KR101350022B1 - Apparatus and method for edge processing of a sheet of brittle material - Google Patents

Apparatus and method for edge processing of a sheet of brittle material Download PDF

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KR101350022B1
KR101350022B1 KR20097008646A KR20097008646A KR101350022B1 KR 101350022 B1 KR101350022 B1 KR 101350022B1 KR 20097008646 A KR20097008646 A KR 20097008646A KR 20097008646 A KR20097008646 A KR 20097008646A KR 101350022 B1 KR101350022 B1 KR 101350022B1
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Prior art keywords
sheet
nozzle
edge
brittle
glass
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KR20097008646A
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Korean (ko)
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KR20090082199A (en
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도시히코 오노
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코닝 제팬 가부시끼 가이샤
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Priority to US60/847,950 priority
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Priority to PCT/JP2007/069518 priority patent/WO2008044613A1/en
Publication of KR20090082199A publication Critical patent/KR20090082199A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00Abrasive blasting machines or devices; Plants
    • B24C3/02Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • B24C1/083Deburring

Abstract

In one example, the edge treatment apparatus 10 of the sheet of brittle material 14, such as a glass sheet, includes at least one nozzle 24 that directs the abrasive stream 26 to the edge 12 of the sheet of brittle material 14. do. The apparatus is disposed in the vicinity of the apparatus 10 for use in injecting air pressure 58 through the slots to prevent dust generated in the cornering process from depositing on the surface of the sheet of brittle material 54. And a cover 60 for collecting dust.
Brittle materials, edges, abrasives, cleaning

Description

Apparatus and method for edge processing of a sheet of brittle material}
The present invention relates to a method and apparatus for processing edges of a sheet of brittle material. More particularly, the present invention relates to methods and apparatus for forming curved surfaces at the edges of a sheet of brittle material such as glass sheets used in flat panel displays, for example.
Liquid Crystal Displays (LCDs) are passive flat panel displays that rely on externally illuminated light sources. Liquid crystal displays are fabricated as segmented displays or as basic structures composed of liquid crystal materials sandwiched between two substrates or in one of two basic forms. Substrates require two forms of change, depending on the addressed matrix, that can withstand or pass through the chemical conditions exposed during the display. The first type is the addressed internal matrix, which depends on the threshold characteristics of the liquid crystal. The second type is an addressed external matrix or active matrix (AM), where electrical switches are provided to each pixel by diode arrays, metal-insulator-metal (MIM) devices or thin film transistors. In both cases, two glass sheets form the display structure and the demand for surface quality is strongly demanded. The separation of the two sheets has a critical gap dimension on the order of 5-10 μm. Individual glass substrate sheets are generally smaller than about 0.7 mm in thickness.
Glass sheet processing requires a high quality surface finish, similar to that used in flat panel displays, and is generally ground and / or cleaned to cut the glass sheet to the desired shape and to remove sharp edges from the edge of the cut glass sheet. need. Recently, grinding and cleaning are carried out using a device known as double edger or using a device with grooves around the wheels. Such double edge devices are well known and commercially available. Such companies include Vendo Kigo Co., Ltd., Miss Beach Heavy Industries, Hukuyama Co., Ltd., and Glass Machine Engineering.
While grinding and cleaning the edges of the glass sheet using a double edge device, the glass sheet is generally made to maintain sheet stiffness to counter frictional forces caused by the grinding wheel. One generally fastening or fitting is used by placing the seat between two nephron or rubber belts. The belt is held in contact with both sides of the sheet while the edges of the glass sheet are ground or cleaned by a common abrasive wheel having a plurality of groove shapes. The belt transfers the glass sheet via the replenishment area device of the device, the grinding or cleaning area device, and the distal end of the device.
