KR102587371B1 - Cleaning chamber including lifting cover door, glass chemical-strengthening apparatus including the same and method for strengthening ultra thin glass - Google Patents

Abstract

A glass cleaning chamber, a glass chemical strengthening facility, and a glass chemical strengthening method using the same are provided, which minimize the time the glass cleaning chamber is exposed to external air between process steps and improve cleaning quality by including a lifting cover door. . The glass cleaning chamber includes a chamber main body having an internal space, one or more lifts disposed at an edge of the chamber main body and whose length changes in the direction of gravity, and opening and closing the internal space of the chamber main body and being lifted and lowered by the lift. Includes cover door.

Description

Glass cleaning chamber including a lifting cover door, glass chemical strengthening equipment including the same, and method for chemical strengthening of ultra-thin glass

The present invention relates to a glass cleaning chamber, a glass chemical strengthening facility including the same, and a method for chemical strengthening of glass using the same. In detail, the glass cleaning chamber includes a lifting cover door to minimize exposure time to external air between process steps and improve cleaning quality, glass chemical strengthening equipment, and glass chemical strengthening method using the same. is to provide.

Thanks to technological advancements, electronic devices such as smartphones and tablet PCs are gradually becoming thinner. In addition, consumers are demanding a wide screen for electronic devices and a high screen-to-body ratio in terms of aesthetics, and accordingly, there is an increasing trend in which the entire front of electronic devices is made of glass.

Glass material has been used as a front cover window material for displays for a long time due to its high light transmittance. However, since general glass is vulnerable to external shock and can easily break or scratch, it is essential to apply tempered glass with improved mechanical strength to form the front of electronic devices such as smartphones with glass.

Meanwhile, research has recently been conducted on foldable displays and rollable displays, and electronic devices equipped with these special displays are also being released.

To implement a foldable display, etc., a flexible material, such as a plastic material such as polyimide film, is used instead of glass as the cover window of the display. However, polyimide films, etc. have lower light transmittance than glass, which may result in light loss. In addition, because foldable displays repeatedly fold a specific location of the cover window, there is a problem of cracks occurring in the area where the folding line is formed or permanent fold marks remaining.

Korean Patent No. 10-1994791, 2019.07.01

In this regard, there is an urgent need for the development of ultra-thin glass (UTG) that has high mechanical strength and can be applied to special displays such as foldable displays or rollable displays. Ultra-thin glass generally refers to a glass material with a thickness of 100㎛ or less. Ultra-thin glass has a higher light transmittance and a thinner thickness than plastic materials, so the folding of the folding line may not be easily visible, and even bending, rolling, or folding may be possible.

Meanwhile, Patent Document 1 discloses a glass chemical strengthening facility that includes a preheating tank for preheating the glass, a strengthening tank for chemically strengthening the glass, a slow cooling tank for slowly cooling the glass, and a hot water tank and a hot water tank for cleaning the glass. That is, Patent Document 1 discloses a chemical strengthening process for glass that is performed in the order of preheating the glass, chemical strengthening, slow cooling, and washing.

However, unlike conventional glass, ultra-thin glass has a very thin thickness, so it is difficult to apply the conventional glass chemical strengthening process to obtain high-quality tempered glass.

For example, the glass strengthening process is based on chemical reactions such as ion substitution. In this case, while conventional glass has a chemical reaction that occurs only at the surface, ultra-thin glass has a mechanism difference in that the chemical reaction occurs substantially uniformly in the thickness direction. These points are the same as the conventional glass chemical strengthening process on ultra-thin glass. This makes it difficult to apply.

Additionally, in the case of conventional glass, such as in Patent Document 1, cleaning and drying can be performed for a sufficient period of time after chemical strengthening. On the other hand, if cleaning and drying are carried out for too long, or if the product is continuously exposed to external air, the chemical strengthening solution or cleaning solution remaining on the surface may remain as a stain, causing problems that are recognized even after commercialization. This is presumed to be due to the thin thickness of ultra-thin glass and the resulting difference in mechanism in the chemical strengthening process, but the present invention is not limited to any theory.

As such, the conventional glass strengthening method and the equipment used therein do not recognize the above factors or do not sufficiently reflect methods to solve them.

In addition, the conventional glass chemical strengthening process mainly uses transport equipment such as overhead transport (OHT) equipment. Overhead transport can be a good way to enable efficient transport in process methods that involve a large number of steps.

However, the overhead transport must install guide rails on the ceiling, etc., must include lifting facilities to move objects in the vertical direction, and all chambers must be configured to allow the overhead transport device to enter and withdraw, etc. Not only is the process space large, but it also acts as a major factor in complicating the equipment.

In particular, facilities where overhead transport is applied severely limit the number of process objects, such as glass, performed at one time due to the space volume controlled by the facility itself. However, unlike conventional glass, ensuring uniformity is of utmost importance for practical use, and in order to have uniform strength for each lot, it is necessary to chemically strengthen as much ultra-thin glass as possible from a single process unit. do.

Accordingly, the problem to be solved by the present invention is to provide a glass cleaning chamber capable of responding to a method of manufacturing ultra-thin glass. Specifically, the aim is to provide a glass cleaning chamber that can reduce exposure time to external air, improve reinforcement quality to prevent stains, etc., and reduce process volume.

Another problem to be solved by the present invention is to provide a chemical strengthening facility for glass that can respond to a method for manufacturing ultra-thin glass.

Another problem that the present invention aims to solve is to provide a method for chemical strengthening of ultra-thin glass.

The problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the description below.

A glass cleaning chamber according to an embodiment of the present invention for solving the above problem includes a chamber main body having an internal space, one or more lifts disposed at an edge of the chamber main body and whose length changes in the direction of gravity, and a portion of the chamber main body. It includes a cover door that opens and closes the interior space and is raised and lowered by the lift.

The cover door may include a door plate that seals the internal space of the chamber body, and a mounting portion disposed on the bottom of the door plate.

When the cover door is open, the mounting portion may be located outside the interior space, and when the cover door is closed, the mounting portion may be located inside the interior space.

Additionally, the relative positions of the mounting portion and the door plate are fixed, and the position of the mounting portion in the direction of gravity may change as the lift moves up and down.

The mounting portion includes a mounting rod extending downward from the door plate in the direction of gravity, an extension plate extending horizontally from a lower end of the mounting rod, a side wall plate protruding downward from an end of the extension plate, and an inner surface of the side wall plate. It may include a plurality of protruding first protrusions.

The chamber main body may include a plurality of first spray nozzles disposed on the inner wall and spraying liquid toward the internal space.

Additionally, the spraying direction of the first spraying nozzle may be inclined downward, and the angle formed between the spraying direction and the inner wall may be 20 degrees to 90 degrees.

The cover door includes a door plate that seals the inner space of the chamber main body from the outside of the inner space, a mounting portion disposed on the bottom of the door plate, and a bottom of the door plate, and the gas is directed downward. Alternatively, it may include one or more second spray nozzles that spray liquid.

In addition, the cover door may further include one or more third spray nozzles disposed on the bottom of the door plate and disposed at an edge of the second spray nozzle.

From a plan view, the second injection nozzle may overlap the internal space of the chamber body, and from a plan view, the third injection nozzle may not overlap the internal space of the chamber body.

Additionally, from a plan view, the plurality of third injection nozzles may be arranged to only partially surround the interior space of the chamber main body.

