KR101940435B1 - Carrier transfer facilitating device - Google Patents

Carrier transfer facilitating device Download PDF

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Publication number
KR101940435B1
KR101940435B1 KR1020177019792A KR20177019792A KR101940435B1 KR 101940435 B1 KR101940435 B1 KR 101940435B1 KR 1020177019792 A KR1020177019792 A KR 1020177019792A KR 20177019792 A KR20177019792 A KR 20177019792A KR 101940435 B1 KR101940435 B1 KR 101940435B1
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KR
South Korea
Prior art keywords
carrier
load
load port
hoop
loading
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KR1020177019792A
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Korean (ko)
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KR20170087523A (en
Inventor
다꾸미 미조까와
미쯔또시 오찌아이
Original Assignee
신포니아 테크놀로지 가부시끼가이샤
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Priority to JP2009237751A priority Critical patent/JP5445015B2/en
Priority to JPJP-P-2009-237751 priority
Application filed by 신포니아 테크놀로지 가부시끼가이샤 filed Critical 신포니아 테크놀로지 가부시끼가이샤
Priority to PCT/JP2010/068051 priority patent/WO2011046171A1/en
Publication of KR20170087523A publication Critical patent/KR20170087523A/en
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Publication of KR101940435B1 publication Critical patent/KR101940435B1/en

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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769Storage means
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733Overhead conveying
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736Loading to or unloading from a conveyor
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00Material or article handling
    • Y10S414/135Associated with semiconductor wafer handling
    • Y10S414/14Wafer cassette transporting

Abstract

SUMMARY OF THE INVENTION An object of the present invention is to provide a carrier movement load promoting device which does not require updating (replacement) of an existing load port. The carrier movement load promoter 1 is installed to the load port 6 on which the FOUP 8 is loaded. This carrier moving load promoter 1 is configured to move the upper portion of the loading platform 6 and the loading reel 2 of the loading port 6 in the horizontal direction A carrier transfer carriage 3 for carrying the transfer of the FOUP 8 between the loading table 61 and the temporary separator 2 by raising and lowering the FOUP 8, (3) and the hoop (8) between the loading platform (61) or the false objet (2) and the OHT (7) (5) for controlling the operation of the carrier transfer carriage (3) so as to avoid contact of the carrier (8).

Description

{CARRIER TRANSFER FACILITATING DEVICE}

The present invention relates to a carrier movement load promoting device for shortening a carrier waiting time of a carrier to a load port.

Such a technique is described, for example, in Patent Document 1. [ The transport system described in Patent Document 1 is provided with a load port, a relay unit disposed adjacent to the load port, and a carrier moving load unit built in the load port and the relay unit. The carrier moving load device has a carrier moving device and a lift device provided below the loading port of the load port and the relay unit. The transport of the carrier to the load port (group of the load ports) is performed by a transporting vehicle such as OHT (Overhead Hoist Transfer). According to this conveying system, it is possible to place a carrier (load a carrier) and a peak (take a carrier) by moving the OHT one time, thereby shortening the conveyance waiting time of the carrier without adopting a device having a large number of load ports .

Japanese Patent Application Laid-Open No. 2008-244416

However, in the conveyance system described in Patent Document 1, since the carrier moving load device is built in the load port and the relay unit itself (inside), it is difficult to carry out the conveyance to the existing load port (load port without the carrier moving load device) In the application of the system, the existing load port can not be used as it is. That is, there has been a problem in that it is necessary to modify the existing load port or update (replace) the load port expression.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a carrier movement load promoting device which does not require updating (replacement) of an existing load port.

The present invention relates to a device for promoting the movement of a carrier mounted on a load port on which a carrier carried by a carrier carrying means is loaded. The device includes: a provisional rehabilitation device for rehiring a carrier; A carrier moving carriage which travels in a horizontal direction and lifts and raises the carrier to carry the carrier between the carriage and the carriage, a support member for supporting the carriage and the carriage carriage carriage, And a transport load balancing control section for controlling the operation of the carrier transporting lading carriage so as to avoid contact between the carrier transporting lading carriage and the carrier during the transmission of the carrier between the carrier lifting section and the carrier transporting section, Carrier transport load promoter.