Performing grinding, processing and conveying using a double edge device is disadvantageous in many ways. Firstly, debris from edge processing (eg grinding) becomes a major contaminant on the surface of the glass sheet. Thus, glass sheets require extended cleaning and drying at the end of the finishing process to remove the resulting debris. Of course, extended cleaning and drying at the end of the additional finishing process increases the cost of the finishing line and increases manufacturing costs. Secondly, debris and chips are placed between the belts to damage the surface of the glass sheet. Occasionally, this damage causes the subsequent process to break and generate a selected process of defective process output of (good quality glass) when shipped to the consumer.
In addition, grinding or cleaning edges using abrasive wheels requires frequent maintenance if the process is stable. First, the polishing wheel must be frequently trimmed to maintain proper grinding edge shape and grinding efficiency. Secondly, loss of active grooves has to be performed for sheet arrangement of other grooves. Finally, the wheel must be replaced when all grooves are used. If appropriate, preliminary work and process changes by these grinding means will change the strength of the grinding edges. Moreover, the reduction in time associated with such management work increases the manufacturing cost.
To eliminate some of these problems, the surface of the glass sheet is protected using a plastic film to prevent damage and contamination. However, if contaminant material is removed or at least minimized, no plastic film is needed, resulting in lower cost and simplifying the complexity of the finishing process.
U.S. Patent US2005 / 0090189 discloses a technique in which compressed air is sprayed from the opposite side through the perforated plate in order to prevent particles generated by edge processing from contamination of the glass sheet, thereby reducing the need for plastic coating. . In these technological advances, perforated plates limit the effectiveness of the plates to prevent low airflow and particle contamination. Moreover, the plate must be relatively wide in order to obtain an efficient seal at low air flow rates, thus increasing the portion of the glass overhanging and positioned between the plates. For example, vibrations caused by excess overhangs in glass sheets of thin films used in LCD displays generate undesirably roughened edges.
Accordingly, there is a need for an apparatus and method that can prevent additional contamination and particles generated during edge finishing for contamination or damage of both sides of a sheet of brittle material, while requiring relatively clean and low chip generation. . Moreover, minimizing the level of particles generated reduces the downstream load of the cleaning apparatus. These and other needs are satisfactorily addressed by the method and apparatus of the present invention.
The melt bottom draw method enables the production of an ideal thin sheet glass (thickness required to be less than approximately 0.7 mm) that can emit light in the flat panel display industry. In the downstream process for processing the glass sheet, the sheet is contaminated by the glass dust generated during the edge process in finishing the edge of the glass sheet. In such a situation, consideration should be given to how to reduce the generation of contaminants in order to remove the contaminants and how to effectively remove the contaminants. Accordingly, one embodiment of the present invention provides an apparatus and method for treating the edges of a sheet of brittle material to refresh the glass sheet and maintain the original properties of the material.
 The present invention reduces, for example, the removal time of the device required to calibrate the polishing wheel device, the reduction of contaminants through the use of a closed system, the force of the specially thin glass sheet applied through the polishing wheel, and applied to the glass. This has the advantage of reducing the force required to stretch the sheet while reducing the losing force.
Briefly, the devices and methods of the present invention may be used in devices other than the devices depicted. Although the apparatus and method described are described in terms of material change or glass sheet.
An apparatus for processing corners of a brittle material sheet according to an embodiment of the present invention includes at least one nozzle for spraying an abrasive stream included in a fluid in a direction toward an edge, and to prevent adhesion of the abrasive to the surface of the sheet of brittle material. And a cleaning device for injecting compressed air through the at least one slot.
In addition, the method of processing corners of a sheet of brittle material according to another embodiment of the present invention comprises the step of forming at least one abrasive stream from the nozzle toward the edge of the sheet of brittle material to form an arcuate surface in the sheet of brittle material, and the brittle material Spraying the compressed air stream from the at least one slot towards the sheet of brittle material to prevent abrasive from adhering to the sheet, the long axis of the at least one nozzle being zero relative to a plane comprising the surface of the sheet of brittle material. It is characterized by having an angle (alpha) in the range of FIGS.
It will be appreciated that the foregoing general description and the following detailed description show embodiments of the invention and provide features for the invention as set forth and claimed for purposes of understanding the outline or the nature. The accompanying drawings are included to provide a better understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate various embodiments of the invention, together with the description provided to explain the principles and operation of the invention.
