KR102477223B1 - Electrical test apparatus - Google Patents

Abstract

An electrical testing apparatus of the present invention includes a test apparatus for applying an electrical signal to a device under test; a DUT frame seated on the upper side of the test device and having an accommodation space in which a test socket can be installed; And a coupling means for detachably coupling the DUT frame to the test device,
The coupling means may include a locking means installed in the test device; and a locking means installed on the DUT frame and moving between a fixing position in which the DUT frame is fixed to the test apparatus by being caught by the hooking means, and a releasing position in which the hooking is released from the hooking means and the DUT frame is detachable from the test apparatus. It relates to an electrical inspection device characterized in that it comprises.

Description

Electrical test apparatus {Electrical test apparatus}

The present invention relates to an electrical testing device, and more particularly, to an electrical testing device capable of easily separating and coupling a DUT frame to a test device.

In general, surface-mounted semiconductor devices such as IC devices or IC packages are composed of LGA (Land Grid Array), BGA (Ball Grid Array), CSP (Chip Sized Package) types, etc., before they are shipped to customers. Electrical tests are performed to verify reliability.

The electrical inspection is to inspect the semiconductor device for defects before applying the semiconductor device to the corresponding electronic device.

In such an electrical test, after the semiconductor device is electrically connected to a test device, a predetermined electrical signal is applied from the test device, and then a signal output from the semiconductor device is recognized to determine whether or not a defect is present.

In this case, the semiconductor device does not directly contact the test device, but is electrically connected via a test socket, and when a signal is applied from the test device, the signal is transmitted to the semiconductor device via the test socket.

At this time, a DUT (Device Under Test) frame is provided to fix the test socket to the test device. After installing the test socket on the DUT frame, screwing the DUT frame to the test device makes contact with the test socket.

FIG. 1 is a view explaining how a test device 20 constituting a conventional electrical inspection device 10 and a DUT frame 30 are coupled.

In the test device 20, in a state where the DUT board 21 is disposed in the center, a square frame-shaped shim 22 (SHIM) is provided around the DUT board 21, and a base frame 23 is provided under the DUT board 21. place Meanwhile, screw grooves 22a for fixing the DUT frame 30 are provided at each corner of the shim 22 (SHIM).

In the DUT frame 30, an accommodation space in which a test socket can be mounted is provided at the center thereof, and screw holes 31 are formed at each corner of the edge. With the test socket mounted inside the DUT frame 30, after the DUT frame 30 is seated on the test device 20, the DUT frame 30 and the test device 20 are connected by using the fixing screw 40. ) are fixedly coupled to each other. At this time, the fixing screw 40 passes through the screw hole 31 of the DUT frame 30 and then fastens to the screw groove of the test device 20, thereby fixing the DUT frame 30 to the test device 20. .

Such a conventional electrical inspection device has the following problems.

Frequent electrical testing of semiconductor devices causes problems with the DUT board and socket for testing. In the case of sockets for inspection, foreign substances may be transferred from semiconductor devices and remain on the surface, or compressive performance may deteriorate during frequent inspections. Performance deteriorates and replacement is required.

In addition, even in the case of a DUT board, abnormalities may occur in the board itself due to heat or other various problems during numerous inspection processes.

In this way, when the inspection socket or the DUT board needs to be inspected, the operator has to remove four fixing screws one by one, which causes inconvenience. After the inspection or replacement work is completed, it is inconvenient to have to fasten the four screws one by one.

In this way, there is a disadvantage in that it takes a lot of time to disassemble and combine the four fixing screws, and a separate tool is required to disassemble and combine the fixing screws.

The electrical inspection apparatus of the present invention for solving the above-described technical problem has a technical purpose to provide an electrical inspection apparatus provided with a coupling means that is easy to disassemble and assemble.

An electrical testing apparatus of the present invention for achieving the above object includes a test apparatus for applying an electrical signal to a device under test;

a DUT frame seated on the upper side of the test device and having an accommodation space in which a test socket can be installed; and

Including coupling means for detachably coupling the DUT frame to the test device,

The coupling means,

Catch means installed in the test device; and

A locking means installed on the DUT frame and moving between a fixing position in which the DUT frame is fixed to the test device by being caught by the hanging means and a release position in which the hanging means is released from the DUT frame and the DUT frame can be separated from the test device. do.

In the electrical inspection device,

The locking means can be moved between a fixed position and a release position in a sliding manner.

