KR101527175B1 - Waste gas scrubber with fine atomization nozzle - Google Patents

Waste gas scrubber with fine atomization nozzle Download PDF

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Publication number
KR101527175B1
KR101527175B1 KR1020130154372A KR20130154372A KR101527175B1 KR 101527175 B1 KR101527175 B1 KR 101527175B1 KR 1020130154372 A KR1020130154372 A KR 1020130154372A KR 20130154372 A KR20130154372 A KR 20130154372A KR 101527175 B1 KR101527175 B1 KR 101527175B1
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South Korea
Prior art keywords
waste gas
nozzle
liquid
sub
cartridge
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KR1020130154372A
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Korean (ko)
Inventor
윤수현
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(주) 세아그린텍
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D47/00Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06Spray cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77Liquid phase processes
    • B01D53/78Liquid phase processes with gas-liquid contact
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect

Abstract

The present invention provides a waste gas treatment apparatus using a fine droplet jetting apparatus having an excellent treatment performance of waste gas.
A waste gas treatment apparatus using a micro-droplet jetting apparatus according to the present invention is a waste gas treatment apparatus using a micro-droplet jetting apparatus for purifying a waste gas using a cleaning liquid, the apparatus comprising: an inlet port ; A cartridge processing unit disposed inside the body and capable of processing the waste gas using the cleaning liquid; And a pretreatment section disposed between the cartridge processing section and the inlet port and capable of spraying sediment to the waste gas.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a waste gas treatment apparatus using a fine droplet jetting apparatus,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waste gas treatment apparatus using a micro-droplet jetting apparatus, and more particularly to a waste gas treatment apparatus using a micro-droplet jetting apparatus for treating waste gas discharged from a semiconductor manufacturing process or the like.

Exhaust gases emitted from chemical processes or semiconductor manufacturing processes are not only harmful to human body because they are highly toxic, explosive, and corrosive, but also cause environmental pollution if they are released into the atmosphere. Therefore, it is necessary to purify the exhaust gas such that the content of harmful components is lowered to a permissible concentration or less. It is legally required that only the harmless gas that has undergone the purification process for removing such toxic substances is released into the atmosphere.

For example, semiconductors are fabricated through various manufacturing processes such as oxidation, etching, deposition, and photolithography. In these semiconductor manufacturing processes, various types of toxic chemical agents and chemical gases are used as reaction gases, and the reaction gases have an oxidizing component, a burning component, and a toxic component.

Therefore, at various stages of the semiconductor manufacturing process, gaseous toxic substances represented by arsine, phosphine, diborane, monosilane, ammonia, nitrogen oxide, boron trichloride, and waste gas including dust and dust are generated.

These toxic waste gases are highly toxic and are released into the atmosphere after being used in the process, which is harmful to the human body and causes environmental pollution. There is also the possibility of a fire due to spontaneous ignition. Therefore, it is necessary to remove toxic substances and dusts contained in the waste gas before discharging such waste gas into the atmosphere.

Accordingly, various types of gas scrubbers are installed in the exhaust line of the semiconductor facility to remove toxic substances from harmful waste gas and discharge it to the atmosphere. Burning method and wetting method have. The dry type is a method of treating an exhaust gas mainly by decomposing, reacting or burning an ignitable gas containing a hydrogen group or the like in a high temperature combustion chamber, and the wet type is a method of treating waste gas by passing it through water and dissolving it.

There are various types of conventional wet waste gas disposal apparatuses. One of them is a device that allows waste gas to pass through a filling material and water in the body to deposit harmful substances, dust, etc. in the filling material. Since the gas or dust is trapped in the packing and the circulating water is reused, the efficiency of the waste gas treatment is gradually reduced and the pressure loss becomes higher than the designed value. Therefore, the dust and the like of the packing should be removed periodically.

FIG. 1 is a view showing a waste gas treatment apparatus according to a conventional technique. The waste gas treatment apparatus according to the prior art includes a body 10, a filling cartridge 20, and an eliminator 30.

