KR101285642B1 - Glass substrate positioning apparatus, positioning method, edge plane polishing apparatus and edge plane polishing method - Google Patents

Glass substrate positioning apparatus, positioning method, edge plane polishing apparatus and edge plane polishing method Download PDF

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Publication number
KR101285642B1
KR101285642B1 KR20077007547A KR20077007547A KR101285642B1 KR 101285642 B1 KR101285642 B1 KR 101285642B1 KR 20077007547 A KR20077007547 A KR 20077007547A KR 20077007547 A KR20077007547 A KR 20077007547A KR 101285642 B1 KR101285642 B1 KR 101285642B1
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South Korea
Prior art keywords
glass substrate
side
pressing
positioning
member
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KR20077007547A
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Korean (ko)
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KR20070106965A (en
Inventor
나오키 니시무라
히로카즈 오쿠무라
시게루 야마키
Original Assignee
니폰 덴키 가라스 가부시키가이샤
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Priority to JP2005049506A priority Critical patent/JP4887630B2/en
Priority to JPJP-P-2005-00049506 priority
Application filed by 니폰 덴키 가라스 가부시키가이샤 filed Critical 니폰 덴키 가라스 가부시키가이샤
Priority to PCT/JP2006/301617 priority patent/WO2006090561A1/en
Publication of KR20070106965A publication Critical patent/KR20070106965A/en
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Publication of KR101285642B1 publication Critical patent/KR101285642B1/en

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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682Mask-wafer alignment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass

Abstract

The support member 3 which can contact one side {2a (2c)} of the glass substrate 2, and the other side {2b (2d)} parallel to this one side {2a (2c)} becomes possible, In addition, the glass substrate 2 is provided with a pressing member 4 for pressing and moving the side of the supporting member 3, the glass substrate (2) by the interaction of the supporting member 3 and the pressing member (4) Positioning of the support substrate 3 and the support member 3 in accordance with the pressing movement of the glass substrate 2 so as to be movable, the support member 3 receives one side {2a (2c)} of the glass substrate 2. 3) Positioning of the glass substrate 2 is performed on the basis of the displacement amount of the other side {2b (2d)} of the glass substrate 2 at the time of the pressing movement by the crimping member 4 in the state which made contact with 3). It is configured to perform.

Description

GLASS SUBSTRATE POSITIONING APPARATUS, POSITIONING METHOD, EDGE PLANE POLISHING APPARATUS AND EDGE PLANE POLISHING METHOD}

BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a positioning device and method for a glass substrate, and an end surface grinding device and method, and more particularly, to positioning the glass substrate accurately for positioning the glass substrate so as to maintain the glass substrate in a normal position in a normal position. An apparatus and method, and an end surface grinding apparatus and method for grinding an end surface of a glass substrate after completion of positioning by them.

As already known, when manufacturing glass panels for various image display apparatuses, such as a liquid crystal display, a plasma display, an electroluminescent display, and a field emission display, it has a glass substrate in the middle of manufacture, ie, a sharp cutting edge. In order to make a glass substrate the required size and end surface shape, grinding is performed to the cut end surface.

This kind of end surface grinding is conventionally performed by relatively moving the grinding tool along the two sides while the grinding tool is in contact with two parallel sides of the glass substrate. It is necessary to position them so that they remain in the correct position at the correct position. Therefore, it is customary that a positioning device is attached to the end surface grinding device of the glass substrate.

Specifically, in the state where the end surface grinding apparatus is loaded with the glass substrate 20 on the mounting surface of the work table (precision plate) 50 as shown in FIG. Grinding holes (diamond tools) 11 made of a grinding wheel are moved along the running rails 10 installed on both sides of the outer side thereof, and the grinding holes 11 are two parallel sides of the glass substrate 20. By rotating in contact with, the end face grinding of the side of the glass substrate 2 is performed as shown in FIG.

On the other hand, the positioning device described above, as shown in Fig. 6, the support member 30 made of a total of three fixed rollers serving as a reference for positioning of the glass substrate 20, and facing them Two orthogonal sides of the glass substrate 20 are provided by the pressing member 40 having a total of three pressing members 40 arranged in total, and the pressing member 40 pushes the glass substrate 2 placed on the loading surface of the work table 50. When the sides 20b and 20d are in contact with the support member 30, the positioning is made. As another example, as shown in FIG. 7, two of the three supporting members 30 provided in the positioning apparatus according to the above example, which are in contact with one side 20b of the glass substrate 20. The support member material is made into the fixed plate 31 instead of the fixed roller, and the structure which makes positioning by the above-mentioned action is mentioned. The above two types of positioning apparatuses have been devised and manufactured by the present inventors in the prior art, but no patent application or publication thereof has been made.