In the electrical inspection device,

The test device,

It consists of a DUT board and a support frame supporting the DUT board,

The engaging means may be fixed to the support frame.

In the electrical inspection device,

The locking means,

A locking body disposed on the DUT frame and movable between a fixed position and a release position;

A guide member for guiding the movement direction of the locking body;

It may include a fixing means that allows the locking body to be temporarily stopped at a fixed position and a release position.

In the electrical inspection device,

In the locking body,

A hook portion may be provided to be hooked to the hooking means.

In the electrical inspection device,

The fixing means is

Including a ball plunger installed in the locking body,

A groove portion may be formed inside the DUT frame to allow the ball plunger to be fitted in a fixed position and a release position, respectively.

In the electrical inspection device,

The ball plunger may include a ball that protrudes from the locking body and comes into contact with the groove, and a spring that elastically supports the ball.

In the electrical inspection device,

The hanging means,

A fixture protruding upward from the test device and having a locking jaw formed thereon,

The locking body may be fixed in position by being caught on the chin of the fixture.

In the electrical inspection device,

The fixing body may be a fixing bolt having a bolt head on an upper portion and a lower portion screwed to the test device.

In the electrical inspection device,

The DUT frame has a fastening groove with an open lower portion formed therein to accommodate the bolt head therein, and the locking body can at least partially close the inlet of the fastening groove so that the bolt head does not come out of the fastening groove at a fixed position.

The electrical inspection apparatus according to an embodiment of the present invention has a DUT frame provided with a locking means that is detachably coupled to the locking means of the test device, so that disassembly is easy and time is saved.

In addition, the electrical inspection device according to an embodiment of the present invention is configured so that the locking means can be coupled and separated while the locking means is slidably moved, so there is an advantage that disassembly and assembly can be performed without a separate tool.

1 is an exploded perspective view of a conventional electrical inspection device;
Figure 2 is a plan view of Figure 1;
3 is a view showing a state in which a DUT frame and a test device of the electrical inspection device of FIG. 1 are coupled to each other;
Figure 4 is an exploded perspective view of an electrical inspection device according to an embodiment of the present invention.
5 is a perspective view showing a rear surface of the DUT frame in FIG. 4;
6 is an exploded perspective view of the DUT frame and locking means of FIG. 5;
7 is an enlarged view of a part to which a locking means is coupled in the DUT frame in FIG. 6;
8 is a view showing a state in which the locking means is in a release position;
Fig. 9 is a sectional view of IX-IX of Fig. 8;
10 is a XX-X cross-sectional view of FIG. 8;
11 is a view showing a state in which the locking means is in a fixed position.
12 is a sectional view taken along line XII-XII of FIG. 11;
13 is a cross-sectional view taken along line XIII-XIII of FIG. 11;

Embodiments of the present disclosure are illustrated for the purpose of explaining the technical idea of the present disclosure. The scope of rights according to the present disclosure is not limited to the specific description of the embodiments or these embodiments presented below.

All technical terms and scientific terms used in this disclosure have meanings commonly understood by those of ordinary skill in the art to which this disclosure belongs, unless otherwise defined. All terms used in this disclosure are selected for the purpose of more clearly describing the disclosure and are not selected to limit the scope of rights according to the disclosure.

Expressions such as "comprising", "including", "having", etc. used in this disclosure are open-ended terms that imply the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included. (open-ended terms).

Expressions in the singular form described in this disclosure may include plural meanings unless otherwise stated, and this applies equally to expressions in the singular form described in the claims.

In the present disclosure, when an element is referred to as being “connected” or “connected” to another element, that element is directly connectable or connectable to the other element, or a new It should be understood that it can be connected or connected via other components.

The direction indicator of "upper" used in the present disclosure is based on the direction in which the test socket is located relative to the test device, and the direction indicator of "lower" means the opposite direction of the upper direction.

The directive of "fixed position" used in the present disclosure means the position of the locking means when the DUT frame is fixed to the test device when the DUT frame is seated on the test device, and the "release position" means the position of the DUT frame in the test device. It means the position of the locking means in a detachable state.

Embodiments are described with reference to examples shown in the accompanying drawings. In the accompanying drawings, identical or corresponding elements are given the same reference numerals. In addition, in the description of the following embodiments, overlapping descriptions of the same or corresponding components may be omitted. However, omission of a description of a component does not intend that such a component is not included in an embodiment.

