KR101538808B1 - 시일링 장치 - Google Patents

시일링 장치 Download PDF

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Publication number
KR101538808B1
KR101538808B1 KR1020090105520A KR20090105520A KR101538808B1 KR 101538808 B1 KR101538808 B1 KR 101538808B1 KR 1020090105520 A KR1020090105520 A KR 1020090105520A KR 20090105520 A KR20090105520 A KR 20090105520A KR 101538808 B1 KR101538808 B1 KR 101538808B1
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South Korea
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substrate
chamber
stage
mask
housing
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KR1020090105520A
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English (en)
Korean (ko)
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KR20100113968A (ko
Inventor
노리유키 츠루
교지 오쿠야마
마코토 니시무라
유카 다카무네
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조요고가쿠 가부시키가이샤
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Publication of KR20100113968A publication Critical patent/KR20100113968A/ko
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Publication of KR101538808B1 publication Critical patent/KR101538808B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR1020090105520A 2009-04-14 2009-11-03 시일링 장치 KR101538808B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009098195A JP5260395B2 (ja) 2009-04-14 2009-04-14 封止装置
JPJP-P-2009-098195 2009-04-14

Publications (2)

Publication Number Publication Date
KR20100113968A KR20100113968A (ko) 2010-10-22
KR101538808B1 true KR101538808B1 (ko) 2015-07-22

Family

ID=42957864

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090105520A KR101538808B1 (ko) 2009-04-14 2009-11-03 시일링 장치

Country Status (4)

Country Link
JP (1) JP5260395B2 (zh)
KR (1) KR101538808B1 (zh)
CN (1) CN101866078B (zh)
TW (1) TWI471660B (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040182A (ja) * 2009-08-07 2011-02-24 Mitsubishi Heavy Ind Ltd 有機発光パネルの製造装置及び有機発光パネルの製造方法
JP5706180B2 (ja) * 2011-02-15 2015-04-22 常陽工学株式会社 封止方法およびその装置
KR101264523B1 (ko) * 2011-03-02 2013-05-14 박웅기 전자부품용 패널의 접합 장치
JP2012230255A (ja) * 2011-04-26 2012-11-22 Joyo Kogaku Kk 封止装置および封止方法
JP2013001888A (ja) * 2011-06-21 2013-01-07 Three M Innovative Properties Co 部材接合方法及び部材接合装置
JP2013167712A (ja) * 2012-02-15 2013-08-29 Hitachi High-Technologies Corp 基板の貼り合せ装置及び基板の貼り合せ方法
JP6221667B2 (ja) * 2013-11-15 2017-11-01 大日本印刷株式会社 素子製造方法および素子製造装置
CN104821377B (zh) * 2015-05-05 2017-07-21 合肥京东方光电科技有限公司 贴片封装装置及方法
JP6054470B2 (ja) * 2015-05-26 2016-12-27 株式会社日本製鋼所 原子層成長装置
JP6770887B2 (ja) * 2016-12-28 2020-10-21 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理システム
CN112124794B (zh) * 2020-08-12 2022-04-19 安徽天元医疗科技有限公司 一种口罩存放装置
CN113932995B (zh) * 2021-09-26 2024-07-30 风帆有限责任公司 一种起停用agm电池气密性检测结构及检测方法
CN114675453B (zh) * 2022-03-30 2023-09-08 广东灿达股份有限公司 一种液晶面板、连成液晶面板以及液晶面板的制造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030003073A (ko) * 2001-06-29 2003-01-09 산요 덴키 가부시키가이샤 표시용 패널의 제조 방법
KR20070066378A (ko) * 2005-12-22 2007-06-27 주식회사 에이디피엔지니어링 합착기판 자외선 경화장치
JP2008033370A (ja) * 2002-05-30 2008-02-14 Lg Phillips Lcd Co Ltd 液晶表示装置を製造するためのシステム及びこれを用いた液晶表示装置の製造方法
JP2009058783A (ja) * 2007-08-31 2009-03-19 Joyo Kogaku Kk 液晶表示パネルの製造方法および製造装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3059360B2 (ja) * 1995-06-28 2000-07-04 シャープ株式会社 液晶パネルの製造方法および製造用プレス装置
JPH1164811A (ja) * 1997-08-21 1999-03-05 Matsushita Electric Ind Co Ltd 液晶表示素子の製造方法およびその装置
JPH11293202A (ja) * 1998-04-15 1999-10-26 Mitsubishi Heavy Ind Ltd 貼り合わせ装置及び方法
JP3994367B2 (ja) * 1999-11-26 2007-10-17 新東工業株式会社 液晶パネル用ガラス基板の貼り合わせ装置
US6991699B2 (en) * 2002-02-05 2006-01-31 Lg.Philips Lcd Co., Ltd. LCD bonding machine and method for fabricating LCD by using the same
JP2004079409A (ja) * 2002-08-21 2004-03-11 Nippon Seiki Co Ltd 有機ｅｌパネルの製造方法、及びその有機ｅｌパネルの製造方法で用いられる封止装置
JP3551379B2 (ja) * 2002-08-30 2004-08-04 日本精機株式会社 封止装置
JP2004310063A (ja) * 2003-03-25 2004-11-04 Sharp Corp 露光用マスク、露光装置、露光方法および液晶表示装置の製造方法
JP2006004707A (ja) * 2004-06-16 2006-01-05 Seiko Epson Corp 封止装置、封止方法、有機ｅｌ装置、および電子機器
JP4400628B2 (ja) * 2007-02-01 2010-01-20 ウシオ電機株式会社 液晶パネルの貼り合せ方法
JP4949172B2 (ja) * 2007-08-30 2012-06-06 株式会社アルバック 光照射装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030003073A (ko) * 2001-06-29 2003-01-09 산요 덴키 가부시키가이샤 표시용 패널의 제조 방법
JP2008033370A (ja) * 2002-05-30 2008-02-14 Lg Phillips Lcd Co Ltd 液晶表示装置を製造するためのシステム及びこれを用いた液晶表示装置の製造方法
KR20070066378A (ko) * 2005-12-22 2007-06-27 주식회사 에이디피엔지니어링 합착기판 자외선 경화장치
JP2009058783A (ja) * 2007-08-31 2009-03-19 Joyo Kogaku Kk 液晶表示パネルの製造方法および製造装置

Also Published As

Publication number Publication date
TW201037426A (en) 2010-10-16
CN101866078A (zh) 2010-10-20
TWI471660B (zh) 2015-02-01
CN101866078B (zh) 2014-08-13
JP2010250008A (ja) 2010-11-04
KR20100113968A (ko) 2010-10-22
JP5260395B2 (ja) 2013-08-14

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