In addition, Patent Document 1 described below includes two reference stoppers provided at one end of a table and capable of contacting one of two parallel sides of the glass plate, and provided at the other end of the glass plate. A position detecting device is disclosed having a contactable crimping member and a traveling arm for holding an edge detecting means which is in contact with a side perpendicular to the two parallel sides of the glass plate. According to this position detecting apparatus, one side of the glass plate placed on the table is brought into contact with the reference stopper by the crimping member, and the position of the other side orthogonal to one side of the glass plate is measured by the edge detecting means. Find the position of.

In addition, Patent Document 2 described below, in both sides of the glass plate conveying line sequentially from the upstream side, in the direction orthogonal to the conveying direction of the glass plate, the grindstone in contact with the two parallel sides of the glass plate, respectively, and moves in the same direction There is disclosed a chamfering device of a glass plate having a roller which is in contact with each of the two sides of the glass plate, and configured to detect a displacement amount of the roller by a displacement sensor having a contactor moving in accordance with the displacement of these rollers. . According to this chamfering device, first, the pair of rollers are moved to position at positions where the two sides of the glass plate can come into contact with each other, and the pair of grindstones are moved to position the two sides of the glass plate at a position that can be polished. Next, by conveying a glass plate along a conveyance line, a roller is moved and contacted with the two sides of the glass plate after grinding | polishing with a grindstone. The displacement sensor detects the width of the glass plate based on the movement amounts of these rollers, and finely adjusts the position of the grindstone based on the detection result.

Patent Document 1: Japanese Patent Application Laid-Open No. 8-141888

Patent Document 2: Japanese Patent Application Laid-Open No. 5-69318

By the way, in the positioning apparatus shown in FIG. 6 and FIG. 7 and the position detection apparatus disclosed in patent document 1, since both the support members (fixed roller, a fixed plate, and the reference stopper) which serve as a stopper are fixed, The sharp edge (cut end surface) of the glass substrate before grinding is brought into contact with the supporting member with a relatively large impact force.

For this reason, the backing member is shaved by the sharp edge of the glass substrate, and wears out prematurely, and a misalignment occurs in the positioning of the glass substrate, or a wound on the backing member causes the edge of the glass substrate to be caught by the wound. It causes a problem that it becomes difficult to move to the position.

In addition, since all of these apparatuses position the glass substrate on the basis of the contact portion of the support member, when the contact portion of the support member is worn as described above, the contact position of the glass substrate itself changes. There is a fear that the positioning accuracy of the substrate may deteriorate.

In the case where the positioning of the glass substrate is hindered as described above, for example, as shown in FIG. 8, it is loaded on the mounting surface of the work table 50 and held thereon for adsorption to the posture of the glass substrate 20. Aberration occurs, and the grinding value t of the glass substrate 20 increases. In such a state, it is necessary to slow down the grinding speed, deteriorate the machining efficiency, and cause variation in the amount of grinding, thereby causing a problem that the surface quality of the grinding surface is lowered.

In recent years, since glass substrates have been promoted, it is difficult to move the glass substrate smoothly, and the glass substrate is distorted. Therefore, the glass substrate may be changed depending on the operation of the crimping member. There is also a problem that the contact member cannot be brought into proper contact.

On the other hand, the chamfering device disclosed in Patent Document 2 described above does not perform positioning by contacting the glass substrate with the rollers, but first conveys the glass substrates between the two rollers after positioning the pair of rollers. Likewise, the problem in the case where the pressing member contacts the glass substrate with the supporting member for positioning is naturally unavoidable.

In addition, the above problem is not limited to the positioning apparatus attached to the end surface grinding apparatus of the above-mentioned glass substrate, but the same also applies to the positioning apparatus attached to the cutting apparatus of a glass substrate, or other similar positioning apparatus. Can occur.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and adds an improvement to the structure of the supporting member, and makes an appropriate element for positioning, thereby improving the positioning accuracy of the glass substrate. Shall be.

The present invention devised to solve the above technical problem, the support member which is in contact with one side of the glass substrate, and the other side parallel to the one side can be contacted and the glass substrate is moved to the side of the support member by pressing A positioning device having a pressing member for positioning the glass substrate by the interaction of the supporting member and the pressing member, wherein the supporting member is pressed against the glass substrate by the pressing member. In a state in which the support member is movable to the support member while being elastically supported so as to be movable in the pressing movement direction while keeping on the side, the one side of the glass substrate is brought into contact with the support member. The amount of displacement in the direction from one side to the other side of the glass substrate during the pressing movement by the pressing member Is detected by a displacement sensor to position the glass substrate.

