KR102672866B1 - 가공 장치 - Google Patents

가공 장치 Download PDF

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Publication number
KR102672866B1
KR102672866B1 KR1020190028060A KR20190028060A KR102672866B1 KR 102672866 B1 KR102672866 B1 KR 102672866B1 KR 1020190028060 A KR1020190028060 A KR 1020190028060A KR 20190028060 A KR20190028060 A KR 20190028060A KR 102672866 B1 KR102672866 B1 KR 102672866B1
Authority
KR
South Korea
Prior art keywords
plate
holding
shaped work
cleaning member
roll cleaning
Prior art date
Application number
KR1020190028060A
Other languages
English (en)
Korean (ko)
Other versions
KR20190114760A (ko
Inventor
히로키 아베
Original Assignee
가부시기가이샤 디스코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 디스코 filed Critical 가부시기가이샤 디스코
Publication of KR20190114760A publication Critical patent/KR20190114760A/ko
Application granted granted Critical
Publication of KR102672866B1 publication Critical patent/KR102672866B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
    • B08B1/143—Wipes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Cleaning By Liquid Or Steam (AREA)
KR1020190028060A 2018-03-30 2019-03-12 가공 장치 KR102672866B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2018-067874 2018-03-30
JP2018067874A JP7100475B2 (ja) 2018-03-30 2018-03-30 加工装置

Publications (2)

Publication Number Publication Date
KR20190114760A KR20190114760A (ko) 2019-10-10
KR102672866B1 true KR102672866B1 (ko) 2024-06-05

Family

ID=68112949

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190028060A KR102672866B1 (ko) 2018-03-30 2019-03-12 가공 장치

Country Status (4)

Country Link
JP (1) JP7100475B2 (ja)
KR (1) KR102672866B1 (ja)
CN (1) CN110315435B (ja)
TW (1) TWI779181B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021074825A (ja) * 2019-11-11 2021-05-20 株式会社ディスコ 保持面洗浄装置
CN113522877A (zh) * 2021-05-21 2021-10-22 太仓顶艺半导体科技有限公司 一种防粘模具的去毛刺工艺
CN114603439A (zh) * 2022-05-12 2022-06-10 南通摩瑞纺织有限公司 一种塑料制品加工用打磨装置
CN114986192B (zh) * 2022-07-27 2022-10-21 江苏朗鹏洁净技术有限公司 一种洁净风淋室不锈钢焊接处理一体化设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003209089A (ja) * 2002-01-17 2003-07-25 Sony Corp ウェハの洗浄方法、洗浄装置およびダイシング装置
CN201304603Y (zh) 2008-11-29 2009-09-09 常熟华冶薄板有限公司 连续热浸镀锌钢带预清洗用的研磨清洗装置
JP2013094876A (ja) * 2011-10-31 2013-05-20 Disco Corp 加工装置
CN103831680A (zh) 2014-02-17 2014-06-04 广州恒微机电设备有限公司 一种全自动卧式平面磨床机械手
JP2017152565A (ja) * 2016-02-25 2017-08-31 株式会社ディスコ 洗浄装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2838660B2 (ja) * 1994-09-19 1998-12-16 株式会社明治ゴム化成 印刷用ブランケットシート表面の清掃装置
JP2930580B1 (ja) * 1998-03-27 1999-08-03 株式会社カイジョー 半導体ウエーハ等用洗浄装置
JP4672924B2 (ja) 2001-08-02 2011-04-20 株式会社ディスコ 吸着パッド洗浄装置及び該装置を用いた吸着パッド洗浄方法
JP5268599B2 (ja) * 2008-12-03 2013-08-21 株式会社ディスコ 研削装置および研削方法
JP6316652B2 (ja) * 2014-05-14 2018-04-25 株式会社ディスコ 研削装置
JP6329813B2 (ja) * 2014-05-21 2018-05-23 株式会社ディスコ 搬送ロボット
CN204075988U (zh) * 2014-06-03 2015-01-07 中芯国际集成电路制造(北京)有限公司 研磨垫调整器清洗装置及化学机械研磨装置
JP6844970B2 (ja) * 2016-08-18 2021-03-17 株式会社ディスコ 研磨装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003209089A (ja) * 2002-01-17 2003-07-25 Sony Corp ウェハの洗浄方法、洗浄装置およびダイシング装置
CN201304603Y (zh) 2008-11-29 2009-09-09 常熟华冶薄板有限公司 连续热浸镀锌钢带预清洗用的研磨清洗装置
JP2013094876A (ja) * 2011-10-31 2013-05-20 Disco Corp 加工装置
CN103831680A (zh) 2014-02-17 2014-06-04 广州恒微机电设备有限公司 一种全自动卧式平面磨床机械手
JP2017152565A (ja) * 2016-02-25 2017-08-31 株式会社ディスコ 洗浄装置

Also Published As

Publication number Publication date
JP7100475B2 (ja) 2022-07-13
CN110315435B (zh) 2022-12-20
JP2019179830A (ja) 2019-10-17
CN110315435A (zh) 2019-10-11
TWI779181B (zh) 2022-10-01
KR20190114760A (ko) 2019-10-10
TW201942972A (zh) 2019-11-01

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E701 Decision to grant or registration of patent right
GRNT Written decision to grant