In some embodiments, the glass cleaning chamber may further include a first sensor and a second sensor that detect the position of the cover door or the lift, and may further include a first sensor and a second sensor that are spaced apart from each other in the direction of gravity.

In some embodiments, the glass cleaning chamber may further include a control unit that controls the lift.

The control unit may control the upward or downward speed of the lift based on the position information of the cover door or the lift detected by the first sensor and the second sensor.

In some embodiments, the glass cleaning chamber may further include a guide post that provides a space in which the first sensor and the second sensor are disposed, extends in the direction of gravity, and performs a guide function of the cover door. there is.

When the lift is raised or lowered, the positions of the first sensor and the second sensor may not change.

A method of chemically strengthening glass according to an embodiment of the present invention to solve the above other problems is a method of chemically strengthening glass, which includes the step of chemically strengthening glass by immersing it in a chemical strengthening solution and then cleaning the glass in a cleaning chamber, It is a cover door that opens and closes the chamber body and the internal space of the chamber body, and is performed using a cleaning chamber including a cover door that is raised and lowered in the direction of gravity.

The glass cleaning step includes mounting the glass loading jig on which the glass is mounted on the mounting portion of the cover door, lowering the cover door and immersing the glass loading jig in the cleaning liquid, and raising the cover door. It may include removing the glass loading jig from the cleaning solution.

In addition, the step of removing the glass loading jig from the cleaning liquid may be performed at least partially simultaneously with the step of spraying the liquid onto the glass loading jig using a first spray nozzle disposed on the inner wall of the chamber body. .

At this time, the liquid sprayed by the first spray nozzle may be heated to about 40°C or higher.

The step of taking out the glass loading jig from the cleaning liquid may be performed at least partially simultaneously with the step of spraying gas into the glass loading jig using the second spray nozzle of the cover door.

At this time, the second injection nozzle may overlap the internal space of the chamber body.

The position of the cover door or a lift that raises or lowers the cover door can be detected, and the speed of raising or lowering the cover door can be controlled based on this.

In addition, the step of mounting the glass loading jig on the holder, lowering the cover door, or raising the cover door includes forming an air curtain using a third spray nozzle of the cover door. and is performed at least partially simultaneously, and the third spray nozzle may not overlap with the internal space of the chamber body.

Insertion of the glass loading jig may be performed in a first direction.

In addition, the mounting portion may include a plurality of side wall plates extending in the first direction and spaced apart in a second direction intersecting the first direction, and a plurality of first protrusions protruding from the inner surface of the side wall plates. there is.

In addition, the glass loading jig includes a loader main body, a plurality of loader protrusions disposed on the upper surface of the loader main body, a plurality of loader protrusions extending in the first direction and spaced apart in the second direction, and an outer surface of the loader protrusion. It may include a plurality of second protrusions protruding from.

At this time, one second protrusion may be mounted on top of the plurality of first protrusions.

Specific details of other embodiments are included in the detailed description.

According to embodiments of the present invention, the glass chemical strengthening process can be performed using a robot arm rather than a transfer facility such as an overhead transport. Therefore, equipment can be simplified and a greater quantity of ultra-thin glass can be manufactured from a single process unit.

Additionally, the loading jig loaded with glass can be immersed in the cleaning solution and taken out using a cover door that is lifted in the direction of gravity. Accordingly, the lifting equipment located at the upper part of the cleaning chamber to raise and lower the loading jig can be omitted, and the utilization of process space can be improved. For example, free design may be possible, such as configuring chambers by stacking them in the direction of gravity.

In addition, in the glass chemical strengthening process, which consists of a preheating process, a chemical strengthening process, a slow cooling process, and a cleaning process, the transport distance of the glass can be shortened and process efficiency can be improved. In particular, it can provide advantages in terms of automation of process equipment or implementation of a turn key system.

Furthermore, the cleaning chamber can include components to improve the chemical strengthening quality of the glass, providing improved quality ultra-thin glass.

Effects according to embodiments of the present invention are not limited to the contents exemplified above, and further various effects are included in the present specification.

Figure 1 is a schematic diagram of a glass chemical strengthening facility according to an embodiment of the present invention.
Figure 2 is a perspective view of a glass cleaning chamber according to an embodiment of the present invention.
FIG. 3 is a cross-sectional perspective view of the glass cleaning chamber of FIG. 2.
Figure 4 is a rear perspective view of the cover door of Figure 3.
Figure 5 is a perspective view of a glass loading jig according to an embodiment of the present invention.
FIG. 6 is a side cross-sectional view for explaining the operation of the glass cleaning chamber of FIG. 2.
Figure 7 is a side cross-sectional view of a glass cleaning chamber according to another embodiment of the present invention.
Figure 8 is a perspective view of a glass cleaning chamber according to another embodiment of the present invention.
Figure 9 is a side cross-sectional view of the glass cleaning chamber of Figure 8;
Figure 10 is a perspective view of a glass cleaning chamber according to another embodiment of the present invention.
Figure 11 is a side cross-sectional view of the glass cleaning chamber of Figure 10.
Figure 12 is a flowchart showing a method for chemically strengthening glass according to an embodiment of the present invention.
Figures 13 to 19 are side cross-sectional views sequentially showing the glass chemical strengthening method of Figure 12.

The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and will be implemented in various different forms, and only the embodiments serve to ensure that the disclosure of the present invention is complete, and those skilled in the art It is provided to fully inform the person of the scope of the invention, and the present invention is only defined by the scope of the claims. That is, various changes may be made to the embodiments presented by the present invention. The embodiments described below are not intended to limit the embodiments, but should be understood to include all changes, equivalents, and substitutes therefor.

Unless otherwise defined, all terms (including technical and scientific terms) used in this specification may be used with meanings that can be commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not interpreted ideally or excessively unless clearly specifically defined.

As used herein, 'and/or' includes each and every combination of one or more of the mentioned items. Additionally, the singular form also includes the plural form unless specifically stated in the phrase. As used herein, 'comprises' and/or 'comprising' do not exclude the presence or addition of one or more other components in addition to the mentioned components. The numerical range expressed using 'to' indicates a numerical range that includes the values written before and after it as the lower limit and upper limit, respectively. ‘About’ or ‘approximately’ means a value or numerical range within 20% of the value or numerical range stated thereafter.

The size, thickness, width, length, etc. of components shown in the drawings may be exaggerated or reduced for convenience and clarity of explanation, so the present invention is not limited to the form shown.

Spatially relative terms such as 'above', 'upper', 'on', 'below', 'beneath', and 'lower' are used in the drawing. As shown, it can be used to easily describe the correlation between one element or component and other elements or components. Spatially relative terms should be understood as terms that include different directions of the element when used in addition to the direction shown in the drawings. For example, when an element shown in a drawing is turned over, an element described as 'below or beneath' another element may be placed 'above' the other element. Accordingly, the illustrative term 'down' may include both downward and upward directions.

Additionally, in this specification, the first direction (X) refers to an arbitrary direction in a plane, and the second direction (Y) refers to another direction intersecting the first direction (X) in the plane. Additionally, the third direction (Z) refers to a direction perpendicular to the plane.

Hereinafter, the present invention will be described in detail with reference to the attached drawings.

Figure 1 is a schematic diagram of a glass chemical strengthening facility 1 according to an embodiment of the present invention.

Referring to FIG. 1, the glass chemical strengthening facility 1 according to this embodiment includes a heat treatment chamber 20, a strengthening chamber 30, a cleaning chamber 10, and a robot arm 40, and a control unit that controls them. (50) may be further included.

