KR102063539B1 - A System for Detecting a Fluid Situation with a Ultrasonic Sensor and a Method for the Same - Google Patents

A System for Detecting a Fluid Situation with a Ultrasonic Sensor and a Method for the Same Download PDF

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Publication number
KR102063539B1
KR102063539B1 KR1020180045078A KR20180045078A KR102063539B1 KR 102063539 B1 KR102063539 B1 KR 102063539B1 KR 1020180045078 A KR1020180045078 A KR 1020180045078A KR 20180045078 A KR20180045078 A KR 20180045078A KR 102063539 B1 KR102063539 B1 KR 102063539B1
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South Korea
Prior art keywords
fluid
ultrasonic sensor
conduit
vessel
ultrasonic
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KR1020180045078A
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Korean (ko)
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KR20190121584A (en
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고상준
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(주)지엠에스티코리아
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/022Liquids

Abstract

The present invention relates to a fluid state detection system by an ultrasonic sensor and a detection method thereof, and specifically, to a fluid state detection by an ultrasonic sensor detecting a state of a fluid flowing through a conduit from information detected from an ultrasonic sensor installed in a conduit through which a fluid flows. A system and its detection method. Fluid state detection system by the ultrasonic sensor and its detection method is an ultrasonic sensor 10 installed between the one vessel (S) and the two vessels (P) for storing or supplying the fluid is installed in the conduit (T) for transferring the fluid (10) ; And a control module (C) for controlling the operation of the ultrasonic sensor (10), wherein the ultrasonic waves generated from the ultrasonic sensor (10) are transmitted through the conduit (T).

Description

System for Detecting a Fluid Situation with a Ultrasonic Sensor and a Method for the Same

The present invention relates to a fluid state detection system by an ultrasonic sensor and a detection method thereof, and specifically, to a fluid state detection by an ultrasonic sensor detecting a state of a fluid flowing through a conduit from information detected from an ultrasonic sensor installed in a conduit through which a fluid flows. A system and its detection method.

Various types of fluids may be conveyed or supplied through the conduits, and it is necessary to monitor whether the fluids are delivered or supplied according to predetermined conditions. The fluid may be a gas or a liquid, and the fluid state detection may monitor the condition of the conduit, the speed of transport of the fluid, the bubbles generated in the fluid, and whether the flow of fluid in the conduit is maintained. Various methods of monitoring the flow state of a fluid are disclosed in the art, and for example, Patent Publication No. 10-2005-0112753 can continuously supply chemicals to processing devices that use chemicals used in semiconductor manufacturing processes. A means for measuring the amount of chemical applied to a chemical supply apparatus is disclosed. In addition, Patent Publication No. 10-2009-0048101 discloses a chemical liquid supply device that can accurately measure the level of the chemical liquid.

Depending on the type of fluid being supplied or the device applied, it may be necessary to detect whether the fluid is flowing in the conveying or supplying conduit or whether it is contained in bubbles or similar foreign matter. However, the prior art or the prior art does not disclose a method for detecting the state of the fluid flowing through the conduit as such.

The present invention is to solve the problems of the prior art has the following object.

Prior Art 1: Patent Publication No. 10-2005-0112753 (Samsung Electronics Co., Ltd., December 01, 2005) Chemical supply device and its supply method Prior Art 2: Patent Publication No. 10-2009-0048101 (Semes Co., Ltd., published May 13, 2009) Chemical supply device

It is an object of the present invention to provide a fluid state detection system and an detection method thereof by an ultrasonic sensor capable of detecting a flow state of a fluid based on detection information transmitted from an ultrasonic sensor installed in a conduit for transport or supply of a fluid. .

According to a preferred embodiment of the present invention, a fluid state detection system by an ultrasonic sensor and a detection method thereof include: an ultrasonic sensor installed in a conduit installed between one container and two containers for storing or supplying a fluid; And a control module for controlling the operation of the ultrasonic sensor, wherein the ultrasonic wave generated from the ultrasonic sensor is transmitted through the conduit.

According to another suitable embodiment of the present invention, the ultrasonic sensor includes a supply tube for transferring fluid between 1 and 2 containers, a control tube for regulating pressure of the 1 and 2 containers, or a discharge tube for transferring fluid from the supply container to the outside. It includes 1, 2, 3, 4 ultrasonic sensors that are installed.