According to the present invention, the carrier moving carriage carriage runs in the horizontal direction above the carriage of the load port, so as to carry the carrier between the carriage and the carriage. In addition, the false rejects and the carrier transport truck are supported by the support members. The operation of the carrier transfer carriage is controlled so as to avoid contact between the carrier transfer carriage carriage and the carrier during transfer of the carrier between the load port of the load port or the carrier and the carrier carriage by the carriage carriage control unit .

As a result, it is possible to carry the carrier by using the upper space of the load port of the load port. As a result, there is no need to embed the carrier transfer device in the load port itself (as in the prior art), and the subsequent mounting of the carrier transfer device (carrier transfer device) (addition to the existing load port) Lt; / RTI > That is, the existing load port can be used as it is.

Further, in the present invention, it is preferable that the carrier transporting means is a transporting means that travels above the carrier transporting carriage, and the transporting and stacking control portion controls the transporting means It is preferable that the carrier transfer carriage is retracted to the avoided position. Further, it is preferable that the retreat position of the carrier transporting carriage is a position where the next operation is possible immediately.

According to this configuration, both the carrier transfer carriage and the carrier transfer means travel above the loading table of the load port. Thus, the upper space of the loading table can be used more effectively, and the space of the entire carrier transporting system can be saved.

Further, in the present invention, it is preferable that the carrier transporting means is a transporting means for transporting the carrier in one direction, the provisional dressing is arranged on the downstream side of the carrier in the carrying direction of the carrier, When the processing is completed, it is preferable that the processed carrier on the loading table is immediately loaded onto the rearmost bed.

According to this configuration, it is possible to shorten the time for which the processed carrier remains on the load port of the load port. As a result, the waiting time for conveying the carrier to the load port can be further shortened.

Further, in the present invention, it is preferable that the bottom level of the carrier when the carrier is lifted by the carrier transfer carriage is higher than the top level of the carrier placed on the loading table and the temporary table .

According to this configuration, it is possible to move the carrier transversely beyond the object of loading of the load port or another carrier positioned on the object. As a result, even if a plurality of existing load ports are disposed adjacent to each other, it is possible to carry the carrier between all the load ports and the remainder, thereby shortening the carrier waiting time for the carrier to the load port.

Further, in the present invention, it is preferable that the load port and the provisional abutment are arranged so as to be adjacent to each other, and the bottom level of the carrier when the carrier is lifted by the carrier movement load balancer is located on the stacking platform and the abutment Is lower than the upper surface level of the carrier in the state of " on "

According to this configuration, the height at which the carrier moving load carriage travels can be suppressed as low as possible. As a result, the height of the carrier moving load promoter can be suppressed as a whole, and a compact carrier moving load promoting device can be provided. In addition, since the amount of lift of the carrier is small, the operation time of the carrier transfer carriage can be shortened, and as a result, the waiting time for conveying the carrier to the load port can be further shortened.

Further, in the present invention, it is preferable that the support member comprises: a running rail arranged in a horizontal direction and on which the carrier moving loading car runs; at least two leg members provided so as to extend downward from the running rail; And a caster mounted on the frame.

According to this configuration, a self-supporting freestanding carrier movement load promoter can be made, which makes it easier to apply to a conventional load port. As a result, the installation work time of the carrier movement load promoting device can be shortened, and the stopping time of existing factory facilities can be shortened. In addition, moving installation (transfer of the carrier movement load promoting device) for other process devices becomes easier.

According to the present invention, it is possible to carry the carrier by using the upper space of the loading port of the load port, and as a result, it becomes possible to mount the carrier moving load accelerating device (carrier moving loading device) later. Thereby, it is possible to provide a carrier movement load promoting device which does not require updating (replacement) of the existing load port. In addition, it is also excellent in expandability because it is possible to install the apparatus for other process apparatuses (i.e., to install the carrier movement load promoting apparatus).

1 is a schematic front view showing a carrier movement load promoting device according to a first embodiment of the present invention.
2 is a schematic plan view (AA arrow view) of the carrier movement load promoting device shown in Fig.
Fig. 3 is a diagram showing the conveying flow of the hoop. Fig.
Fig. 4 is a diagram showing the conveying flow of the hoop. Fig.
Fig. 5 is a diagram showing the transportation flow of the hoop. Fig.
Fig. 6 is a diagram showing the transportation flow of the hoop. Fig.
Fig. 7 is a schematic perspective view showing a modified example of the carrier movement load promoting device according to the first embodiment. Fig.
8 is a schematic front view showing a carrier movement load promoting device according to a second embodiment of the present invention.
9 is a schematic front view showing a carrier movement load promoting device according to a third embodiment of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

