KR102706073B1 - Power consumption reduction device that suppresses fluid backflow during initial operation of vacuum pump - Google Patents

Abstract

The present invention relates to a power-saving device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump, which is implemented to reduce power consumption of the vacuum pump and at the same time prevent a fluid backflow phenomenon during initial operation of the vacuum pump, and includes a front pipe; a middle pipe; a rear pipe; an ejector; a venturi tube; and an auto gate valve.

Description

{Power consumption reduction device that suppresses fluid backflow during initial operation of vacuum pump}

The present invention relates to a power consumption reduction device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump, and more specifically, to a power consumption reduction device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump, which is implemented to reduce power consumption of the vacuum pump and simultaneously prevent a fluid backflow phenomenon during initial operation of the vacuum pump.

In general, various chemicals are used in semiconductor manufacturing processes or LCD manufacturing processes. The various chemicals used in this process are washed and discharged through a cleaning solution during the cleaning process, or discharged in liquid or gaseous form through a discharge device during a separate discharge process.

The vacuum pump used in the semiconductor process and the vacuum equipment equipped with it are composed of a vacuum pump and a scrubber. The vacuum pump is connected to the semiconductor or LCD manufacturing process line, sucks in hazardous fluids generated in the manufacturing process and discharges them to the scrubber. The scrubber recovers the fluid sucked through the vacuum pump and chemically or physically processes the recovered fluid to separately collect hazardous substances among the recovered fluid.

The fluid flowing into the vacuum pump in the above-mentioned treatment facility contains fine particulates used in the semiconductor and LCD manufacturing processes. Most of these are recovered by the vacuum pump to the scrubber, but a significant amount accumulates inside the vacuum pump or in the pipe connecting the vacuum pump and the scrubber, reducing the efficiency of the vacuum pump.

In particular, fine particles used in the high-temperature environment of semiconductor and LCD manufacturing processes have a strong tendency to solidify at low temperatures, so they are easily cooled and stuck to pipes while moving from the vacuum pump to the scrubber.

When a vacuum pump is initially started, a large amount of fluid flows in as a power-saving device, which cannot pass through the narrow flow path and causes a bottleneck phenomenon, resulting in a fluid backflow phenomenon.

Due to this type of fluid backflow, the vacuum pump down phenomenon occurs, and therefore, technology development is needed to prevent the fluid backflow phenomenon during initial operation of the vacuum pump.

Meanwhile, the background technology described above is technical information that the inventor possessed for deriving the present invention or acquired during the process of deriving the present invention, and cannot necessarily be considered as publicly known technology disclosed to the general public prior to the application of the present invention.

Korean Patent Registration No. 10-1632591 (Announced on June 21, 2016)

One aspect of the present invention provides a power-saving device that suppresses a fluid backflow phenomenon during initial operation of a vacuum pump, which is implemented to reduce power consumption of the vacuum pump while preventing a fluid backflow phenomenon during initial operation of the vacuum pump.

The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the description below.

According to one embodiment of the present invention, a power consumption reduction device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump comprises: a front pipe formed in a cylindrical shape and installed at an exhaust end of a vacuum pump, the front pipe generating a vacuum at the exhaust end of the vacuum pump so as to reduce the load of the vacuum pump; a middle pipe formed in a cylindrical shape forming an inner diameter equal to the inner diameter of the front pipe and installed at the rear end of the front pipe; a rear pipe formed in a cylindrical shape forming an inner diameter larger than the inner diameter of the middle pipe and installed at the rear end of the middle pipe; an ejector installed by penetrating the outer wall of the front pipe and guiding an external transport gas into the interior of the front pipe and then spraying it in the direction of the middle pipe; a venturi tube formed in a cylindrical shape forming an inner diameter smaller than the inner diameter of the middle pipe so that a vacuum can be formed in the inner space of the front pipe as the flow velocity increases during the movement of the fluid according to Bernoulli's law, and installed along the center of the middle pipe and the rear pipe; And it includes an auto gate valve formed in a disc shape having a diameter larger than the inner diameter of the above-mentioned interrupted pipe, forming a circular space in the center for the venturi tube to be seated, the rear end being supported by a support spring installed along the outer side of the venturi tube so as to cover the rear end outlet of the above-mentioned interrupted pipe and seated at the front end of the inner space of the rear end pipe, and opening the rear end outlet of the above-mentioned interrupted pipe so that the fluid moves through the space between the outer edge and the inner circumference of the rear end pipe while moving rearward along the inner space of the above-mentioned interrupted pipe when a large amount of fluid is instantaneously supplied to the above-mentioned interrupted pipe and the venturi tube during the initial operation of the vacuum pump.

In one embodiment, a power consumption reduction device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump according to one embodiment of the present invention may further include an indirect heater that surrounds the front pipe, the middle pipe, and the rear pipe and heats the front pipe, the middle pipe, and the rear pipe using indirect heat.

In one embodiment, a power consumption reduction device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump according to one embodiment of the present invention may further include a heater module formed in a spiral coil shape and installed along the outer side of the shear pipe, and heated to heat the shear pipe.

In one embodiment, a power consumption reduction device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump according to one embodiment of the present invention may further include a multipurpose holder that secures and holds the shear pipe while buffering vibration or shock transmitted from the shear pipe.