In an exemplary embodiment, the glass chemical strengthening process using the glass chemical strengthening equipment 1 according to this embodiment may include a preheating step of the glass, a chemical strengthening step of the glass, a slow cooling step of the glass, and a cleaning step of the glass. . The preheating step and/or the slow cooling step may be performed in the heat treatment chamber 20, and the strengthening step may be performed in the strengthening chamber 30. Additionally, the cleaning step may be performed in the cleaning chamber 10. The chemical strengthening process of glass will be described later with reference to FIG. 12.

The robot arm 40 performs the function of drawing in and/or drawing out the glass to be strengthened into the heat treatment chamber 20, the strengthening chamber 30, and the cleaning chamber 10, or transferring it between the chambers. can do. Although the present invention is not limited thereto, the glass chemical strengthening facility 1 according to this embodiment is a process space where the glass chemical strengthening process is performed by adopting a robot arm 40 rather than a transport facility such as an overhead transport. Efficient use is possible, and a larger quantity of glass can be strengthened in one process unit. In addition, it may be desirable to use the robot arm 40 in terms of automation of the glass chemical strengthening process and simplification of the structure of each chamber.

The control unit 50 may be a means for controlling one or more of the heat treatment chamber 20, the strengthening chamber 30, the cleaning chamber 10, and the robot arm 40 described above. For example, the control unit 50 may perform opening and closing control of each chamber, temperature control, movement control of components, timing control, etc. In some embodiments, the controller 50 is electrically connected to all of the heat treatment chamber 20, the strengthening chamber 30, the cleaning chamber 10, and the robot arm 40 to perform control, or is connected to only some of them. control can be performed.

In another embodiment, the control unit 50 may be implemented integrated with one of the heat treatment chamber 20, the strengthening chamber 30, the cleaning chamber 10, and the robot arm 40. Alternatively, the control unit 50 may be provided in plural numbers. In this case, some of the plurality of control units are connected to some of the heat treatment chamber 20, strengthening chamber 30, cleaning chamber 10, and robot arm 40, and other parts of the plurality of control units are connected to the heat treatment chamber 20, It may be connected to other parts of the strengthening chamber 30, the cleaning chamber 10, and the robot arm 40.

The control unit 50 may be configured to include a processor and/or memory. The processor may include a Central Processing Unit (CPU), Micro Processor Unit (MPU), Micro Controller Unit (MCU), or any type of processor known in the art. The memory may be RAM (Random Access Memory), ROM (Read Only Memory), EPROM (Erasable Programmable ROM), EEPROM (Electrically Erasable Programmable ROM), Flash Memory, or any other form of memory known in the art. It may be configured to include.

Figure 2 is a perspective view of the glass cleaning chamber 11 according to an embodiment of the present invention. FIG. 3 is a cross-sectional perspective view of the glass cleaning chamber 11 of FIG. 2. FIG. 4 is a rear perspective view of the cover door 301 of FIG. 3. Figure 5 is a perspective view of the glass loading jig 60 according to an embodiment of the present invention. FIG. 6 is a side cross-sectional view for explaining the operation of the glass cleaning chamber 11 of FIG. 2.

2 to 6, the cleaning chamber 11 according to this embodiment includes a chamber body 101, a lift 200 disposed on the chamber body 101, and a cover door that is raised and lowered by the lift 200. It may include (301).

The chamber body 101 may include a bottom portion 110 and a side wall portion 131. Additionally, the side wall portion 131 may include an inner wall portion (131a) and an outer wall portion (131b). In some embodiments, the inner wall portion 131a and the outer wall portion 131b may be spaced apart by a predetermined distance. Other components or wiring for driving the cleaning chamber 11 may be placed in the space.

The inner wall portion 131a may be substantially circular in plan view, and the outer wall portion 131b may be substantially square in plan view, but the present invention is not limited thereto. In another embodiment, the inner wall portion 131a may have a polygonal shape such as a square, pentagon, hexagon, or octagon in plan view. Additionally, the outer wall portion 131b may also have a polygonal shape other than a square shape, or may be circular.

The inner wall portion 131a and the bottom portion 110 may form an internal space (IS) of the chamber body 101. The internal space (IS) may provide a process space of the chamber body 101. The internal space IS may have a cylindrical shape with an open top. The internal space (IS) may provide a space where a cleaning process, which will be described later, is performed.

Additionally, the upper ends of the inner wall portion 131a and the outer wall portion 131b may form at least partially different levels. As will be described later, the upper part of the chamber body 101 may be sealed by a cover door 301. In this case, considering the components disposed on the bottom of the cover door 301, an upper step between the inner wall portion 131a and the outer wall portion 131b can be formed at a corresponding position.

The first spray nozzle 190 may be disposed on the inner wall of the inner wall portion 131a. The first spray nozzle 190 is located within the internal space (IS) and may be configured to spray liquid toward the loading jig 60 on which the cleaning object entering the internal space (IS), for example, glass (G) is mounted. there is. That is, the first injection nozzle 190 may be tilted downward. The angle formed between the spray direction of the first spray nozzle 190 and the inner wall of the inner wall portion 131a may be about 20 degrees to 90 degrees, or about 20 degrees to 60 degrees, or about 30 degrees to 50 degrees.

The first spray nozzle 190 may spray liquid such as cleaning liquid, distilled water, and/or water. That is, the first spray nozzle 190 may be a liquid spray nozzle. The liquid sprayed from the first spray nozzle 190 may be heated to a predetermined temperature (eg, about 20°C, about 40°C, about 60°C, or about 80°C) or higher. The liquid sprayed from the first spray nozzle 190 may have a temperature similar to that of the cleaning liquid in the cleaning chamber 11. The function of the first injection nozzle 190 will be described later with reference to FIG. 12 and the like. Figure 1 illustrates an embodiment in which a total of 20 plurality of first injection nozzles 190 are arranged in a circular arrangement at an angle of 18 degrees, but the present invention is not limited thereto. However, it may be desirable to arrange eight or more first injection nozzles 190. If the number of first spray nozzles 190 is less than 8, uniform secondary cleaning may be difficult.

In addition, the first spray nozzle 190 is attached to a hinge-type structure that is partially coupled to the inside of the internal space (IS) to control the spray direction, or is attached to a structure that adjusts the spray direction at the nozzle tip. It could be.

The lift 200 may be at least partially inserted into the chamber body 101. The lift 200 may be a component whose length changes in the direction of gravity, that is, in the third direction (Z). For example, the lift 200 may include a plurality of pipes having different diameters. Although not shown in the drawing, a power source such as a motor for controlling the length of the lift 200 may be disposed inside the chamber body 101. That is, the lift 200 may be implemented as a hydraulic cylinder in which a piston or plunger performs linear motion by hydraulic pressure, or may be implemented through a motor that generates power by electronic signals.

The lift 200 may be placed on the edge side of the chamber body 101. For example, the plurality of lifts 200 may be arranged to surround the internal space (IS) of the chamber body 101. Alternatively, the lift 200 may be disposed on the outer surface of the chamber main body 101 or may be directly coupled to the chamber main body 101 on the outer surface of the chamber main body 101. 2 and the like illustrate a case in which four lifts 200 are provided, but the present invention is not limited thereto.