An inlet port 11 is formed at one side of the body 10 and an exhaust port 12 is formed at the other side of the body 10. A filling cartridge 20 is installed inside the body 10. The filling cartridge 20 has a box shape in which a plurality of through holes are formed with an inner space, and a plurality of filling materials (not shown) are filled in the inner space of the filling cartridge 20.

A plurality of spray tubes 40 are arranged in parallel on the top of the filling cartridge 20 and a washing liquid is sprayed toward the filling cartridge 20 through a plurality of nozzles 41 formed in each spray tube 40. Therefore, the waste gas flowing through the inlet 11 meets with the cleaning liquid, and harmful components in the waste gas are mixed with the cleaning liquid and collected in the packing.

An eliminator 30 is disposed between the filling cartridge 20 and the exhaust port 12. Waste gas and moisture passing through the filling cartridge 20 are collected by the eliminator 30, Is discharged through the exhaust port (12).

However, since the size of the filling material is large and the length of the filling material is relatively short, contaminants or gases which are not absorbed in the liquid droplets of the cleaning liquid can not be captured by the filling material and pass through between the filling materials. To prevent this, if the size of the filler is made small or if the length of the filler is made long, it is difficult to perform the filling or drift phenomenon and the efficiency becomes low.

Further, contaminants or the like that have passed through the filling cartridge 20 are deposited on the eliminator 30 and the gas flow path of the eliminator 30 is closed, so that the gas treatment is not easy. There is a disadvantage in that a trouble may occur in the production process because the device must be stopped.

In addition, waste gas treatment is not favorable when the waste gas contains powder, for example, SiO 2 or the like. That is, when waste gas having characteristics not considered in the design of the apparatus is generated, it can not be effectively treated, and the waste gas processing speed and throughput are drastically reduced.

In general, the above-described apparatus is very large in size and may have a size of a building. Therefore, once installed, it is very difficult to remodel the apparatus in response to a change in the waste gas characteristic.

An object of the present invention is to provide a waste gas treatment apparatus using a fine droplet jetting apparatus capable of having an excellent treatment capacity of waste gas.

It is another object of the present invention to provide a waste gas treatment apparatus using a micro-droplet jetting apparatus capable of minimizing contamination deposition of an eliminator.

Another object of the present invention is to provide a waste gas treatment apparatus using a micro-droplet jetting apparatus capable of easily changing treatment characteristics in accordance with waste gas characteristics.

It is another object of the present invention to provide a waste gas treatment apparatus using a micro-droplet jetting apparatus capable of reducing the size of the apparatus and increasing the gas treatment capability.

A waste gas treatment apparatus using a micro-droplet jetting apparatus according to the present invention is a waste gas treatment apparatus using a micro-droplet jetting apparatus for purifying a waste gas using a cleaning liquid, the apparatus comprising an inlet port through which the waste gas flows, ; A cartridge processing unit disposed inside the body and capable of processing the waste gas using the cleaning liquid; And a pretreatment section disposed between the cartridge processing section and the inlet port and capable of spraying sediment to the waste gas.

Preferably, the cartridge processing unit includes: a packing for collecting impurities contained in the waste gas; A cartridge having a passage through which the waste gas can flow, the cartridge containing the filling material therein; And a main spraying tube having at least one main nozzle for spraying the cleaning liquid and spraying the cleaning liquid to the cartridge side.

Preferably, the filling is a Tri-pack or a telerette.

Preferably, the pre-processing unit includes a sub-spraying tube having at least one sub-nozzle for injecting the sediment, and the sub-nozzle is a Fog nozzle for generating mist-shaped droplets.

Preferably, the droplet ejected from the sub nozzle has an average particle diameter of 50 mu m or less.

Preferably, the area occupied by one subnozzle in the vertical plane in the direction in which the waste gas flows is 0.23 m 2 to 0.275 m 2.

Preferably, the electrostatic spray generating unit configured to have the polarity of the collecting liquid injected from the sub-nozzle, wherein the droplet ejecting from a part of the sub nozzles is an anode, and the droplets ejected from the remaining sub- I have.

Preferably, the apparatus further includes a turning processing unit for turning the waste gas, and the turning processing unit includes a turning vane having a propeller shape provided with a plurality of blades.