According to this configuration, when the pressing member moves the glass substrate toward the supporting member, when the one of two parallel sides of the glass substrate contacts the supporting member, the supporting member is kept in the contact state while maintaining the contact. The substrate moves in accordance with the pressing movement of the substrate. Therefore, the impact when the glass substrate is in contact with the support member is alleviated, so that scratches or abrasions, etc. are less likely to occur at the contact portion of the support member. And poor positioning due to the glass substrate being caught on the wound of the support member or the like. In addition, since the positioning is performed on the basis of the displacement amount of the other side of the glass substrate when the pressing member is pushing the glass substrate while the glass substrate is in contact with the supporting member, in other words, Since the positioning of the glass substrate is performed on the basis of the position itself of the other side of the glass substrate, there are no or almost no sources of positioning error, so that highly accurate positioning is realized.

In this case, it is preferable to provide a displacement sensor adjacent to the crimping member to detect the displacement amount of the other side of the glass substrate. In addition, the displacement sensor may be a contact type which contacts another side of a glass substrate, or may be a non-contact type thing.

In this way, positioning of the glass substrate is completed when the crimping member is stopped when the displacement amount of the other side of the glass substrate detected by the displacement sensor reaches a preset set value. As a result, the positioning operation of the glass substrate can be automatically performed, and an accurate and quick positioning operation can be performed.

In detail, the edges of the outer peripheral edges of the glass substrate include first and second sides parallel to each other, and third and fourth sides perpendicular to and parallel to the sides thereof. , At least two of the supporting members is in contact with the first side and at least one of the third sides, and at least two of the crimping members are in the second side, and the fourth side. At least one of the sides is preferably configured to be in contact with each other. In this case, each supporting member and each crimping member are disposed to face each other.

In this way, the pressing member can be moved to the side of the supporting member while the glass substrate is stably held, and it is necessary to damage or position the glass substrate due to the pressing movement while the attitude of the glass substrate is unjustly changed. Problems such as prolongation of time become difficult to occur. Further, two supporting members contactable to the first side, one supporting member contactable to the third side, two pressing members contactable to the second side, and four fourth contacting members With one contact member that can be contacted, the glass substrate is supported by three points by each supporting member, and also by three points by each pressing member, and does not cause an increase in the number of parts, thereby supporting the glass substrate. It becomes possible to make it more stable.

Also in this case, a displacement sensor for detecting respective displacement amounts of the second side and the fourth side of the glass substrate, adjacent to each pressing member contactable to the second side and the fourth side of the glass substrate, is provided. It is preferable to install.

By doing in this way, the effect by installing the displacement sensor mentioned above can be similarly nostalgic.

In addition, the pressing member preferably has an eccentric roller for converting the rotational driving force from the driving source into the pressing movement operation on the glass substrate.

In this case, the glass substrate is pressed by the strong driving force due to the rotation of the eccentric roller, and even if the glass substrate is a large plate, it does not cause the lack of the pressing movement force and reliably until the glass substrate contacts the supporting member. It is possible to move accurately, to avoid the situation in which the glass substrate does not reach the supporting member or worsen, and to cope with the recent large-sized glass substrate.

In this case, the eccentric rollers relatively increase the amount of pressing movement per unit rotation angle in the initial stage of the pressing movement with respect to the glass substrate, and the amount of pressing movement per unit rotation angle in the final stage of the pressing movement with respect to the glass substrate. It is preferable that it is comprised so that it may become comparatively small.

In this way, fine adjustment of the position of the glass substrate is made in the final stage of the pressing movement with respect to the glass substrate, especially immediately before the positioning of the glass substrate is completed, and at the initial stage of the pressing movement with respect to the glass substrate. As the phosphorus movement is performed, a compact positioning operation can be performed by fine movement in the final stage, while reducing the time for positioning operation.

In the above configuration, the supporting member and the pressing member are installed outside the outer peripheral edge of the working table, and the interaction between the supporting member and the pressing member when the glass substrate is mounted on the mounting surface of the working table. It may be configured to position the mounting surface of the glass substrate.

In this way, the glass substrate is accurately positioned at a predetermined predetermined position on the mounting surface of the work table, and it becomes possible to smoothly and appropriately perform the machining operation on the glass substrate and the like.

In this case, at least two parallel sides of the glass substrate are positioned outside the outer circumferential edge of the loading surface of the work table, and the glass substrate after the positioning is completed by the positioning device around the position. It is also possible to provide a grinding tool for grinding the end face of at least two parallel sides of, and may serve as the end face grinding device of the glass substrate.

In this way, at least two parallel sides of the glass substrate accurately positioned on the mounting surface of the work table can be ground by the grinding hole in the state of having a small grinding value, and the grinding speed is increased to improve the processing efficiency. In addition to being possible, it is also possible to increase the surface quality of the grinding end face.