The space between the two lifts 200 spaced apart in the second direction (Y) provides a space into which the loading jig 60 on which the cleaning object, for example, the glass (G) is mounted, is drawn in or drawn out. can do. For example, the loading jig 60 may be introduced and/or withdrawn through the space on the right side of FIG. 6 (one side in the first direction (X)). Although not shown in the drawing, the end-effector of the robot arm 40 is inserted into the space between the chamber body 101 and the cover door 301 and is attached to the mounting portion 350 of the cover door 301. The loading jig 60 can be mounted or detached.

In another embodiment, the directions other than the direction in which the loading jig 60 is retracted or withdrawn, that is, the other side in the first direction (X) (left side in FIG. 6) and both sides in the second direction (Y) are at least partially closed or , other components may also be deployed.

A cover door 301 may be placed on the chamber body 101 and the lift 200. That is, the chamber body 101 and the lift 200 may be located on the lower surface of the cover door 301 based on the direction of gravity. The cover door 301 may be moved up and down in the third direction (Z) by the lift 200. The cover door 301 may include a door plate 310 and a mounting portion 350.

The door plate 310 may be a part that opens, closes, or seals the internal space (IS) of the chamber body 101. The bottom of the door plate 310 may be substantially flat. In some embodiments, the edge of the door plate 310 may have a depression 311g. The depression 311g of the door plate 310 has a shape corresponding to the protrusion 131p at the top of the outer wall 131b, and when the door plate 310 seals the internal space IS, the protrusion 131p is It may be at least partially inserted into the recessed portion 311g. Through the above structure, the internal space (IS) of the chamber body 101 can be sealed more precisely. The portion where the door plate 310 and the chamber body 101 come into contact for sealing, for example, the depression 311g and the protrusion 131p, may be coated or attached with a sealing material.

The mounting portion 350 may refer to a portion where the glass loading jig 60 is mounted or hung. The mounting portion 350 may have a shape that allows attachment and detachment from the upper part of the glass loading jig 60. The mounting portion 350 may have a shape that protrudes from the bottom of the door plate 310 in the third direction (Z).

The mounting portion 350 may be arranged to be fixed and coupled to the bottom of the door plate 310. In an exemplary embodiment, the mounting portion 350 includes a mounting rod 351 extending in the third direction (Z), an extension plate 353a extending in the horizontal direction, and protruding from the extension plate 353a in the third direction (Z). It may include a side wall plate 353b and a first protrusion 353c protruding inward from the side wall plate 353b.

The mounting rod 351 may have a shape extending from the door plate 310 in the third direction (Z). The mounting rod 351 has a predetermined separation distance between the bottom surface of the door plate 310 and the first protrusion 353c on which the door plate 310 is substantially mounted, and the relative position between them, for example, the separation distance in the third direction (Z) is substantially It can have a fixing function. In some embodiments, the mounting rod 351 is configured to be rotatable within a plane to which the first direction (X) and the second direction (Y) belong, and can rotate the extension plate 353a, etc.

The extension plate 353a may have a shape extended from the mounting rod 351 in the plane direction. The extension plate 353a may function to ensure that the first protrusions 353c have a sufficient separation distance in the second direction (Y).

Additionally, the side wall plate 353b may have a shape that protrudes from both ends of the extension plate 353a in the second direction (Y) downward in the third direction (Z). The side wall plate 353b can allow the extension plate 353a and the first protrusion 353c to have a predetermined separation distance. The side wall plate 353b has a shape that extends approximately in the first direction (X) and may be spaced apart in the second direction (Y). In this specification, the first direction (X) may be defined as a direction in which the glass loading jig 60 is drawn in or drawn out of the cleaning chamber 11. In this case, the side wall plate 353b preferably has the above shape.

A plurality of first protrusions 353c may be disposed on the inner surface of the side wall plate 353b. Figure 4 illustrates a case where a total of eight first protrusions 353c are arranged in pairs of two. Specifically, two or more, three or more, or four or more first protrusions 353c may be arranged in the first direction (X) and spaced apart in the second direction (Y).

The second protrusion 63c of the glass loading jig 60, which will be described later, may be engaged with the first protrusion 353c. Additionally, the first direction (X) may be a direction in which the glass loading jig 60 is retracted and/or withdrawn. Therefore, it is desirable for the first protrusion 353c to have the above arrangement. As will be described later, a pair of first protrusions 353c, that is, two first protrusions 353c, may be configured to support one second protrusion 63c.

The mounting portion 350 may be elevated or lifted together with the door plate 310 in the third direction (Z). Elevation of the mounting portion 350 and the door plate 310 in the third direction (Z) may be performed through the lift 200 described above. When the length of the lift 200 is extended in the third direction (Z), the cover door 301 including the mounting portion 350 and the door plate 310 rises upward and the third direction of the lift 200 When the length to (Z) is shortened, the cover door 301 including the mounting portion 350 and the door plate 310 can descend downward.

When the lift 200 is extended and the cover door 301 closes the internal space (IS), the bottom surface of the door plate 310 may at least partially contact the inner wall portion 131a and the outer wall portion 131b. there is. Also, in this case, the mounting portion 350 may be disposed inside the internal space (IS). Meanwhile, when the top of the inner wall portion 131a is in contact with the door plate 310, the portion of the bottom of the door plate 310 facing the top of the inner wall portion 131a and the upper portion of the inner wall portion 131a are sealed. Materials for may be applied or attached.

On the other hand, when the lift 200 is shortened and the cover door 301 opens the internal space (IS), the bottom surface of the door plate 310 may be spaced apart from the inner wall portion 131a and the outer wall portion 131b. Also, in this case, the mounting portion 350 may be disposed outside the internal space (IS).

The glass loading jig 60 may be mounted on the mounting portion 350. The glass loading jig 60 may be configured to load glass (G), which is subject to chemical strengthening and cleaning. For example, the loading jig 60 may include a loader body 61 and a locking unit 63 located on top of the loader body 61.

The loader body 61 may have an approximately octagonal shape in plan view. In another embodiment, the loader body 61 may be approximately polygonal, such as a triangle, square, pentagon, or hexagon, or may be circular in plan view. The loader body 61 may have a lower opening and an empty interior.

A locking unit 63 may be disposed on the upper surface of the loader body 61. The locking unit 63 may be configured to be attachable to and detachable from the robot arm 40 and/or the mounting portion 350.

In an exemplary embodiment, the locking unit 63 may include a loader protrusion 63a, a second protrusion 63c, and a bar 63b for gripping the robot arm.

The loader protrusion 63a may protrude upward from the upper surface of the loader main body 61 in the third direction (Z). The loader protrusions 63a may extend approximately in the first direction (X) and may be arranged in plural numbers spaced apart from each other in the second direction (Y). As described above, the glass loading jig 60 may be inserted into the cleaning chamber 11 in the first direction (X). That is, the extension direction of the loader protrusion 63a may be substantially parallel to the retraction/extraction direction of the glass loading jig 60.

A plurality of second protrusions 63c may be disposed on the loader protrusion 63a. The second protrusion 63c may protrude toward the outer surface from either side of the loader protrusion 63a. Figure 5 illustrates a case where four second protrusions 63c are formed using two bars 63b, but the present invention is not limited thereto, and the number of bars 63b may be one or two or more. The second protrusion 63c may be configured to engage or engage with the first protrusion 353c of the above-described mounting portion 350.