According to another suitable embodiment of the present invention, an ultrasonic sensor comprises: a transmitting vibrator disposed on an outer circumferential surface of a conduit; And a reception vibrator disposed at a position facing the transmission vibrator.

According to another suitable embodiment of the present invention, there is provided a method of detecting a state of a fluid conveyed through a conduit, wherein an arrangement position of an ultrasonic sensor is set in the conduit, and at least one ultrasonic sensor is installed at at least one position. step; Setting a generation period of the ultrasonic waves of each of the at least one ultrasonic sensor, and transmitting and receiving the ultrasonic waves based on the setting; Analyzing the reception sensitivity of the received ultrasound to determine whether the device is in a normal state; And generating an alarm according to the determination result, wherein the fluid is supplied through the conduit according to the analysis of the reception sensitivity, whether the fluid supplied contains bubbles or different fluid containers connected by the conduit. It is detected whether the fluid is in a low state or whether there is a fluid of a different type from the predetermined form in the conduit.

The method according to the invention is applied to the supply of chemicals applied to the semiconductor manufacturing process to enable monitoring of the flow state of the chemicals. For example, a chemical, such as titanium tetrachloride, is applied to the process from the storage tank to the process tank so that a predetermined amount of titanium tetrachloride is supplied to the process tank to prevent a poor supply of the chemical. The method according to the present invention can be applied to various types of conveying conduits or tubes, and can be applied regardless of the type of fluid while allowing the detection of foreign matter such as bubbles contained in the fluid. In addition, the method according to the invention allows for automatic supply monitoring.

1 illustrates an embodiment of a fluid state detection system by an ultrasonic sensor according to the present invention.
2 illustrates an embodiment to which a detection system according to the present invention is applied.
Figure 3 shows an embodiment of the ultrasonic sensor module applied to the detection system according to the present invention.
Figure 4 shows an embodiment of the operating structure of the detection system according to the present invention.
Figure 5 illustrates an embodiment of an automatic control valve applicable to the detection system according to the present invention.
6 illustrates an embodiment of a fluid state detection method by an ultrasonic sensor according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the embodiments set forth in the accompanying drawings, but the embodiments are provided for clarity of understanding and the present invention is not limited thereto. In the following description, components having the same reference numerals in different drawings have similar functions, and thus are not repeatedly described unless necessary for understanding of the invention, and well-known components are briefly described or omitted. It should not be understood to be excluded from the embodiment of.

1 illustrates an embodiment of a fluid state detection system by an ultrasonic sensor according to the present invention.

Referring to FIG. 1, a fluid state detection system using an ultrasonic sensor includes an ultrasonic sensor installed in a conduit T installed between a first container S and a second container P for storing or supplying a fluid. 10); And a control module (C) for controlling the operation of the ultrasonic sensor (10), wherein the ultrasonic waves generated from the ultrasonic sensor (10) are transmitted through the conduit (T).

The fluid may be a gas or a liquid, and may be, for example, a gas such as helium or a chemical such as titanium tetrachloride (TiCl 4 ), but is not limited thereto. Various kinds of fluids may be detected by the ultrasonic sensor 10, and the fluids may be transferred from one vessel S to two vessels P by various kinds of conduits T. The conduit T may be made of various standards or various materials capable of transporting a fluid such as gas or liquid, and may be made of a material such as metal or synthetic resin according to the type of fluid. The fluid may be transferred between the first vessel S and the second vessel P along the conduit T.

The first container S may be a storage container for storing the fluid, and the second container P may be a supply container for supplying the fluid supplied from the one container S for the process. The conduit (T) may connect one or two vessels (S, P), connect an external supply vessel and one vessel (S), or connect two vessels (P) with a fluid application facility such as, for example, a process chamber. Can be. Conduit T may be installed in various paths where transport of a fluid such as gas or liquid is required, and is not limited to the embodiments shown.