1 is a side perspective view showing a slurry jet nozzle for a glass sheet treated according to one embodiment of the present invention.
FIG. 2 is an enlarged side perspective view of the glass sheet treated in FIG. 1. FIG.
3 is a graph showing the radius of curvature of the polishing surface and the amount of glass removal with respect to the notch angle.
4 is a projection view of a sample of a glass sheet to show how to measure the amount of glass removal.
5 is a graph showing the radius of curvature and the amount of glass removal versus air pressure used to accelerate the slurry.
FIG. 6 is a graph showing the amount of glass removal versus air pressure for two different separations between the abrasive surface and the nozzle outlet orifice.
FIG. 7 is a graph showing the radius of curvature with respect to air pressure for two different separations between the abrasive surface and the nozzle outlet orifice.
FIG. 8 is a graph showing the radius of curvature of the polishing surface versus air pressure for two different separations between the polishing surface and the nozzle outlet orifice.
FIG. 9 is a graph showing the amount of glass removal versus header (slurry jet nozzle) velocity for two different separations between the abrasive surface and the nozzle exit orifice.
FIG. 10 is a graph showing the radius of curvature of the polished surface versus the header velocity with three different angles between the slurry jet nozzle and the glass sheet. FIG.
FIG. 11 is a graph showing the radius of curvature of the polished surface versus air pressure for two different crete sizes. FIG.
12 is a graph showing the amount of glass removal versus header speed for two different creats sizes.
FIG. 13 is a cutaway view of processing a glass sheet for two slurry jet nozzles disposed facing each other with respect to the side of the sheet; FIG.
14 is a cutaway view in which one pair is located on the left side of the glass sheet, and the other pair is used to treat the glass sheet using two pairs of slurry jet nozzles on the right side of the glass sheet.
15A is a projection view of a plurality of slurry jet nozzles facing and having the same angle with respect to the plane of the glass sheet, and disposed along a single edge of the glass sheet.
15B is a projection view of a plurality of slurry jet nozzles facing at different angles to the plane of the glass sheet and disposed along a single edge of the glass sheet.
FIG. 16 is a cutaway view including a cleaning device for preventing adhesion of dust and other residues from the glass sheet according to one embodiment of the present invention, and a lid surrounding a space around an edge of the glass sheet; FIG.
In the following detailed description, embodiments that disclose particular items for purposes of explanation without limitation are described to provide a thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention may be practiced in other embodiments that depart from the specific items disclosed herein. Moreover, descriptions of conventional devices, methods, and materials will be omitted so as not to obscure the description of the embodiments. Wherever possible, the same reference numerals will be used throughout the drawings to refer to the same or like parts thereof.
1 and 2, a drawing shows a processing apparatus 10 for at least one edge 12 of a glass sheet 14 according to one embodiment of the invention. Although the device 10 is depicted here as being used to remove material from the edges of the glass sheet, the device 10 also includes other types of brittleness, such as glass-ceramic materials, ceramic materials or polymeric materials such as polycarbonite. It can be used to process materials. Here, the brittle material absorbs less energy before it breaks, with little or no evidence of plastic deformation prior to breakage. Brittle materials generally have less tension than shear. However, the present invention uses a soft material such as metal. Thus, the device 10 of the present invention does not have to be manufactured in a limited manner. Processing of the glass sheet is described in order to achieve the object described below.
The glass sheet 14 has two flat and substantially parallel sides 16, 18. The glass sheet 14 has a thickness "Y" which defines the distance of the parallel faces. Although one skilled in the art regards the edge of the glass sheet as the outer circumferential surface of the sheet, the edge is defined here as the line or line segment between the side 16 and the edge surface 20 as shown. The edge face 20 is defined as the face of the glass sheet between two edges, 12 and 22, and is generally not necessarily orthogonal to the sides 16, 18. In particular, the edge face 20 is located between two edges 12, 22, each edge 12, 22 being adjacent to the side of the glass sheet 14. Glass sheet 14 has one or more edge faces. For example, a circular glass sheet can have only one corner face. The pentagonal glass sheet has five edges. Glass sheets used in display applications generally have a square shape and can have four corners and eight corners because the two sheets are joined, and two corners are joined to each corner surface.