In addition, the method according to the present invention devised to solve the above technical problem, the support member which is in contact with one side of the glass substrate, and the other side parallel to the one side is possible to contact the glass substrate and the support member A positioning method comprising a pressing member for pushing and moving toward a side of the substrate, wherein the positioning of the glass substrate is performed by the interaction of the supporting member and the pressing member. The glass substrate is pressed against the supporting member elastically supported to be movable in the pressing movement direction of the pressing member, and the supporting member is pressed against the pressing movement of the glass substrate by the pressing member. The displacement amount in the direction from the other side of the glass substrate toward one side while moving in the direction It will stand, characterized in that for performing the positioning of the glass substrate.

According to this method, when the pressing member pushes the glass substrate toward the supporting member, one side of the two parallel sides of the glass substrate is in contact with the supporting member, and the supporting member is pressed against the pressing movement of the glass substrate. In addition to the following movement, positioning is performed based on the displacement amount of the other side of the glass substrate in this state. By performing such an operation, the effect already described with respect to the operation | movement corresponding to this can be enjoyed in the same way.

In this case, the positioning method is carried out by mounting the glass substrate on the work table so that at least two parallel sides of the glass substrate are located outside the outer peripheral edge of the loading surface of the work table. At least two parallel sides of the glass substrate after the completion of crystallization may be subjected to end surface grinding with a grinding tool, and may be used as a method for grinding the end surface of the glass substrate.

In this way, the end surface grinding is performed on the glass substrate whose grinding value is appropriately reduced as the accurate positioning is performed, thereby increasing the grinding speed and improving the processing efficiency. It is also possible to raise the surface quality of the later end face.

(Effects of the Invention)

As described above, according to the present invention, when one side of two parallel sides of the glass substrate is in contact with the support member, the support member moves in accordance with the pressing movement of the glass substrate while maintaining the contact. When the glass substrate is in contact with the support member, the impact is alleviated, and the positioning accuracy of the glass substrate due to premature wear of the support member is deteriorated, and the positioning failure due to the glass substrate being caught by the wound of the support member is caused. If possible suppressed. Further, since the positioning is performed on the basis of the displacement amount of the other side of the glass substrate when the pressing member pushes the glass substrate in contact with the supporting member, a very high precision positioning is realized. do.

1 is a schematic plan view showing the overall configuration of a positioning device for a glass substrate according to an embodiment of the present invention.

2 is an enlarged plan view of a main portion of the main portion of the positioning device for positioning a glass substrate according to an embodiment of the present invention.

3 is a schematic plan view showing a state of the glass substrate positioned using the positioning apparatus of the glass substrate according to the embodiment of the present invention.

4 is a plan view schematically showing the overall configuration of an end surface grinding apparatus (also known as an example) on which a positioning device for a glass substrate according to an embodiment of the present invention is attached.

Fig. 5 is an enlarged plan view of a main part showing a simplified part of a main surface grinding device (also known as an example) on which a positioning device for a glass substrate according to an embodiment of the present invention is attached.

6 is a schematic plan view showing an example of a positioning apparatus for a glass substrate in the related art.

7 is a schematic plan view showing another example of a positioning apparatus for a glass substrate in the related art.

Fig. 8 is a schematic plan view showing the state of a glass substrate positioned using a glass substrate positioning apparatus in the related art.

Description of the Related Art

1: positioning device

2: glass substrate

2a: first side

2b: second side

2c: third side

2d: fourth side

3: support member

4: pressing member

4b: Eccentric Roller

5: working table

6: displacement sensor

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to attached drawing. In addition, since the end surface grinding apparatus in which the positioning device which concerns on this embodiment is attached is the same as the structure shown in FIG. 4 and FIG. 5 which were demonstrated previously, the illustration and description are abbreviate | omitted.

As shown in FIG. 1, the positioning apparatus 1 which concerns on this embodiment is basically the support member 3 which can contact one side {2a (2c)} of the glass substrate 2, and this one. It is provided with a crimping member 4 which makes contact with another side {2b (2d)} parallel to the side {2a (2c)} and pushes the glass substrate 2 to the side of the supporting member 3, , The supporting member 3 is moved in accordance with the pressing movement of the glass substrate 2 and the one side {2a (2c)} of the glass substrate 2 is brought into contact with the supporting member 3. The positioning of the glass substrate 2 is performed on the basis of the displacement amount of the other side {2b (2d)} of the glass substrate 2 when the pressing member 4 presses and moves.