(Carrier transport system)

The configuration of the carrier transport system 50 and the carrier transport load promotion device 1 will be described with reference to Figs. 1 and 2. Fig. 1, the carrier transport system 50 includes an OHT 7 (overhead hoist transfer) running on the ceiling in the factory, a rail A load port 6 provided below the rail 9 and a carrier movement load promoting device 1 provided to the load port 6. The load port 6 is provided on the lower side of the rail 9,

(OHT)

The OHT 7 is a carrier transporting means (carrier transporting vehicle) that travels above the carrier transporting carriage 3 to be described later and has a hoist portion 71 capable of vertically moving by belt driving. The OHT 7 suspends the hoop 38 (8) (FOUP (Front Opening Unified Pod)) by the hoist portion 71 and travels in one direction to carry the hoop 38 (8). An example of a carrier is described as a FOUP.

Further, the carrier transporting means is not an OHT (7) but also an OHS (Overhead Shuttle), an RGV (Rail Guided Vehicle), an AGV (Automated Guided Vehicle) do. The RGV and the AGV are carrier carrying means for traveling on the floor side in the factory.

The hoop 38 (8) has a main body 81 and a flange portion 82 mounted on the upper surface of the main body 81. For example, a plurality of semiconductor substrates are housed in the main body 81. The hoop 38 (8) is lifted up to the OHT 7 by the flange portion 82 and transported. The hoop 38 (8) corresponds to a carrier in the present invention. Further, the carrier is not limited to the hoop 38 (8).

[Rail (orbit)]

The rail (9) is installed by hanging from the ceiling of the factory. When the carrier conveying means is RGV, the rail (orbit) is installed on the floor of the factory or the like.

(Load port)

The load port 6 is a device for opening and closing the lid 83 (see Fig. 2) of the FOUP 8 mounted on the loading table 61. Fig. A loading table 61 is provided on the front surface side of the load port 6. On the rear surface side of the load port 6, a processing apparatus (not shown) for processing a semiconductor substrate or the like is disposed.

(The carrier movement load promoting device of the first embodiment)

The carrier moving load accelerating device 1 includes a movable slider 2, a carrier moving load carrier 3, a supporting member 4 for supporting the movable slider 2 and the carrier moving loading carriage 3, And a controller 5 (a mobile loading and unloading control device) for controlling the operation of the loading carriage 3.

(A)

The reel 2 is a lathe on which the hoop 8 is mounted. The wrist strap 2 includes a bracket 21 mounted on a side surface of the leg member 42 of the support member 4 and a bracket 22 fixed to the upper surface of the bracket 21. In the present embodiment, the false obj ect 2 is disposed on the downstream side in the carrying direction of the FOUP 8 with respect to the stacking table 61 (the load port 6).

(Carriage moving load balancing)

The carrier transporting carriage 3 travels horizontally above the loading platform 61 and the loading platform 2 of the load port 6 and lifts and hoists the hoop 8, (2) to move the hoops (8).

The carrier transfer carriage 3 is provided with a carriage 31 on which wheels are mounted and a lift device 32 mounted on the carriage 31. The lift apparatus 32 is, for example, driven by a belt. The carrier transporting carriage 3 travels in the horizontal direction above the pallet 61 and the pallet 2 of the load port 6 by means of the pallet 31. By the lift device 32, And lifts the hoop 8. There may be a plurality of carrier transporting carriages 3.

(Supporting member)

The support member 4 is disposed horizontally and has an upper surface thereof formed by a running rail 41 on which the carrier moving loading carriage 3 travels and four leg members 41 extending vertically downward from the end of the running rail 41 42). As shown in Fig. 2, the running rail 41 is composed of two rail members 41a arranged in parallel and two connecting members 41b connecting the rail members 41a. The gap between the two rail members 41a is such that the FOUP 8 ascending and descending between the rail members 41a does not interfere with the rail member 41a. Likewise, the position of the connecting member 41b is a position avoiding the vertical upper portion of the FOUP 8 so that the FOUP 8 and the connecting member 41b are not in contact with each other during lifting and lowering of the FOUP 8. [

In this embodiment, the support members 4 are installed upright with respect to the bottom surface in the factory by the four leg members 42, and do not contact the load port 6. [ Further, a bracket (not shown, a constituent member of a support member) or the like may be mounted on the rod port 6 to support the rod port 6. Further, the rail member 41a on the side of the process apparatus may be mounted on the process apparatus.

