KR101787483B1 - Laser pulse controlling apparatus and method for controlling laser pulses - Google Patents

Laser pulse controlling apparatus and method for controlling laser pulses Download PDF

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Publication number
KR101787483B1
KR101787483B1 KR1020160017860A KR20160017860A KR101787483B1 KR 101787483 B1 KR101787483 B1 KR 101787483B1 KR 1020160017860 A KR1020160017860 A KR 1020160017860A KR 20160017860 A KR20160017860 A KR 20160017860A KR 101787483 B1 KR101787483 B1 KR 101787483B1
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South Korea
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laser
laser pulses
pulse
optical modulator
modulator
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KR1020160017860A
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Korean (ko)
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KR20170096457A (en
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신동준
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주식회사 이오테크닉스
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Priority to KR1020160017860A priority Critical patent/KR101787483B1/en
Priority to PCT/KR2016/010234 priority patent/WO2017142155A1/en
Priority to CN201680081531.5A priority patent/CN108780978A/en
Priority to TW105130292A priority patent/TWI644492B/en
Publication of KR20170096457A publication Critical patent/KR20170096457A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/107—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using electro-optic devices, e.g. exhibiting Pockels or Kerr effect

Abstract

A laser pulse control apparatus and a laser pulse control method are disclosed. The laser pulse control apparatus includes a pulse laser generator for generating a plurality of laser pulses at regular time intervals, an optical modulator for selectively extracting a part of the laser pulses by driving, an electric signal applied to the optical modulator at a time And a control unit for controlling the driving of the optical modulator while varying the laser pulses according to the control signal.

Description

[0001] The present invention relates to a laser pulse controlling apparatus and a laser pulse controlling method,

The present invention relates to a laser pulse control apparatus and a laser pulse control method, and more particularly, to a laser pulse control apparatus and a laser pulse control method for controlling a laser pulse control apparatus and a laser pulse control method, A pulse laser apparatus and a laser pulse control method.

For the processing of precision parts such as the electronics industry, laser processing technology is becoming more and more technologically advanced by super-precision, super-fast processing, and large-area processing. In particular, ultra-precision machining is essential to process components in the microelectronics industry, including semiconductors, displays, solar cells, next-generation high-value / high-performance PCBs, and next-generation packaging industries.

For such micro-sized ultra-precision machining, high performance laser specifications are also required. In order to miniaturize the processing, a laser in the ultraviolet region is used, or a femtosecond and picosecond pulsed laser having a very short pulse width is used. At the same time, a high-quality laser in which the spatial distribution of the laser beam is in a single mode is required. In addition, pulse lasers with high repetition rate and high output are required for high speed and large area.

Q (Q) switching and mode locking methods are used as a method of operating the laser with pulses. In the laser diode, a method of directly modulating the current to be applied and operating as a pulse is used.

Conventionally, in order to generate a laser pulse in a burst mode, a method of implementing a burst mode by generating a path difference after dividing a pulse by using a single polarizer is used. However, this method has a limitation of the laser pulse energy because it generates and divides one pulse. In addition, an optical system for dividing the laser beam is additionally required, and it may be difficult to arbitrarily adjust the number of laser pulses in the burst mode.

One embodiment of the present invention relates to a pulse control device capable of operating output laser pulses in a burst mode and adjusting the peak of laser pulses by changing an electrical signal applied to an optical modulator with time, Control method.

A pulse control apparatus according to an embodiment of the present invention includes: a pulse laser generator for generating a plurality of laser pulses at a predetermined time interval; An optical modulator for selectively extracting a part of the laser pulses by driving; A controller for controlling driving of the optical modulator while changing an electrical signal applied to the optical modulator with time; And an optical amplifier for amplifying the extracted laser pulses.

The optical modulator may include an electro optic modulator (EOM).

The electrical signal includes a voltage, and the control unit may apply a time-varying voltage to the electro-optic modulator.

The output of the laser pulses from the optical amplifier may be constant or vary over time.

The optical modulator may comprise an acoustic optics modulator (AOM).

