KR102141601B1 - All in one optical device - Google Patents

All in one optical device Download PDF

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Publication number
KR102141601B1
KR102141601B1 KR1020180086802A KR20180086802A KR102141601B1 KR 102141601 B1 KR102141601 B1 KR 102141601B1 KR 1020180086802 A KR1020180086802 A KR 1020180086802A KR 20180086802 A KR20180086802 A KR 20180086802A KR 102141601 B1 KR102141601 B1 KR 102141601B1
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South Korea
Prior art keywords
light
sample
measurement
optical
incident
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KR1020180086802A
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Korean (ko)
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KR20200011836A (en
Inventor
김홍승
김이종
김건희
김승현
명태식
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한국기초과학지원연구원
한밭대학교 산학협력단
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements

Abstract

The present invention relates to an integrated optical device, wherein the integrated optical device includes a light source unit sequentially outputting first and second incident light having a predefined wavelength and output range; An incidence unit forming an incidence path through which the first and second incident light enters the measurement object; A first light receiving unit that receives the first measurement light reflected from the measurement object by the first incident light and outputs it to a shape measurement device; And a second light receiving unit which receives the second measurement light output from the measurement object by the second incident light and outputs it to the component analysis device.

Description

All-in-one optical device

The present invention relates to an all-in-one optical device, and more specifically, a device capable of performing qualitative and quantitative analysis of elements included in a sample and measuring the shape of a sample is integrally manufactured in a compact manner to enable a low-cost system configuration. It relates to an integrated optical device.

In general, the plasma generated during laser irradiation emits light of a specific wavelength depending on the material, so that the light can be collected to analyze the components of the material qualitatively or quantitatively.

A device that performs qualitative or quantitative analysis of a sample by irradiating a laser in this way has been commercialized.

On the other hand, an apparatus for measuring the shape of a sample by imaging a light reflected from the sample by a camera by irradiating a laser has been developed and used.

In Korean Patent Publication No. 10-1423988 (Patent Document 1), generating a plasma by irradiating a laser beam to a sample containing an element to be measured and obtaining a spectral spectrum generated from the plasma; Obtaining a fit curve of the remaining region minus the peak to be measured from the spectral spectrum; Separating the curve of the peak to be measured by subtracting the fit curve from the spectral spectrum; A method of quantitative analysis of the element to be measured in a sample comprising calculating a peak intensity from a target peak curve separated from the fit curve and obtaining a concentration ratio of the element to be measured at a ratio of the specific peak intensity. It is disclosed.

Patent Document 1 can perform quantitative analysis of elements contained in a sample, but has a disadvantage in that a separate device is required to measure the shape of the sample.

: Korean Registered Patent Publication No. 10-1423988

The present invention has been devised in view of the above points, the purpose of which is an integrated optical device in which a device capable of measuring the shape of a sample and performing qualitative and quantitative analysis of elements contained in a sample is compactly integrated. To provide.

In order to achieve the above object, the integrated optical device according to an embodiment of the present invention, the light source unit for sequentially outputting the first and second incident light having a predetermined wavelength and output range;

An incidence unit forming an incidence path through which the first and second incident light enters the measurement object;

A first light receiving unit that receives the first measurement light reflected from the measurement object by the first incident light and outputs it to a shape measurement device; And

And a second light receiving unit receiving the second measurement light output from the measurement object by the second incident light and outputting it to the component analysis device.

Here, the light source unit,

And a light modulating device that outputs any one of the first and second incident light, and modulates the first incident light as a second incident light or modulates the second incident light as a first incident light.

In addition, the integrated optical device is characterized in that the first light-receiving path through which the first measurement light is incident on the shape-measuring device is configured such that at least a portion overlaps with the incident path.

In addition, the integrated optical device is characterized in that the second light receiving path through which the second measurement light enters the component analysis device is configured to be formed independently of the first light receiving path.

In addition, the integrated optical device is the integrated optical device,

At least a portion of the optical member included in the incident portion is configured therein, and at least a part of the incident path further comprises a housing formed therein.

In addition, the integrated optical device is configured independently of the housing, an optical fiber for outputting the second measurement light to the component analysis device; And

And a light guide device formed on an end side of the housing to receive the second measurement light output from the measurement object and guide the optical fiber to the optical fiber.