(controller)

The controller 5 is configured to avoid contact between the carrier transfer carriage 3 and the FOUP 8 during transfer of the FOUP 8 between the loading table 61 or the recharter 2 and the OHT 7. [ And has a mobile loading and unloading control unit for controlling the operation of the carrier moving loading and unloading carriage 3 therein. Here, the mobile loading and unloading control unit is, for example, a program unit of a microcomputer built in a controller. The controller 5 is disposed in the lower space of the reel unit 2 and is attached to the side surface of the leg member 42 of the support member 4.

(Operation of Carrier Movement Accelerator)

Next, an example of the conveying flow of the FOUP 8 using the carrier movement load promoter 1 will be described with reference to Figs. 3 to 6, while the controller 5 Control of the carrier transfer carriage 3 by the control device will be described. In addition, the movement of the carrier transfer carriage 3 described below is realized by the mobile carriage control unit built in the controller 5. [

(Retraction of the carrier transport load carriage)

When the OHT 7 intends to load the FOUP 8 on the loading table 61 of the load port 6, the carrier moving loading carriage 3 is moved by the signal from the controller 5 to the loading table 61 (Step (1)). In the present embodiment, the carrier-moving pallet truck 3 is retracted to a position above the false dismantlement 2.

3, the running rail 41 may be extended to the downstream side in the carrying direction with respect to the reel stopper 2, as shown by a virtual line (two-dot chain line). Then, the carrier transfer carriage 3 may be retracted to a position where the temporary separator 2 is not located below (step (1) -2). According to this, the carrier transfer carriage 3 does not interfere with the transfer of the hoops between the rewinder 2 and the separate OHT.

When the OHT 7 tries to load the hoop 8 on the loading table 61 of the load port 6, the carrier transfer loading carriage 3 is positioned above the loading table 61 It is confirmed by the controller 5 that the carrier transfer carriage 3 is not positioned above the loading table 61. In this case,

(Loading hoop by OHT)

The OHT 7 in a state holding the FOUP 8 travels to a position above the loading table 61 of the load port 6 (step (2)). When the OHT 7 arrives at a position above the loading table 61 of the load port 6, the OHT 7 lowers the FOUP 8 on the loading table 61 (step (3)).

(Receipt of another hoop by OHT)

Next, as shown in Fig. 4, the OHT 7 pulls up the hoist portion 71, and then starts traveling to the upper position of the false harness 2 (Step (4)). On the other hand, on the condition that the OHT 7 starts traveling, or the hoist portion 71 is not present in the traveling space of the carrier moving loading carriage 3 above the loading carriage 61, Is controlled by the controller 5 and moves toward the upper position of the loading table 61 from the upper position of the falsehood 2 (step (5)).

As shown in FIG. 4 and the like, on the rewinder 2, a processed hoop (not shown) for housing a semiconductor substrate or the like processed by a process apparatus (not shown) disposed on the rear surface side of the load port 6 (The FOUP 18 is transported from the loading table 61 to the loading table 2 by the carrier transfer loading carriage 3).

5, when the empty OHT 7 that does not hold the FOUP 8 arrives at a position above the fritting receptacle 2, the OHT 7 is placed in a state of being processed on the false litter 2 (Step (6)). Thereafter, the OHT 7 returns the FOUP 18 to a predetermined position (step (7)).

According to this conveying system 50, the position of the hoop (loading of the hoop [step (3)] and the peak (receiving of the hoop [step (6) Peak) can be performed. Therefore, it is possible to shorten the conveyance waiting time of the hoop without employing a device having a large number of load ports. In other words, the conveyance efficiency of the carrier transport system 50 can be improved.

(Loading and unloading of the hoop by the carrier transport load carriage)

When the carrier transfer carriage 3 arrives at a position above the loading table 61, the semiconductor substrate or the like is processed by a processing apparatus or the like, and a hoop 8 (a processed hoop 8 ), The controller 5 waits for the carrier-moving pallet truck 3 to stand at a position above the pallet 61.

Here, when the processing of the FOUP 8 is completed, the controller 5 controls the carrier transfer carriage 3 to immediately move the processed hoops 8 on the pallet 61 onto the pallet 2 . More specifically, as shown in FIG. 6, when the semiconductor substrate on which the FOUP 8 on the loading table 61 has been processed is housed, the carrier transfer loading carriage 3 immediately hangs up the FOUP 8 (Step (8)), and the hoop (8) is lowered (step (10)) on the false slider (2).