In one embodiment, the multipurpose stand comprises: a first stand frame formed by bending the upper and lower ends in a "[" shape so that they are perpendicular to each other and placed on one side of the shear pipe;

The second mounting frame may include: a second mounting frame formed in a "]" shape to form a symmetrical structure with the first mounting frame, the upper and lower ends being bent so that they are perpendicular to the direction of the first mounting frame, and the upper and lower ends being respectively fastened to the upper and lower ends of the first mounting frame, and arranged on the other side of the shear pipe; a first fastening portion installed at an upper corner of the first mounting frame to fasten an upper end of one side of the shear pipe; a second fastening portion installed at a lower corner of the first mounting frame to fasten a lower end of one side of the shear pipe; a third fastening portion installed at an upper corner of the second mounting frame to fasten an upper end of the other side of the shear pipe; and a fourth fastening portion installed at a lower corner of the second mounting frame to fasten a lower end of the other side of the shear pipe.

In one embodiment, the first fastening portion may include: a first corner housing formed recessed in an upper corner of the first mounting frame; a close support formed in a pillar shape corresponding to a shape of the first corner housing and mounted on the first corner housing; a fastening plate installed at a front end of the close support exposed to the outside of the first corner housing and fastening an upper end of one side of the front end pipe; and a multi-functional buffer portion installed on the inside of the first corner housing and supporting a rear end of the close support inserted into the first corner housing while buffering vibration or shock transmitted from the close support.

In one embodiment, the multifunctional buffer unit may include: an upper support plate supporting a rear end of the close support member inserted into the first corner housing; a lower support plate spaced downwardly from the upper support plate and mounted inside the first corner housing; a lower support block formed in a cylindrical shape and installed on an upper side of the lower support plate; a Java-type sealing cover formed in a corrugated pipe shape that can expand or contract in a vertical direction and installed between the lower side of the upper support plate and the upper side of the lower support block to seal a space between the lower side of the upper support plate and the upper side of the lower support block; and a plate support unit installed on an upper side of the lower support block sealed by the Java-type sealing cover and supporting the upper support plate.

In one embodiment, the plate support may include a center post installed upright at the upper center of the lower support block; a first buffer support installed on one upper side of the lower support block to support one side of the upper support plate; a second buffer support installed at a 120º angle from the first buffer support with the center post as the central axis to support the lower side of the upper support plate; and a third buffer support installed at a 120º angle from the first buffer support and the second buffer support with the center post as the central axis to support the lower side of the upper support plate.

In one embodiment, the first buffer support member may include a vertical support member that is vertically extended so that the lower portion is inserted into the lower support block and the upper portion is exposed to the upper side of the lower support block, and a rotational support head that is rotatably connected to the upper portion supports the lower side of the upper support plate, and is supported by a first buffer spring that is installed between the upper holder installed along the upper outer side and the upper side of the lower support block; a vertical support cylinder that is installed on the inner side of the lower support block and inserted into the inner side of the lower support block, and the lower portion of the vertical support member is positioned on the inner side, and supports the lower portion of the vertical support member upward by a fluid accommodated in the internal space; and an inclined support member that has one end rotatably connected to the rotational support head and the other end rotatably connected to one side of the lower portion of the center post to support the rotational support head, and in which the upper support plate is lowered so that the vertical support member is lowered, the one end and the other end are rotated and the length is contracted at the same time.

In one embodiment, the inclined support member comprises: a first rotational frame having an upper end rotatably connected to the rotational support head; a second rotational frame having an upper end disposed opposite a lower end of the first rotational frame and a lower end rotatably connected to one side of the lower portion of the center post; a plurality of support links, each of which is formed by foldable-connected to form an “X” shape at the middle of a straight first link frame and a second link frame, and which are rotatably connected to one another in a longitudinal direction, and a foldable support link member installed between the lower end of the first rotational frame and the upper end of the second rotational frame; a plurality of intermediate support frames that are rotatably upright and connected to one side of an intersection position where the first link frame and the second link frame are connected; a second buffer spring installed between the plurality of intermediate support frames to support a gap between the plurality of intermediate support frames; The present invention may include a frame anti-twist bar having one end fixedly installed at the lower end of the first rotational frame and the other end inserted while passing through the inner side of each of the second buffer springs, and also penetrating and inserting through each of the intermediate support frames, and inserted into the inner side of the second rotational frame through the upper end of the second rotational frame so as to support between the first rotational frame and the second rotational frame so that the first rotational frame and the second rotational frame can be in a straight line; and an inclined support cylinder having the other end of the frame anti-twist bar installed on the inner side of the second rotational frame and inserted into the inner side of the second rotational frame, and supporting the other end of the frame anti-twist bar upward by a fluid accommodated in an internal space.

In one embodiment, the vertical support cylinder may include: a fluid tank installed inside the lower support block, forming a sealed internal space in which a fluid is accommodated; a fluid transmission pipe communicating between the inclined support cylinder and the lower end of the fluid tank and configured to transmit or receive fluid therebetween; a separation partition installed inside the fluid tank to enable vertical sliding movement while dividing the fluid tank into a lower space in which a fluid is accommodated and an upper space in which no fluid is accommodated; and a vertical buffer spring installed on the upper side of the separation partition to support a lower end of the vertical support portion inserted into the upper space.

According to one aspect of the present invention described above, it is possible to provide the effect of reducing power consumption of a vacuum pump while preventing a fluid backflow phenomenon during initial operation of the vacuum pump.

The effects of the present invention are not limited to the effects mentioned above, and various effects may be included within a range obvious to those skilled in the art from the contents described below.

