KR101881244B1 - Gas barrier film and electronic device using same - Google Patents

Gas barrier film and electronic device using same Download PDF

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Publication number
KR101881244B1
KR101881244B1 KR1020167032509A KR20167032509A KR101881244B1 KR 101881244 B1 KR101881244 B1 KR 101881244B1 KR 1020167032509 A KR1020167032509 A KR 1020167032509A KR 20167032509 A KR20167032509 A KR 20167032509A KR 101881244 B1 KR101881244 B1 KR 101881244B1
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KR
South Korea
Prior art keywords
layer
gas barrier
film
barrier layer
atoms
Prior art date
Application number
KR1020167032509A
Other languages
Korean (ko)
Other versions
KR20160146900A (en
Inventor
히로아키 이토
가즈토시 무로타
Original Assignee
코니카 미놀타 가부시키가이샤
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Publication date
Priority to JP2014108556 priority Critical
Priority to JPJP-P-2014-108556 priority
Application filed by 코니카 미놀타 가부시키가이샤 filed Critical 코니카 미놀타 가부시키가이샤
Priority to PCT/JP2015/065146 priority patent/WO2015182623A1/en
Publication of KR20160146900A publication Critical patent/KR20160146900A/en
Application granted granted Critical
Publication of KR101881244B1 publication Critical patent/KR101881244B1/en

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