Preferably, the apparatus further includes a filter processing unit capable of treating the waste gas using the collected liquid.

Preferably, the filter processing unit includes: a filter disposed inside the body; And a filter discharge tube having at least one filter nozzle for spraying the sediment to the filter side.

Preferably, the subnozzle and the filter nozzle further include an electrostatic mist generating unit configured to have a polarity so that the sediment liquid ejected from the subnozzle and the filter nozzle is ejected from a part of the subnozzle and the filter nozzle, The droplet to be sprayed has a negative polarity.

Preferably, the distance between adjacent sub-injection tubes is 15 cm to 60 cm, and the distance between adjacent sub-nozzles may be 60 cm or less.

The waste gas treatment apparatus using the micro-droplet jetting apparatus of the present invention can improve the waste gas treatment ability and efficiency, and can perform excellent purification treatment and minimize the deposition of contaminants in the eliminator, so that the gas flow is smooth, The cleaning period of the washing machine can be minimized. In addition, it is very easy to change the waste gas treatment characteristics in accordance with the waste gas characteristic, and the size of the apparatus can be reduced while maintaining the same exhaust gas treatment ability.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a waste gas treatment apparatus according to the prior art,
FIG. 2 is a plan view of a waste gas treatment apparatus using a droplet jetting apparatus according to an embodiment of the present invention. FIG.
FIG. 3 is a front view of a waste gas treatment apparatus using a droplet jetting apparatus according to an embodiment of the present invention,
4 is a view showing a sub nozzle of a waste gas treatment apparatus using a droplet jetting apparatus according to an embodiment of the present invention;
5 is a view showing the arrangement of sub nozzles of the waste gas treatment apparatus using the droplet jetting apparatus according to the embodiment of the present invention
6 is a view showing an eliminator structure of a waste gas treatment apparatus using a droplet jetting apparatus according to another embodiment of the present invention,
7 is a view showing an apparatus for waste gas treatment using a droplet jetting apparatus according to another embodiment of the present invention,
8 is a view showing a turning vane of a waste gas treatment apparatus using a droplet jetting apparatus according to another embodiment of the present invention, and Fig.
9 is a view showing an apparatus for waste gas treatment using a fine droplet jetting apparatus using electrostatic spraying according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms, and the inventor should appropriately interpret the concepts of the terms appropriately It should be interpreted in accordance with the meaning and concept consistent with the technical idea of the present invention based on the principle that it can be defined. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the particular embodiments, It is to be understood that the invention includes all modifications, equivalents, and alternatives falling within the scope. It should also be understood that various equivalents and modifications may be substituted for those at the time of the present application.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

In the following description of the present invention with reference to the accompanying drawings, the same components are denoted by the same reference numerals regardless of the reference numerals, and redundant explanations thereof will be omitted. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

FIG. 2 is a plan view of a waste gas treatment apparatus using a droplet jetting apparatus according to an embodiment of the present invention, and FIG. 3 is a front view of a waste gas treatment apparatus using a droplet jetting apparatus according to an embodiment of the present invention.

The waste gas treatment apparatus using the droplet jetting apparatus according to an embodiment of the present invention includes a cartridge processing section 200 and a pre-processing section 300.

The cartridge processing section 200 includes a main body 100 and a main injection pipe 220. A cartridge 210 is disposed inside the tubular body 100 and an inlet 110 is formed at one side of the body 100 to allow the gas to flow therethrough and an outlet 110 120 are formed.

The cartridge 210 has a box shape having an inner space and a plurality of through holes formed therein, and the inner space is filled with a plurality of fillings. According to one embodiment of the present invention, the filling material may be a Tri-pack or a Tellerette. However, the present invention is not limited to this, and any material capable of collecting harmful substances, dust, dust, and the like in the waste gas can be used. Meanwhile, according to another embodiment of the present invention, the surface through which the waste gas of the cartridge 210 passes may be formed to have a net shape.

A main spray tube 220 is disposed inside the body 100. The main spray tubes 220 are arranged in parallel to each other and a plurality of main nozzles 221 are formed in each main spray tube 220 . The main spray tube 220 is connected to a cleaning liquid supply unit (not shown) to receive a cleaning liquid. The cleaning liquid is sprayed into the cartridge processing unit 200 through the main nozzle 221 and the main spray tube 220.