An integrated optical device according to an embodiment of the present invention, a laser light source for outputting a first laser light having a first power;

A laser light modulator for modulating the first laser light having the first power output from the laser light source and outputting a second laser light having a second power;

A beam splitter that transmits the first and second laser light or reflects light reflected from a sample;

An objective lens irradiating the sample with the first and second laser light transmitted from the beam splitter;

A camera which acquires the image of the sample by receiving the first laser light reflected from the sample through the objective lens and measuring the shape of the sample through a first path reflected by the beam splitter;

A ring light guide for condensing light emitted from the plasma generated from the sample with the second laser light;

An optical fiber that is optically coupled to the ring light guide and detects light condensed in the ring light guide; And

It characterized in that it comprises; a spectrometer for measuring the spectral spectrum by receiving the light emitted from the plasma generated from the sample through the ring light guide and the second path transmitted to the optical fiber.

In addition, the integrated optical device is characterized in that the first path and the second path are spaced apart.

Further, in the integrated optical device, the ring light guide is made of glass,

The ring light guide has a donut shape,

The ring light guide includes an empty core air layer; And an annular glass layer surrounding the core air layer.

In addition, in the integrated optical device, an optical fiber coupling hole is formed in the glass layer of the ring optical guide region coupled with the optical fiber,

The optical fiber coupling hole is made of a structure that communicates from the outside of the glass layer to the core air layer, and the optical fiber is inserted into the optical fiber coupling hole to be optically coupled so that the end of the optical fiber is exposed to the core air layer.

According to the present invention, there is an advantage that a low-cost system can be constructed by integrally manufacturing a device capable of measuring the shape of a sample and performing qualitative and quantitative analysis of elements contained in a sample.

That is, the present invention combines UV microscopy and laser burst spectroscopy (LIBS) to measure the shape with nanometer-level resolution, while simultaneously analyzing the components of the sample, and controlling the output of the UV light source in real time. It is possible to carry out shape measurement and qualitative and quantitative analysis for Korean.

1 is a configuration diagram of an integrated optical device according to the present invention,
2 is a cross-sectional view of a ring light guide applied to the integrated optical device according to the present invention,
3A and 3B are cross-sectional views for explaining an example method in which an optical fiber is coupled to a ring optical guide applied to an integrated optical device according to the present invention,
4 is a view for explaining the path of the first laser light for the shape analysis of the sample in the integrated optical device according to the present invention,
5 is a view for explaining the path of the second laser light for quantitative and qualitative analysis of the sample in the integrated optical device according to the present invention,
6 is a view for explaining a path of light emitted from a plasma generated from a sample according to the present invention;
7 is a partial perspective view for explaining a path of light emitted from a plasma generated from a sample according to the present invention;
8A and 8B are photographs of samples taken to analyze the shape of a sample in the integrated optical device according to the present invention;
9 is a graph of quantitative and qualitative analysis results of neodymium contained in a sample in the integrated optical device according to the present invention,
10 is a graph of quantitative and qualitative analysis results of samarium contained in a sample in the integrated optical device according to the present invention.

The above objects, other objects, features and advantages of the present invention will be readily understood through the following preferred embodiments related to the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided to ensure that the disclosed contents are thorough and complete and that the spirit of the present invention is sufficiently conveyed to those skilled in the art.

In the present specification, when terms such as first and second are used to describe elements, these elements should not be limited by these terms. These terms are only used to distinguish one component from another component. The embodiments described and illustrated herein also include its complementary embodiments.

In the present specification, the singular form also includes the plural form unless otherwise specified in the phrase. As used herein,'comprise' and/or'comprising' does not exclude the presence or addition of one or more other components.

In the present specification, if the description is made before describing the embodiment, there may be various methods for implementing the configuration of the claims of the present invention, and the following embodiment provides one example of implementing the configuration in the claims. Reveal that it is intended to be shown. Therefore, the scope of the present invention is not limited by the following examples.

Hereinafter, the present invention will be described in detail with reference to the drawings. In describing the following specific embodiments, various specific contents have been prepared to more specifically describe and understand the invention. However, a reader who has knowledge in this field to understand the present invention can recognize that it can be used without these various specific contents. It should be noted that, in some cases, parts that are commonly known in describing the invention and that are not significantly related to the invention are not described in order to avoid confusion in describing the invention.