Apparatus 10 may include a hollow nozzle or slurry spraying device 24 for directing stream 26 to the abrasive portion of the edge of glass sheet 14. The polishing site is preferably impregnated or suspended in a fluid such as water to form a slurry. Since the slurry is accelerated by a gas stream, air is supplied to the slurry under pressure from a suitable supply line (not shown) for this purpose, and the exit orifice 28 of the nozzle 24 with a high velocity stream or jet to the polishing site 26. Emitted through An abrasive is added to the glass sheet for polishing the glass sheet and removes the glass material from the sheet. Thus, the device 10 is used to remove glass from a particular edge of the glass sheet 14, and has a sharp shape in contact with the side face 16 of the glass sheet 14 of the edge face 20. 30).
The glass sheet 14 is conveyed relative to the stream of abrasive or the glass sheet is fixed and the abrasive debris moves relative to the glass sheet, consequently the glass sheet 14 and the glass fragment stream (ie slurry) 26. Will move relatively. The abrasive debris stream is conveyed along the edge 12, which removes the glass from the edge and results in an arcuate edge surface 30.
As shown in FIG. 1, the nozzle 24 has a long axis 32 and is aligned to have an α relative angle on a plane 34 parallel to the surface 16 of the glass sheet. As shown in FIG. 1, the plane 34 is parallel to the face of the glass sheet 14 and includes the face of the glass sheet 14. As can be seen, the nozzle 24 faces the edge 12 of the glass sheet 14 to face the body of the glass sheet rather than away from the glass sheet. The nozzle 24 has a circular outlet orifice, or the nozzle 24 has an elliptical or flat outlet orifice. The planar outlet orifice (side large aspect ratio) is larger than the range of the edges 12, resulting in reduced processing time.
The choice of nozzle angle α depends on the desired operating conditions-the amount of glass removal, the radius of curvature of the polishing edge, and the like. For example, maximum glass removal is obtained at approximately 30 degrees relative to plane 34, while a more arcuate polishing surface is obtained at approximately 60 degrees relative to plane 34. 3 shows the radius of curvature for the angle α of the nozzle 24 with respect to the plane 34 and the amount of material removal from the edge 12. "Polishing surface" here refers to an arcuate surface left after being polished at the corners. Glass removal is obtained by measuring the distance from the unreferenced reference plane 36 to the machined edge 35 as shown in FIG. 4. As shown in FIG. 4, the reference plane 36 is identical to the edge plane 20. The data is obtained by directing a # 800 grit size alumina slurry to the glass sheet edge with a thickness of approximately 0.7 mm. The nozzle is conveyed along the edge of the glass sheet at a speed of about 100 mm / s, and the distance δ between the exit orifice 28 of the nozzle 24 and the edge 12 of the glass sheet 14 is approximately 10 mm. Two paths are made at the nozzle and one path is opposite along the other path and edge 12. Two pressures are defined: 0.15 MPa represents curves 38 (curvature) and 40 (removal amount) in FIG. 3, and 0.2 MPa represents curves 42 and 44. The angle α varies from 0 to 120 degrees. As indicated, the maximum material (glass) removal is obtained when the angle α is about 30 degrees, whereas the maximum radius of curvature of the polishing surface 30 is obtained when the angle α is about 60 degrees. Other factors, such as air pressure used to accelerate the slurry, the distance δ between the nozzle and the polishing surface 30, the head speed (or the rate of movement of the nozzle moving relative to the glass edge being processed), the polishing size (i.e. grit Size) and the like.
