KR101275540B1 - Substrate breaking apparatus - Google Patents

Substrate breaking apparatus Download PDF

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Publication number
KR101275540B1
KR101275540B1 KR1020117015981A KR20117015981A KR101275540B1 KR 101275540 B1 KR101275540 B1 KR 101275540B1 KR 1020117015981 A KR1020117015981 A KR 1020117015981A KR 20117015981 A KR20117015981 A KR 20117015981A KR 101275540 B1 KR101275540 B1 KR 101275540B1
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KR
South Korea
Prior art keywords
substrate
brake
brake bar
brittle
scribe line
Prior art date
Application number
KR1020117015981A
Other languages
Korean (ko)
Other versions
KR20110095936A (en
Inventor
마사노부 소야마
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2009020447A priority Critical patent/JP5330845B2/en
Priority to JPJP-P-2009-020447 priority
Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Priority to PCT/JP2010/051185 priority patent/WO2010087424A1/en
Publication of KR20110095936A publication Critical patent/KR20110095936A/en
Application granted granted Critical
Publication of KR101275540B1 publication Critical patent/KR101275540B1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26FPERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F3/00Severing by means other than cutting; Apparatus therefor
    • B26F3/002Precutting and tensioning or breaking
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment

Abstract

Even when the brittle material substrate to be brake is a thin plate and brakes at a small pitch, a square shape corresponding to the shape of the brittle material substrate 1 is provided in order to provide a substrate brake device capable of accurately positioning the brake position. The board | substrate support plate 2 in which the rectangular opening part 7 is formed, the elastic film 4 which covers the opening part 7 in the upper surface of the board | substrate support plate 2, and the up-down direction from the upper direction of the elastic film 4 The upper brake bars 6a and 6b braked along the scribe line 11 so as to be movable in the direction of the scribe line 11 and the scribe line 11 installed so as to be able to move upward and downward from the elastic film 4. Therefore, the lower brake bar 5 which brakes is provided. The lower brake bar 5 is pressed along the scribe line 11 on the side opposite to the side on which the scribe line 11 is formed, and the brittle material substrate is formed by the lower brake bar 5 and the first upper brake bar 6a. Brake with the upper brake bar 6b in the state of holding 1).

Description

Substrate Brake Device {SUBSTRATE BREAKING APPARATUS}
The present invention relates to a substrate brake apparatus capable of braking a brittle material substrate such as a glass plate on which a scribing line is formed, with high quality without depending on the plate thickness.
When a plurality of electronic components are cut out by braking a Low Temperature Co-fired Ceramics (LTCC) substrate made of a brittle material such as a ceramic, a scribe line is formed on the surface of the LTCC substrate to apply a predetermined load. As a result, the LTCC substrate is braked along the formed scribe line to cut out a plurality of electronic components.
When the thickness of the LTCC substrate is thin, an excessive load is added in a normal substrate brake device, and there is a possibility that not only vertical cracks but also horizontal cracks are not assumed. When a horizontal crack occurs, the cross section of the brake electronic component does not become uniform, but it becomes a problem when cutting out an electronic component for which brake precision is required.
Therefore, various methods have been taken so that even thin sheets can be braked with high precision. For example, in Patent Document 1, the substrate is braked by the lower brake bar 31B in the state of being supported by the pair of upper substrate fixing bars 32A and 32A, or the pair of substrate fixing is performed. A substrate brake device is disclosed in which a substrate is braked by an upper brake bar 31A while being supported by bars 32B and 32B.
In the substrate brake device of Patent Literature 1, since the substrate is supported at two points, and the brake bar positioned between the two points is used to brake the substrate, the precision for determining the position at which the brake bar is pushed, that is, the brake position is high. Even a thin substrate such as a bonded substrate can be braked with high accuracy.
Japanese Laid-Open Patent Publication No. 2006-289625
However, in the substrate brake apparatus as disclosed in Patent Literature 1, the substrate to be braked is supported at two points, and the substrate is braked by a brake bar positioned between the two supported points. The shift of the brake position due to the bending down occurs quite a lot. When used to cut out a small electronic component, positioning accuracy that can cope with a very small pitch is required for the brake position.