The loading rest 6 is placed on the loading table 61 by placing the loading reed 2 on the downstream side of the loading belt 61 in the carrying direction of the FOUP 8, It is possible to shorten the time for which the processed hoops remain. As a result, it is possible to shorten the waiting time for conveying the FOUP to the load port 6. When the processing of the FOUP 8 is completed, it refers to a state where the FOUP 8 is housed in the main body 81 of a semiconductor substrate or the like that has been processed with a semiconductor substrate or the like by a process apparatus or the like and has been processed.

In the present embodiment, the bottom level H1 of the FOUP 8 (the main body 81 of the FOUP 8) when the FOUP 8 is lifted by the carrier transporting carriage 3, Is lower than the upper surface level h1 of the FOUP 8 (the flange portion 82 of the FOUP 8) lying on the base 61 and the reel 2.

In addition, there may be a plurality of load ports 6 (the loading table 61) and a plurality of temporary objects 2. Here, the bottom level H1 of the FOUP 8 when lifting the FOUP 8 is lower than the top level h1 of the FOUP 8 lying on the stacking table 61 and the reattachment bin 2 Is lower than the upper level h1 of the upper level h1 of the upper surface level h1 of the hoop 8 placed on each of the pallet 61 and the reel 2, ) Is low.

The level H1 of the bottom surface of the FOUP 8 when the FOUP 8 is lifted is determined by the installation level of the running rail 41 and the lift amount of the lift apparatus 32 of the carrier transporting bogie 3 .

In this embodiment, the upper surface level of the loading table 61 and the upper surface level of the false remainder 2 are equal to each other. However, there may be a case where the upper surface level of the loading table 61 and the upper surface level of the false remainder 2 are different .

6, the lift height of the FOUP 8 from the loading table 61 (or the rear wheel 2) {the lift amount of the FOUP 8 by the carrier moving load carriage 3 (The distance between the upper surface of the loading table 61 (or the rear wheel 2) and the bottom surface of the FOUP 8) is preferably minimized.

As described above, according to the carrier movement load promoter 1, it is possible to carry out the movement of the FOUP 8 by using the space above the loading table 61 of the load port 6. As a result, it is no longer necessary to incorporate a carrier transfer device in the load port itself (as in the prior art), and later mounting of the carrier transfer device (carrier transfer device) becomes possible. That is, the existing load port can be used as it is.

Here, in the one-direction transporting system of OHT described in Patent Document 1, one load port and one relay unit are disposed adjacent to each other. On the other hand, the front side (the side on which the carrier is mounted) is determined for the load port and the relay unit. As a result, there has been a left-right specification for a single set of transport systems (one load port, one relay unit, and one carrier transport stacker).

However, as described above, the carrier movement load promoter 1 can be mounted later on the existing load port. That is, in the one-direction transporting system using the OHT, it is possible to appropriately arrange the movable reattachment 2 of the carrier movement load promoter 1 on the upstream side and the downstream side of the existing load port ), There is no problem of the left and right specifications (excellent in expandability).

In the above embodiment, the FOUP 8 untreated on the loading table 61 of the load port 6 is first loaded by the OHT 7 and the processed FOUP 8 is placed on the loading table The FOUP 8 that has not yet been processed on the false disposal 2 is removed by the OHT 7 and the FOUP 8 is transported by the OHT 7 to the reel 2 And then the untreated hoops 8 may be loaded and unloaded from the temporary remover 2 onto the loading table 61 by the carrier transfer loading carriage 3. [

In this case, when the OHT 7 tries to load the FOUP 8 on the false slider 2, the carrier movement loading carriage 3 is moved upward from the upper side of the false slider 2 by the signal from the controller 5 (In the above embodiment, the upper position of the loading table 61). The untreated FOUP 8 refers to the FOUP 8 in a state where an unprocessed semiconductor substrate or the like is housed.

In the above embodiment, the example of disposing the false dislocation 2 on the downstream side in the carrying direction of the FOUP 8 relative to the loading platform 61 (the load port 6) Port 6)] may be arranged on the upstream side of the FOUP 8 in the transport direction.