FIG. 1 is a drawing schematically illustrating the configuration of a power consumption reduction device that suppresses a fluid backflow phenomenon during initial operation of a vacuum pump according to a first embodiment of the present invention.
FIG. 2 is a drawing explaining the operating principle of a power consumption reduction device that suppresses a fluid backflow phenomenon during initial operation of a vacuum pump according to the first embodiment of the present invention of FIG. 1.
FIG. 3 is a drawing schematically illustrating the configuration of a power consumption reduction device that suppresses a fluid backflow phenomenon during initial operation of a vacuum pump according to a second embodiment of the present invention.
FIG. 4 is a drawing schematically illustrating the configuration of a power consumption reduction device that suppresses a fluid backflow phenomenon during initial operation of a vacuum pump according to a fourth embodiment of the present invention.
FIG. 5 is a drawing schematically illustrating the configuration of a power consumption reduction device that suppresses a fluid backflow phenomenon during initial operation of a vacuum pump according to a fourth embodiment of the present invention.
Fig. 6 is a drawing explaining the fastening structure between the first mounting frame and the second mounting frame of Fig. 5.
Figures 7 and 8 are drawings showing the first fastening part of Figure 5.
FIGS. 9 and 10 are drawings showing one embodiment of the multifunctional buffer unit of FIG. 7.
Fig. 11 is a drawing showing the first buffer support of Fig. 9.
Fig. 12 is a drawing showing the inclined support of Fig. 11.
FIG. 13 is a drawing showing one embodiment of the vertical support cylinder of FIG. 11.

The detailed description of the invention set forth below refers to the accompanying drawings which illustrate, by way of example, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the invention, while different from one another, are not necessarily mutually exclusive. For example, specific shapes, structures, and features described herein may be implemented in other embodiments without departing from the spirit and scope of the invention. It should also be understood that the positions or arrangements of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the invention. Accordingly, the detailed description set forth below is not to be taken in a limiting sense, and the scope of the invention is defined only by the appended claims, along with the full scope of equivalents to which such claims are entitled, if properly so described. Like reference numerals in the drawings designate the same or similar functionality throughout the several aspects.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

FIG. 1 is a drawing schematically illustrating the configuration of a power consumption reduction device that suppresses a fluid backflow phenomenon during initial operation of a vacuum pump according to a first embodiment of the present invention.

Referring to FIG. 1, a power consumption reduction device (10) for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump according to the first embodiment of the present invention includes a front pipe (100), a middle pipe (150), a rear pipe (200), an ejector (250), a venturi tube (300), and an auto gate valve (350).

The shear pipe (100) is formed in a cylindrical shape and installed at the exhaust end of the vacuum pump, and generates a vacuum at the exhaust end of the vacuum pump so as to reduce the load on the vacuum pump.

In one embodiment, the shear pipe (100) is connected to the exhaust end of a vacuum pump and can create a vacuum in the internal space using compressed fluid by a venturi tube (300) without requiring separate power.

The stop pipe (150) is formed in a cylindrical shape with an inner diameter equal to the inner diameter of the shear pipe (100) and is installed at the rear end of the shear pipe (100).

The rear pipe (200) is formed in a cylindrical shape with an inner diameter larger than that of the stop pipe (150) and is installed at the rear end of the stop pipe (150).

The ejector (250) is installed to penetrate the outer wall of the shear pipe (100), guides the external transport gas into the interior of the shear pipe (100), and then sprays it in the direction of the stop pipe (150).

The venturi tube (300) is formed in a cylindrical shape with an inner diameter smaller than that of the stop pipe (150) so that a vacuum can be formed in the inner space of the front pipe (100) as the flow velocity increases during the movement of the fluid according to Bernoulli's law, and is installed along the center of the stop pipe (150) and the rear pipe (200).

The auto gate valve (350) is formed in a disc shape with a diameter larger than the inner diameter of the stop pipe (150), and forms a circular space in the center for the venturi tube (300) to be seated, and the rear end is supported by a support spring (S) installed along the outer side of the venturi tube (300), so that it normally covers the rear end outlet of the stop pipe (150) as shown in (a) of FIG. 2 and is seated at the front end of the inner space of the rear end pipe (200), and when a large amount of fluid is supplied to the stop pipe (150) and the venturi tube (300) at the initial operation of the vacuum pump, as shown in (b) of FIG. 2, it overcomes the elasticity of the support spring (S) and moves rearward along the inner space of the rear end pipe (200) so that the fluid moves through the space (G) between the outer edge and the inner surface of the rear end pipe (200), thereby opening the rear end outlet of the stop pipe (150).

The power consumption reduction device (20) for suppressing the fluid backflow phenomenon during initial operation of a vacuum pump according to the second embodiment of the present invention may further include an indirect heater (400).

The indirect heater (400) is installed to surround the front pipe (100), the middle pipe (150), and the rear pipe (200) and heats the front pipe (100), the middle pipe (150), and the rear pipe (200) using indirect heat.

In one embodiment, the indirect heater (400) can increase the temperature of a fluid that has first entered the product through an indirect heating method and then spray it through a discharge port through a secondary product module.

The power consumption reduction device (30) for suppressing the fluid backflow phenomenon during initial operation of a vacuum pump according to the third embodiment of the present invention may further include a heater module (450).

The heater module (450) is formed in a spiral coil shape and is installed along the outside of the shear pipe (100), and is heated to heat the shear pipe (100).

In one embodiment, the heater module (450) may perform direct heating rather than indirect heating as temperature loss occurs as the product moves to the product module after primary heating, and the internal design may be configured to optimize the thermal efficiency of the direct heating method.