The electric signal includes high-frequency power, and the control unit may apply high-frequency power that varies with time to the acousto-optic modulator.

The output of the laser pulses from the optical amplifier may be constant or vary over time.

A pulse control method according to an embodiment of the present invention includes generating a plurality of laser pulses at a constant time interval; Selectively extracting a portion of the laser pulses by driving an optical modulator; And amplifying the extracted laser pulses, wherein the extracting step is performed by changing a voltage or a high frequency power applied to the optical modulator by the control unit over time.

The optical modulator includes an electro-optic modulator driven by voltage application, and the control unit may apply a voltage varying with time to the electro-optic modulator.

The voltage applied to the electro-optic modulator may decrease with time or increase with time.

The output of the amplified laser pulses may be constant or change over time.

The optical modulator includes an acousto-optic modulator driven by application of high-frequency power, and the control unit may apply high-frequency power that varies with time to the acoustooptic modulator.

The high-frequency power applied to the acousto-optic modulator may decrease with time or increase with time.

The output of the amplified laser pulses may be constant or change over time.

According to the above-mentioned problem solving means of the present invention, by arbitrarily adjusting the electric signal applied to the optical modulator, it is possible to realize various burst modes according to the type of object to be processed, thereby increasing the productivity.

In addition, it can be spatially simplified as compared with generating a burst mode of a laser pulse using an optical system.

1 schematically shows a pulse control apparatus according to an embodiment of the present invention.
2A is a graph showing the relationship between the energy accumulated in the amplification medium and the saturation time when the excitation energy is continuously applied to the optical amplifier.
2B and 2C are graphs showing the energy accumulated in the optical amplifier medium and the input laser pulse and the output laser pulse when the laser pulse is periodically inputted and amplified and outputted while continuously applying excitation energy to the optical amplifier.
3A to 3D illustrate a process of selectively extracting and amplifying laser pulses using a pulse control apparatus according to an embodiment of the present invention.
4A to 4D illustrate a process of selectively extracting and amplifying laser pulses using a pulse control device according to an embodiment of the present invention.
5A to 5D illustrate a process of selectively extracting and amplifying laser pulses using a pulse control apparatus according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

Throughout the specification, when a part is referred to as being "connected" to another part, it includes not only "directly connected" but also "electrically connected" with another part in between . Also, when an element is referred to as "comprising ", it means that it can include other elements as well, without departing from the other elements unless specifically stated otherwise.

1 schematically shows a pulse control apparatus 100 according to an embodiment of the present invention.

Referring to FIG. 1, the pulse control apparatus 100 includes a pulse laser generator 110, an optical modulator 120, a controller 130, and an optical amplifier 140.

The pulse laser generator 100 can continuously generate a plurality of laser pulses LP at regular time intervals. The pulsed laser generator 100 may be variously classified into gas, liquid, and solid laser generators depending on the type of material generating the laser. The time interval between the plurality of laser pulses LP generated in the pulse laser generator 100 may be 100 ns or less.

The optical modulator 120 may selectively extract a part of the laser pulses LP incident on the optical modulator 120. The optical modulator 120 may include an electro optic modulator (EOM) and an acoustic optics modulator (AOM).

The control unit 130 may control the driving of the optical modulator 120 by applying an electrical signal to the optical modulator 120. The controller 130 may apply a voltage when the optical modulator 120 is an electro-optic modulator. When the optical modulator 120 is an acousto-optic modulator, the control unit 130 controls the driving of the optical modulator 120 by applying high- .

When the optical modulator 120 is an electro-optic modulator, the laser pulse LP can be selectively extracted using a Pockels effect. A polarization beam splitter (PBS) (not shown) may be disposed on the optical path of the laser beam passing through the electro-optic modulator. When the controller 130 applies a voltage to the electro-optic modulator, the refractive index of the electro-optic modulator medium changes, and thus the polarization direction of the light can be changed. By using this, only a part of the laser pulses LP generated by the pulse laser generator 110 can be selectively extracted, and the intensity of the extracted laser pulses LP can also be adjusted.

