KR101332497B1 - 광학 조립체를 포함하는 마이크로-리소그래피의 투사 노광기 - Google Patents

광학 조립체를 포함하는 마이크로-리소그래피의 투사 노광기 Download PDF

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Publication number
KR101332497B1
KR101332497B1 KR1020077019351A KR20077019351A KR101332497B1 KR 101332497 B1 KR101332497 B1 KR 101332497B1 KR 1020077019351 A KR1020077019351 A KR 1020077019351A KR 20077019351 A KR20077019351 A KR 20077019351A KR 101332497 B1 KR101332497 B1 KR 101332497B1
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South Korea
Prior art keywords
manipulator
housing
optical assembly
optical
objective lens
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Expired - Lifetime
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KR1020077019351A
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English (en)
Korean (ko)
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KR20070097125A (ko
Inventor
헤르만 비이크
카를-오이겐 아우벨레
임-분 파트릭 콴
슈테판 크살터
마틴 슈미트
사베리오 산비도
위-리엠 뉴옌
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칼 짜이스 에스엠테 게엠베하
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Publication of KR20070097125A publication Critical patent/KR20070097125A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827—Motorised alignment

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lens Barrels (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
KR1020077019351A 2005-01-26 2006-01-26 광학 조립체를 포함하는 마이크로-리소그래피의 투사 노광기 Expired - Lifetime KR101332497B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US64763305P 2005-01-26 2005-01-26
US60/647,633 2005-01-26
US64785505P 2005-01-27 2005-01-27
US60/647,855 2005-01-27
DE102005034235.3 2005-07-19
DE102005034235 2005-07-19
PCT/EP2006/000684 WO2006079537A2 (en) 2005-01-26 2006-01-26 Optical assembly

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020107017963A Division KR101279666B1 (ko) 2005-01-26 2006-01-26 광학 조립체

Publications (2)

Publication Number Publication Date
KR20070097125A KR20070097125A (ko) 2007-10-02
KR101332497B1 true KR101332497B1 (ko) 2013-11-26

Family

ID=36127394

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077019351A Expired - Lifetime KR101332497B1 (ko) 2005-01-26 2006-01-26 광학 조립체를 포함하는 마이크로-리소그래피의 투사 노광기

Country Status (4)

Country Link
US (3) US7791826B2 (https=)
JP (2) JP5022914B2 (https=)
KR (1) KR101332497B1 (https=)
WO (1) WO2006079537A2 (https=)

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DE102006045075A1 (de) 2006-09-21 2008-04-03 Carl Zeiss Smt Ag Steuerbares optisches Element
DE102006050835A1 (de) * 2006-10-27 2008-05-08 Carl Zeiss Smt Ag Verfahren und Vorrichtung zum Austausch von Objetkivteilen
WO2009124590A1 (en) * 2008-04-09 2009-10-15 Carl Zeiss Smt Ag Optical aperture device
KR101012998B1 (ko) * 2008-08-06 2011-02-10 경북대학교 산학협력단 생체모방형 로봇 눈 어셈블리
DE102009005954B4 (de) * 2009-01-20 2010-10-21 Carl Zeiss Smt Ag Dämpfungsvorrichtung
DE102009029673A1 (de) 2009-09-22 2010-11-25 Carl Zeiss Smt Ag Manipulator zur Positionierung eines optischen Elementes in mehreren räumlichen Freiheitsgraden
JP2011119551A (ja) * 2009-12-04 2011-06-16 Nikon Corp 光学部材変形装置、光学系、露光装置、デバイスの製造方法
JP5556155B2 (ja) * 2009-12-04 2014-07-23 株式会社ニコン 光学部材変形装置、光学系、露光装置、デバイスの製造方法
GB2486212A (en) * 2010-12-06 2012-06-13 Owen Reading A self-contained variable power lens unit with enclosed laterally movable optical plate
WO2012163643A1 (de) * 2011-05-30 2012-12-06 Carl Zeiss Smt Gmbh Bewegung eines optischen elements in einer mikrolithografischen projektionsbelichtungsanlage
NL1039652C2 (en) * 2012-06-05 2013-12-09 Janssen Prec Engineering Cryogenic positioning stage.
SG10201509875XA (en) 2012-09-12 2016-01-28 Heptagon Micro Optics Pte Ltd Testing of optical devices
DE102012219806A1 (de) * 2012-10-30 2014-04-30 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage mit mindestens einem Mittel zur Reduktion des Einflusses von Druckschwankungen
JP6314318B2 (ja) * 2013-10-15 2018-04-25 パナソニックＩｐマネジメント株式会社 レンズ鏡筒
EP2942654B1 (en) * 2014-05-08 2018-10-10 Airbus Defence and Space GmbH Detector plane alignment adjusting device
DE102015207154A1 (de) 2014-05-09 2015-11-12 Carl Zeiss Smt Gmbh Projektionsobjektiv mit Wellenfrontmanipulator
US10082667B2 (en) * 2015-05-04 2018-09-25 Harris Corporation Laser imaging system with adjustable optical element mounting fixture and related methods
DE102016013045A1 (de) * 2016-10-24 2018-04-26 Blum-Novotest Gmbh Messsystem zur Messung an Werkzeugen in einer Werkzeugmaschine
DE102017126293A1 (de) * 2017-11-09 2019-05-09 Compact Laser Solutions Gmbh Vorrichtung zur Verstellung eines optischen Bauelements
DE102017126291A1 (de) * 2017-11-09 2019-05-09 Compact Laser Solutions Gmbh Vorrichtung zur Erzeugung einer Laserstrahlung
DE102018207949A1 (de) * 2018-05-22 2019-05-29 Carl Zeiss Smt Gmbh Baugruppe in einer mikrolithographischen Projektionsbelichtungsanalge
JP7694101B2 (ja) * 2021-03-26 2025-06-18 日本精工株式会社 マニピュレーションシステム
US12455405B2 (en) * 2021-07-23 2025-10-28 Optotune Switzerland Ag Tunable optical device
JP7723534B2 (ja) * 2021-08-26 2025-08-14 キヤノン株式会社 駆動装置、露光装置および物品製造方法
DE102022102664B3 (de) * 2022-02-04 2023-08-10 Precitec Gmbh & Co. Kg Laserbearbeitungskopf mit hermetisch gekapselter beweglicher Optik
EP4575307A3 (en) * 2023-11-28 2025-08-20 Harman Professional Denmark ApS Systems for multi-lens devices

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Also Published As

Publication number Publication date
US8570676B2 (en) 2013-10-29
US7791826B2 (en) 2010-09-07
US20100271607A1 (en) 2010-10-28
JP5540030B2 (ja) 2014-07-02
JP5022914B2 (ja) 2012-09-12
WO2006079537A2 (en) 2006-08-03
US7929227B2 (en) 2011-04-19
WO2006079537A3 (en) 2006-09-21
KR20070097125A (ko) 2007-10-02
US20080170303A1 (en) 2008-07-17
JP2012124520A (ja) 2012-06-28
US20110181857A1 (en) 2011-07-28
JP2008529076A (ja) 2008-07-31

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