In detail, this positioning device 1 comprises two support members which can contact the first side 2a of the glass substrate 2 mounted on the mounting surface of the work table (precision plate) 5. (3), two pressing members 4 which are in contact with the second side 2b parallel to the first side 2a, and their first and second sides 2a and 2b; One support member 3 that can be in contact with the third side 2c at right angles, and one pressing member 4 which is in contact with the fourth side 2d at right angles to the third side 2c, Have In this case, the four sides 2a, 2b, 2c, and 2d of the glass substrate 2 are located outside the outer circumferential edge of the loading surface of the work table 5, and each supporting member 3 and each The crimping member 4 is disposed outside the outer circumferential edge of the mounting surface of the work table 5 and outside the total four sides 2a, 2b, 2c, and 2d of the glass substrate 2. Therefore, the rectangular glass substrate 2 is supported at three points by three supporting members 3 in total, and is also supported at three points by three pressing members 4 in total.

In this case, with respect to the first side 2a of the glass substrate 2, the two supporting members 3 are arrange | positioned in the vicinity of the both ends, and also in the vicinity of the both ends of the 2nd side 2b. Two pressing members 4 are respectively arranged opposite to the two supporting members 3. Moreover, about the 3rd side 2c of the glass substrate 2, the one support member 3 is arrange | positioned in the vicinity of the corner part with the 2nd side 2b, and the 4th side 2d Also in the vicinity of the corner portion with the second side 2b, one pressing member 4 facing the one supporting member 3 is disposed. In addition, with respect to the supporting member 3 and the crimping member 4 which are disposed corresponding to the third side 2c and the fourth side 2d of the glass substrate 2, the second side 2b and It is not limited to the corner part vicinity of this, and you may arrange | position it in the vicinity of each center part of each side 2c, 2d.

The positioning device 1 further comprises two displacement sensors 6 which are in contact with the second side 2b of the glass substrate 2 and which are adjacent to the two pressing members 4 of the site, respectively. In addition, one displacement sensor 6 which is in contact with the fourth side 2d and is adjacent to the one pressing member 4 in the portion is provided. These three displacement sensors 6 are also disposed outside the outer circumferential edge of the mounting surface of the work table 5 and outside the corresponding sides 2b and 2d of the glass substrate 2.

When explaining the detailed structure of each component, the supporting member 3 is a cylindrical (or cylindrical) contact receiving body 3a in contact with the corresponding sides 2a and 2c of the glass substrate 2. The contact receiving body 3a is elastically supported by an elastic body 3b made of a spring or a hydraulic cylinder. Therefore, each contact receiving body 3a is movable together with the glass substrate 2 in the state which maintained the contact with the corresponding edge | side 2a, 2c of the glass substrate 2, respectively.

On the other hand, the crimping member 4 has a circular contact pressing body 4a in contact with the corresponding sides 2b and 2d of the glass substrate 2, and a glass substrate with respect to each of the contact pressing bodies 4a. It has the eccentric roller 4b which gives a movement force to the direction orthogonal to each edge | side 2b and 2d of (2), respectively. These eccentric rollers 4b serve to convert the rotational driving force from a rotational drive source (not shown) made of a servo motor into a pressing movement operation against the glass substrate 2 of the contact pressing body 4a. In this case, the contact holding body 4a is always maintained in a constant posture.

Specifically, for example, as shown in FIG. 2, the eccentric roller 4b formed by the rotational center X is biased to be rotatably fitted through a bearing inside the contact pressing body 4a, It is comprised so that rotation driving force from a rotation drive source may be transmitted to this eccentric roller 4b. And as shown in the figure, the arrow a is from the state in which the bias amount of the center of rotation X of the eccentric roller 4b is maximum in the direction parallel to each side {2b (2d)} of the glass substrate 2. In the case of starting rotation in the direction, the glass substrate per unit rotation angle is approached as the rotation angle in the direction of the arrow a approaches 90 ° with respect to the relatively large amount of pressing movement with respect to the glass substrate 2 per unit rotation angle. The amount of push movement for (2) becomes relatively small. Therefore, in the initial stage of the positioning operation by the interaction between the pressing member 4 and the supporting member 3, the pressing movement operation with respect to the glass substrate 2 becomes a rough movement, and in the final stage, the fine movement is performed as a fine movement. do.

As shown in Fig. 1, the displacement sensor 6 is a contact sensor, each having a contactor 6a that can contact each corresponding side 2b, 2d of the glass substrate 2, and their contactor 6a. The moving direction of is arrange | positioned so that it may become parallel with the pushing movement direction of each press member 4, respectively. Then, the displacement amounts of the second and fourth sides 2b and 2d at the time of the pressing movement of the glass substrate 2 by the crimping member 4 are detected by the displacement sensors 6 and the detection thereof. It is comprised so that rotation of the eccentric roller 4b of the crimping | compression-bonding member 4 may stop at the time when the amount of displacement which became the preset value became predetermined value.

Next, the operation of the positioning device 1 having the above configuration will be described.