For example, a polarizing beam splitter can pass a P-type light beam and reflect an S-type light beam, and the laser pulses LP passing through the electro-optic modulator can have an S-type polarization direction. Therefore, before the voltage is applied to the electro-optic modulator by the control unit 130, the laser pulses LP can not pass through the polarizing beam splitter. When the control unit 130 applies a voltage to the electro-optic modulator, the polarization direction of the laser pulses LP is rotated and can pass through the polarization beam splitter. Also, by controlling the magnitude of the applied voltage, the rotation angle of the polarization direction of the laser pulses LP can be adjusted, and thus the intensity of the extracted laser pulses LP can be controlled.

When the optical modulator 120 is an acousto-optic modulator, when the controller 130 applies high-frequency power to the acousto-optic modulator, diffraction of light by the diffraction grating may occur due to a periodic change in the refractive index of the acousto- have. Accordingly, a path difference may occur between the laser pulses LP incident on the acoustooptic modulator, and only a part of the laser pulses LP may be selectively extracted using the path difference. Also, by adjusting the magnitude of the high-frequency power applied to the acousto-optic modulator, the intensity of the extracted laser pulses LP can be adjusted.

The optical amplifier 140 amplifies and outputs the laser pulses LP extracted by the optical modulator 120. When the laser pulse LP is input to the optical amplifier 140, the energy of the laser pulses LP can be amplified by inverting the inversely distributed energy. The relationship between the energy accumulated in the amplification medium of the optical amplifier 140 and the amplification of the laser pulse LP will be described later.

2A is a graph showing the relationship between the energy accumulated in the amplification medium and the saturation time when the excitation energy is continuously applied to the optical amplifier 140. FIG.

Referring to FIG. 2A, accumulated energy is continuously increased until a saturation time ts for a predetermined time. The saturation time depends on the amplification medium, but in the case of rare earth ions, a range of a few microseconds to a few tens of microseconds is common.

2B and 2C show the relationship between the energy accumulated in the medium of the optical amplifier 140 and the energy of the input laser pulse LP when the laser pulse LP is periodically incident and amplified and outputted while continuously applying excitation energy to the optical amplifier 140. [ (LP) and an output laser pulse (LP).

Referring to FIG. 2B, the time interval t1 between the laser pulses LP selectively extracted by the optical modulator 120 after being generated in the pulse laser generator 110 is greater than or equal to the saturation time ts . That is, the time from when one laser pulse LP is input to the optical amplifier 140 to when the next laser pulse LP is input is equal to or greater than the saturation time ts. The energy accumulated in the amplification medium of the optical amplifier 140 before the next laser pulse LP is inputted after the amplified laser pulse LP is amplified by the optical amplifier 140 may be saturated. Therefore, the laser pulse LP inputted at the rearranged position can be sufficiently amplified, so that the output of the laser pulse LP inputted first and the laser pulse LP inputted next can be the same.

Referring to FIG. 2C, the time interval t2 between the laser pulses LP selectively extracted by the optical modulator 120 after generated in the pulse laser generator 110 may be smaller than the saturation time ts . That is, the time from when one laser pulse LP is input to the optical amplifier 140 to when the next laser pulse LP is input is smaller than the saturation time ts. When the input laser pulse LP is amplified by the optical amplifier 140 and then the next laser pulse LP is inputted, the energy stored in the amplification medium of the optical amplifier 140 is reduced . Therefore, the laser pulse LP inputted in the rear order may be less amplified than the input laser pulse LP, so that the laser pulse LP, which is input first, Lt; / RTI > If the laser pulse LP having a time interval t2 smaller than the saturation time ts is continuously input to the optical amplifier 140, Can exhibit increasingly decreasing output.

3A to 3D illustrate a process of selectively extracting and amplifying laser pulses LP using the pulse control apparatus 100 according to an embodiment of the present invention.

Referring to FIG. 3A, the laser pulses LP generated by the pulse laser generator 110 may have a constant time interval from each other. The time interval between the laser pulses LP may be less than 100 ns and may be less than the saturation time ts of the optical amplifier 140.