In this case as well, the FOUP 8 untreated on the false disposal 2 is firstly dug by the OHT 7, and then the untreated FOUP 8 is transferred from the false disposal 2 to the loading table 61. [ The FOUP 8 that has not yet been processed on the loading table 61 of the load port 6 is loaded by the OHT 7 on the contrary, The processed hoops 8 may be carried by the carrier transfer carriage 3 from the loading table 61 onto the temporary table 2.

What is common is that the controller 5 controls the position of the loading table 61 or the upper side of the loading table 61 or the rear loading table 2 during the transfer of the FOUP between the loading table 61 or the temporary table 2 and the OHT 7 So as to avoid the contact of the carrier transfer carriage 3 with the hoop by controlling the operation of the carrier transfer carriage 3 so as to retract the carrier transfer carriage 3 to a position where the carrier transfer carriage carriage 3 is evacuated.

(Modification of Carrier Moving Transport Accelerator)

With reference to Fig. 7, a modified example of the carrier movement load promoting device 1 according to the first embodiment will be described. In addition, in the description of the carrier movement load promoting apparatus 101 according to the present modified example, a difference from the carrier movement load promoting apparatus 1 according to the first embodiment will be mainly described. Further, in Fig. 7, illustration of the false rejects 2 and the controller 5 is omitted.

As shown in Fig. 7, the carrier movement load promoting apparatus 101 according to the present modification example further comprises a caster 43 and an area sensor 44. Fig.

In this modified example, four casters 43 are attached to the lower ends of the four leg members 42, respectively. In addition, the area sensors 44 are mounted on the two leg members 42, which are opposed to the FOUP conveying direction, in a state in which they are set with respect to the load port 6.

By attaching the caster 43 to the lower end portion of the leg member 42, the self-supporting type carrier moving load promoter 101 can be driven, and the application to the existing load port becomes easier. In addition, by providing the area sensor 44, it is possible to prevent the movement of the hoop by the OHT 7 and the lateral movement of the hoop by the carrier transfer carriage 3, It is possible to detect an intruder of the worker and prevent an accident such as an injury of the worker from occurring. In addition, by making the supporting member 4 a housing structure, the area sensor 44 can be easily mounted. In addition, in the carrier moving apparatus described in Patent Document 1, there is a problem that it is difficult to mount an area sensor that generates a beam reaching from the end portion to the end portion of the carrier moving apparatus.

(Second Embodiment)

Next, a description will be given of the carrier movement load promoting apparatus 201 according to the second embodiment with reference to Fig. In the description of the present embodiment, differences from the first embodiment will be mainly described.

8, the carrier movement load promoter 201 according to the present embodiment is configured such that the provisional remoders 2a and 2b are positioned on both sides of the two adjacent load ports 6a and 6b, . In addition, the reel unit 2a and the reel unit 2b are arranged so as to be adjacent to the load port 6a and the load port 6b, respectively. In the same way as the carrier movement load promoter 1 according to the first embodiment, the FOUP 8 (the body of the FOUP 8) when the FOUP 8 is lifted by the carrier transfer carriage 3 The bottom level is configured to be lower than the level of the top surface of the hoop 8 (the flange portion of the FOUP 8) in a state in which the load port 6 and the false harness 2 are placed.

An outline of an example of the conveying flow of the FOUP 8 using the carrier movement load promoter 201 will be described below.

First, the OHT 7 moves the fulcrum 8 (step (1)) to the downstream side in the transport direction (step (2)) on the reel absorber 2a And moves to the loading stand of the port 6a. Here, it is assumed that another processed hoop 18 is already loaded on the loading table of the load port 6a.

When the OHT 7 tries to mount the FOUP 8 on the false slider 2a by the signal from the controller 5, And is retreated to a position avoiding the upward position. In the present embodiment, the carrier-moving pallet truck 3 is retracted to a position above the loading stand of the load port 6b.

Next, the OHT 7 moved above the loading table of the load port 6a pulls up the FOUP 18 on the loading table, and then transfers the FOUP 18 to a predetermined position (step (3)). . In this example as well, it is possible to place a hoop (hoop loading (step (1)) and peak (hoop receiving (step (3)) by moving the OHT 7 once, It is possible to shorten the conveyance waiting time of the hoop without adopting the apparatus (this also applies to the third embodiment to be described later).

On the other hand, the controller 5 controls the carrier transfer carriage 3 to move the untreated hoops 8 on the recharging device 2a to the loading carriage of the load port 6a (step (4)) . Thereby, the hoop 8 is moved and loaded.