According to an embodiment of the present invention, two cartridge processing units 200 are connected in series, but one or more than three cartridge processing units 200 may be configured according to waste gas treatment.

The pre-processing unit 300 includes a plurality of sub-injection pipes 310 arranged in a row, and each of the sub-injection pipes 310 includes a plurality of sub-nozzles 311. 4 is a view showing a sub nozzle of the waste gas treatment apparatus using the droplet jetting apparatus according to an embodiment of the present invention. The sub nozzle 311 may be a fog nozzle for spraying mist-like droplets, A very fine particulate sediment can be sprayed in the form of a spray. At this time, the sub-injection tube 310 is connected to a collecting liquid supply unit (not shown), and the collected liquid is injected into the body 100 through the sub-nozzle 311.

5 is a view showing the arrangement of sub-nozzles of the waste gas treatment apparatus using the droplet jetting apparatus according to the embodiment of the present invention, in which sub-nozzles 311 are provided in each of the sub- Spaced apart. However, the arrangement of the sub-injection tube 310 and the sub-nozzle 311 is not limited thereto, and may be variously formed according to the device shape, the gas flow, and the like.

In addition, an eliminator 500 is connected to the rear end of the cartridge processing unit 200 to remove moisture from the exhaust gas. FIG. 6 is a view showing an electrostatic spray showing an eliminator structure of a waste gas treatment apparatus using a droplet jetting apparatus according to an embodiment of the present invention. In particular, So that the gas flow path can be minimally closed. On the other hand, the principle of the eliminator 500 is merely a well-known conventional technique, and a further explanation will be omitted.

The waste gas treatment process of the waste gas treatment apparatus using the droplet jetting apparatus according to an embodiment of the present invention is as follows.

The waste gas flowing into the inlet 110 passes through the pretreatment unit 300. The contaminants contained in the waste gas are collected in mist-like droplets ejected from the sub nozzle 311 and are easily processed in the cartridge processing unit 200 .

The waste gas flowing into the cartridge processing unit 200 through the pretreatment unit 300 is supplied with the cleaning liquid from the main nozzle 221 and passes through the packing material. The contaminants, dust, and dust contained in the waste gas are supplied to the packing material together with the cleaning liquid Lt; / RTI > At this time, due to the cleaning liquid, contaminants or the like of the filling material may flow down and be cleaned.

The waste gas processed in the cartridge processing unit 200 flows into the eliminator 500, and the gas containing moisture removed from the gas is discharged to the discharge port 120.

Contaminants or dusts in the waste gas collide with the liquid droplet due to inertia or are collected in the liquid droplet by diffusion. Contaminants or the like may be collected into the liquid droplet by contact with the liquid droplet, or may be collected over the liquid droplet boundary surface, As shown in FIG.

In the present invention, since the droplet is formed very finely by the sub-nozzle, the surface area of the droplet can be formed relatively wide even when the same amount of the sediment is sprayed. Therefore, the contact efficiency between the contaminants and the like of the waste gas and the droplet is improved, and the waste gas can be collected more efficiently in the droplet. Therefore, the contaminants and the like of the waste gas can be more effectively treated in the cartridge processing section 200, so that the amount of contaminants deposited in the eliminator 500 can be reduced, so that the differential pressure increase in the apparatus can be minimized. FIG. 6 is a view showing an eliminator structure of a waste gas treatment apparatus using a micro-droplet jetting apparatus according to another embodiment of the present invention. Particularly, contaminants or the like are easily deposited on the inner side A, Can be closed, but this can be minimized in the present invention.

According to an embodiment of the present invention, it is preferable that the droplet ejected from the sub nozzle 311 has an average particle diameter of 50 mu m or less so as to have a sufficient surface area.

In addition, although the dust collected may have an emission angle of 90 degrees with respect to the vertical penetration surface of the sub nozzle 311, the spray angle is not limited to this, and the spray angle may be adjusted corresponding to the waste gas treatment characteristic, The number and position of the sub-nozzles 311 can be changed according to the size and amount of pollutants such as pollutants.