The power consumption reduction device (10, 20, 30) for suppressing the fluid backflow phenomenon during initial operation of a vacuum pump according to various embodiments of the invention having the configuration described above can drastically reduce stagnation of by-products in an exhaust line in a process in which a large amount of by-products is generated by being equipped with its own heater (400, 450).

In addition, a power consumption reduction device for a vacuum pump with a target temperature of 125℃ or higher can be implemented when the exhaust temperature reaches 1,000mm at 160℃.

Considering that the temperature of the fluid at a distance of 1,000 mm from the discharge port is 102℃ for the performance of the existing development product, it would be desirable to apply a high-efficiency heater of 700Wh instead of the current heater with a performance of 500Wh.

Considering the existing thermal efficiency and accumulated power, the built-in heater is suitable as a SIN heater or ceramic heater, and the ejector has also been redesigned due to the change in the product's internal throttle design.

In order for the fluid discharged from the discharge port to reach 1,000 mm or more while maintaining a certain temperature or higher, the optimal fluid flow must be selected while designing the internal throttle, ejector, and discharge port.

It is designed to concentrate the flow inside the fluid by applying rotation to the fluid flow by changing the internal throttle and ejector of the product to the flow of fluid currently discharged over a wide area.

The temperature test by section is as shown in Table 1 (currently: 160℃ / 40SLM standard).

A power consumption reduction device (10, 20, 30) for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump according to various embodiments of the invention having the configuration as described above is installed at an inlet or an outlet of a vacuum pump, and is a component installed in a body in which a flow path through which a fluid can flow along the longitudinal direction is formed, and a bottleneck section (i.e., a venturi tube (300)) in which the cross-sectional area is reduced and expanded is formed in the middle of the flow path, and which includes a nozzle that sprays fluid toward the bottleneck section and a heating device that heats the fluid sprayed through the nozzle (ejector (250)).

The nozzle installed in the ejector is installed in the non-bottleneck section to inject the second fluid with a high flow rate toward the bottleneck section, and the heating device heats the first fluid by heating the second fluid injected through the nozzle.

Fluid dynamics show that when a fluid passes through a bottleneck and flows into a section with a wider cross-section than the bottleneck, its velocity decreases. However, when a fluid passes through a bottleneck at the speed of sound or faster than the speed of sound, its velocity increases. Therefore, when a second fluid is injected through a nozzle at the speed of sound or faster than the speed of sound, the first fluid is discharged at high speed together with the second fluid, which reduces the vacuum load on the vacuum pump.

As a result, the second fluid, which has been made high temperature by the heating device, is injected to heat the first fluid, whose temperature has been lowered, thereby suppressing the phenomenon of fine particles in the first fluid solidifying while cooling, and at the same time shortening the time for the first fluid discharged from the vacuum pump to be recovered to the scrubber, thereby reducing the opportunity for the first fluid to cool while moving to the scrubber and the opportunity for it to stick to the backing plate.

A power consumption reduction device (10, 20, 30) for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump according to various embodiments of the invention having a configuration as described above is connected to an exhaust end of a vacuum pump and generates a vacuum using compressed fluid without requiring separate power, thereby preventing a clogging phenomenon due to stagnation of by-products in the exhaust end of the vacuum pump and reducing the load of the vacuum pump, thereby also reducing power consumption.

In addition, the process pump unit reduces powder accumulation in the exhaust line according to the process, thereby increasing the replacement cycle of the vacuum pump. In addition, maintenance costs are additionally incurred due to the reduction in the pipe cleaning and replacement cycle of the exhaust line as well as the vacuum pump. Maintenance costs in the semiconductor and display manufacturing processes can be reduced by improving the replacement cycle of the vacuum pump.

In addition, it can reduce the power consumption of the vacuum pump and prevent the fluid backflow phenomenon during the initial operation of the vacuum pump.

FIG. 5 is a drawing schematically illustrating the configuration of a power consumption reduction device that suppresses a fluid backflow phenomenon during initial operation of a vacuum pump according to a fourth embodiment of the present invention.

Referring to FIG. 5, a power consumption reduction device (40) for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump according to a fourth embodiment of the present invention includes a front pipe (100), a middle pipe (150), a rear pipe (200), an ejector (250), a venturi tube (300), an auto gate valve (350), and a multipurpose stand (500).

Here, the front pipe (100), the stop pipe (150), the rear pipe (200), the ejector (250), the venturi tube (300), and the auto gate valve (350) are the same as the components of Fig. 1, so their description will be omitted.

The multipurpose stand (500) secures and supports the shear pipe (100) while buffering vibration or shock transmitted from the shear pipe (100).

In one embodiment, the multipurpose stand (500) includes a first stand frame (510), a second stand frame (520), a first fastening member (530), a second fastening member (540), a third fastening member (550), and a fourth fastening member (560).

The first mounting frame (510) is formed by bending the top and bottom in a "[" shape to form a symmetrical structure with the second mounting frame (520) so that they are perpendicular to each other and are placed on one side of the shear pipe (100).

The second mounting frame (520) is formed in a “]” shape that forms a symmetrical structure with the first mounting frame (510) so that the upper and lower ends are bent at right angles toward the first mounting frame (510), and the upper and lower ends are respectively connected to the upper and lower ends of the first mounting frame (510) and are placed on the other side of the shear pipe (100).