According to the carrier movement load promoter 201 according to the present embodiment, the height at which the carrier moving carriage 3 travels (in other words, the height of the running rail 41) can be suppressed to a low level. As a result, the height of the carrier moving load promoter 201 can be suppressed as a whole, and a compact carrier moving load promoting device can be provided. Since the hoisting amount of the hoop is small, the operation time of the carrier transfer carriage 3 can be shortened, and as a result, the waiting time for transferring the hoop to the load port 6 can be further shortened.

(Third Embodiment)

Next, with reference to Fig. 9, a description will be given of the carrier movement load promoting device 301 according to the third embodiment. In the description of the present embodiment, differences from the first embodiment will be mainly described.

As shown in Fig. 9, the carrier movement load promoter 301 according to the present embodiment is provided so as to surround all of a plurality of (five) load ports 6a to 6e disposed adjacent to each other. The fake receptacle 2 on which the FOUP 8 is mounted is arranged so as to be positioned on the downstream side of the load port 6e so as to be adjacent to the most downstream-side load port 6e.

It is also possible to dispose the temporary remoter 2 between any one of the load ports 6a to 6e (there may be a gap between the load ports) The rechargeable battery 2 may be disposed so as to be positioned on the upstream side of the load port 6a.

The difference between the carrier movement load promoting device 1 according to the first embodiment and the carrier movement load promoting device 301 according to the present embodiment is not only the length of the running rail 41 caused by the difference in the number of load ports, And the lifting height of the FOUP 8 by the carrier transporting carriage 3. In the present embodiment, the bottom level H2 of the FOUP 8 (the main body 81 of the FOUP 8) when the FOUP 8 is lifted by the carrier transfer carriage 3 is lower than the bottom level H2 of the load port 6 is higher than the upper surface level h1 of the FOUP 8 (the flange portion 82 of the FOUP 8) in a state of being placed on the mounting table and the false bar 2.

The bottom level H2 of the FOUP 8 at the time of lifting the FOUP 8 is the level of the top surface of the FOUP 8 in a state where the bottom level H2 of the FOUP 8 is placed on the loading stand of the load port 6, h1 indicates that the upper level h1 of the highest level among the upper surface level h1 of the hoop 8 placed on the loading stand of the load pots 6a to 6e and the false harness 2, The bottom level H2 is higher than the bottom level H2. In this embodiment, the upper surface level of the loading stand of the load pots 6a to 6e and the upper surface level of the false harness 2 are equivalent.

The bottom level H1 of the FOUP 8 at the time of lifting the FOUP 8 is set to a value equal to or less than a predetermined value by the installation level of the running rail 41 and the lift amount of the lift apparatus 32 of the carrier- .

According to the carrier movement load promoter 301 according to the present embodiment, the FOUP 8 can be moved transversely beyond the other FOUP images located on the loading table of the load port 6. [ As a result, even if a plurality of existing load ports are arranged adjacent to each other, it is possible to carry the carrier between all the load ports and the remainder, and to shorten the carrier waiting time for the carrier to the load port. The carrier movement load promoting apparatus 301 according to the present embodiment is configured such that the bottom level H2 of the FOUP 8 at the time of lifting the FOUP 8 is set to the top surface level h1 of the FOUP 8 ), It is easy to apply to existing load port groups arranged adjacent to each other.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, but can be variously modified within the scope of the claims.

1: Carrier moving load acceleration device
Two:
3: Carrier moving load carriage
4: Support member
5: Controller
6: Load port
7: OHT (carrier carrying means)
8: Hoop (carrier)
61: Stacking table

Claims (7)