The ultrasonic sensor 10 may be installed on an outer circumferential surface of the conduit T, and at least one ultrasonic sensor 10 may be installed in one conduit T forming one path. The ultrasonic sensor 10 may include a transducer for converting between electrical energy and mechanical energy. The transducer may also include a piezoelectric element made of a material such as quartz, tourmaline, roselle salt, barium titanate or artificial ceramics (PZT), and may include an amplifier or similar signal processing element for amplifying the signal. Can be. The ultrasonic waves generated by the ultrasonic sensor 10 may be transmitted in the form of penetrating the conduit T, for example, in a direction perpendicular to the extension direction of the conduit T or in the extension direction of the conduit T. Ultrasound may be transmitted in an inclined direction with respect to the. The ultrasonic sensor 10 may be transmitted and received by the same vibrator or may be performed by different vibrators. According to one embodiment of the invention, the ultrasonic wave is transmitted to the transmission vibrator installed on the outer circumferential surface of the conduit (T) and passes through the fluid, the ultrasonic wave passing through the fluid is received by the receiving vibrator installed opposite the transmission vibrator Can be. In this way, the flow state of the fluid may be detected by analyzing the ultrasonic waves received through the fluid. However, the transmission or reception of the ultrasound may be made in various ways and is not limited to the presented embodiments.

The ultrasonic sensor 10 installed on the circumferential surface of the conduit T may be connected to the control module C by wire or wirelessly, and the operation of the ultrasonic sensor 10 may be controlled by the control module C. In addition, the control module C may determine the flow state of the fluid by analyzing the ultrasonic waves received by the ultrasonic sensor 10, and may determine whether the fluid contains foreign substances such as bubbles. The control module C may be installed in the monitoring computer, or in the monitoring module arranged outside the area in which the containers S, P or conduits T are arranged.

The control module C may be disposed at various locations and connected to the ultrasonic sensor 10 in a suitable manner so as to enable data communication, and the present disclosure is not limited to the present embodiment.

The fluid detectable by the ultrasonic sensor 10 may be a gas, a liquid or the like, and whether the fluid is flowing along the conduit T by the ultrasonic sensor 10, along the conduit T Whether a liquid or gas is flowing, whether the fluid is flowing in a defined form, or a similar flow state can be detected. As such, the flow state may include various flow conditions. The detection system according to the invention can also be applied to fluid delivery devices, equipment or systems for the supply of gas or liquid, for the transport of gas or liquid or for various uses. For example, the detection system according to the present invention can be applied to a facility for providing a compound in a semiconductor manufacturing process.

2 illustrates an embodiment to which a detection system according to the present invention is applied.

Referring to FIG. 2, the ultrasonic sensor includes a supply tube 24 for transferring fluid between the first and second containers, a control tube 251 and 252 or a supply container for adjusting the pressure of the first and second containers S and P. 23, 1, 2, 3, 4 ultrasonic sensors 11, 12, 13, 14 installed in the discharge tube 26 to transfer the fluid from the outside.

The detection system may be applied to a supply facility that supplies a compound for metal deposition, such as titanium tetrachloride (TiCl 4 ), to a process chamber for semiconductor manufacturing.

The storage container 22 in which the fluid is stored and the supply container 23 for supplying the fluid transferred from the storage container 22 to the process may be disposed in the sealed space 21 in which the receiving space is formed. The reservoir 22 and the supply vessel 23 may be connected by a supply tube 24 for the transfer of fluid, and the fluid stored in the reservoir 22 may be supplied to the supply vessel 23. 1 and 2 control tubes 251 and 252 are connected to the storage container 22 and the supply container 23, respectively, and helium or similar inert gas is supplied through the 1 and 2 control tubes 251 and 252. ) May be injected into the supply vessel 23 and the pressure in the vessels 22 and 23 may be adjusted. In addition, a discharge tube 26 connecting the supply vessel 23 and the process chamber may be installed.

The amount of compound or fluid supplied from the storage vessel 22 to the supply vessel 23 can be determined by the amount of compound contained in the supply vessel 23, wherein the level of the compound in the supply vessel 23 is maintained at a predetermined level. Need to be. The level of supply of fluid through the feed tube 24 can be regulated by the pressure inside the reservoir 22 and the feed vessel 23, for example the pressure inside the feed vessel 23 is the reservoir 22. It can be maintained at a low level compared to the internal pressure of. In addition, pressure regulating gas such as helium is supplied to the storage vessel 22 and the supply vessel 23 through the first and second control tubes 251 and 252 to adjust the internal pressures of the storage vessel 22 and the supply vessel 23. It can be injected internally. In such a structure, the compound in liquid form may be transferred through the supply tube 24 and the discharge tube 26, and gas may be transferred through the first and second control tubes 251 and 252. And the level L1, L2 of the storage container 22 and the supply container 23 should be maintained at a predetermined level, and especially the level L2 of the supply container 23 should be maintained at a predetermined level.