In addition, since City Water is excellent in reactivity as sediment and cleaning liquid and has low solubility of salts, it is preferable that constants are used as a dust collector and a cleaning liquid according to an embodiment of the present invention. Do. However, the present invention is not limited thereto, and various types of liquid and processing chemicals can be used depending on the waste gas characteristic.

It is preferable that the distance between adjacent sub-injection pipes 310 is 15 cm or more. When the distance between the sub-injection pipes 310 is less than 15 cm, the sub-injection pipes 310 are arranged so densely that the gas flow I do not want it. In addition, when the distance between adjacent sub-injection tubes 310 exceeds 60 cm, the density of the fine droplets becomes too low, a dead space is generated, and the gas is not sufficiently supplied to the gas, The distance between the capillaries 310 is preferably 60 cm or less. Likewise, the distance between adjacent sub-nozzles 311 is preferably 60 cm or less.

Example  One

The gas treatment efficiency was examined by changing the area (based on the vertical direction of the gas flow direction) and the liquid ratio of one sub nozzle 310. At this time, the spraying angle of the sub nozzle 311 was 90 °, and a constant was used as the dust collecting solution. Efficiency refers to the rate of contaminant removal in the waste gas, and the ratio refers to the ratio of the waste gas flow rate to the particulate matter injection volume.

Sub nozzle area (㎡) Liquor ratio (ℓ / ㎥) Gas flow rate (m3 / min) Injection amount (l / min) efficiency(%) No sub nozzle ~ 1600 ~ 64.5 0.525 0.0055 1600 8.8 75.9 0.275 0.0083 1600 13.2 84.2 0.235 0.011 1600 17.6 93.6 0.223 0.0138 1600 22 93.9 0.171 0.0172 1600 27.5 94.2 0.147 0.0206 1600 33 94.6

In Example 1, the gas treating efficiency is improved as the area occupied by the throat nozzle is smaller, but the gas treating efficiency is not significantly increased as compared with the case where the amount of the precipitating liquid is increased. In consideration of the amount of collected dust and the efficiency of gas treatment, it is preferable that the area occupied by each sub-nozzle is 0.23 to 0.275 m 2.

Example  2

The gas treatment efficiency was examined by changing the droplet size of the sub nozzle 310. At this time, the spray angle of the sub nozzle 311 was 90 °, the area covered by one sub nozzle was 0.235 m 2, and a constant was used as the dust collector. Efficiency refers to the rate of contaminant removal in the waste gas, and the ratio refers to the ratio of the waste gas flow rate to the particulate matter injection volume.

Nozzle type Size of droplet (㎛) Liquor ratio (ℓ / ㎥) Gas flow rate (m3 / min) Injection amount (l / min) efficiency(%) Fog nozzle 1 to 50 0.01 1600 16 93.6 Fog nozzle 60 to 300 0.01 1600 16 89.9 Common nozzle 400 to 700 0.01 1600 16 78.1 Common nozzle 800 ~ 1500 0.01 1600 16 69.7

FIG. 7 is a view showing a waste gas treatment apparatus using a droplet jetting apparatus according to another embodiment of the present invention, and FIG. 8 is a view showing a turning vane of a waste gas treatment apparatus using a droplet jetting apparatus according to another embodiment of the present invention FIG.

According to another embodiment of the present invention, the pre-processing unit 300 may be disposed before the swivel processing unit 400. [ That is, a pre-processing unit 300 is disposed in the inlet 110, a swirling unit 400 is disposed between the pre-processing unit 300 and the cartridge processing unit 200, and before the waste gas flows into the swirling unit 400 Collecting liquid can be supplied. The swivel processing unit 400 includes a swivel vane 410, and the swivel vane 410 has a plurality of blades that are configured to be inclined at a predetermined angle. Therefore, the gas passing through the swirling processing unit 400 is forced to turn by the swirl vane 410 and flow.

The waste gas passing through the pretreatment unit 300 passes through the swirling processing unit 400 and is swirled while passing through the swirling vane 410. Since the blades of the vane 410 are tilted in the same direction as the propeller, the fluid flow can be guided in a certain direction, and the waste gas is deflected in the same direction through the vane 410.