Embodiments described below and examples shown in the accompanying drawings represent an electrical testing apparatus for electrical connection of two electronic devices. In this case, one of the two electronic devices may be a testing device, and the other of the two electronic devices may be a device to be tested by the testing device. Accordingly, the DUT frame of the embodiments may be used to fix a test socket for electrically connecting a device under test with a test device. For example, the DUT frame according to the embodiment may be used for a final electrical test of the device under test in a later process of manufacturing the device under test. However, examples of inspections to which the electrical inspection devices of the embodiments are applied are not limited to the above inspections.

In an embodiment of the present invention, the device to be tested may be a semiconductor package, but is not limited thereto. A semiconductor package is a semiconductor device in which a semiconductor IC chip, a plurality of lead frames, and a plurality of terminals are packaged in a hexahedral shape using a resin material. The semiconductor IC chip may be a memory IC chip or a non-memory IC chip. As the terminal, a pin, a solder ball or the like can be used.

The inspection apparatus may inspect electrical characteristics, functional characteristics, operating speed, and the like of the device under test. The test device may have a plurality of terminals capable of outputting an electrical test signal and receiving a response signal in a board where the test is performed.

The test socket is inserted into the DUT frame and fixed together with the DUT frame when the DUT frame is fixed to the test device. The lower end of the test socket is connected to the terminal of the test device and the upper portion provides a space into which the device to be tested can be inserted. Since the test socket is the same as the prior art, a detailed description thereof will be omitted in the present invention. .

An electrical inspection device 100 according to an embodiment of the present invention is configured to include a test device 110, a DUT frame 120, and a coupling means 130.

The test apparatus 110 is for applying an electrical signal to a device under test and is composed of a DUT board 111 and a support frame 112 .

The DUT board 111 has a plurality of terminals formed on the upper surface to be connected to a test socket, and is formed in a flat plate shape. The DUT board 111 may apply electrical signals to the device under test. Also, the DUT board 111 may be configured to receive an electrical signal from a device under test. Since this DUT board 111 is a common technology in the electrical inspection device 100, a detailed description thereof will be omitted.

The support frame 112 includes a square frame-shaped shim 1121 (SHIM) surrounding the edge of the DUT board 111 and a base frame for supporting the DUT board 111 and the shim 1121 from a lower side. (1122). The shim 1121 surrounds the centrally located DUT board 111 and is made of a metal material.

A bolt hole through which the fixing bolt 1311 can be coupled is formed at the edge of the shim 1121, and a total of four bolt holes, one for each edge of the shim 1121, are provided.

The base frame 1122 is in close contact with the lower surface of the DUT board 111 and the lower surface of the shim 1121, has a rectangular plate shape, and is configured to support the DUT board 111 and the shim 1121.

The DUT frame 120 is seated on the upper side of the test device 110 and has an accommodation space 121a in which a test socket can be installed. The DUT frame 120 has a rectangular shape as a whole and has a predetermined thickness. A central hole is formed in the center of the DUT frame 120, and an accommodating space 121a in which a test socket can be accommodated is formed below the central hole. The device to be tested is configured to be inserted into the test socket through the central hole.

A fastening hole 122 penetrating in the vertical direction is provided at the edge of the DUT frame 120 . The fastening hole 122 is a hole of a rectangular shape as a whole and is configured such that the locking means 132 is disposed therein.

A first hole 123 to which the guide member 1322 of the locking means 132 can be coupled is formed on the lower surface of the DUT frame 120 as a periphery of the fastening hole 122, and the first hole 123 Four are provided around the silver fastening hole 122 .

In addition, a plurality of grooves 124 are formed on the inner surface of the locking groove 125 to allow the ball plunger to be inserted between a fixed position and a release position, respectively. These grooves 124 are formed at a position where the locking body 1321 is fitted to the ball plunger when it is in a fixed position and at a position where it is fitted to the ball plunger when the locking body 1321 is in a release position.

In the DUT frame 120, a fastening groove 125 is formed at a position corresponding to the bolt hole of the shim 1121. The fastening groove 125 is configured to accommodate the head of the fixing bolt 1311 fixed to the bolt hole of the shim 1121. The fastening groove 125 has a shape and size corresponding to the head of the fixing bolt 1311.

The coupling means 130 is for detachably coupling the DUT frame 120 to the test device 110 .

This coupling means 130 is configured to include a locking means 131 and a locking means (132).