1 is a configuration diagram of an integrated optical device according to the present invention, FIG. 2 is a cross-sectional view of a ring optical guide applied to the integrated optical device according to the present invention, and FIGS. 3A and 3B are ring optical guides applied to the integrated optical device according to the present invention It is a cross-sectional view for explaining an example method of the optical fiber is coupled to.

Referring to FIG. 1, the integrated optical device according to the present invention includes a laser light source 100 (light source unit), a laser light modulating unit 110, a mirror 120, a beam splitter 130, an objective lens 140, and a camera ( 160), a ring light guide 200, an optical fiber 300, and a spectrometer (spectrometer) 150.

The laser light source 100 outputs a first laser light having a first output.

The laser light modulator 110 modulates a first laser light having a first output (power) output from the laser light source 100 and outputs a second laser light having a second output.

Here, the first laser light having a first output is for measuring the shape of the sample 500, and the second laser light having a second output is for quantitative/quantitative component analysis in the sample 500.

At this time, the wavelengths of the first and second laser light are 193 nm, the first output is less than 0.1 mJ, and the second output is preferably 10 mJ or more.

Then, the mirror 120 reflects at a predetermined angle to change the traveling path of the first and second laser light.

That is, in the present invention, the traveling paths of the first and second laser lights emitted from the laser light source 100 and the laser light modulator 110 are vertically changed by the mirror 120 so that they can be incident on the sample 500. By doing so, the laser light source 100 and the objective lens 140 are arranged in an'A' shape to manufacture a compact all-in-one optical device.

The beam splitter 130 transmits the first and second laser light or reflects the light reflected from the sample 500 toward the camera 160.

The objective lens 140 irradiates the sample 500 with the first and second laser light transmitted from the beam splitter 130.

The camera 160 acquires an image of the sample 500 by imaging light reflected from the sample 500 to measure the shape of the sample 500.

Here, the camera 160 can use a CCD camera, it is possible to shoot a real-time high-resolution image.

The ring light guide 200 is formed in a donut shape and condenses light emitted from plasma generated on the surface of the sample 500.

The ring light guide 200 is employed to detect light emitted from the plasma generation region in a path different from the path where the second laser light is incident on the surface of the sample 500.

The material of the ring light guide 200 is preferably glass.

As shown in FIG. 2, the ring light guide 200 is provided with an empty core air layer 210 and an annular glass layer 220 surrounding the core air layer 210.

Therefore, the light incident on the annular glass layer 220 of the ring light guide 200 is refracted and transmitted to the core air layer 210, is totally reflected in the core air layer 210, exits the optical fiber 300, and becomes a LIBS signal. .

Here, the optical fiber 300 is optically coupled to the ring optical guide 200, and thus the optical coupling of the optical fiber 300 and the ring optical guide 200 can be performed by various methods and structural fastening methods.

In the present invention, a method of coupling the optical fiber 300 to the ring light guide 200 applied to the integrated optical device may be applied with reference to FIGS. 3A and 3B.

That is, the optical fiber coupling hole 221 is formed in the glass layer 220 of the ring optical guide region coupled with the optical fiber 300. The optical fiber coupling hole 221 is made of a structure that communicates from the outside of the glass layer 220 to the core air layer 210 as shown in FIG. 3A, and when the optical fiber 300 is inserted into the optical fiber coupling hole 221, FIG. Likewise, the end portion of the optical fiber 300 is exposed to the core air layer 210 so that light transmitted to the core air layer 210 passes through the optical fiber 300.

Therefore, the present invention reflects the first laser light emitted from the laser light source 100 from the mirror 120 to the beam splitter 130, and the first laser light transmitted through the beam splitter 130 is transmitted to the sample 500. Irradiated, the light reflected from the sample 500 is reflected from the beam splitter 130 to the camera 160, and the camera 160 captures the light reflected from the sample 500 to measure the shape of the sample 500 Is to do. Here, a shape measuring unit (not shown) capable of receiving the captured image of the camera 160 and measuring the shape of the sample 500 may be further provided.

In the present invention, the first laser light emitted from the laser light source 100 is modulated by the laser light modulator 110 to the second laser light, and the second laser light is transmitted from the mirror 120 to the beam splitter 130. While reflecting, and the second laser light transmitted through the beam splitter 130 is irradiated to the sample 500, plasma is formed in the sample 500, the light emitted from the plasma is condensed by the ring light guide 200, and the ring light The light emitted from the plasma collected by the guide 200 is detected by the optical fiber 300 combined with the ring light guide 200 and transmitted to the spectrometer 150, and the spectrometer 150 uses light emitted from the plasma. The spectral spectrum of the sample 500 is measured.