In one embodiment, the lower ends (511, 521) of the first mounting frame (510) and the second mounting frame (520) may be fastened by a fastening means (B) such as a bolt after the step (511a) formed at the lower end (511) of the first mounting frame (510) and the step (521a) formed at the lower end (521) of the second mounting frame (520) are positioned so that the step (511a) formed at the lower end of the first mounting frame (510) intersect with the step (521a) formed at the lower end of the first mounting frame (510). In addition, the upper ends of the first mounting frame (510) and the second mounting frame (520) may also be fastened in the same manner.

The first fastening member (530) is installed at the upper corner of the first mounting frame (510) and fastens the upper end of one side of the shear pipe (100).

The second fastening member (540) is installed at the lower corner of the first mounting frame (510) and fastens the lower end of one side of the shear pipe (100).

The third fastening member (550) is installed at the upper corner of the second mounting frame (520) and fastens the upper end of the other side of the shear pipe (100).

The fourth fastening member (560) is installed at the lower corner of the second mounting frame (520) and fastens the other lower end of the shear pipe (100).

The power consumption reduction device (40) for suppressing the phenomenon of fluid backflow during initial operation of a vacuum pump according to the fourth embodiment of the present invention having the configuration described above can reduce noise by stably fastening all directions along the outer side of the shear pipe (100) and cushioning vibrations or shocks generated in the shear pipe (100), while also improving durability.

Figures 7 and 8 are drawings showing the first fastening part of Figure 5.

Referring to FIGS. 7 and 8, the first fastening portion (530) includes a first corner housing (531), a close support member (532), a fastening plate (533), and a multifunctional buffer portion (600).

Here, the second fastening part (540), the third fastening part (550), and the fourth fastening part (560) have the same configuration as the first fastening part (530) described below, and the configurations of the first corner housing (531), the contact support (532), the fastening plate (533), and the multi-functional buffer part (600) of the first fastening part (530) can be applied in the same manner. Therefore, the description thereof will be omitted to avoid duplication of explanation.

The first corner housing (531) is formed recessed at the upper corner of the first mounting frame (510) so that the close support (532) can be inserted and secured.

The close support member (532) is formed in a pillar shape corresponding to the shape of the first corner housing (531), is mounted on the first corner housing (531), and is supported by the multi-functional buffer member (600), and a fastening plate (533) is installed at the front end.

The fastening plate (533) is installed at the front end of the contact support (532) exposed to the outside of the first corner housing (531) and fastens one upper end of the front pipe (100).

In one embodiment, the fastening plate (533) may preferably be formed with a recessed cross-section corresponding to the side shape of the shear pipe (100) so that it can be closely seated on the shear pipe (100).

The multi-functional buffer unit (600) is installed on the inside of the first corner housing (531) to support the rear end of the contact support member (532) inserted into the first corner housing (531) and at the same time cushion vibration or shock transmitted from the contact support member (532).

The first fastening member (530) having the configuration described above stably fastens the outer side of the shear pipe (100), thereby reducing noise by buffering vibrations or shocks generated from the shear pipe (100), and can also improve durability.

FIGS. 9 and 10 are drawings showing one embodiment of the multifunctional buffer unit of FIG. 7.

Referring to FIGS. 9 and 10, a multifunctional buffer unit (600) according to one embodiment includes an upper support plate (610), a lower support plate (620), a lower support block (630), a Java-style sealing cover (640), and a plate support unit (650).

Here, the multifunctional buffer unit (600) according to one embodiment will be installed in a lying form such that the upper support plate (610) and the lower support plate (620) are arranged in a horizontal direction, but for convenience of explanation, the following description will be based on an upright form such that the upper support plate (610) is positioned at the upper side and the lower support plate (620) is positioned at the lower side.

The upper support plate (610) is formed in a disc shape, is supported at the lower side by the plate support member (650), is spaced upward from the lower support plate (620), and supports the upper side of the internal space of the housing (4141), and an upper edge of a Java-type sealing cover (640) is installed along the edge.

The lower support plate (620) is formed in a circular shape identical to the shape of the upper support plate (610), is spaced downward from the upper support plate (610), and supports the upper side of the buffer block (4142), and the lower support block (630) is installed on the upper side.

The lower support block (630) is formed in a cylindrical shape and installed on the upper side of the lower support plate (620), and a lower edge of a Java-type sealing cover (640) is installed along the upper edge, and a plate support part (650) is installed on the upper side.

The Java-style sealed cover (640) is formed in the form of a cylindrical corrugated tube that can expand or contract in the vertical direction and is installed between the lower side of the upper support plate (610) and the upper side of the lower support block (630) to seal the space between the lower side of the upper support plate (610) and the upper side of the lower support block (630) where the plate support member (650) is installed, thereby preventing foreign substances such as dust or moisture from entering the plate support member (650) and causing damage to the plate support member (650).

The plate support member (650) is installed on the upper side of the lower support block (630) which is sealed by a Java-type sealing cover (640) and supports the upper support plate (610).

In one embodiment, the plate support (650) includes a center post (651), a first buffer support (700-1), a second buffer support (700-2), and a third buffer support (700-3).

The center post (651) is installed upright in the upper center of the lower support block (630), and the first buffer support member (700-1), the second buffer support member (700-2), and the third buffer support member (700-3) are installed at equal intervals of 120º along the outer side.

At this time, the center post (651) should be formed to have a height lower than the vertical heights of the first buffer support (700-1), the second buffer support (700-2), and the third buffer support (700-3) so that the first buffer support (700-1), the second buffer support (700-2), and the third buffer support (700-3) can form a height that allows the first buffer support (700-1), the second buffer support (700-2), and the third buffer support (700-3) to rise and fall in the vertical direction.