In some embodiments, the bar 63b connecting the loader protrusions 63a may form a space at the bottom where a bar- or plate-shaped robot arm can be inserted and withdrawn. Alternatively, when using a robot arm with a gripping or grip function, the bar 63b may be directly gripped by the robot arm. The bar 63b may have a circular cross-section, but may also be implemented in a polygonal shape. The bar 63b is located at the top of the robot arm and can be used to move the loader body 61 between glass processing processes. As described above, the glass loading jig 60 is held by the robot arm and introduced into the cleaning chamber 11, and is mounted on the mounting portion 350 of the cleaning chamber 11, and after the cleaning process is completed, the glass loading jig 60 is held by the robot arm and introduced into the cleaning chamber 11. It may be held by an arm and pulled out of the cleaning chamber 11.

A plurality of cassettes 70 may be fixed on the side of the loader main body 61 and configured to be detachable. For example, a plurality of holes are formed on the side wall of the loader body 61, and the cassette 70 can be placed in the holes. A plurality of cassettes 70 may be provided along the side direction of the loader body 61 and in the third direction (Z). Figure 5 illustrates a case where three cassettes 70 are arranged in the third direction (Z) on each of the eight sides of the loader body 61, but the present invention is of course not limited thereto.

A plurality of glasses (G) may be loaded or mounted on one cassette (70). The glass (G) may be in the state of a glass cell in which the mother glass is cut to a predetermined size. In contrast, the glass (G) may be glass that substantially does not contain sodium ions, or may be glass that contains potassium ions in abundance compared to sodium ions, that is, glass after chemical strengthening.

The glass (G) may be ultra-thin glass having a thickness of about 100 μm or less, or about 90 μm or less, or about 80 μm or less, or about 70 μm or less, or about 60 μm or less, or about 50 μm or less. The plurality of glasses G may form a glass stack GS or a glass laminate through an adhesive or the like, and the glass stack GS may be mounted on the cassette 70 . FIG. 5 illustrates a case in which two glass stacks GS are arranged in a radial direction within one cassette 70 .

The cleaning chamber 11 according to this embodiment can seal the chamber body 101 using a cover door 301 while performing the cleaning step. Therefore, cleaning can be performed under uniform conditions, and defects that may occur after cleaning, such as stain defects, can be minimized. Additionally, the cleaning chamber 11 may seal the chamber body 101 so that the cleaning liquid is not sprayed out of the cleaning chamber 11 while the cleaning step is performed.

Meanwhile, the cleaning liquid in the cleaning chamber 11 may be in the form of a liquid heated to a predetermined temperature (eg, about 20°C, about 40°C, about 60°C, or about 80°C) or higher. To this end, the cleaning chamber 11 may further include a heater-like structure inside the chamber body 101 for heating the cleaning liquid to a predetermined temperature or higher.

In addition, the first spray nozzle 190 disposed on the inner wall of the chamber main body 101 is cleaned by being immersed in the cleaning liquid, and is taken out from the cleaning liquid, or while being taken out, the glass G and the loading jig on which the glass G is mounted ( Secondary cleaning can be performed at 60). If the remaining cleaning solution on the surface of the glass (G) removed from the cleaning solution comes into contact with external air and a rapid change occurs in the surface of the glass (G), this may lead to defective staining. The cleaning chamber 11 according to this embodiment can solve the above problem by secondarily spraying the cleaning solution onto the glass G taken out from the cleaning solution using the first spray nozzle 190.

In addition, in the door structure of the cleaning chamber 11, a hinge structure, etc. is not adopted, so the equipment can be miniaturized, and there is an advantage that the robot arm 40 can be applied as a transfer equipment. This will be described later along with FIG. 12 and the like.

Hereinafter, other embodiments of the present invention will be described. However, the description of the same or extremely similar configuration as the above-described embodiment will be omitted, and this will be easily understood by those skilled in the art from the accompanying drawings and detailed description.

Figure 7 is a side cross-sectional view of the glass cleaning chamber 12 according to another embodiment of the present invention.

Referring to FIG. 7, the cover door 302 of the cleaning chamber 12 according to this embodiment further includes one or more second spray nozzles 390 disposed on the bottom of the door plate 310, as shown in FIG. 2 This is different from the cleaning chamber 11 according to the other embodiments.

The second spray nozzle 390 may be configured to spray gas or liquid toward the loading jig 60 mounted on the mounting portion 350. That is, the second injection nozzle 390 may be a gas injection nozzle or a liquid injection nozzle. The gas may be compressed air or an inert gas such as argon (Ar) or helium (He). The liquid may be a liquid such as the cleaning liquid described above, distilled water, and/or water. When the second spray nozzle 390 is a liquid spray nozzle, the liquid may be the same as or different from the liquid sprayed by the first spray nozzle 190.

The gas (or liquid) sprayed by the second spray nozzle 390 may be heated to a predetermined temperature. For example, the gas (or liquid) sprayed by the second injection nozzle 390 may be about 20°C or higher, or about 40°C or higher, or about 60°C, or about 80°C or higher. In some embodiments, the temperature of the spray from the second spray nozzle 390 may be higher or lower than the temperature of the spray from the first spray nozzle 190. For example, since the second spray nozzle 390 is located higher than the first spray nozzle 190, a temperature difference may occur when it reaches the glass surface, so that the liquid sprayed from the second spray nozzle 390 The temperature may be higher than that of the liquid sprayed from the first spray nozzle 190. The spray direction of the second spray nozzle 390 may be approximately perpendicular to the bottom surface of the door plate 310 or may be at a predetermined angle.

The second spray nozzle 390 sprays gas (or liquid) at a strong intensity after the loading jig 60 is removed from the cleaning solution and before performing the drying step, thereby at least partially removing the cleaning solution remaining on the glass surface. there is. Through this, defects such as stains on the glass can be minimized. That is, the second spray nozzle 390 can perform third cleaning following the first spray nozzle 190, but the function of the second spray nozzle 390 is not limited to this.

The second injection nozzle 390 may be arranged to overlap the internal space IS in the third direction Z. Additionally, when the cover door 302 opens the internal space IS, the second spray nozzle 390 may be disposed outside the internal space IS. On the other hand, when the cover door 302 seals the internal space (IS), the second spray nozzle 390 may be disposed inside the internal space (IS). That is, the second injection nozzle 390 may closely overlap the inner wall portion 131a and/or the outer wall portion 131b in the horizontal direction. In addition, the second spray nozzle 390 is attached to a hinge-type structure partially coupled to the bottom of the door plate 310 of the cover door 302 to adjust the spray direction, or is attached to the tip of the nozzle to control the spray direction. It may also be combined with a structure that regulates .

From a plan view, the plurality of second injection nozzles 390 may be arranged to surround the mounting portion 350. The number of second injection nozzles 390 is not particularly limited, but may be about 4 or more, or about 8 or more, or about 16 or more.

Figure 8 is a perspective view of a glass cleaning chamber 13 according to another embodiment of the present invention. Figure 9 is a side cross-sectional view of the glass cleaning chamber 13 of Figure 8.

8 and 9, the cover door 303 of the cleaning chamber 13 according to this embodiment further includes one or more third spray nozzles 395 disposed on the bottom of the door plate 310. This is different from the cleaning chamber 12 according to the embodiment of FIG. 7.