In addition, in the case of braking from the top and the bottom as in Patent Literature 1, it is difficult to detect a mark or the like for specifying the brake position when continuously braking. Therefore, in order to accurately specify the brake position, each time the positioning operation of the substrate to be braked is performed, it is necessary to move the brake bar located at least upward to secure a field of view such as a mark, which makes operation complicated. There was also a problem.
This invention is made | formed in view of such a situation, and an object of this invention is to provide the board | substrate brake apparatus which can perform the positioning of a brake with high precision, even when the brittle material board | substrate to brake is thin plate and brakes with a small pitch. .
In order to achieve the above object, the substrate brake apparatus according to the first invention is a substrate brake apparatus for braking a brittle material substrate having a scribe line formed on its surface along the scribe line. The substrate support plate in which the rectangular opening part is formed, the elastic film which covers the said opening part on the upper surface of the said substrate support plate, and fixes the brittle material board | substrate, and can move to the up-down direction from the said elastic film. A first upper brake bar and a second upper brake bar braked along the scribe line so as to be braked along the scribe line so as to move upward and downward from the elastic film. A brake bar and the first upper brake bar and a second phase The rake bar is configured to be individually liftable, compresses the lower brake bar along the scribe line on the side opposite to the side on which the scribe line is formed, and the brittle material of the lower brake bar and the first upper brake bar. The second upper brake bar is braked in a state where the substrate is sandwiched.
In the first invention, a substrate support plate having a rectangular opening corresponding to the shape of a brittle material substrate is formed, an elastic film which covers the opening on the upper surface of the substrate support plate to fix the brittle material substrate, and the elasticity. A first upper brake bar and a second upper brake bar for braking along the scribe line, which are installed to move upward and downward in the film, and a brake for braking along the scribe line, which is installed to move upward and downward in an elastic film. A brake bar is provided. The lower brake bar is squeezed along the scribe line on the side opposite to the side where the scribe line is formed, and the brake is secured along the scribe line by braking the second upper brake bar while the brittle material substrate is sandwiched between the lower brake bar and the first upper brake bar. This makes it possible to precisely position the brake position. In addition, by supporting the brake position from above and below, even when braking at a small pitch, unexpected cracks do not occur, and the likelihood of unevenness in the broken end surface is low.
Moreover, in the 1st invention, the board | substrate brake apparatus which concerns on 2nd invention WHEREIN: The said elastic film is fixed to the said board | substrate support plate with the film crimping mechanism provided in the periphery of the four sides of the said opening part.
In 2nd invention, an elastic film is fixed to the board | substrate support plate with the film crimping mechanism provided around the four sides of an opening part, and can shorten the space | interval of an elastic film and a square brittle material board | substrate, and an elastic film It is possible to minimize the positional shift due to stretching.
Moreover, in the board | substrate brake apparatus which concerns on 3rd invention, the imaging device is provided above the said 1st upper brake bar and the said 2nd upper brake bar in 1st or 2nd invention, A mark applied to the brittle material substrate is picked up to adjust an installation position of the brittle material substrate, and the first upper brake bar and the second upper brake bar are disposed at a predetermined angle with respect to the substrate support plate. It is characterized by including the inclination moving mechanism which can move to the inclination direction.
In 3rd invention, the imaging device is provided above the 1st upper brake bar and the 2nd upper brake bar. The mark applied to the brittle material substrate is picked up by the imaging device, and the installation position of the brittle material substrate is adjusted. An inclination movement mechanism capable of moving the first upper brake bar and the second upper brake bar in the inclined direction at a predetermined angle with respect to the substrate support plate allows imaging of a mark applied to the brittle material substrate by the imaging device before starting the brake. This makes it possible to precisely position the brake position.
Moreover, in the board | substrate brake apparatus which concerns on 4th invention, in the 1st or 2nd invention, an imaging device is provided above the said 1st upper brake bar and the said 2nd upper brake bar, and the said imaging device uses A mark applied to the brittle material substrate is picked up to adjust an installation position of the brittle material substrate, and the first upper brake bar and the second upper brake bar are positioned substantially horizontally with respect to the substrate support plate. It is characterized by including the horizontal movement mechanism which can move.