5 is a view showing a correlation between the air pressure and the glass removal amount. A slurry with an average grit size of # 800 is accelerated to a speed of 100 mm / s relative to the glass sheet along the edge of the glass sheet having a thickness of approximately 0.7 mm. The distance between the exit orifice 28 of the nozzle and the glass sheet 14 is approximately 10 mm, and the long axis of the nozzle and the angle of the plane 34 are zero. Two paths are made from the nozzles and the paths run in opposite directions along the edges. The air pressure providing the thrust to the slurry is increased from 0.05 MPa to 0.25 MPa, and the removal amount is dramatically increased. The data also show an increase in the radius of curvature of the polished surface, as indicated by curve 46, and indicate that an increase in removal is expected.
FIG. 6 shows the correlation of air pressure and removal rate at two different distances (2 mm and 10 mm) between the nozzle outlet orifice and the glass edge, and FIG. 7 equally shows two different distances between the nozzle exit orifice and the glass edge. Shows the radius of curvature of the polishing surface 30 with respect to air pressure. The alumina slurry has an average grit size of # 800 and lies flat with the glass sheet at 0 degrees and points directly to the glass sheet edge. The nozzle is conveyed at a speed of about 100 mm / s relative to the glass. Two paths are created by the nozzles, and at the corners the two paths run in opposite directions. As indicated, the amount of glass removal is substantially unchanged when the nozzle and glass vary between 2 mm and 10 mm as indicated by the two overlapping curves 37 and 39. However, when the distance between the nozzle and the glass is about 2 mm as shown in FIG. 7, the radius of curvature of the polishing surface 30 increases nonlinearly with respect to the air pressure as shown in curve 48. When the distance between the glass and the nozzle is increased to 10 mm, the radius of curvature of the glass edge changes approximately linearly. Finally, Figure 8 shows the change in curvature of the polishing surface 30 when the nozzle and glass distance is equal to 2 mm (curve 51a) and 10 mm (curve 51b) as mentioned above, while the nozzle angle is 60 degrees. Shows. All other conditions have been described above. In this case, the difference in curvature radius is minute.
9 shows material removal for nozzle speed (header) speed at two different distances between the nozzle and glass edge, 2 mm (curve 55a) and 10 mm (curve 55b). As mentioned before, the glass sheet is about 0.7 mm thick. The nozzle travels along the edge at speeds of 50 mm / s and 200 mm / s at two different distances between the nozzle and the glass edge. It has a grit size of slurry # 800 and the air pressure used to accelerate the slurry is 0.15 MPa. The nozzle has a direction of an angle of zero degrees with respect to the plane. As shown in the figure, the amount of material removed varies approximately linearly with the feed rate of the nozzle along the glass edge and hardly depends on the distance between the nozzle and the edge. In contrast, FIG. 10 shows the amount of material removal versus nozzle speed at three different angles (0 degrees, 60 degrees, 120 degrees) when the distance is fixed at 10 mm. Two paths are created by the nozzles and are directed in different directions along each corner of the two paths. As shown in FIG. 10, the results vary over a wide range. When the nozzle angle is 120 degrees, the radius of curvature is hardly dependent on the nozzle speed. However, when the nozzle angle is 60 degrees and 0 degrees, the dependency shows that the radius of curvature of the polishing surface 30 obtained at 60 degrees is greater than that at 0 degrees.
The radius of curvature is evaluated with respect to air pressure for two different grit sizes # 800 and # 2000 to assess the effect of grinding size (grit size). The angle α of the nozzle is 60 degrees, the distance between the nozzle outlet orifice and the glass edge is 10 mm, and the nozzle is conveyed along the edge at a speed of about 10 mm / s. As shown in FIG. 11, the radius of curvature of the polishing surface 30 in the # 800 size of the grit abrasive (curve 57a) is approximately 3 times the radius of curvature of the polishing surface 30 in the # 2000 size of the grit abrasive (curve 57b). It is a ship.