The first buffer support member (700-1) is installed on one side of the upper portion of the lower support block (630) and supports one side of the upper support plate (610).

The second buffer support member (700-2) is installed at a 120º angle from the first buffer support member (700-1) with the center post (651) as the central axis and supports the lower side of the upper support plate (610).

The third buffer support member (700-3) is installed at an angle of 120º from the first buffer support member (700-1) and the second buffer support member (700-2) with the center post (651) as the central axis to support the lower side of the upper support plate (610).

That is, the first buffer support member (700-1), the second buffer support member (700-2), and the third buffer support member (700-3) can independently support the area in which they are installed by dividing the upper support plate (610) into 1/3 each.

Accordingly, the plate support member (650) can effectively support and buffer vibrations or shocks transmitted from various directions by being supported by one of the first buffer support member (700-1), the second buffer support member (700-2), or the third buffer support member (700-3) installed at the corresponding location, not only when the upper support plate (610) is lowered horizontally, but also when only one side of the upper support plate (610) is lowered.

A multifunctional buffer unit (600) according to one embodiment having a configuration as described above can stably support or buffer vibrations or shocks from various directions, thereby enabling stable support.

Fig. 11 is a drawing showing the first buffer support of Fig. 9.

Referring to FIG. 11, the first buffer support member (700-1) includes a vertical support member (710), a vertical support cylinder (720), and an inclined support member (730).

Here, the second buffer support member (700-2) and the third buffer support member (700-3) have the same configuration as the first buffer support member (700-1) described below, and the configurations of the vertical support member (710), the vertical support cylinder (720), and the inclined support member (730) of the first buffer support member (700-1) can be applied in the same manner. Therefore, the description thereof will be omitted to avoid duplication of explanation.

The vertical support member (710) is formed to extend vertically in the up-down direction, with the lower part inserted into the lower support block (630) and the upper part exposed to the upper side of the lower support block (630), and a rotational support head (713) that is rotatably connected and installed at the upper end supports the lower side of the upper support plate (610), and is supported by an upper stand (711) formed in a circular ring shape and installed along the upper outer side, and a first buffer spring (712) installed between the upper side of the lower support block (630).

That is, the vertical support member (710) can be inserted and positioned through the inner side of the first buffer spring (712), as illustrated in FIG. 11.

At this time, the first buffer spring (712) can support the upper stand (711) so that the upper support plate (610) is supported by the vertical support member (710), while buffering vibrations or shocks transmitted from the upper support plate (610) through the upper stand (711).

The vertical support cylinder (720) is installed on the inside of the lower support block (630) and has the lower part of the vertical support member (710) inserted into the inside of the lower support block (630) placed on the inside, and supports the lower part of the vertical support member (710) in the upward direction by a fluid (e.g., air, water, or oil, etc.) accommodated in the internal space.

In one embodiment, the vertical support cylinder (720) can raise the vertical support member (710) as fluid is supplied, and lower the vertical support member (710) as fluid flows out, as described below.

The inclined support member (730) has one end positioned on the upper side rotatably connected to the rotation support head (713) and the other end positioned on the lower side rotatably connected to the lower side (651a) of the center post (651) to support the rotation support head (713). As the upper support plate (610) is lowered and the vertical support member (710) is lowered, the one end and the other end rotate and contract in length, thereby cushioning vibrations or shocks transmitted from the rotation support head (713).

The first buffer support member (700-1) having the configuration described above can support the lower side of the upper support plate (610) while effectively buffering vibrations or shocks transmitted from the upper support plate (610).

Fig. 12 is a drawing showing the inclined support of Fig. 11.

Referring to FIG. 12, the inclined support member (730) includes a first rotating frame (731), a second rotating frame (732), a foldable support link member (733), a plurality of intermediate support frames (734), a second buffer spring (735), a frame distortion prevention bar (736), and an inclined support cylinder (737).

The first rotation frame (731) is installed so that the upper part can rotate to the rotation support head (713), and the lower part is supported by a foldable support link (733) and a frame distortion prevention bar (736).

The second rotation frame (732) is supported at the upper side by a foldable support link (733) and a frame distortion prevention bar (736), and is positioned so that the upper side faces the lower side of the first rotation frame (731), and the lower side is rotatably connected to the lower side (651a) of the center post (651).

The foldable support link (733) is formed by a plurality of support links (F3-1, F3-2, F3-3) that are installed so as to be foldable and connected to each other in the shape of an “X” at each end (H) of a first link frame (F1) and a second link frame (F2) having a straight shape, and are rotatably connected to each other in a row in the longitudinal direction, and is installed between the lower end of the first rotational frame (731) and the upper end of the second rotational frame (732). As the gap between the first rotational frame (731) and the second rotational frame (732) decreases or increases, the first link frame (F1) and the second link frame (F2) fold and expand or contract to support the first rotational frame (731) and the second rotational frame (732).

At this time, as illustrated in Fig. 12, each end of the first link frame (F1) and the second link frame (F2) constituting one support link (F3) may be rotatably connected to each other end of the second link frame (F2) and the first link frame (F1) constituting another support link (F3), so that they may be connected and installed in a row.

The intermediate support frame (734) is installed upright and connected so as to be rotatable on one side of the intersection position (H) where the first link frame (F1) and the second link frame (F2) are connected and installed, and a frame distortion prevention bar (736) passes through and is inserted therein.

That is, the intermediate support frame (734) can prevent the foldable support link (733) from bending by moving forward and backward along the frame anti-twist bar (736) as the gap between the first rotation frame (731) and the second rotation frame (732) decreases or increases.