Here, the apparatus of the present invention may further include an analysis unit (not shown) capable of quantitative and qualitative analysis with the spectral spectrum measured by the spectrometer 150.

The integrated optical device of the present invention includes a light source unit for sequentially outputting first and second incident light having a predetermined wavelength and output range; An incidence unit forming an incidence path through which the first and second incident light enters the measurement object; A first light receiving unit that receives the first measurement light reflected from the measurement object by the first incident light and outputs it to a shape measurement device; And a second light receiving unit which receives the second measurement light output from the measurement object by the second incident light and outputs it to the component analysis device.

Here, the light source unit is a laser light source 100 that emits the first laser light and a laser light modulator 110 that modulates the first laser light to emit the second laser light, and the incident part is a laser light modulator 110. A plurality of barrels (or, in other words, housings) connected to the laser light modulator 110 and mirrors 120 located within the plurality of barrels for injecting the first and second laser light into the sample 500 to be measured. And beam splitter 130.

In addition, the first light-receiving unit is for transmitting light reflected from the sample 500 to the camera 160, which is a shape measuring device, and the second light-receiving unit is a spectrometer that is a component analysis device for light emitted from the plasma of the sample 500 It is intended to be delivered to (150).

Therefore, in the present invention, a device capable of performing the shape measurement of the sample 500 and the qualitative and quantitative analysis of the elements included in the sample 500 can be integrally formed.

4 is a view for explaining a path of a first laser light for analyzing the shape of a sample in the integrated optical device according to the present invention, and FIG. 5 is a second for quantitative and qualitative analysis of a sample in the integrated optical device according to the present invention A diagram for explaining a path of laser light, and FIG. 6 is a diagram for explaining a path of light emitted from a plasma generated from a sample according to the present invention, and FIG. 7 is a view of light emitted from a plasma generated from a sample according to the present invention Some perspective views for explaining the route.

As described above, depending on whether the first laser light is irradiated to the sample or the second laser light is irradiated to the sample, shape measurement of the sample is performed or quantitative/quantitative component analysis is performed.

At this time, as shown in Figure 4, the first laser light emitted from the laser light source 100 has a first frequency, and is irradiated to the sample through the mirror 120 and the beam splitter 130 and reflected from the sample By being transmitted to the camera 160 by the function of the beam splitter 130 and imaged by the camera 160, the shape of the sample can be measured.

Then, as shown in Figure 5, the laser light modulator 110 modulates the first laser light emitted from the laser light source 100 into a second laser light, and the second laser light is a mirror 120 and a beam splitter 130. The sample is irradiated to generate plasma, and the light emitted from the generated plasma is detected by the ring light guide 200 and the optical fiber 300 to measure the spectral spectrum of the sample with light emitted from the plasma by the spectrometer 150 do.

Light emitted from the plasma transmitted to the optical fiber 300 may be referred to as a LIBS signal.

That is, since the plasma generated during laser irradiation of the LIBS signal emits light of a specific wavelength depending on the material, it is possible to qualitatively or quantitatively analyze the components of the material by collecting the light. Laser-induced decay (plasma) spectroscopy (hereinafter referred to as LIBS), which is one of the methods of analyzing the constituents of a substance using collected light, generates breakdown, a kind of discharge phenomenon using a high-power laser. It is a spectroscopic analysis technology that uses the generated plasma as an excitation source. In the plasma induced by the laser, the sample is vaporized so that atoms and ions can exist in an excited state. Atoms and ions in the excited state emit energy after a certain lifetime, and then return to the ground state, which emits a unique wavelength depending on the type of element and the excited state. Therefore, by analyzing the spectrum of the emitted wavelength, it is possible to qualitatively or quantitatively analyze the constituents of a substance.

Referring to Figures 6 and 7 in more detail, the ring light guide 200 is a donut shape with a space formed inside, the second laser light is irradiated to the sample in the space of the ring light guide 200 and the sample surface is Plasma P is generated by the output of two laser lights.