According to one embodiment of the present invention, one ultrasonic sensor 11 may be installed on the circumferential surface of the supply tube 24, and the second and third ultrasonic sensors 12 and 13 may include the control tubes 251 and 252. 4 ultrasonic sensors 14 may be disposed in the discharge tube 26.

The 1 ultrasonic sensor 11 installed in the supply tube 24 may detect whether the compound is being transferred, whether the compound is being supplied at a predetermined pressure, or whether the compound contains foreign substances such as bubbles. It may be detected whether gas is being supplied by the two or three ultrasonic sensors 12, 13, and in particular whether the compound is present inside the one, two control tubes 251, 252. The detection of such a compound is for detecting whether the compound contained in the storage container 22 or the supply container 23 is introduced into the first and second control tubes 251 and 252. And 4 the ultrasonic sensor 14 can be detected whether the transport of the compound or the transfer pressure, in particular whether the foreign matter such as bubbles contained in the compound can be detected. In this way, the ultrasonic sensors 11, 12, 13, 14 are arranged in the respective tubes 24, 251, 252, and 26 so that the flow of the liquid or gas is monitored to ensure a safe supply of the compound supply chamber. Can be secured. At least one ultrasonic sensor 11, 12, 13, 14 may be arranged in each tube 24, 251, 252, 26, and the present invention provides an installation position of the ultrasonic sensor 11, 12, 13, 14. Or it is not limited by the number of installation. In addition, each of the ultrasonic sensors 11, 12, 13, and 14 may be made in various structures.

Figure 3 shows an embodiment of the ultrasonic sensor module applied to the detection system according to the present invention.

Referring to FIG. 3, the ultrasonic sensor 10 may be made of a modular structure, and the ultrasonic transducer may be made of a detection electronic chip structure. Specifically, the ultrasonic transducer includes a sensor body 31 having a through groove 313 into which the tube T is inserted; A transmission vibrator 311 and a reception vibrator 312 disposed at positions of the sensor body 31 facing each other; And a bonding layer that allows ultrasonic waves generated from the vibrator to be transmitted to the tube T. In addition, a sound absorbing layer for absorbing the reflected ultrasonic waves may be disposed on the rear surface of the transmitting vibrator 311 as necessary. The ultrasonic transducer can be made of a suitable structure in which the generated ultrasonic waves are transmitted to the inside of the tube T, and the transmitted ultrasonic waves can be received via the circumferential surface of the tube T, and are not limited to the presented embodiments. . The ultrasonic transducer may be made of an independent module structure that may be mounted on the tube T, and the ultrasonic sensor 10 of the module structure may transmit electrical signals or data through wired or wireless communication with the control board E. May be electrically connected as possible. A microprocessor for control of operation on the control board E, a pulse generator 32 for the generation of ultrasonic pulses; A clock unit 33 for setting the form or generation period of the ultrasonic wave in the form of a pulse; An amplifier 35 for amplifying a signal received from the reception vibrator 312 and converted into an electrical signal; A digital signal processing processor 36 for converting the signal amplified by the amplifier 35 into a digital signal; A detection analysis unit 34 that analyzes reception characteristics of received ultrasonic waves from the signal processed by the processing processor 36; An output unit 37 which outputs the detection result analyzed by the detection analysis unit 34; And a window unit 38 for converting the output signal transmitted from the output unit 37 into a signal that can be displayed on the screen.

The control board E may include various elements or components for generating ultrasonic waves, transmitting ultrasonic waves, receiving ultrasonic waves, processing or analyzing received ultrasonic waves, and the present invention is not limited thereto. In addition, the control board E may be connected to various types of monitoring devices or management devices, and may be connected to various alarm generating units capable of generating alarms according to detection results.

Figure 4 shows an embodiment of the operating structure of the detection system according to the present invention.