The second buffer spring (735) is installed between a plurality of intermediate support frames (734) to support the gap between the plurality of intermediate support frames (734), and is installed with a frame distortion prevention bar (736) penetrating along the inner side.

The frame anti-twist bar (736) is formed to extend in a straight shape, one end of which is fixedly installed at the bottom of the first rotation frame (731), and the other end is inserted while passing through the inside of each of the second buffer springs (735), and at the same time, penetrates and is inserted through each of the intermediate support frames (734), and is inserted into the inside of the second rotation frame (732) through the top of the second rotation frame (732) to prevent the foldable support link (733) from bending, thereby supporting the first rotation frame (731) and the second rotation frame (732) so that the first rotation frame (731) and the second rotation frame (732) can maintain a straight line.

The inclined support cylinder (737) is installed on the inside of the second rotating frame (732), and the other end of the frame anti-twist bar (736) inserted into the inside of the second rotating frame (732) is placed on the inside, and supports the other end of the frame anti-twist bar (736) in an upward direction by a fluid accommodated in the internal space.

In one embodiment, the inclined support cylinder (737) supplies fluid (L) contained in the internal space to the fluid tank (721) as the frame anti-twist bar (736) is inserted as the gap between the first rotation frame (731) and the second rotation frame (732) decreases, and as the gap between the first rotation frame (731) and the second rotation frame (732) increases, the fluid (L) is supplied and the frame anti-twist bar (736) is discharged.

The inclined support member (730) having the configuration described above can support the vertical support member (710) by rotating as the vertical support member (710) rises and falls in the vertical direction and simultaneously extending or contracting in the longitudinal direction, thereby effectively buffering vibrations or shocks transmitted from the vertical support member (710).

FIG. 13 is a drawing showing one embodiment of the vertical support cylinder of FIG. 11.

Referring to FIG. 13, the vertical support cylinder (720a) includes a fluid tank (721), a fluid delivery pipe (722), a separation bulkhead (723), and a vertical buffer spring (724).

The fluid tank (721) is installed on the inside of the lower support block (630) while forming a sealed internal space in which the fluid (L) is accommodated.

The fluid delivery pipe (722) is installed to communicate between the inclined support cylinder (737) and the lower end of the fluid tank (721) and delivers or receives fluid (L) between them.

The separation bulkhead (723) is installed to enable vertical sliding movement inside the fluid tank (721) while dividing the fluid tank (721) into a lower space (N1) where the fluid is received and an upper space (N2) where the fluid is not received, and supports a vertical buffer spring (724) installed on the upper side.

The vertical buffer spring (724) is installed on the upper side of the separation bulkhead (723) and supports the lower end of the vertical support member (710) inserted into the upper space.

The vertical support cylinder (720a) having the configuration described above normally supports the lower side of the vertical support member (710) and at the same time cushions vibrations or shocks transmitted from the vertical support member (710). As the vertical support member (710) is lowered and the gap between the first rotation frame (731) and the second rotation frame (732) of FIG. 11 is reduced, fluid (L) is supplied from the inclined support cylinder (737) to the fluid tank (721) to raise the separation bulkhead (723), thereby effectively preventing the vertical support member (710) from being lowered.

The above-described embodiments are for illustrative purposes, and those skilled in the art will appreciate that the above-described embodiments can be easily modified into other specific forms without changing the technical idea or essential features of the above-described embodiments. Therefore, the above-described embodiments should be understood as illustrative and not restrictive in all respects. For example, each component described as a single entity may be implemented in a distributed manner, and likewise, components described as distributed may be implemented in a combined manner.

The scope of protection sought by this specification is indicated by the claims described below rather than the detailed description above, and should be interpreted to include all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts.

10, 20, 30, 40: Power saving device that suppresses fluid backflow phenomenon during initial operation of the vacuum pump
100: Shear pipe
150: Stop piping
200: Rear piping
250: Ejector
300: Venturi tube
350: Auto Gate Valve
400: Indirect heater
450: Heater module
500: Multipurpose stand

Claims (10)