The plasma P generated in the sample emits light from the surface of the sample and emits light. The light emitted from the plasma P is incident on the ring light guide 200 and totally internally reflected on the ring light guide 200 to be optically aligned on the upper side of the ring light guide 200 and transmitted to the optical fiber 300 connected and connected to the optical fiber ( 300) is transmitted to the spectrometer 150 to measure the spectral spectrum of the sample.

Through the spectral spectrum measured by the spectrometer 150, the intensity of light can be quantitatively analyzed with respect to the elements included in the sample, and the wavelength of the light can know the type of elements contained in the sample. This allows qualitative analysis to be performed.

That is, the spectroscopic spectrum is obtained from the spectrometer 150 from the light (LIBS signal) emitted from the plasma P generated in the sample, and the concentration of the peak signal, wavelength, and elements shown in the obtained spectral spectrum can be obtained. .

8A and 8B are photographs of samples taken to analyze the shape of a sample in the integrated optical device according to the present invention, and FIG. 9 is a result of quantitative and qualitative analysis of the neodymium contained in the sample in the integrated optical device according to the present invention 10 is a graph of quantitative and qualitative analysis results of samarium contained in a sample in the integrated optical device according to the present invention.

Since the spatial resolution of the shape analysis of the sample applied in the present invention is 470 nm as shown in FIG. 8A and 390 nm as shown in FIG. 8B, it is possible to perform shape analysis of the sample with an image captured by the camera.

Table 1 shows the signal, calibration curve and curvature (R 2 ) of the spectral spectrum for the element for quantitative and qualitative analysis in the integrated optical device. Here, the correction curve for the element and the curvature of the graph of the element concentration and the signal are stored in the database in advance, and the sample among the spectral spectra obtained from the light emitted from the plasma generated from the sample (LIBS signal) is the'SUS 300 series'. When the signal of is 425.4nm, it contains chromium (Cr), and if the signal of'Cu alloy' is 510.6nm, the sample contains copper (Cu), and if it is 503.5nm, it contains nickel (Ni). Qualitative analysis.

In addition, the correction curve for the element for quantitative and qualitative analysis in the integrated optical device, and the graph curvature (R 2 ) of the element concentration and signal are previously stored in a database.

element sample Signal (nm) Correction curve R 2 Cr SUS 300 series 425.4 Y=-0.3276+0.224X 0.9913 Cu Cu alloy 510.6 Y=-3.2876+0.7095X 0.9933 Ni Cu alloy 503.5 Y=-16.8591+2.8710X 0.9980

Therefore, it can be seen that the sample contains neodymium (Nd) as the peak signal of the spectral spectrum obtained from the light (LIBS signal) emitted from the plasma generated in the sample, and the correction curve (A) of neodymium as shown in FIG. 9 When'Y=-1.1919 + 0.2246X' and the elemental concentration and the graph curvature (R 2 ) of the signal are 0.9913, A1 graph and A2 graph are included to detect the concentration by signal intensity. That is, when the signal strength of neodymium appears in the form of'a' in the graph, it can be seen that the sample contains neodymium at a concentration of 30%.

Then, when it can be seen from the peak signal of the spectral spectrum of the target sample that samarium (Sm) is included in the target sample, as shown in FIG. 10, the correction curve B of samarium is'Y=-1.6710 + 1.2818. When X'and the element's concentration and the graph curvature (R 2 ) of the signal are 0.9535, B1 graph and B2 graph are included to detect the concentration by signal intensity, so the signal strength of samarium appears in the graph as'a'. At this time, it can be seen that the sample contains samarium at a concentration of 14.37%.

Therefore, the present invention enables qualitative/quantitative analysis of rare earth elements with many emission lines, and can increase the measurement accuracy to 95% to 99% or more.

In the above, the present invention has been illustrated and described with reference to specific preferred embodiments, but the present invention is not limited to the above-described embodiments and is common knowledge in the technical field to which the present invention pertains without departing from the spirit of the present invention. Various changes and modifications will be possible by those who have.