The third injection nozzle 395 is directed approximately in the third direction (Z) toward the side wall portion 131 of the chamber body 101 rather than the loading jig 60, and/or toward the outer direction in the third direction (Z). It may be configured to spray gas in a direction having a predetermined inclination. The gas may be compressed air or an inert gas such as argon (Ar) or helium (He). That is, the third injection nozzle 395 may be a gas injection nozzle. The type of gas sprayed by the third injection nozzle 395 may be the same as or different from the type of gas sprayed by the second spray nozzle 390. The gas sprayed by the third injection nozzle 395 may be heated to a predetermined temperature. For example, the gas sprayed by the third injection nozzle 395 may be about 30°C or higher, or about 40°C or higher, or about 50°C or higher.

The spray direction of the third spray nozzle 395 may be approximately perpendicular to the bottom surface of the door plate 310 or may be at a predetermined angle. When the cover door 303 is open, the third spray nozzle 395 may form an air curtain between the cover door 303 and the chamber body 101 spaced apart in the third direction (Z). Through this, exposure of the reinforced glass to external air is minimized by using the air curtain of the third spray nozzle 395 before immersing the loading jig 60 in the cleaning solution or after taking the loading jig 60 out of the cleaning solution. It is possible to improve the strengthening quality of glass by preventing contamination of the glass by foreign substances mixed with external air. In addition, when the third injection nozzle 395 sprays gas vertically or inclined at a predetermined angle toward the chamber body 101, work by-products such as cleaning liquid and reinforcing liquid are transferred to the work space outside the chamber body 101. This can prevent it from spreading.

From a plan view, the third spray nozzle 395 may be arranged to at least partially surround the chamber body 101. Specifically, the third injection nozzle 395 is disposed to only partially surround the chamber body 101, and may not be disposed in some areas.

In an exemplary embodiment, the third injection nozzle 395 may be disposed only in the remaining area excluding the side where the loading jig 60 is retracted and/or withdrawn. For example, the third spray nozzle is not disposed in the right space of FIG. 9 (one side of the first direction (X)), but only on the other side of the first direction (X) (left side of FIG. 9) and both sides of the second direction (Y). Third injection nozzles 395 may be disposed.

In this case, the direction in which the third spray nozzle 395 is not partially disposed is substantially parallel to the direction of extension of the side wall plate of the mounting portion 350, or is parallel to the direction of extension of the loader protrusion of the glass loading jig 60. may be substantially parallel.

The third injection nozzle 395 may be arranged to non-overlap the internal space (IS) in the third direction (Z). That is, when the cover door 303 opens or closes the internal space IS, the third spray nozzle 395 may be disposed outside the internal space IS. In some embodiments, the top of the outer wall portion 131b of the chamber body 101 may be partially recessed to form a receiving groove in which the third spray nozzle 395 is accommodated.

Figure 10 is a perspective view of a glass cleaning chamber 14 according to another embodiment of the present invention. Figure 11 is a side cross-sectional view of the glass cleaning chamber 14 of Figure 10.

10 and 11, the cleaning chamber 14 according to the present embodiment is different from the cleaning chamber 13 according to the embodiment of FIG. 8 in that it further includes a guide post 500 and sensors 400. This is different.

The guide post 500 provides a space where the first sensor 410 and the second sensor 420, which will be described later, are placed, and can perform a guide function for lifting the lift 200 and/or the cover door 304. there is. The guide post 500 may be disposed on the outer wall portion 131b of the chamber body 101. However, the present invention is not limited to this, and the cover door 304 may be placed in another location where it can perform a lifting/lowering guide function.

Guide posts 500 may be placed near each corner. Each guide post 500 may have a shape extending in the third direction (Z). Regardless of whether the lift 200 is raised or lowered, the guide post 500 may be configured so that its position does not change.

A first sensor 410 and a second sensor 420 may be disposed on the inner surface of the guide post 500. The first sensor 410 and the second sensor 420 may be spaced apart from each other in the third direction (Z). The first sensor 410 and the second sensor 420 may each be a sensor capable of detecting positional information such as a change in displacement of an object located in front of it, or speed information such as speed or acceleration. For example, the first sensor 410 and the second sensor 420 may be implemented as an infrared sensor or an ultrasonic sensor, but the present invention is not limited thereto.

In addition, the first sensor 410 and the second sensor 420 are disposed on the guide post 500, and in this case, the first sensor 410 and the second sensor ( The position of 420) in the third direction (Z) may not change.

In an exemplary embodiment, the first sensor 410 and the second sensor 420 detect the position or speed information of the cover door 304 or the lift 200, and raise and/or raise the lift 200 based on this. Alternatively, the descent speed can be controlled. The first sensor 410 and the second sensor 420 are each controlled by the control unit (50 in FIG. 1) as shown in FIG. 1 described above, and the control unit may be configured to control the speed of the lift 200.

Therefore, when the cover door 304 (e.g., the door plate 310) approaches within a predetermined distance at approximately the top and bottom positions, the control unit (50 in FIG. 1) lowers the rising and/or lowering speed of the lift 200 to lower the loader. It can prevent the main body and cassette from being separated, or the glass from being separated or damaged.

Also, based on the information collected by the first sensor 410 and the second sensor 420, the above-described first injection nozzle 190, second injection nozzle 390, and/or third injection nozzle 395 One or more of the operation point, operation timing, or operation speed may be controlled.

Hereinafter, a method for chemically strengthening glass according to an embodiment of the present invention will be described with further reference to FIG. 12 and the like. For simplicity of explanation, FIGS. 13 to 19 illustrate the case of using the cleaning chamber according to the above-described embodiment of FIG. 10, but the present invention is not limited thereto, and cleaning chambers according to other embodiments may be used. Of course.

Figure 12 is a flowchart showing a method for chemically strengthening glass according to an embodiment of the present invention. Figures 13 to 19 are side cross-sectional views sequentially showing the glass chemical strengthening method of Figure 12.

Referring further to FIG. 12, the method of chemical strengthening of glass according to this embodiment includes a chemical strengthening step of glass (S100) and a cleaning step of glass (S200), and may further include a drying step of glass (S300). there is. In addition, although not shown in the drawing, a preheating step of the glass is further performed before the chemical strengthening step (S100) of the glass, and a slow cooling step of the glass is further performed between the chemical strengthening step (S100) and the cleaning step (S200) of the glass. It may be possible.

The preheating and slow cooling steps of the glass may be performed in a heat treatment chamber. That is, the heat treatment may include pre-heating treatment (warm-up treatment) as pre-treatment and slow cool-down treatment (slow cool-down treatment) as post-treatment in the chemical strengthening process of glass. In another aspect, the heat treatment may include performing temperature rising, constant temperature, temperature dropping, and combinations thereof of the heat treatment object.

The preheating step (not shown) may be a step of preheating the glass to a temperature at which chemical strengthening through efficient ion substitution of the glass is performed before chemical strengthening of the glass. Through this, rapid temperature changes in the glass and resulting glass damage can be minimized, and efficient chemical strengthening can be performed.

The preheating step, such as the final heating temperature, may be at least about 300°C, or at least about 350°C, or at least about 400°C, or at least about 450°C, or at least about 500°C. The temperature increase in the preheating step may be done continuously or gradually, or may be done discontinuously by repeating constant temperature and temperature increase. The performance time of the preheating step may be at least about 100 minutes, or at least about 110 minutes, or at least about 120 minutes, or at least about 130 minutes, or at least about 140 minutes, or at least about 150 minutes.

The chemical strengthening step (S100) may be a step for imparting bending strength, impact resistance, heat resistance, etc. to glass through ion substitution with silicate-containing glass. The chemical strengthening step (S100) may be performed by immersing the glass in a strengthening solution. An example of a strengthening solution may be potassium nitrate (KNO ₃ ), but the present invention is not limited thereto.