3B is a graph showing a voltage or a high frequency power applied to the optical modulator 120 by the controller 130. FIG. Referring to FIG. 3B, the controller 130 may apply a constant voltage or high frequency power to the optical modulator 120 at predetermined time intervals.

FIG. 3C shows laser pulses LP selectively extracted by the optical modulator 120. FIG. The laser pulse LP extracted by the optical modulator 120 may have the same output because the control unit 130 is applied with a voltage or a high frequency power that is maintained constant over time. The laser pulses LP may not be extracted during a period in which no voltage or high frequency power is applied to the optical modulator 120. [

FIG. 3D shows the laser pulses LP amplified by the optical amplifier 140 after being extracted from the optical modulator 120. FIG. Referring to FIG. 3D, the time interval between the laser pulses LP belonging to the same group may be smaller than the saturation time ts of the optical amplifier 140. Therefore, when the input laser pulse LP is amplified by the optical amplifier 140 and then the next laser pulse LP is input, the energy accumulated in the amplification medium of the optical amplifier 140 reaches the saturation state May be before. Therefore, the laser pulse LP inputted in the rear order may be less amplified than the input laser pulse LP, so that the laser pulse LP, which is input first, Lt; / RTI > If the laser pulse LP having a time interval shorter than the saturation time ts is continuously input to the optical amplifier 140, the output laser pulses LP gradually decrease Lt; / RTI > The energy accumulated in the amplification medium of the optical amplifier 140 reaches the saturation state again because no laser pulse LP is input to the optical amplifier 140 in a period in which no voltage or high frequency power is applied to the optical modulator 120 can do. At this time, when the laser pulses LP having a time interval smaller than the saturation time ts are inputted to the optical amplifier 140, the laser pulses LP indicating the gradually decreasing output can be outputted again.

The laser pulses LP are extracted in the section where the control unit 130 applies the voltage or the high frequency power to the optical modulator 120 and the time interval between the laser pulses LP may be 100 ns or less. On the other hand, the laser pulse LP is not outputted in the section where the voltage or the high frequency power is not applied to the optical modulator 120, and the time when the voltage or the high frequency power is not applied may be several hundred ns or more. Therefore, the group of laser pulses LP having a time interval of 100 ns or less can be repeated with a time period of several hundred ns or more by applying or not applying voltage or high frequency power to the optical modulator 120 in the control unit 130, 4A to 4D illustrate a process of selectively extracting and amplifying the laser pulses LP using the pulse control apparatus 100 according to an embodiment of the present invention.

Referring to FIG. 4A, the laser pulses LP generated by the pulse laser generator 110 may have a constant time interval from each other. The time interval between the laser pulses LP may be less than 100 ns and may be less than the saturation time ts of the optical amplifier 140.

4B is a graph showing a voltage or a high frequency power applied to the optical modulator 120 by the controller 130. FIG. Referring to FIG. 4B, the controller 130 may apply an increasing voltage or a high frequency power to the optical modulator 120 at a predetermined time interval.

FIG. 4C shows laser pulses LP selectively extracted by the optical modulator 120. FIG. Since the voltage or the high frequency power which increases with time is applied to the controller 130, the laser pulses LP extracted by the optical modulator 120 may have an output that increases with time. The laser pulses LP may not be extracted during a period in which no voltage or high frequency power is applied to the optical modulator 120. [

FIG. 4D shows laser pulses LP amplified by the optical amplifier 140 after being extracted from the optical modulator 120. FIG. Referring to FIG. 4D, the time interval between the laser pulses LP belonging to the same group may be smaller than the saturation time ts of the optical amplifier 140. Therefore, when the input laser pulse LP is amplified by the optical amplifier 140 and then the next laser pulse LP is input, the energy accumulated in the amplification medium of the optical amplifier 140 reaches the saturation state May be before. Therefore, the degree of amplification of the laser pulse LP inputted at the rear position may be smaller than that of the laser pulse LP inputted first. 4C, since the output of the input laser pulse LP is smaller than the output of the laser pulse LP input at a rearranged position, the laser pulse LP is amplified by the optical amplifier 140, (LPs) may be the same.