A pre-pipe formed in a cylindrical shape and installed at the exhaust end of a vacuum pump, which generates a vacuum at the exhaust end of the vacuum pump so as to reduce the load of the vacuum pump;
A stop pipe formed in a cylindrical shape with an inner diameter identical to the inner diameter of the above-mentioned shear pipe and installed at the rear end of the above-mentioned shear pipe;
A rear pipe formed in a cylindrical shape with an inner diameter larger than the inner diameter of the above-mentioned interrupted pipe and installed at the rear end of the above-mentioned interrupted pipe;
An ejector that penetrates the outer wall of the above-mentioned shear pipe and is installed to guide external transport gas into the interior of the above-mentioned shear pipe and then spray it in the direction of the above-mentioned stop pipe;
A venturi tube formed in a cylindrical shape with an inner diameter smaller than that of the stop pipe so that a vacuum can be formed in the inner space of the front pipe as the flow speed increases during the movement of the fluid according to Bernoulli's law, and installed along the center of the stop pipe and the rear pipe; and
An auto gate valve formed in a disc shape having a diameter larger than the inner diameter of the above-mentioned interrupted pipe, forming a circular space in the center for the venturi tube to be seated, the rear end being supported by a support spring installed along the outer side of the venturi tube so as to cover the rear end outlet of the above-mentioned interrupted pipe and seated at the front end of the inner space of the rear end pipe, and when a large amount of fluid is momentarily supplied to the above-mentioned interrupted pipe and the venturi tube during the initial operation of the vacuum pump, opening the rear end outlet of the above-mentioned interrupted pipe so that the fluid moves through the space between the outer edge and the inner circumference of the rear end pipe while moving rearward along the inner space of the above-mentioned interrupted pipe;
It further includes a multipurpose stand that secures and holds the above-mentioned shear pipe while buffering vibration or shock transmitted from the above-mentioned shear pipe;
The above multipurpose stand is,
A first mounting frame formed by bending the upper and lower parts in a "[" shape so that they are perpendicular to each other and placed on one side of the shear pipe;
A second mounting frame formed in a "]" shape forming a symmetrical structure with the first mounting frame so that the upper and lower ends are bent perpendicular to the direction of the first mounting frame, and the upper and lower ends are respectively fastened to the upper and lower ends of the first mounting frame, and is arranged on the other side of the shear pipe;
A first fastening member installed at the upper corner of the first mounting frame and fastening an upper end of one side of the shear pipe;
A second fastening member installed at the lower corner of the first mounting frame and fastening one lower end of the shear pipe;
A third fastening member installed at the upper corner of the second mounting frame and fastening the upper end of the other side of the shear pipe; and
Including a fourth fastening member installed at the lower corner of the second mounting frame and fastening the other lower side of the shear pipe;
The above first connecting part is,
A first corner housing formed recessed in an upper corner of the first mounting frame;
A close support formed in a pillar shape corresponding to the shape of the first corner housing and mounted on the first corner housing;
A fastening plate installed on the front end of the close support exposed to the outside of the first corner housing and fastening one upper end of the front end pipe; and
It includes a multifunctional buffer unit installed on the inside of the first corner housing to support the rear end of the close support inserted into the first corner housing and to buffer vibration or shock transmitted from the close support unit;
The above multi-functional buffer unit is,
An upper support plate supporting the rear end of the contact support member inserted into the first corner housing;
A lower support plate spaced downwardly from the upper support plate and mounted on the inside of the first corner housing;
A lower support block formed in a cylindrical shape and installed on the upper side of the lower support plate;
A Java-type sealing cover formed in the form of a corrugated tube that can expand or contract in the vertical direction and installed between the lower side of the upper support plate and the upper side of the lower support block to seal the space between the lower side of the upper support plate and the upper side of the lower support block; and
A power-saving device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump, comprising: a plate support member installed on the upper side of the lower support block, which is sealed by the Java-type sealing cover, and which supports the upper support plate;
delete delete delete delete delete delete In the first paragraph, the plate support member,
A center post installed upright at the upper center of the lower support block;
A first buffer support member installed on one side of the upper portion of the lower support block and supporting one side of the upper support plate;
A second buffer support member is installed at a 120º angle from the first buffer support member with the center post as the central axis and supports the lower side of the upper support plate; and
A power saving device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump, comprising: a third buffer support member, which is installed at a 120º angle from the first buffer support member and the second buffer support member, with the center post as the central axis, to support the lower side of the upper support plate;
In the 8th paragraph, the first buffer support member,
A vertical support member formed to extend vertically in an up-down direction, the lower portion being inserted into the lower support block and the upper portion being exposed to the upper side of the lower support block, the rotational support head being rotatably connected and installed at the upper end to support the lower side of the upper support plate, and supported by an upper holder installed along the upper outer side and a first buffer spring installed between the upper side of the lower support block;
A vertical support cylinder, which is installed on the inside of the lower support block and has the lower part of the vertical support inserted into the inside of the lower support block, and supports the lower part of the vertical support in an upward direction by a fluid accommodated in the internal space; and
A power-saving device that suppresses the fluid backflow phenomenon during initial operation of a vacuum pump, comprising: an inclined support member, one end of which is rotatably connected to the above-described rotational support head, the other end of which is rotatably connected to one side of the lower portion of the above-described center post to support the above-described rotational support head, and in which the one end and the other end rotate and contract in length as the upper support plate is lowered and the vertical support member is lowered;
In the 9th paragraph, the inclined support member,
A first rotary frame having an upper end rotatably connected to the rotary support head;
A second rotation frame having an upper portion opposite the lower portion of the first rotation frame and a lower portion rotatably connected to one side of the lower portion of the center post;
A plurality of support links are installed so as to be foldable and connected to form an “X” shape at each end of a first link frame and a second link frame in a straight shape, and are installed so as to be rotatable relative to each other in a row in the longitudinal direction, and a foldable support link portion is installed between the lower end of the first rotational frame and the upper end of the second rotational frame;
A plurality of intermediate support frames that are installed upright and connected so as to be rotatable at one side of the intersection position where the first link frame and the second link frame are connected and installed;
A second buffer spring installed between the plurality of intermediate support frames and supporting the gap between the plurality of intermediate support frames;
A frame anti-twist bar having one end fixedly installed at the bottom of the first rotation frame and the other end inserted while passing through the inside of each of the second buffer springs, and also penetrating and inserting through each of the intermediate support frames, and inserted into the inside of the second rotation frame through the top of the second rotation frame so that the first rotation frame and the second rotation frame can maintain a straight line, and supporting between the first rotation frame and the second rotation frame; and
A power-saving device for suppressing a fluid backflow phenomenon during initial operation of a vacuum pump, comprising: an inclined support cylinder, which is installed on the inside of the second rotating frame and has the other end of the frame anti-twist bar inserted into the inside of the second rotating frame, and which supports the other end of the frame anti-twist bar upward by a fluid accommodated in an internal space;