The temperature in the chemical strengthening step (S100), such as the heating temperature of the chemical strengthening solution, may be about 300°C or higher, or about 350°C or higher, or about 400°C or higher, or about 450°C or higher, or about 500°C or higher. The strengthening step may be performed for about 30 minutes or less, or about 25 minutes or less, or about 20 minutes or less, or about 15 minutes or less, or about 10 minutes or less.

The slow cooling step (not shown) may be a step of gradually cooling the ion-substituted glass after chemical strengthening of the glass. Through this, rapid temperature changes in the glass and damage to the glass resulting from this can be minimized. Additionally, the subsequent cleaning process can be performed.

The slow cooling temperature, such as the final cooling temperature, is about 100°C or less, or about 90°C or less, or about 80°C or less, or about 70°C or less, or about 60°C or less, or about 50°C or less, or about 40°C or less, or It may be about 30°C or lower, or about 20°C or lower. The temperature decrease in the slow cooling step may be done continuously or gradually, or may be done discontinuously by repeating constant temperature and temperature decrease. The performance time of the slow cooling step may be about 30 minutes or less, or about 25 minutes or less, or about 20 minutes or less, or about 15 minutes or less, or about 10 minutes or less.

Then, a glass cleaning step (S200) may be performed. The glass cleaning step (S200) includes mounting the loading jig 60 on the mounting portion 350 of the cleaning chamber 14 (S210) and lowering the cover door 304 and the loading jig 60 together ( S220), cleaning the loading jig 60 by immersing it in a cleaning solution (S230), raising the cover door 304 and the loading jig 60 together (S240), and gas cleaning the glass (S230) S250) may be further included.

In another embodiment, the glass cleaning step (S200) and the glass drying step (S300) may be performed to remove foreign substances on the glass surface before the glass chemical strengthening step (S100).

First, referring further to FIGS. 13 and 14 , the loading jig 60 on which the glass is mounted is introduced from one side of the cleaning chamber 14, for example, one side in the first direction (X) (S210). The steps of inserting the loading jig 60 and mounting it on the mounting portion 350 may be performed using a robot arm (not shown).

Specifically, the robot arm (not shown) is lifted by hanging on the bar 63b of the loading jig 60 or the bar is held using the robot arm (not shown), and the two side walls of the mounting portion 350 are lifted. Insert the two loader protrusions 63a of the loading jig 60 between the plates 353b. At this time, the first protrusion 353c of the mounting portion 350 may be positioned spaced lower than the second protrusion 63c of the loading jig 60.

Then, the robot arm can be moved downward to place the second protrusion 63c of the loading jig 60 on the first protrusion 353c of the mounting unit 350. As described above, one second protrusion 63c may be mounted and fixed on the two first protrusions 353c. The robot arm can then release the grip state.

When using a robot arm as in this embodiment, the loading jig 60 can be easily inserted and withdrawn without a lift facility that penetrates the cleaning chamber 14 in the direction of gravity. In addition, the cover door 304 is configured to be lifted in the direction of gravity, so that the process area occupied by the glass chemical strengthening equipment including the cleaning chamber 14 can be reduced.

In some embodiments, in this step, the third injection nozzle 395 may begin spraying gas, such as compressed air. As described above, the gas sprayed by the third injection nozzle 395 forms an air curtain, and the loading jig 60 on which the glass immediately after chemical strengthening is exposed to external air, causing unintended chemical changes or chemical deterioration. What happens can be minimized.

Next, with further reference to FIG. 15, the cover door 304 is lowered using the lift 200 (S220). This step can be performed by shortening the length of the lift 200.

As described above, the cover door 304 includes a door plate 310 and a mounting portion 350, and the relative positions of the door plate 310 and the mounting portion 350 can be lowered together while being fixed. In addition, the loading jig 60 mounted on the mounting portion 350 can also be lowered together.

In some embodiments, at this stage, the third injection nozzle 395 may continue to spray gas, such as compressed air. Additionally, while the cover door 304 is lowered, the injection intensity or the gas injection amount of the third injection nozzle 395 may gradually decrease.

Next, with further reference to FIG. 16, the loading jig 60 on which the glass is mounted is completely immersed in the cleaning solution W to perform cleaning (S230). This step may be performed for a period of time of about 30 minutes or less, or about 25 minutes or less, or about 20 minutes or less, or about 15 minutes or less, or about 10 minutes or less. The cleaning liquid (W) may be distilled water or ion-free water. The glass can be immersed in the cleaning solution (W) to remove the reinforcing solution remaining on the glass surface.

Next, with further reference to FIG. 17, the cover door 304 is raised using the lift 200 (S240). This step can be performed by extending the length of the lift 200.

As described above, the cover door 304 includes a door plate 310 and a mounting portion 350, and the relative positions of the door plate 310 and the mounting portion 350 can be raised together while being fixed. In addition, the loading jig 60 mounted on the mounting portion 350 can also rise together.

In some embodiments, the first spray nozzle 190 may start spraying a liquid, such as a cleaning solution. By additionally spraying the cleaning liquid at high intensity on the glass taken out from the cleaning liquid (W), rapid changes in the conditions around the glass can be prevented, thereby improving the tempering quality and improving stain defects. As described above, the liquid sprayed by the first spray nozzle 190 may be heated to a predetermined temperature.

Also, in some embodiments, the third injection nozzle 395 may restart gas injection, such as compressed air.

Next, referring further to FIG. 18, gas injection (or liquid injection) such as compressed air is performed using the second injection nozzle 390 (S250). As described above, the gas (or liquid) sprayed by the second spray nozzle 390 may be discharged toward the glass loading jig 60. Additionally, the gas may be heated to a predetermined temperature.

By blowing the glass that has been secondarily cleaned using the first spray nozzle 190 using a strong gas or liquid discharged from the second spray nozzle 390, the problem of stain defects in the glass can be significantly improved. In an exemplary embodiment, the injection intensity of the second injection nozzle 390 may be greater than that of the first injection nozzle 190.

In some embodiments, the second injection nozzle 390 may start spraying gas after the cover door 304 is completely raised, or may start spraying gas while the cover door 304 is rising, as shown in FIG. 17 .

In some embodiments, the third injection nozzle 395 may continue to spray gas such as compressed air. Additionally, while the cover door 304 rises, the injection intensity or the gas injection amount of the third injection nozzle 395 may gradually increase.

Next, with further reference to FIG. 19, the loading jig 60 on which the glass is mounted is pulled out through one side of the cleaning chamber 14, for example, one side in the first direction (X). The step of detaching the loading jig 60 from the mounting portion 350 and withdrawing the loading jig 60 may be performed using a robot arm (not shown).

Then, the cleaned glass is completely dried in a separate drying chamber or in a room temperature atmosphere (S300). In some embodiments, drying of the cleaned glass may be performed prior to withdrawal from the cleaning chamber 14, such as in the state of FIG. 19.

As mentioned above, from the viewpoint of automation of glass chemical strengthening equipment, there can be various advantages when applying a robot arm rather than an overhead transport as a transfer equipment for the glass loading jig.

In particular, when each process step performed sequentially does not take a similar amount of time, but there is a significant difference in the time required for each process step, for example, the time required for the preheating step is greater than the time required for the strengthening step (S100), the slow cooling step, and the slow cooling step. /or about 5 times or more, or about 6 times or more, or about 7 times or more, or about 8 times or more, or about 9 times or more, or about 10 times or more, or about 11 times the time required in the cleaning step (S200) If it is more than double, or about 12 times more, the time required for the entire process may increase inefficiently due to logistics backlog.