  1. A carrier transporting means for transporting the carrier,
    A carrier movement load promoting device installed on a plurality of load ports,
    A carrier for conveying the carrier conveyed by the carrier conveying means,
    A load port provided on an outer side of the load port for moving the load port of the load port and the upper portion of the reel in a horizontal direction and raising and lowering the carrier to move the carrier between the load reel and the reel, A loading truck,
    And a support member for supporting the temporary rider and the carrier transporting bogie,
    Wherein the carrier transporting means is a transporting means that travels above the carrier transporting carriage,
    Wherein the support member includes a running rail on which the carrier moving load carriage travels in a horizontal direction,
    The traveling rail is constituted by two rail members arranged in parallel. The distance between the two rail members is set so that the carrier lifting and lowering between the rail members does not interfere with the rail member,
    Wherein said carrier is capable of carrying said carrier between said temporary retention stand and an arbitrary stacking table of a plurality of loading ports of said load port.
  2. The method according to claim 1,
    The carrier transporting means is configured to be capable of transporting the carrier with respect to the provisional remainder by lifting the hoist portion provided in the carrier transporting means in a state where the carrier transporting means is stopped at a position overlapping with the provisional reward in a vertical direction ,
    Wherein said carriage rails form a space through which said hoist portion and said carrier can pass in the vertical direction when said carrier carrying means in a stationary state at said stop position for temporarily holding the carrier moves and loads the carrier, .
  3. 3. The method of claim 2,
    Wherein said traveling rail is constituted by a pair of rail members arranged with a space therebetween in the lateral width direction of said carrier transporting carriage in a state in which the hoist portion supporting the carrier forms a clearance allowing passage in the vertical direction, Carrier moving load acceleration device.
  4. 4. The method according to any one of claims 1 to 3,
    Wherein a lower end portion of the carrier held by the carrier carrying means is higher than an upper end portion of the carrier moving loading carriage.
  5. 4. The method according to any one of claims 1 to 3,
    A transport load balancing control unit for controlling the operation of the carrier transporting load balancing so as to avoid the contact between the carrier transporting load balancing and the carrier during the transfer of the carrier between the load balancer or the reel and the carrier carrying unit, And,
    Wherein the transport load balancing control unit retracts the carrier transport load balancer to a position that avoids an upper position of the loading rack or the empty reloading bin during the transfer.
  6. (Carrier transporting means) which is capable of traveling along a rail disposed on the ceiling side and capable of lifting and lowering a hoist portion for supporting a Hoop (carrier), and for hoisting a hoop transported by the OHT The reel is installed,
    And a plurality of load ports, each of which is provided with a loading unit,
    The provisional remount is disposed at a position different from the load port in the running direction of the OHT,
    Wherein the OHT is configured to be able to move the hoop relative to the load port by lifting the hoist portion in a state where the OHT is stationary at a load port stop position set at a position overlapping with the load port in the vertical direction, The hoist part is movable up and down with the hoist part in a stopped state at a stop position for temporary replacement set at a position overlapping the hoist part,
    A carrier lifting truck capable of lifting and lowering a hoop so as to be capable of lifting and lowering the hoop between the reel and the load port is vertically overlapped with the OHT and the load port, A loading position for the load port for loading and unloading the FOUP with respect to the load port, a moving loading position for the FOUP to move the FOUP between the load port and the load stop, Avoids interference with the hoist portion and the hoop when the OHT moves and moves the hoop between the hoist portion and the hoop when the OHT moves and loads the hoist between the hoist portion and the hoop, Wherein the load port and the OHT are arranged in a circumferential direction at a height between the load port and the OHT, And,
    A support member which has a running rail for guiding movement of the carrier moving loading carriage along the running direction and which does not contact the load port for supporting the carrier moving loading carriage is provided,
    The traveling rail is configured to form a space through which the hoist and the hoop can pass in the vertical direction when the OHT, which is stationary at the stop position for the load port and at the stop position for the temporary rest, stops moving the hoop ,
    Wherein the hoisting machine is capable of transporting the hoop between the pick and place and any of the stacking tables of the plurality of load ports,
    Wherein the carrier movement load accelerating device is movable independently of the load port in a state of supporting the movable slider.
  7. The method according to claim 1,
    Wherein the carrier movement load promoting device is movable independently of the load port.

KR1020177019792A 2009-10-14 2010-10-14 Carrier transfer facilitating device KR101940435B1 (en)

Priority Applications (3)

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JP2009237751A JP5445015B2 (en) 2009-10-14 2009-10-14 Carrier transfer promotion device
JPJP-P-2009-237751 2009-10-14
PCT/JP2010/068051 WO2011046171A1 (en) 2009-10-14 2010-10-14 Carrier transfer facilitating device

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KR20170087523A (en) 2017-07-28
CN102576688B (en) 2015-01-07
US9230844B2 (en) 2016-01-05
CN102576688A (en) 2012-07-11
TWI541181B (en) 2016-07-11
JP2011086733A (en) 2011-04-28
US20120263562A1 (en) 2012-10-18
KR101760961B1 (en) 2017-07-24
KR20120095848A (en) 2012-08-29
WO2011046171A1 (en) 2011-04-21
JP5445015B2 (en) 2014-03-19

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