The laser pulses LP are extracted in the section where the control unit 130 applies the voltage or the high frequency power to the optical modulator 120 and the time interval between the laser pulses LP may be 100 ns or less. On the other hand, the laser pulse LP is not outputted in the section where the voltage or the high frequency power is not applied to the optical modulator 120, and the time when the voltage or the high frequency power is not applied may be several hundred ns or more. Therefore, the group of laser pulses LP having a time interval of 100 ns or less can be repeated with a time period of several hundred ns or more by applying or not applying voltage or high frequency power to the optical modulator 120 in the control unit 130, According to the embodiment, by arbitrarily adjusting the electric signal applied to the optical modulator 120, it is possible to realize various burst modes according to the type of object to be processed, Can be increased. Further, it can be spatially simplified as compared with generating the burst mode of the laser pulse LP using the optical system.

5A to 5D illustrate a process of selectively extracting and amplifying laser pulses LP using the pulse control device 100 according to an embodiment of the present invention.

Referring to FIG. 5A, the laser pulses LP generated by the pulse laser generator 110 may have a constant time interval from each other. The time interval between the laser pulses LP may be less than 100 ns and may be less than the saturation time ts of the optical amplifier 140.

5B is a graph showing a voltage or a high frequency power applied to the optical modulator 120 by the controller 130. As shown in FIG. Referring to FIG. 4B, the controller 130 may apply a voltage or a high frequency power to the optical modulator 120 at a predetermined time interval while decreasing with time.

FIG. 5C shows laser pulses LP selectively extracted by the optical modulator 120. FIG. The laser pulse LP extracted by the optical modulator 120 may have a decreasing and increasing output over time since the voltage or the high frequency power which is decreasing with time is applied to the controller 130. The laser pulses LP may not be extracted during a period in which no voltage or high frequency power is applied to the optical modulator 120. [

5D shows the laser pulses LP amplified by the optical amplifier 140 after being extracted from the optical modulator 120. FIG. Referring to FIG. 5D, the time interval between the laser pulses LP belonging to the same group may be smaller than the saturation time ts of the optical amplifier 140. Therefore, when the input laser pulse LP is amplified by the optical amplifier 140 and then the next laser pulse LP is input, the energy accumulated in the amplification medium of the optical amplifier 140 reaches the saturation state May be before. Therefore, the degree of amplification of the laser pulse LP inputted at the rear position may be smaller than that of the laser pulse LP inputted first. By adjusting the voltage or the high frequency power input to the optical modulator 120, it is possible to control the shape of the period in which the output of the laser pulse LP passing through the optical modulator 120 decreases and the shape of the increasing period. By using this, the form of the output of the laser pulse LP output by the optical amplifier 140 can be reduced and then increased to produce a symmetrical shape.

The laser pulses LP are extracted in the section where the control unit 130 applies the voltage or the high frequency power to the optical modulator 120 and the time interval between the laser pulses LP may be 100 ns or less. On the other hand, the laser pulse LP is not outputted in the section where the voltage or the high frequency power is not applied to the optical modulator 120, and the time when the voltage or the high frequency power is not applied may be several hundred ns or more. Therefore, the group of laser pulses LP having a time interval of 100 ns or less can be repeated with a time period of several hundred ns or more by applying or not applying voltage or high frequency power to the optical modulator 120 in the control unit 130, This can be called a burst mode.