The locking means 131 is coupled to the test device 110 so that it can be fixed by being caught by the locking means 132 . Specifically, the locking means 131 functions to fix the DUT frame 120 so that it is not separated from the test device 110 by being caught by the locking means 132 when the locking means 132 is moved to a fixed position.

The engaging means 131 is inserted into the bolt hole of the shim 1121 in the test device 110 and fixed in position. Specifically, it is a fixture protruding upward from the shim 1121 of the test device 110 and having a locking jaw formed thereon. This fixing body has a bolt head 1311a on the upper part and a pillar part 1311b on the lower part, and the pillar part 1311b may be a fixing bolt 1311 screwed into a bolt hole.

When the DUT frame 120 is seated on the test device 110, the bolt head 1311a of the fixing bolt 1311 is configured to be accommodated in the fastening groove 125.

The locking means 132 is installed on the DUT frame 120 and is caught by the hooking means 131 to secure the DUT frame 120 to the test device 110, and is hooked from the hooking means 131. This is to move between release positions where the DUT frame 120 can be separated from the test device 110 by being released.

This locking means 132 is configured to include a locking body 1321, a guide member 1322 and a fixing means (1323).

The locking body 1321 is inserted into the fastening hole 122 of the DUT frame 120 and is configured to slide within the fastening hole 122 . Specifically, the locking body 1321 is to be slidably moved between the release position (position of FIG. 8) and the fixed position (position of FIG. 11) within the fastening hole 122.

A guide groove 1321a extending in one direction is formed on the lower surface of the locking body 1321. A guide member 1322 is inserted into the guide groove 1321a to allow the locking body 1321 to slide along the guide member 1322 .

One side of the locking body 1321 is formed with a hook portion 1321b extending in a direction toward the fixing bolt 1311. The hook portion 1321b slides along with the locking body 1321 and is configured to pass through the lower surface of the bolt head 1311a of the fixing bolt 1311 and be inserted into the pillar portion 1311b of the fixing bolt 1311 at a fixed position. And, in the releasing position, it comes out of the pillar part 1311b and is configured to be disposed at a position away from the lower surface of the bolt head 1311a. Specifically, the locking body 1321 is configured to close at least a portion of the inlet of the fastening groove 125 so that the bolt head 1311a does not escape from the fastening groove 125 in the fixed position.

The guide member 1322 guides the movement direction of the locking body 1321. Specifically, the locking body 1321 is configured to guide the moving direction of the guide member 1322 sliding between the fixed position and the release position.

The guide member 1322 is composed of a pair of guide rods 1322a and screws 1322b disposed at both ends of the guide rods 1322a and coupled to the first hole 123 of the DUT frame 120. . The guide rod 1322a whose position is fixed by the screw 1322b is inserted into the guide groove 1321a of the locking body 1321 to guide the moving direction of the locking body 1321.

The fixing means 1323 is to allow the locking body 1321 to pause between a fixed position and a release position. This fixing means 1323 includes a ball plunger installed on the locking body 1321. The ball plunger includes a plunger body 1323a in which a ball 1323b and a spring 1323c are inserted and one side is opened, and a plunger body 1323a that slides in and a part can protrude through the opening. It consists of a ball 1323b and a spring 1323c that elastically supports the ball 1323b.

These ball plungers are formed on both sides of the locking body 1321, and the ball 1323b is inserted into the groove 124 and brought into contact so that the locking body 1321 can be temporarily stopped at the fixed position and the release position. .

The electrical inspection device 100 according to the present invention has the following operational effects.

If a problem occurs in the test socket or test device 110 disposed inside the DUT frame 120, the DUT frame 120 is first separated and then the test socket or test device 110 is inspected.

When the DUT frame 120 separated from the test device 110 is reassembled in this process, as shown in FIG. 4 , the DUT frame 120 is seated on the upper side of the test device 110 . At this time, the bolt heads 1311a of the fixing bolts 1311 provided at each edge of the test device 110 are inserted into the fastening grooves 125 of the DUT frame 120.

At this time, as the locking means 132 is shown in FIGS. 8 to 10, the locking body 1321 is disposed in the release position, and at this time, the hook portion 1321b of the locking body 1321 is fastened to the groove 125. ) Is spaced apart from the fastening groove 125 so as not to interfere with the inlet.