At the time when the glass substrate 2 is placed on the mounting surface of the work table 5 by the conveying means (not shown), each of the eccentric rollers 4b is rotated from the initial setting state shown in FIG. Rotate in the direction. As a result, the contact pressing body 4a of the two pressing members 4 presses and moves the second side 2b of the glass substrate 2 in the form of a rough movement, and one pressing member 4 The contact pressing body 4a of) presses the fourth side 2d in the same manner as the rough movement. As a result, the first side 2a of the glass substrate 2 is in contact with the contact receiving body 3a of the two supporting members 3, and the third side 2c is connected to one supporting member ( It comes in contact with the contact receiving body 3a of 3).

After that, as the eccentric roller 4b continues to rotate, each press member 4 continues to press the glass substrate 2, and each supporting member 3 is formed at each side of the glass substrate 2, respectively. They retreat, respectively, while maintaining contact with (2a, 2c). While this operation is being performed, the contactor 6a of each displacement sensor 6 moves while maintaining contact with each side 2b, 2d of the glass substrate 2, and each side 2b. , 2d) is continuously detected. Then, in the step where the eccentric roller 4b is rotated from the initial setting state to the vicinity of the angular position of 90 °, each pressing member 4 moves the sides 2b and 2d of the glass substrate 2 in the form of micro movement. By pressing and moving, the rotation drive source stops the rotation of the eccentric roller 4b when the amount of displacement detected by each displacement sensor 6 reaches a preset value. At this point, the positioning operation on the glass substrate 2 is completed.

At this point in time, since the glass substrate 2 is positioned in the correct position at the correct position with respect to the mounting surface of the work table 5, as shown in Fig. 3, the grinding value of the glass substrate 2 ( t) is small. In this state, negative pressure is generated on the rear surface side of the glass substrate 2 through the plurality of suction holes of the work table 5, thereby adsorbing the glass substrate 2 onto the mounting surface of the work table 5. Keep it. Thereafter, each component of the positioning device 1 is evacuated, and the grinding wheel shown in FIG. 4 described above is described on the first side 2a and the second side 2b of the glass substrate 2. The grinding | polishing tool (diamond tool) 11 which consists of these is made to contact. In this case, since both sides 2a and 2b of the work table 5 and each side 2a and 2b of the glass substrate 2 are set in advance so as to be parallel to the traveling rail 10 shown in FIG. ) Is moved along the running rail 10, the grinding end surface with stable surface quality in a short time can be obtained as the grinding value t of the glass substrate 2 is small.

The positioning device, positioning method, end surface grinding device, and end surface grinding method according to the present invention are used in the production of glass panels for various image display devices such as liquid crystal displays, plasma displays, electroluminescent displays, field emission displays, and the like. Like glass substrates used, glass substrates used as substrates for forming various electronic display functional elements or thin films, high-precision positioning is required in various processing processes, and high end quality is required.

Claims (21)