In 4th invention, the imaging device is provided above the 1st upper brake bar and the 2nd upper brake bar. The mark applied to the brittle material substrate is picked up by the imaging device, and the installation position of the brittle material substrate is adjusted. By providing a horizontal moving mechanism capable of moving the first upper brake bar and the second upper brake bar in a substantially horizontal direction with respect to the substrate support plate, it is possible to image a mark applied to the brittle material substrate by the imaging device before starting the brake. The positioning of the brake position can be performed with high accuracy.
As described above, the crush bar is squeezed along the scribe line on the side opposite to the side on which the scribe line is formed, and the crush bar is reliably crushed by breaking the second upper brake bar with the brittle material substrate sandwiched between the lower brake bar and the first upper brake bar. It can break along a line, and it becomes possible to precisely position a brake position. In addition, by supporting the brake position from above and below, even when braking at a small pitch, unexpected cracks do not occur, and the likelihood of unevenness in the broken end surface is low.
BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing in the surface substantially orthogonal to the moving direction of the brittle material board | substrate which shows the structure of the board | substrate brake apparatus which concerns on embodiment of this invention.
2 is a plan view showing a state in which the LTCC substrate is mounted.
3 is a plan view illustrating a state in which a scribe process is performed while the LTCC substrate is mounted.
4 is a cross-sectional view schematically illustrating a brake process of the substrate brake device according to the embodiment of the present invention.
5 is a schematic diagram showing the positional relationship between the substrate brake device and the image pickup device when the upper brake bar is moved up and down.
It is a schematic diagram which shows the positional relationship of a board | substrate brake apparatus and an imaging device in the case of vertically moving the upper brake bar of the board | substrate brake apparatus which concerns on embodiment of this invention.
(Mode for carrying out the invention)
EMBODIMENT OF THE INVENTION Below, this invention is demonstrated in detail based on drawing which shows embodiment. BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing in the surface substantially orthogonal to the moving direction of the brittle material substrate which consists of a brittle material which shows the structure of the board | substrate brake apparatus which concerns on embodiment of this invention.
As shown in FIG. 1, in the substrate brake device according to the embodiment of the present invention, the adhesive film having the strong adhesive property is unfolded by using the dicing frame 3, and the openings are formed from the lower surface of the dicing frame 3. It fixes to the upper surface of the board | substrate support plate 2 which has 7 (for example, by the vacuum suction mechanism of the board | substrate support plate 2). The upper surface of the elastic film 4 has strong adhesiveness and can hold | maintain the brittle material board | substrate 1 which becomes an object of a scribe or a brake by this adhesiveness.
The board | substrate brake apparatus can be moved from the upper side of the brittle material board | substrate 1 in the state which mounted the brittle material board | substrate 1 to be braked on the upper surface of the opening part 7 of the board | substrate support plate 2. The upper brake bars 6a and 6b and one lower brake bar 5 which can be moved from the lower side of the elastic film 4 are provided. A plurality of scribe lines 11, 11,... Are formed on the upper surface of the brittle material substrate 1 provided on the elastic film 4.
When the brittle material substrate 1 is braked by the substrate brake device, the upper brake bars 6a and 6b are lowered over the scribe line 11 formed on the upper surface of the brittle material substrate 1, and the lower brake bar ( Raising 5) to coincide with the position of the scribe line 11 breaks the brittle material substrate 1 along the scribe line 11.
2 is a plan view showing a state in which the LTCC substrate 1 is mounted as the brittle material substrate 1. Since the LTCC board | substrate 1 in which several electronic components are integrally formed is square, the rectangular opening part 7 is formed in the center part of the board | substrate support plate 2. The elastic film 4 is placed so as to cover the rectangular opening 7, and the elastic film 4 is unfolded with a dicing frame 3 functioning as a film spreading mechanism provided outside the substrate support plate 2. The board | substrate support plate 2 is fixed (for example, by the vacuum suction mechanism of an upper surface). The mark (alignment mark) 8 for alignment with the lower brake bar 5 is attached to the LTCC board | substrate 1. For example, by imaging the surface of the LTCC board | substrate 1 with an imaging device etc. from upper direction, a brake position can be positioned based on the image | capture positioning mark 8 imaged.
3 is a plan view showing a state in which a scribe process is performed while the LTCC substrate 1 is mounted. As shown in Fig. 3, a plurality of scribe lines 11, 11, ... are formed in the vertical and horizontal directions with the scribe device so that the electronic components can be cut out from the mounted LTCC substrate 1.