In order to fix the DUT frame 120 to the test device 110, the locking body 1321 is moved to a fixing position as shown in FIGS. 11 to 13. At this time, the locking body 1321 moves toward the fixed position in a state guided by the guide member 1322. When the locking body 1321 is moved to the fixed position, the hook part 1321b closes at least a portion of the entrance of the fastening groove 125 and is inserted into the pillar part 1311b of the fixing bolt 1311. Along with this, the head of the fixing bolt 1311 is supported without being separated from the fastening groove 125.

Meanwhile, since the locking body 1321 is disposed at each corner of the DUT frame 120, the fixing work is completed by moving the four locking bodies 1321 of the operator to the fixed position.

The electrical inspection device according to the present invention eliminates the problem of fixing the DUT frame and the test device in the existing bolt fixing method, and enables easy fixation and separation by sliding the locking means, thereby reducing work time and work efficiency. has the advantage of maximizing

In addition, the locking means can be separated and fixed by sliding the locking means installed on the DUT frame without the need for a separate tool, so that the work can be convenient.

In addition, the present invention provides the ball plunger so that the locking means can temporarily stop at the fixed position and the release position, so there is an advantage that the position can be maintained without being separated from the locking position and the release position.

In the above-described embodiment, the sliding movement of the locking means in the surface direction of the DUT frame has been exemplified, but it is not limited thereto, and it is also possible to engage the locking means by sliding in the vertical direction.

In addition, it is also possible to detachably hang on the hooking means by utilizing the pivoting means that rotates and moves in a hinged manner rather than a sliding manner as a locking means.

Although the present invention has been described in detail with preferred embodiments above, the present invention is not necessarily limited to these embodiments and may be variously modified and implemented without departing from the technical spirit of the present invention.

100 ... electrical inspection device 110 ... test device
111 ... DUT board 112 ... support frame
1121 ... shim 1122 ... base frame
120 ... DUT frame 121 ... center hole
121a ... accommodation space 122 ... fastening hole
123... first hole 124... groove
125 ... fastening groove 130 ... coupling means
131... fixing bolt 1311... fixing bolt
1311a ... bolt head 1311b ... column
132 ... locking means 1321 ... locking body
1321a ... guide groove 1321b ... hook part
1322 ... guide member 1323 ... fixing means
1323a ... plunger body 1323b ... ball
1323c...spring

Claims (10)

a test device for applying an electrical signal to a device under test;
a DUT frame seated on the upper side of the test device and having an accommodation space in which a test socket can be installed; and
Including coupling means for detachably coupling the DUT frame to the test device,
The coupling means,
A locking means fixedly installed in the test device and protruding toward the DUT frame; and
Including a locking means installed to be slidable between a fixed position and a release position on the DUT frame,
The locking means,
At the fixed position, the DUT frame is fixed to the test device by being hooked on the hanging means protruding from the DUT frame,
At the releasing position, the hooking means is released from the hooking means so that the DUT frame can be separated from the test device so that the DUT frame can be separated from the test device without being hooked on the hooking means. delete According to claim 1,
The test device,
It consists of a DUT board and a support frame supporting the DUT board,
The engaging means is an electrical inspection device, characterized in that fixedly installed on the support frame. According to claim 1,
The locking means,
A locking body disposed on the DUT frame and movable between a fixed position and a release position;
A guide member for guiding the movement direction of the locking body;
An electrical inspection device comprising a fixing means for allowing the locking body to temporarily stop at a fixed position and a release position. According to claim 4,
In the locking body,
An electrical inspection device, characterized in that the hook portion is provided so that the hook type can be hooked to the hook. According to claim 4,
The fixing means is
Including a ball plunger installed in the locking body,
An electrical inspection device characterized in that a groove portion is formed inside the DUT frame to allow the ball plunger to be fitted in a fixed position and a release position, respectively. According to claim 6,
The ball plunger is an electrical inspection device, characterized in that consisting of a ball that protrudes from the locking body and comes into contact with the groove, and a spring that elastically supports the ball. According to claim 4,
The hanging means,
A fixture protruding upward from the test device and having a locking jaw formed thereon,
The electrical inspection device, characterized in that the locking body is caught on the locking jaw of the fixture and fixed in position. According to claim 8,
The electrical inspection device, characterized in that the fixing body is a fixing bolt having a bolt head on the upper portion and a lower portion screwed to the test device. According to claim 9,
The DUT frame is formed with a fastening groove with an open bottom to accommodate the bolt head therein, and the locking body at least partially closes the inlet of the fastening groove so that the bolt head does not escape from the fastening groove in the fixed position. electrical inspection device.

Images