12 also shows the effect of abrasive size on glass removal. Abrasive size is checked for air pressure for two different grit sizes # 800 (curve 59a) and # 2000 (curve 59b). The nozzle has an angle α of 0 degrees, the distance between the nozzle outlet orifice and the glass edge is 10 mm, the nozzle is conveyed at a speed of about 10 mm / s along the edge, and the air pressure is 0.15 MPa. Two paths are created by the nozzles, which are formed in opposite directions with respect to each other. As shown, more glass is removed at an abrasive size greater than # 2000 (ie # 800) at a given nozzle feed rate relative to the glass edge.
In other embodiments, multiple slurry jet nozzles 24 may be used in the process of treating two or more glass sheet edges at the same time. As shown in FIG. 13, one slurry jet nozzle 24 is used to treat the edge 12 between the edge face 20 and the first side 16 of the glass sheet 14, and the second The slurry jet nozzle 24 is used to treat the edge 20 between the edge face 20 and the second side 16 of the glass sheet 14. Moreover, multiple slurry jet nozzles are used to treat multiple edges of the glass. For example, as shown in FIG. 14, a pair of slurry jets are disposed at adjacent edges 16, 18 of glass sheet 14, and a second pair of slurry jets are disposed at adjacent edges 16 of glass sheet 14. , 18) on the opposite side. As shown in FIG. 14, the glass sheet 14 moves relative to the slurry jet, or alternatively the slurry jet moves relative to the glass sheet. A plurality of edges are completed by the same process. For example, when the glass sheet moves up and down relative to the ground, the upper and lower edges of the left and right sides of the glass sheet 14 are processed.
According to another embodiment shown in FIG. 15A, the plurality of nozzles 24 are each nozzle arranged such that they can produce different results. For example, the plurality of nozzles 24 are disposed adjacent to each other, and sequentially provide different grit sizes (eg, monotonically increasing grit sizes) to allow edges to be processed sequentially. Thus, only a small amount of material is removed when gradually increasing the grit slurry in a given transfer state between the sheet and the nozzle. Suitable grit sizes are about # 400 to # 4000. Moreover, if the other processing mentioned above is changed, there is a change between different nozzles. For example, the slurry for each nozzle is accelerated by gas at different air pressures, and each nozzle has a different distance from the glass edge than the adjacent nozzles. The arrangement and treatment conditions are determined by the desired properties of the edges and can be determined by one skilled in the art without undue experimentation. When the plurality of nozzles and the edges 12 move relatively in the direction of the arrow 53 shown, the edges are polished gradually along the longitudinal direction of the edges. The plurality of nozzles may move, the glass sheet may move, or the glass sheet and nozzle may move to provide relative movement. Additionally, the nozzles of the plurality of nozzles have an angle α relative to the edge, as shown in FIG. 15B. Advantageously, the change in angle has the effect of improving the mismatch of the edge shape (the shape of the polishing surface 30).
As shown in FIG. 16, the device 10 further includes at least one barrier or cleaning device 54. At least one cleaning device 54 is adjacent or bonded to both sides 16 and 18 of the glass sheet 14 to prevent debris and other contaminants generated during the cornering process of the glass sheet 14.
In a preferred embodiment, the cleaning device 54 consists of an air jet alignment disclosed in US Patent Application No. 60/752858, filed November 21, 2005. The cleaning device 54 includes at least one slot 56 which, for example, directs a high velocity gas 58 such as air to the glass surface as a gas curtain to remove dust that accumulates on the glass surface. These dusts are abrasive debris from the slurry, glass chips removed from the glass sheet during processing on the sheet, dust and other foreign matter deposited on the surface of the glass sheet. The air curtain generally faces the glass surface opposite the slots and the air curtain impinges on the glass surface at an angle. That is, the angle formed by the glass sheet and the air curtain is 90 degrees or less (perpendicular to the glass sheet). The cleaning jet is connected to the cleaning device to remove dust from the glass face. In one example, the cleaning liquid 61 such as water is directed through the cleaning jet 63 to the surface of the glass sheet. Again, the cleaning liquid is preferably directed at an angle of less than 90 degrees to the surface of the glass sheet.