  1. A supporting member contactable to one side of the glass substrate, and a crimping member capable of contacting the other side parallel to the one side and pressing the glass substrate to the side of the supporting member, wherein the supporting member and the pressing member are provided. A positioning device configured to perform positioning of the glass substrate by interaction of
    The support member is elastically supported to follow the pressing movement of the glass substrate by the pressing member and to be movable in the pressing movement direction, and maintains the supporting member movable state by the elastic support. In the state in which one side of the glass substrate is in contact with the supporting member, the displacement sensor detects the displacement in the direction from the other side of the glass substrate to one side at the time of the pressing movement by the pressing member, and detects the displacement of the glass substrate. A positioning apparatus for a glass substrate, which is configured to perform positioning.
  2. 2. The positioning apparatus of a glass substrate according to claim 1, wherein the displacement sensor is provided adjacent to the pressing member.
  3. 2. The edge of the outer periphery of the glass substrate according to claim 1, comprising a first side and a second side parallel to each other, and a third side and a fourth side perpendicular to and parallel to the sides thereof. And at least two of the supporting members are in contact with the first side and at least one of the third sides, and at least two of the crimping members are at the second side, and the And at least one of the fourth sides is configured to be in contact with the fourth side.
  4. 4. The displacement according to claim 3, wherein the displacement for detecting respective displacement amounts of the second side and the fourth side of the glass substrate is adjacent to each pressing member contactable to the second side and the fourth side of the glass substrate. Positioning apparatus for a glass substrate, characterized in that the sensor is installed.
  5. 2. The positioning apparatus of a glass substrate according to claim 1, wherein said pressing member has an eccentric roller for converting rotational driving force from a drive source into a pressing movement operation on said glass substrate.
  6. 3. The positioning apparatus of a glass substrate according to claim 2, wherein the crimping member has an eccentric roller for converting a rotational driving force from a drive source into a push movement operation on the glass substrate.
  7. 4. The positioning apparatus of a glass substrate according to claim 3, wherein said crimping member has an eccentric roller for converting rotational driving force from a drive source into a pressing movement operation on said glass substrate.
  8. 5. The positioning apparatus of a glass substrate according to claim 4, wherein said pressing member has an eccentric roller for converting rotational driving force from a drive source into a pressing movement operation on said glass substrate.
  9. 6. The eccentric roller according to claim 5, wherein the eccentric roller relatively increases the amount of pressing movement per unit rotation angle in the initial stage of the pressing operation with respect to the glass substrate, and at the end of the pressing movement with respect to the glass substrate. Positioning apparatus for a glass substrate, characterized in that configured to reduce the amount of pressing movement relatively.
  10. The eccentric roller according to claim 6, wherein the eccentric roller relatively increases the amount of pressing movement per unit rotation angle in the initial stage of the pressing operation with respect to the glass substrate, and at the end of the pressing movement with respect to the glass substrate. Positioning apparatus for a glass substrate, characterized in that configured to reduce the amount of pressing movement relatively.
  11. 8. The method of claim 7, wherein the eccentric rollers relatively increase the amount of pressing movement per unit rotation angle in the initial stage of the pressing operation with respect to the glass substrate, and at the end of the pressing movement with respect to the glass substrate. Positioning apparatus for a glass substrate, characterized in that configured to reduce the amount of pressing movement relatively.
  12. 9. The method of claim 8, wherein the eccentric rollers relatively increase the amount of pressing movement per unit rotation angle in the initial stage of the pressing operation with respect to the glass substrate, and at the end of the pressing movement with respect to the glass substrate. Positioning apparatus for a glass substrate, characterized in that configured to reduce the amount of pressing movement relatively.
  13. According to claim 1, wherein the supporting member and the pressing member is installed on the outer side than the outer peripheral edge of the work table, and when the glass substrate is placed on the mounting surface of the work table to the interaction of the support member and the pressing member Positioning apparatus for positioning the loading surface of the glass substrate by means of the positioning of the glass substrate.
  14. According to claim 2, wherein the support member and the pressing member is installed on the outer side than the outer peripheral edge of the work table, and when the glass substrate is placed on the mounting surface of the work table, the interaction between the support member and the pressing member Positioning apparatus for positioning the loading surface of the glass substrate by means of the positioning of the glass substrate.
  15. According to claim 3, wherein the supporting member and the pressing member is installed on the outer side than the outer peripheral edge of the work table, and when the glass substrate is placed on the mounting surface of the work table to the interaction of the support member and the pressing member. Positioning apparatus for positioning the loading surface of the glass substrate by means of the positioning of the glass substrate.
  16. The method of claim 4, wherein the support member and the pressing member are installed outside the outer circumferential edge of the work table, and when the glass substrate is placed on the mounting surface of the work table, Positioning apparatus for positioning the stacking surface of the glass substrate.
  17. 6. The supporting member and the pressing member are installed outside the outer circumferential edge of the work table, and when the glass substrate is placed on the mounting surface of the work table, Positioning apparatus for positioning the loading surface of the glass substrate by means of the positioning of the glass substrate.
  18. 10. The method of claim 9, wherein the supporting member and the pressing member are installed outside the outer circumferential edge of the working table, and when the glass substrate is placed on the mounting surface of the working table, the supporting member and the pressing member interact with each other. Positioning apparatus for positioning the loading surface of the glass substrate by means of the positioning of the glass substrate.
  19. At least two parallel sides of the glass substrate are located outside the outer circumferential edge of the loading surface of the work table, and the positioning according to any one of claims 1 to 18 is provided around the position. An end surface grinding apparatus for a glass substrate, characterized in that a grinding hole for grinding the end surfaces of at least two parallel sides of the glass substrate after positioning completion by the device is provided.
  20. A supporting member contactable to one side of the glass substrate, and a crimping member capable of contacting the other side parallel to the one side and pressing the glass substrate to the side of the supporting member, wherein the supporting member and the pressing member are provided. In the positioning method for positioning the glass substrate by the interaction of
    By the pressing member, one side of the glass substrate is brought into contact with the supporting member elastically supported to be movable in the pressing movement direction of the pressing member so that the glass substrate is pressed and moved, and the supporting member is pressed against the pressing member. The displacement of the glass substrate is detected by the displacement sensor while following the pressing movement of the glass substrate and moving in the pressing movement direction, by detecting the displacement amount from the other side of the glass substrate to one side. Positioning method of glass substrate.
  21. The positioning method according to claim 20 is carried out by mounting the glass substrate on the work table so that at least two parallel sides of the glass substrate are located outside the outer peripheral edge of the loading surface of the work table. An end surface grinding method of an end surface of a glass substrate, characterized in that the end surface grinding is performed on at least two parallel sides of the glass substrate after the completion of the determination with a grinding hole.
KR20077007547A 2005-02-24 2006-02-01 Glass substrate positioning apparatus, positioning method, edge plane polishing apparatus and edge plane polishing method KR101285642B1 (en)