Since the waste gas passing through the swirling processing unit 400 is pivoted by the spiral, the waste gas can be spread evenly on the body 100, the cleaning liquid and the waste gas can be mixed well, and in particular, the contaminant can be efficiently collected in the dust collector. That is, due to the formation of the swirling flow, the flow of the waste gas becomes uniform, the dead space can be minimized, and the efficiency of contact between the waste gas and the sediment liquid and the reaction time are increased by the swirling flow, The waste gas treatment efficiency can be improved.

According to another embodiment of the present invention, the pre-processing unit 300 is disposed between the swirling unit 400 and the cartridge processing unit 200 so that the waste gas passes through the swirling unit 400, .

9 shows a waste gas treatment apparatus using a droplet jetting apparatus according to another embodiment of the present invention. A filter processing unit 600 is disposed between a pretreatment unit 300 and a cartridge processing unit 200, The processing unit 600 includes a filter 610 and a filter injection pipe 620.

The filter injection pipe 620 is disposed above the filter 610 and each filter injection pipe 620 is provided with a plurality of filter nozzles 621. The filter injection pipe 620 is connected to the filter 610 via the filter nozzle 621, . Therefore, since the pollutant can be additionally removed by the filter processing unit 600, the waste gas treatment capability can be improved. Further, the filter nozzle 621 may be a fog nozzle for jetting fine droplets, and contaminants can be treated more effectively.

According to another embodiment of the present invention, an electrostatic spray generating unit (not shown) including a high voltage generating unit is formed in the pretreatment unit 300, and a collecting liquid sprayed from the sub nozzle 311 is supplied to the positive electrode or the negative electrode Can be charged. That is, the positive-electrode high-voltage generating portion and the negative high-voltage generating portion may cause the electrostatic spray generating portion to inject a bipolar droplet in a part of the sub-nozzles 311, and the negative droplet may be injected in the remainder. Therefore, pollutants and the like can be well collected in the droplet due to the influence of electrons.

That is, not only the contaminant is captured by the inertia collision and diffusion between the contaminant and the droplet, but also by the electric force between the contaminant and the droplet, the contaminant treatment efficiency can be further improved. In addition, liquid droplets having different polarities can be easily agglomerated and grown, so that the collecting efficiency of the filter processing unit 600 and the cartridge processing unit 200 can be improved.

According to another embodiment of the present invention, an electrostatic spray generating unit (not shown) is formed in the filter processing unit 600, a liquid droplet having one polarity is injected from the sub nozzle 311, The droplet of the opposite polarity may be ejected. That is, for example, the anode liquid droplet may be injected from the sub nozzle 311, the cathode liquid droplet may be injected from the filter nozzle 621, or vice versa.

Since the conventional waste gas treatment apparatus used in a semiconductor process or the like has a comparatively large gap between the packing materials, fine contaminants or gases which are not absorbed by the liquid droplets of the cleaning liquid can not be caught in contact with the packing material and pass through between the packing materials. This is a bad problem. To prevent this, it is difficult to narrow the gap between the packing materials because the gas flow is reduced and the throughput is decreased. In addition, since contaminants passing through the filling cartridge are deposited on the eliminator and the gas flow path of the eliminator is closed, gas treatment is not easy and there is a problem that it is frequently cleaned in order to remove the gas. In this case, So that there is a disadvantage that a production process may be disrupted. In addition, waste gas treatment is not favorable when the waste gas contains powder, for example, SiO 2 or the like. That is, when waste gas having characteristics not considered at the time of designing the apparatus is generated, the waste gas can not be efficiently treated and the waste gas processing speed and throughput may be rapidly deteriorated. In general, the above-mentioned apparatus is very large in size and may have a size of a building. Therefore, there is a problem that it is difficult to remodel the apparatus once installed in accordance with the change of the waste gas characteristic.