In addition, as shown in Fig. 16, the lid 60 is used to collect the cleaning liquid flowing out of the used slurry generated in the glass removal process and the dust generated in the glass removal process as well as one or more cleaning apparatus used. Used. The cover must fully enclose at least a portion of the glass sheet edge treated by the slurry jet and be connected to a cleaning device or device that creates a space between the cover and the cleaning device. The cover is designed to move the glass sheet edges along the cover. Thus, the lid has an opening through which the glass sheet can be terminated. Preferably, the lid is connected to a dust (eg slurry and glass) and a vacuum source (not shown) for removing the cleaning liquid from the vicinity of the glass surface. The inflow of air into the lid is in the direction indicated by the arrow 62. One or more slurry delivery nozzles are installed in the interior region 64 enclosed by the cover via the cover. The formation of a vacuum in the region 64 additionally enables the air flow to be formed along the surface of the glass sheet as indicated by arrow 66.
It should be noted that the above-described embodiments of the present invention, in particular “preferred” embodiments, are merely possible examples of implementation and are only described to clearly understand the principles of the present invention. Many modifications and variations can be made in the embodiments of the invention described above without departing from the spirit and scope of the invention. All such modifications and variations are intended to be included herein within the scope of this disclosure and the present invention and protected by the appended claims.

Claims (27)

  1. Forming an arcuate surface in the sheet of brittle material 14 by spraying at least one abrasive stream 26 from the nozzle 24 toward the edge 12 of the sheet of brittle material; And
    A spraying step of injecting a compressed air 58 stream from the at least one slot 56 toward the brittle material sheet 14 to prevent the abrasive from adhering to the brittle material sheet;
    And wherein the major axis (32) of the at least one nozzle has an angle α in the range of 0 to 60 degrees with respect to the plane (34) comprising the surface of the sheet of brittle material.
  2. Claim 1
    Wherein said forming step comprises spraying a plurality of abrasive streams toward the edges.
  3. Claim 1
    And spraying the wash liquor stream (61) onto the surface of the sheet of brittle material.
  4. Claim 1
    And a cover (60) surrounding the edge portion of the sheet of brittle material to collect abrasive.
  5. Claim 1
    And transferring the edges opposite the abrasive stream.
  6. Claim 1
    The brittle material sheet
    And at least two corners are processed simultaneously, wherein at least two corners are processed simultaneously.
  7. At least one nozzle 24 for spraying the abrasive stream 26 toward the edge; And
    A cleaning device 54 located adjacent the corner for injecting compressed air 58 from the at least one slot to prevent adhesion of the abrasive to the sheet of brittle material,
    The cleaning device 54 is connected to the cover and the edge 12 processing device of the sheet of brittle material to which the nozzle is connected to the cover.
  8. Claim 7
    And a lid (60) positioned proximate the edge (12) to collect the abrasive.
  9. Claim 7
    Wherein said at least one nozzle comprises a plurality of nozzles for ejecting a plurality of abrasive streams toward the edges.
  10. The method according to claim 9
    Wherein each nozzle of the plurality of nozzles is located adjacent to each other, each nozzle of the plurality of nozzles spraying abrasive having a different average crete size than the adjacent nozzles.
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KR20097008646A 2006-09-28 2007-09-28 Apparatus and method for edge processing of a sheet of brittle material KR101350022B1 (en)

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US84795006P true 2006-09-28 2006-09-28
US60/847,950 2006-09-28
PCT/JP2007/069518 WO2008044613A1 (en) 2006-09-28 2007-09-28 Apparatus and method for edge processing of a sheet of brittle material

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TW201829119A (en) * 2016-11-29 2018-08-16 美商康寧公司 Apparatus and method for edge processing of a substrate sheet
CN112768383A (en) * 2021-01-26 2021-05-07 长江存储科技有限责任公司 Wafer processing apparatus and wafer processing method

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CN101626875A (en) 2010-01-13
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JP2010504859A (en) 2010-02-18
JP5127825B2 (en) 2013-01-23
KR20090082199A (en) 2009-07-29

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