Referring to FIG. 4, the entire operation of the ultrasonic sensors can be controlled by the control unit 41, and the control unit 41 controls the operation of the respective ultrasonic sensors 11, 12, 1N (operation control unit ( 42 may transmit the operating conditions of each of the ultrasonic sensors 11 to 1N. The operation control unit 42 can set the operating conditions of each of the ultrasonic sensors 11 to 1N installed in each of the tubes T1 to TN, and each of the ultrasonic sensors 11 to 1N has a pulse shape at a predetermined cycle. Ultrasonic waves may be generated, and the shape or frequency of the pulse may be appropriately selected depending on, for example, the type of fluid to be transferred, the material or the structure of the tubes T1 to TN. Ultrasonic waves generated according to the operation control of the operation control unit 42 and transmitted to the respective tubes T1 to TN may be transmitted through the fluid and the conduit, received by the reception vibrator, and transmitted to the reception processing unit 43. . The reception processing unit 43 may convert the received signal into an electrical signal, amplify the converted signal, convert it into a digital signal, and transmit the converted signal to the fluid state analysis unit 44.

Ultrasonic waves exhibit different transfer characteristics depending on the type of medium, the density of the medium or the state of the medium, for example the type of fluid transferred through each of the tubes T1 to TN, the speed of fluid transfer, temperature or Depending on the density can have different transfer characteristics. The fluid state analysis unit 44 may detect the propagation speed, the reception rate, and the reflection characteristic of the ultrasonic waves, and may detect the flow state of the fluid in each of the tubes T1 to TN based thereon. A characteristic database 441 may be prepared in advance for the transmission characteristics of the ultrasonic wave according to the type of fluid, temperature, pressure, material, thickness, diameter of the tubes T1 to TN, or similar medium characteristics. The fluid state analysis unit 44 compares the received ultrasonic characteristics transmitted from the reception processing unit 43 with the data stored in the characteristic database 441 to analyze the flow state of the fluid inside the respective tubes T1 to TN. Can be. The analysis result can then be sent to the control unit 41.

The control unit 41 may determine whether the flow state of the fluid in each of the tubes T1 to TN is normal from the analysis result, and may activate the alarm unit 45 to generate an alarm if necessary. For example, an alarm may be triggered if no compound is transported through the feed tube, if a compound is introduced into the control tube, or if a bubble is present in the compound being transported to the discharge tube. And by this the supply of the compound and the state of inflow of gas into the vessel can be monitored in real time. In addition, the valve can be operated automatically according to the analysis result.

Figure 5 illustrates an embodiment of an automatic control valve applicable to the detection system according to the present invention.

If it is detected that no compound is supplied from the storage container to the supply container, the compound needs to be filled into the storage container or the storage container needs to be replaced. The supply of gas to the storage vessel via the control tube needs to be stopped for replacement of the storage vessel. Interruption of the gas supply can occur automatically.

Referring to FIG. 5, the automatic regulating valve includes a valve body 51; Opening and closing means (52) coupled to the valve body (51); A locking unit 53 for opening and closing the flow path of the valve; An induction unit 55 for inducing movement of the locking unit 53; A movement inducing member 54 which allows the locking unit 53 to move along a predetermined path while fixing the induction unit 55; And an injection tab 56 for injecting gas for movement of the locking unit 53. An induction path 552 may be formed in the induction unit 55 to induce the movement of the locking unit 53, and the induction unit 55 may be coupled to the movement induction member 54 by a coupling bracket 551. have. When gas is injected or discharged through the injection tab 56, the locking unit 53 can be moved along the induction path 552, thereby opening and closing the flow path of the automatic control valve.

An ultrasonic sensor may be placed in the control tube to detect the injection state of the gas during or after the replacement of the reservoir and the operation of the automatic control valve may be adjusted according to the detection result.

6 illustrates an embodiment of a fluid state detection method by an ultrasonic sensor according to the present invention.

Referring to FIG. 6, in the method of detecting a state of a fluid conveyed through a conduit, an arrangement position of an ultrasonic sensor is set in the conduit, and at least one ultrasonic sensor is installed at at least one position (P61); Setting a generation period of the ultrasonic waves of each of the at least one ultrasonic sensor, and based on the setting, ultrasonic waves are transmitted and received (P62); Analyzing the reception sensitivity of the received ultrasound to determine whether the device is in a normal state (P64); And a step (P66) of generating an alarm according to the determination result, wherein whether the fluid is supplied through the conduit according to the analysis of the reception sensitivity, whether the fluid is contained in the supplied fluid, or different from each other connected by the conduit. It is detected whether the fluid container is in a state of fluid shortage or whether a fluid of a different type from the predetermined form exists in the conduit.