According to the embodiment, by arbitrarily adjusting the electric signal applied to the optical modulator 120, it is possible to realize various burst modes according to the type of object to be processed, and thus productivity can be increased. Further, it can be spatially simplified as compared with generating the burst mode of the laser pulse LP using the optical system.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

100 ... Pulse control device
110 ... Pulsed laser generator
120 ... Optical modulator
130 ... The control unit
140 ... Optical amplifier
LP ... Laser pulse

Claims (14)

delete delete delete delete delete delete delete Generating a plurality of laser pulses at a first time interval;
Selectively extracting a portion of the laser pulses by driving an optical modulator; And
Amplifying the extracted laser pulses using an optical amplifier,
Wherein the first time interval is less than the saturation time of the optical amplifier,
Wherein the extracting step is performed by changing a voltage or a high frequency power applied to the optical modulator by the control unit over time,
Wherein the voltage or the radio frequency power applied to the optical modulator increases with time over a second time interval,
Wherein the laser pulses amplified by the optical amplifier have the same output. 9. The method of claim 8,
Wherein the optical modulator includes an electro-optic modulator driven by voltage application,
Wherein the controller applies a voltage to the electro-optic modulator. delete delete 9. The method of claim 8,
Wherein the optical modulator comprises an acousto-optic modulator driven by high-frequency power application,
Wherein the controller applies high-frequency power to the acousto-optic modulator. delete delete
KR1020160017860A 2016-02-16 2016-02-16 Laser pulse controlling apparatus and method for controlling laser pulses KR101787483B1 (en)

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KR1020160017860A KR101787483B1 (en) 2016-02-16 2016-02-16 Laser pulse controlling apparatus and method for controlling laser pulses
PCT/KR2016/010234 WO2017142155A1 (en) 2016-02-16 2016-09-12 Laser pulse control apparatus and laser pulse control method
CN201680081531.5A CN108780978A (en) 2016-02-16 2016-09-12 A kind of pulse control unit and pulse control method
TW105130292A TWI644492B (en) 2016-02-16 2016-09-20 Pulse controlling apparatus and method for controlling pulses

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Families Citing this family (1)

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Publication number Priority date Publication date Assignee Title
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0230345A1 (en) 1986-01-06 1987-07-29 Rank Taylor Hobson Limited Metrological apparatus and method using polarisation modulation
US6124706A (en) 1995-12-08 2000-09-26 Bechtel Bwxt Idaho, Llc Electro-optic voltage sensor with Multiple Beam Splitting
US20040179571A1 (en) * 2003-02-14 2004-09-16 Govorkov Sergei V. Master oscillator/power amplifier excimer laser system with pulse energy and pointing control

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4391524B2 (en) * 2003-08-19 2009-12-24 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド Link processing method and laser system using laser pulses with a specially shaped power profile.
CN101990729B (en) * 2008-03-31 2013-02-27 伊雷克托科学工业股份有限公司 Combining multiple laser beams to form high repetition rate, high average power polarized laser beam
US8309885B2 (en) * 2009-01-15 2012-11-13 Electro Scientific Industries, Inc. Pulse temporal programmable ultrafast burst mode laser for micromachining
KR101176447B1 (en) * 2011-04-28 2012-08-30 광주과학기술원 Pulse laser system with flexible burst mode operation and method of flexible burst mode operation
US9129904B2 (en) * 2011-06-15 2015-09-08 Applied Materials, Inc. Wafer dicing using pulse train laser with multiple-pulse bursts and plasma etch
US8958705B2 (en) * 2012-01-13 2015-02-17 Esi-Pyrophotonics Lasers Inc. Methods and systems for a pulsed laser source emitting a predetermined output pulse profile
DE112012006506B4 (en) * 2012-06-12 2017-10-26 Photon Energy Gmbh Short pulse laser
PL2789061T3 (en) * 2013-02-27 2017-05-31 Wavelight Gmbh Laser apparatus and method for laser processing a target material
CN103500913B (en) * 2013-09-30 2015-11-25 中国科学院高能物理研究所 Pulse optical fiber and laser pulse generation method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0230345A1 (en) 1986-01-06 1987-07-29 Rank Taylor Hobson Limited Metrological apparatus and method using polarisation modulation
US6124706A (en) 1995-12-08 2000-09-26 Bechtel Bwxt Idaho, Llc Electro-optic voltage sensor with Multiple Beam Splitting
US20040179571A1 (en) * 2003-02-14 2004-09-16 Govorkov Sergei V. Master oscillator/power amplifier excimer laser system with pulse energy and pointing control

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