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JP2005049506A JP4887630B2 (en) 2005-02-24 2005-02-24 Glass substrate positioning device and end surface grinding device
JPJP-P-2005-00049506 2005-02-24
PCT/JP2006/301617 WO2006090561A1 (en) 2005-02-24 2006-02-01 Glass substrate positioning apparatus, positioning method, edge plane polishing apparatus and edge plane polishing method

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Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5720696B2 (en) * 2010-11-01 2015-05-20 旭硝子株式会社 Chamfering device and chamfering method
CN102744662A (en) * 2012-07-20 2012-10-24 山东耀华玻璃有限公司 Glass edging system
CN102785092A (en) * 2012-08-01 2012-11-21 李清波 Pneumatic writing-board positioning device for multimedia blackboard
CN102806500A (en) * 2012-09-04 2012-12-05 张家港市广丰玻璃有限公司 Chamfering machine
CN102963726B (en) * 2012-11-30 2015-09-30 江西沃格光电股份有限公司 Seamless movable glass fixture
CN103323960B (en) * 2013-05-15 2016-03-30 友达光电(苏州)有限公司 Locating device and use its pick-up unit, apparatus for assembling
CN103625704B (en) * 2013-12-15 2016-01-20 佛山市鼎吉包装技术有限公司 A kind of buttress of the ceramic tile with one group of centripetal connecting rod synchronous drive device righting mechanism
CN103625705B (en) * 2013-12-15 2016-04-13 佛山市鼎吉包装技术有限公司 A kind of straight mechanism of ceramic tile stack
JP5932861B2 (en) * 2014-02-25 2016-06-08 国立大学法人東北大学 Alloy composition, Fe-based nanocrystalline alloy ribbon, Fe-based nanocrystalline alloy powder and magnetic component
CN104589113B (en) * 2014-12-02 2016-09-07 爱彼思(苏州)自动化科技有限公司 Housing clamping device
CN106217667B (en) * 2016-08-30 2018-07-13 台州市双辉机械设备有限公司 A kind of flitch positioning device of crystal stick orientation sizing machine
CN106405897B (en) * 2016-11-29 2019-03-15 京东方科技集团股份有限公司 A kind of alignment device and array substrate maintenance equipment
CN107170703B (en) * 2017-06-19 2019-11-05 武汉华星光电技术有限公司 A kind of position of glass substrate apparatus for correcting and method
CN109352510A (en) * 2018-11-08 2019-02-19 东旭集团有限公司 Base plate glass grinds positioning system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0195741U (en) * 1987-12-18 1989-06-26
JPH08141888A (en) * 1994-11-15 1996-06-04 Asahi Glass Co Ltd Method and device for detecting position of plate material

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50122383U (en) * 1974-03-22 1975-10-06
GB1596777A (en) 1977-04-12 1981-08-26 Lucas Industries Ltd Method of locating a board on a support
JPS62104835U (en) * 1985-12-18 1987-07-04
JP3763619B2 (en) * 1996-10-28 2006-04-05 大日本スクリーン製造株式会社 Substrate rotation holding device and rotary substrate processing apparatus
US6336276B1 (en) 2000-01-18 2002-01-08 Agilent Technologies, Inc. Customizable nest for positioning a device under test
CN100399534C (en) 2003-02-20 2008-07-02 应用材料有限公司 Method and apparatus for corresponding to supporting table positioning substrate
EP1458013A1 (en) 2003-02-20 2004-09-15 Applied Materials, Inc. A method and an apparatus for determining a position of a substrate relative to a support stage
TWI285937B (en) 2003-02-20 2007-08-21 Applied Materials Inc Methods and apparatus for positioning a substrate relative to a support stage
CN2621878Y (en) 2003-03-11 2004-06-30 时密克 High precision glass edger

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0195741U (en) * 1987-12-18 1989-06-26
JPH08141888A (en) * 1994-11-15 1996-06-04 Asahi Glass Co Ltd Method and device for detecting position of plate material

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JP4887630B2 (en) 2012-02-29
TW200630184A (en) 2006-09-01
JP2006231462A (en) 2006-09-07
CN101080303A (en) 2007-11-28
WO2006090561A1 (en) 2006-08-31
CN100577351C (en) 2010-01-06
KR20070106965A (en) 2007-11-06

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