To solve this problem, it may be considered to have a plurality of chambers used in a process step that takes a relatively long time, such as a preheating step. However, if each chamber is matched many-to-one rather than one-to-one, it is difficult to use overhead transport equipment, separate lifting equipment must be provided for each chamber, and the structure of the guide rail of the overhead transport becomes complicated, etc. problems may occur.

However, by applying a robot arm as in the present invention, process automation can be easily implemented even if the chambers used for each process step are matched many to one. Accordingly, unlike the prior art, the present invention proposes a new structure of the cleaning chamber 14 that can be applied when a robot arm is used without using an overhead transport facility.

Additionally, when a hinge structure is applied as the door structure of the cleaning chamber 14, smooth use of the robot arm may be substantially difficult due to interference with the robot arm having a height similar to that of the chamber. In particular, doors with a hinged structure occupy a large area due to the movable range of the door when opening and closing, which can lead to an increase in the size of the facility. However, as in the present embodiment, the cleaning chamber 14 includes a lifting cover door 304 that is lifted and lowered in the vertical direction, thereby avoiding interference with the robot arm and having the advantage of being able to strengthen a larger quantity of glass.

In addition, facilities implemented as overhead transport as well as facilities including lifting facilities coupled to the top of the facility may have limitations due to the size of the facility in terms of transportation, installation, or operation, but are located on the side of the cleaning chamber 14. Using the lifting cover door 304, which is raised and lowered using the arranged lift 200, has the advantage of simplifying the transportation of the equipment and enabling free installation or operation, thereby increasing the utilization of the cleaning equipment.

Although the description has been made above with a focus on embodiments of the present invention, this is merely an example and does not limit the present invention, and those skilled in the art will be able to understand the present invention without departing from the essential characteristics of the embodiments of the present invention. It will be apparent that various modifications and applications not exemplified above are possible.

Therefore, the scope of the present invention should be understood to include changes, equivalents, or substitutes of the technical ideas exemplified above. For example, each component specifically shown in the embodiments of the present invention can be modified and implemented. And these variations and differences in application should be construed as being included in the scope of the present invention as defined in the appended claims.

1: Glass chemical strengthening equipment
10: Cleaning chamber
20: heat treatment chamber
30: Reinforcement chamber
40: robot arm
101: Chamber body
200: lift
301: cover door

Claims (20)

A chamber body having an internal space; one or more lifts disposed at the edge of the chamber body and varying in length in the direction of gravity; and a cover door that opens and closes the internal space of the chamber body and is raised and lowered by the lift, including a door plate that seals the internal space of the chamber body and a mounting portion disposed on the bottom of the door plate. However,
When the cover door is open, the mounting portion is located outside the interior space,
A glass cleaning chamber, wherein when the cover door is closed, the mounting portion is located inside the interior space. delete According to paragraph 1,
The relative positions of the mounting portion and the door plate are fixed,
A glass cleaning chamber in which the position of the mounting portion in the direction of gravity changes as the lift moves up and down. According to paragraph 1,
The mounting part,
A mounting rod extending downward from the door plate in the direction of gravity,
An extension plate extending horizontally from the lower end of the mounting rod,
A side wall plate protruding downward from an end of the extension plate, and
A glass cleaning chamber comprising a plurality of first protrusions protruding from an inner surface of the side wall plate. According to paragraph 1,
The chamber main body is a glass cleaning chamber including a plurality of first spray nozzles disposed on the inner wall and spraying liquid toward the interior space. According to clause 5,
The spraying direction of the first spray nozzle is tilted downward,
A glass cleaning chamber in which the angle between the spray direction and the inner wall is 20 to 90 degrees. According to paragraph 1,
The cover door is,
The glass cleaning chamber is disposed on the bottom of the door plate and further includes at least one second spray nozzle that sprays gas or liquid downward. In clause 7,
The cover door is,
It further includes at least one third injection nozzle disposed on the bottom of the door plate, disposed at an edge of the second injection nozzle, and configured to spray gas,
From a plan view, the second injection nozzle overlaps the internal space of the chamber body,
From a plan view, the third spray nozzle is a glass cleaning chamber that does not overlap with the internal space of the chamber body. According to clause 8,
The third injection nozzle is provided in plural numbers,
A glass cleaning chamber in which, when viewed from a plan view, the plurality of third spray nozzles are arranged to only partially surround an interior space of the chamber body. According to paragraph 1,
A glass cleaning chamber further comprising a first sensor and a second sensor for detecting the position of the cover door or the lift, the first sensor and the second sensor being spaced apart from each other in the direction of gravity. According to clause 10,
It further includes a control unit that controls the lift,
The control unit controls the rising or falling speed of the lift based on the position information of the cover door or the lift detected by the first sensor and the second sensor. According to clause 11,
The glass cleaning chamber further includes a guide post that provides a space in which the first sensor and the second sensor are disposed, extends in the direction of gravity, and performs a guide function of the cover door. According to clause 11,
A glass cleaning chamber in which the positions of the first sensor and the second sensor do not change when the lift is raised or lowered. A method of chemical strengthening of glass comprising the step of chemically strengthening the glass by immersing it in a chemical strengthening solution and then cleaning the glass in a cleaning chamber,
It is a cover door that opens and closes the chamber body and the internal space of the chamber body, and is performed using a cleaning chamber including a cover door that is raised and lowered in the direction of gravity,
The cleaning step of the glass is,
The method includes mounting a glass loading jig on which glass is mounted on a mounting portion of the cover door, lowering the cover door to immerse the glass loading jig in a cleaning solution, and raising the cover door to remove the glass loading jig. It includes the step of taking out from the cleaning liquid,
Insertion of the glass loading jig is performed in a first direction,
The mounting portion includes a plurality of side wall plates extending in the first direction and spaced apart in a second direction intersecting the first direction, and a plurality of first protrusions protruding from the inner surface of the side wall plates,
The glass loading jig includes a loader main body, a plurality of loader protrusions disposed on the upper surface of the loader main body, a plurality of loader protrusions extending in the first direction and spaced apart in the second direction, and an outer surface of the loader protrusion. Comprising a plurality of second protruding protrusions,
One second protrusion is placed on top of the plurality of first protrusions.
Methods for chemical strengthening of glass. delete According to clause 14,
The step of removing the glass loading jig from the cleaning solution is:
A method of chemically strengthening glass, which is performed at least partially simultaneously with the step of spraying liquid onto the glass loading jig using a first spray nozzle disposed on the inner wall of the chamber body. According to clause 16,
The step of removing the glass loading jig from the cleaning solution,
Performed at least partially simultaneously with the step of spraying gas to the glass loading jig using the second spray nozzle of the cover door,
The method of chemically strengthening glass, wherein the second injection nozzle overlaps the internal space of the chamber body. According to clause 14,
A method of chemically strengthening glass, detecting the position of the cover door or a lift that raises and lowers the cover door, and controlling the speed of raising or lowering the cover door based on this. According to clause 14,
The step of mounting the glass loading jig on the holder, lowering the cover door, or raising the cover door,
Performed at least partially simultaneously with the step of forming an air curtain using the third spray nozzle of the cover door,
The third spray nozzle is non-overlapping with the internal space of the chamber body. delete

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