100: laser light source
110: laser light modulator
120: mirror
130: beam splitter
140: objective lens
150: Spectrometer
160: camera
200: ring light guide
300: optical fiber
500: sample

Claims (10)

  1. A light source unit sequentially outputting first and second incident light having a predetermined wavelength and output range for shape measurement of a measurement object and component analysis of a sample ;
    An incidence part disposed in the shape of an'a' with the light source part and vertically forming an incidence path in which the first and second incident light enters the measurement object by one mirror ;
    A first light receiving unit that receives the first measurement light reflected from the measurement object by the first incident light and outputs it to a shape measurement device; And
    It includes; a second light receiving unit for receiving the second measurement light output from the measurement object by the second incident light and outputting it to the component analysis device;
    The incidence unit,
    It includes a housing for irradiating the first and second incident light whose incident path is vertically changed by the one mirror to the measurement object,
    The second light receiving unit,
    An integrated optical device comprising an optical fiber which is independently configured on the outer surface of the housing and outputs the second measurement light to the component analysis device.
  2. According to claim 1,
    The light source unit,
    And an optical modulator for outputting any one of the first and second incident light, and modulating the first incident light to the second incident light or the second incident light to the first incident light. Device.
  3. According to claim 1,
    An integrated optical device, wherein the first light-receiving path through which the first measurement light is incident on the shape measuring device is configured to overlap at least a part of the incident path.
  4. According to claim 3,
    The second optical path through which the second measurement light is incident on the component analysis device is configured to be formed independently of the first optical path.
  5. delete
  6. According to claim 1 ,
    The second light receiving unit,
    Integrated optical device, characterized in that further comprising a; and receiving the second measurement light is formed in the end side of the housing that is output from the measurement object a light guide unit for guiding the optical fiber.
  7. A laser light source outputting a first laser light having a first power;
    A laser light modulator for modulating the first laser light having the first power output from the laser light source and outputting a second laser light having a second power;
    A mirror for vertically changing the paths of the first and second laser lights in the direction of the sample;
    A beam splitter that transmits the first and second laser light or reflects light reflected from the sample;
    An objective lens coupled to the one mirror and disposed in the shape of an'a' with the laser light source to irradiate the sample with the first and second laser light transmitted from the beam splitter;
    A camera which acquires the image of the sample by receiving the first laser light reflected from the sample through the objective lens and measuring the shape of the sample through a first path reflected by the beam splitter;
    A ring light guide for condensing light emitted from the plasma generated from the sample with the second laser light;
    An optical fiber that is optically coupled to the ring light guide and is provided along an outer surface of the objective lens to detect light condensed in the ring light guide; And
    A spectrometer that receives light emitted from the plasma generated from the sample through the ring optical guide and the second path transmitted to the optical fiber and measures a spectral spectrum;
    All-in-one optical device comprising a.
  8. The method of claim 7,
    The integrated optical device, characterized in that the first path and the second path are spaced apart.
  9. The method of claim 7,
    The material of the ring light guide is glass,
    The ring light guide has a donut shape,
    The ring light guide includes an empty core air layer; And an annular glass layer surrounding the core air layer.
  10. The method of claim 9,
    An optical fiber coupling hole is formed in the glass layer of the ring optical guide region coupled to the optical fiber,
    The optical fiber coupling hole is made of a structure that communicates from the outside of the glass layer to the core air layer, and the optical fiber is inserted into the optical fiber coupling hole to be optically coupled so that an end of the optical fiber is exposed to the core air layer. Optical device.


KR1020180086802A 2018-07-25 2018-07-25 All in one optical device KR102141601B1 (en)

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Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2000334587A (en) 1999-05-25 2000-12-05 Sumitomo Heavy Ind Ltd Device for detecting welding state of laser beam welding
JP2005140529A (en) * 2003-11-04 2005-06-02 Toshiba Corp Apparatus and method for analyzing element
JP2009288068A (en) 2008-05-29 2009-12-10 Toshiba Corp Analyzing method and analyzer
JP2010038560A (en) * 2008-07-31 2010-02-18 Toshiba Corp Element analyzer and element analysis method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101423988B1 (en) 2012-12-13 2014-08-01 광주과학기술원 Quantitative analysis method for mesuring element in sample using laser plasma spectrum

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000334587A (en) 1999-05-25 2000-12-05 Sumitomo Heavy Ind Ltd Device for detecting welding state of laser beam welding
JP2005140529A (en) * 2003-11-04 2005-06-02 Toshiba Corp Apparatus and method for analyzing element
JP2009288068A (en) 2008-05-29 2009-12-10 Toshiba Corp Analyzing method and analyzer
JP2010038560A (en) * 2008-07-31 2010-02-18 Toshiba Corp Element analyzer and element analysis method

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