KR102658632B1 - 노즐 및 액체 분사 장치 - Google Patents

노즐 및 액체 분사 장치 Download PDF

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Publication number
KR102658632B1
KR102658632B1 KR1020227001885A KR20227001885A KR102658632B1 KR 102658632 B1 KR102658632 B1 KR 102658632B1 KR 1020227001885 A KR1020227001885 A KR 1020227001885A KR 20227001885 A KR20227001885 A KR 20227001885A KR 102658632 B1 KR102658632 B1 KR 102658632B1
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KR
South Korea
Prior art keywords
flow path
liquid
nozzle
flow
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
KR1020227001885A
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English (en)
Korean (ko)
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KR20220020389A (ko
Inventor
히로키 아케나가
겐타 나카모리
후미야 사카이
Original Assignee
아사히 슈낙 가부시키 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR20220020389A publication Critical patent/KR20220020389A/ko
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Publication of KR102658632B1 publication Critical patent/KR102658632B1/ko
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/34—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to influence the nature of flow of the liquid or other fluent material, e.g. to produce swirl
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/08—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape of pulsating nature, e.g. delivering liquid in successive separate quantities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
    • B05B9/0423—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material for supplying liquid or other fluent material to several spraying apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H01L21/304—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/004—Arrangements for controlling delivery; Arrangements for controlling the spray area comprising sensors for monitoring the delivery, e.g. by displaying the sensed value or generating an alarm
    • B05B12/006—Pressure or flow rate sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
    • B08B2203/027—Pump details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
    • B08B2203/0288—Ultra or megasonic jets

Landscapes

  • Nozzles (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020227001885A 2019-07-24 2019-07-24 노즐 및 액체 분사 장치 Active KR102658632B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/029014 WO2021014610A1 (ja) 2019-07-24 2019-07-24 ノズル、および液体噴射装置

Publications (2)

Publication Number Publication Date
KR20220020389A KR20220020389A (ko) 2022-02-18
KR102658632B1 true KR102658632B1 (ko) 2024-04-19

Family

ID=74192538

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227001885A Active KR102658632B1 (ko) 2019-07-24 2019-07-24 노즐 및 액체 분사 장치

Country Status (6)

Country Link
US (1) US12183598B2 (https=)
JP (1) JP7312486B2 (https=)
KR (1) KR102658632B1 (https=)
CN (1) CN114126764A (https=)
TW (1) TWI711488B (https=)
WO (1) WO2021014610A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102904841B1 (ko) * 2023-06-21 2025-12-26 유한책임회사 세봉 초음파 세척 모듈
KR102904843B1 (ko) * 2023-06-21 2025-12-26 유한책임회사 세봉 S ＆ s 초음파 세척 모듈

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005205397A (ja) * 2003-12-24 2005-08-04 Matsushita Electric Ind Co Ltd 流体供給ノズル、基板処理装置及び基板処理方法
JP2014064979A (ja) * 2012-09-25 2014-04-17 Sugino Machine Ltd キャビテーションノズル

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6125899Y2 (https=) * 1979-04-17 1986-08-04
JPS55153150A (en) 1979-05-15 1980-11-28 Olympus Optical Co Ltd Back-space unit
JPS56141860A (en) * 1980-04-07 1981-11-05 Nippon Steel Corp Liquid injector
JP3277214B2 (ja) * 1992-02-05 2002-04-22 株式会社スギノマシン 急拡大型液中ジェット噴射用ノズル
JP3320105B2 (ja) * 1992-07-30 2002-09-03 バブコック日立株式会社 キヤビテーシヨン噴流用ノズル
JPH11204480A (ja) 1998-01-20 1999-07-30 Dainippon Screen Mfg Co Ltd 基板洗浄装置
JP2001044602A (ja) 1999-07-30 2001-02-16 Kyocera Corp 描画装置
NL1019212C2 (nl) * 2001-10-23 2002-08-20 Theodorus Alphonsius Niemeijer Werkwijze en inrichting voor het behandelen van oppervlakken.
US20060118495A1 (en) * 2004-12-08 2006-06-08 Ilia Kondratalv Nozzle for generating high-energy cavitation
ES2370158T3 (es) * 2005-04-19 2011-12-13 Special Coating Laboratory International Unidad de lavado para una máquina de limpieza de cristales oftálmicos u otros sustratos.
FR2912946B1 (fr) * 2007-02-28 2009-04-10 Snecma Sa Controle d'alignement pour un systeme de decoupe par jet d'eau
JP5270317B2 (ja) 2008-11-28 2013-08-21 旭サナック株式会社 洗浄用ノズル
JP2012170849A (ja) * 2011-02-18 2012-09-10 Panasonic Corp 微細気泡生成ノズル
CN202238396U (zh) * 2011-09-09 2012-05-30 海南绿航水下清洗科技有限公司 水下清洗枪用喷头
CN102513237B (zh) 2011-12-28 2014-03-12 天津海源流体工程技术有限公司 空化型超高压水锤式水枪喷头
CN102941172B (zh) * 2012-11-26 2015-06-10 宁波恒瑞机械有限公司 一种混液发泡装置
WO2016178421A1 (ja) * 2015-05-01 2016-11-10 有限会社オーケー・エンジニアリング ループ流式バブル発生ノズルを備えた液体供給装置
CN105275702B (zh) * 2015-11-18 2017-12-26 武汉科技大学 一种空燃比自适应调节的喷油器雾化装置
CN105642456A (zh) * 2016-01-04 2016-06-08 湖南工业大学 一种高压低频自振脉冲气液射流喷嘴
JP6865952B2 (ja) * 2016-12-07 2021-04-28 旭サナック株式会社 １流体ノズル
CN207254577U (zh) * 2017-09-01 2018-04-20 西安东仪海博机电科技有限责任公司 一种清洗剥离用脉冲水射流喷头装置
CN207745859U (zh) 2017-12-13 2018-08-21 广东药科大学 一种制备低聚壳聚糖的自振空化装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005205397A (ja) * 2003-12-24 2005-08-04 Matsushita Electric Ind Co Ltd 流体供給ノズル、基板処理装置及び基板処理方法
JP2014064979A (ja) * 2012-09-25 2014-04-17 Sugino Machine Ltd キャビテーションノズル

Also Published As

Publication number Publication date
JPWO2021014610A1 (https=) 2021-01-28
US20220351985A1 (en) 2022-11-03
TW202103800A (zh) 2021-02-01
KR20220020389A (ko) 2022-02-18
TWI711488B (zh) 2020-12-01
JP7312486B2 (ja) 2023-07-21
WO2021014610A1 (ja) 2021-01-28
US12183598B2 (en) 2024-12-31
CN114126764A (zh) 2022-03-01

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