However, according to the waste gas treatment apparatus of the present invention, the waste gas treatment apparatus using the micro-droplet jetting apparatus of the present invention can improve the waste gas treatment capacity and efficiency, so that excellent purification treatment can be performed and contamination deposit of the eliminator can be minimized So that the gas flow is smooth without clogging, and the cleaning period of the device can be minimized. In addition, it is very easy to change the waste gas treatment characteristics in correspondence with the waste gas characteristic, and the size of the apparatus can be reduced while maintaining the same exhaust gas treating ability, and the treatment efficiency can be made good so that the amount of collecting liquid and cleaning liquid used can be reduced .

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. Various modifications and variations are possible within the scope of the appended claims.

100: body 110: inlet
120: Outlet
200: cartridge processing section 210: cartridge
220: main spray tube 221: main nozzle
300: Pretreatment unit 310: Sub-
311: Sub nozzle
400: turning processor 410: turning vane
500: Eliminator
600: Filter processor 610: Filter
620: Filter jetting tube 621: Filter nozzle

Claims (11)

  1. A waste gas treatment apparatus using a fine droplet jetting apparatus for purifying a waste gas using a cleaning liquid,
    A body having an inlet through which the waste gas flows and an outlet through which the waste gas is discharged;
    A cartridge processing unit disposed inside the body and capable of processing the waste gas using the cleaning liquid; And
    A pretreatment unit disposed between the cartridge processing unit and the inlet and capable of spraying the collected liquid to the waste gas,
    Wherein the cartridge processing unit includes:
    A filler collecting impurities contained in the waste gas;
    A cartridge having a passage through which the waste gas can flow, the cartridge containing the filling material therein; And
    And a main spraying pipe disposed at an upper portion of the cartridge, for spraying the cleaning liquid to the cartridge side, the main spraying nozzle having at least one main nozzle for spraying the cleaning liquid,
    Wherein the preprocessing unit comprises:
    A sub-injection pipe having at least one sub-nozzle for injecting the collected liquid,
    / RTI >
    Wherein the sub nozzle is a Fog nozzle for generating a droplet of a mist shape and a droplet ejected from the sub nozzle has a particle size of 50 mu m or less on an average and in a vertical plane in the direction in which the waste gas flows, Wherein the area occupied by the waste liquid is 0.23 to 0.275 m 2.
  2. delete
  3. The method according to claim 1,
    Characterized in that the filler is a tellurite.
  4. delete
  5. delete
  6. delete
  7. The method according to claim 1,
    Further comprising an electrostatic mist generating unit configured to have polarity of the sediment injected from the sub nozzle,
    Wherein a liquid droplet ejected from a part of the sub nozzles has an anode and a liquid droplet ejected from the remainder has a polarity of a cathode.
  8. The method according to claim 1,
    Further comprising a turning processing unit for turning the waste gas,
    The turning processing unit,
    A waste gas treatment apparatus using a fine droplet jetting apparatus comprising a rotating vane having a propeller shape provided with a plurality of blades.
  9. The method according to claim 1,
    Further comprising a filter processing unit capable of processing the waste gas using the collected liquid.
  10. 10. The image processing apparatus according to claim 9,
    A filter disposed inside the body; And
    And a filter injection pipe having at least one filter nozzle for injecting the collection liquid to the filter side
    Wherein the waste liquid is discharged from the waste liquid tank.
  11. 11. The method of claim 10,
    Further comprising an electrostatic mist generating unit configured to have the polarity of the sediment injected from the sub nozzle and the filter nozzle,
    Wherein the droplet ejected from a part of the sub nozzle and the filter nozzle has an anode and a liquid droplet ejected from the remainder has a polarity of the cathode.
KR1020130154372A 2013-12-12 2013-12-12 Waste gas scrubber with fine atomization nozzle KR101527175B1 (en)

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KR101981066B1 (en) * 2017-06-05 2019-05-27 주식회사 파나시아 Exhaust Gas Treatment System Capable of Preventing Corrosion
KR20180133281A (en) * 2017-06-05 2018-12-14 주식회사 파나시아 Exhaust Gas Treatment System Capable of Preventing Corrosion
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KR20190024120A (en) * 2017-08-31 2019-03-08 주식회사 에코에너젠 Treatment system for process exhaust stream containing isopropyl alcohol
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