As described above, the ultrasonic sensor may have a function of detecting the flow state of the gas or liquid, and the ultrasonic sensor may be disposed at various positions of the conduit for transporting the fluid (P61). The ultrasonic sensor may be composed of a transmitting vibrator and a receiving vibrator, and the ultrasonic waves generated by the transmitting vibrator may be transmitted through the conduit and the fluid so that some of them may be reflected and others may be received by the receiving vibrator. The ultrasonic waves may be in the form of pulses and the transmission period may be determined. When the ultrasound is transmitted and received according to the set period (P63), the transmission characteristics of the ultrasound according to the medium may be analyzed (P64). If it is determined in the normal state according to the analysis result (YES), ultrasonic waves of another cycle may be transmitted and received (P63). On the contrary, if it is not the normal state (NO), an alarm may be generated while the flow state is displayed (P67). In addition, the supply valve may be operated as necessary to adjust the supply of the fluid (P66).

Detection of the fluid by the ultrasonic sensor can be made through various processes and is not limited to the presented embodiments.

It is applied to the supply process of the chemical applied to the semiconductor manufacturing process according to the present invention to enable monitoring of the flow state of the chemical. For example, a chemical, such as titanium tetrachloride, is applied to the process from the storage tank to the process tank so that a predetermined amount of titanium tetrachloride is supplied to the process tank to prevent a poor supply of the chemical. The method according to the present invention can be applied to various types of conveying conduits or tubes, and can be applied regardless of the type of fluid while allowing the detection of foreign matter such as bubbles contained in the fluid. In addition, the method according to the invention allows for automatic supply monitoring.

Although the present invention has been described in detail with reference to the presented embodiments, those skilled in the art may make various modifications and modifications without departing from the spirit of the present invention with reference to the presented embodiments. . The invention is not limited by the invention as such variations and modifications but only by the claims appended hereto.

10: ultrasonic sensor 11, 12, 13, 14, 1N: ultrasonic sensor
21: sealed space 22: storage container
23: supply container 24: supply tube
26: discharge tube 31: sensor body
32: pulse generator 33: clock unit
34: detection analysis unit 35: amplifier
36: processing processor 37: output unit
38: window unit 41: control unit
42: operation control unit 43: reception processing unit
44: fluid state analysis unit 45: alarm unit
51: valve body 52: opening and closing means
53: locking unit 54: moving guide member
55: guide unit 56: injection tap
251, 252: 1, 2 control tube 311: transmit oscillator
312: receiving oscillator 313: through groove
441: Properties Database 551: Joining Bracket
552: induction path C: control module
E: control board L1, L2: level
P: 2 containers S: 1 containers
T: conduit T1 to TN: tube

Claims (4)

  1. An ultrasonic sensor 10 installed between the first container S for storing or supplying the fluid and the second container P for installing the fluid; And
    It includes a control module (C) for controlling the operation of the ultrasonic sensor 10,
    Ultrasound generated from the ultrasonic sensor 10 is transmitted through the conduit (T),
    The amount of fluid supplied from the first vessel 22 to the second vessel 23 is determined by the amount of compound contained in the second vessel 23 and the level of the fluid in the second vessel 23 is maintained at a predetermined level. The supply level of the fluid through the conduit T is controlled by the internal pressures of the first vessel 22 and the second vessel 23, and the pressures of the first and second vessels S and P are respectively adjusted. Further comprising control tubes 251 and 252 for injecting pressure regulating gas and a discharge tube 26 for transferring fluid from the two vessels 23 to the outside,
    The ultrasonic sensor 10 includes one ultrasonic sensor 11 installed on the circumferential surface of the conduit T, two or three ultrasonic sensors 12 and 13 disposed on the control tubes 251 and 252, and the discharge tube 26. Fluid state detection system by the ultrasonic sensor, characterized in that it comprises four ultrasonic sensors (14) disposed in.
  2. delete
  3. The ultrasonic sensor 10 of claim 1, further comprising: a transmission vibrator 311 disposed on an outer circumferential surface of the conduit T; And a reception vibrator 312 disposed at a position facing the transmission vibrator 311.
  4. delete
KR1020180045078A 2018-04-18 2018-04-18 A System for Detecting a Fluid Situation with a Ultrasonic Sensor and a Method for the Same KR102063539B1 (en)

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