After the scribing process, the substrate is moved to the substrate brake device to perform alignment. After positioning, the protective sheet which protects the surface of the LTCC board | substrate 1 is adhere | attached on the scribed surface, and it presses and brakes by the 3-point bending system using three brake bars. 4 is a cross-sectional view schematically illustrating the brake processing of the substrate brake device according to the embodiment of the present invention.
As shown to Fig.4 (a), the board | substrate brake apparatus which concerns on this embodiment has two so that the scribe line 11 formed in the upper surface of the LTCC board | substrate 1 mounted in the board | substrate support plate 2 may be extended. The upper brake bars 6a and 6b are disposed to lower one of the upper brake bars 6a, and the lower brake bars 5 are raised from below to the position of the scribe line 11. Thereby, by fitting the LTCC board | substrate 1 to the upper and lower brake bars, even if it raises, falls, etc. in the LTCC board | substrate 1, it can adjust so that it may become substantially horizontal by the pressure of a brake bar.
Thereafter, the LTCC substrate 1 can be braked along the scribe line 11 by lowering the other upper brake bars 6b. After the brake, the upper brake bars 6a and 6b are raised, the lower brake bars 5 are lowered, and then the substrate supporting plate () is placed until the next scribe line 11 is directly above the lower brake bars 5. Pitch 2) is repeated and the LTCC board | substrate 1 is braked by repeating the above-mentioned operation.
The movement order of the upper brake bars 6a and 6b and the lower brake bar 5 is not limited to the order mentioned above. For example, only the upper brake bars 6a and 6b are lowered first at the position at which the scribe line 11 to be braked is fitted, and the upper brake bars 6a and 6b are bent and pushed down by pushing against the LTCC substrate 1 to be braked. The lower brake bar 5 is raised from below with the back reduced. Accordingly, the LTCC substrate 1 may be braked along the scribe line 11.
By dissipating the adhesive force by UV irradiation from the back of the elastic film 4 in the braked state, each electronic component can be separated from the elastic film 4 as a separate piece.
Thus, the lower brake bar 5 is crimped along the scribe line 11 on the side opposite to the side on which the scribe lines 11, 11, ... are formed, and the lower brake bar 5 and the upper brake bar 6a. Since the upper brake bar 6b is lowered and braked in the state where the LTCC board | substrate 1 is clamped in the state, the scribe line 11 to brake can be pinpointed precisely, and a small pitch is supported by supporting the brake position from up and down. Even in the case of low braking, unexpected cracks are less likely to occur, and the likelihood of unevenness in the broken end surface is lowered, and it can be used for cutting small electronic components.
Moreover, the imaging device for position alignment is provided above upper brake bars 6a and 6b. By the imaging device, the positioning mark 8 provided on the LTCC board | substrate 1 is imaged, and the installation position of the LTCC board | substrate 1 is adjusted. FIG. 5: is a schematic diagram which shows the positional relationship of the board | substrate brake apparatus and the imaging device at the time of moving the upper brake bars 6a and 6b up and down.
FIG.5 (a) is a schematic diagram which shows the state which raised the upper brake bars 6a and 6b, and FIG.5 (b) is a schematic diagram which shows the state which lowered the upper brake bars 6a and 6b at the time of a brake. . In either case, the upper brake bars 6a and 6b are obstructed, and the imaging marks 20 cannot be used to image the alignment marks 8 provided on the LTCC substrate 1, so that the brake position can be taken. Positioning is not possible.
So, in this embodiment, the upper brake bar 6a, 6b is equipped with the inclination movement mechanism which can move with respect to the board | substrate support plate 2 in a predetermined angle inclination direction, and it positions by the imaging device 20 The imaging of the dragon mark 8 is made possible, and positioning of a brake position can be performed reliably.
FIG. 6: is a schematic diagram which shows the positional relationship of the board | substrate brake apparatus and the imaging device at the time of vertically moving the upper brake bars 6a and 6b of the board | substrate brake apparatus which concerns on embodiment of this invention. FIG. 6 (a) is a schematic diagram showing a state where the upper brake bars 6a and 6b are raised, and FIG. 6 (b) is a schematic diagram showing a state where the upper brake bars 6a and 6b are lowered during the break. .
As shown in FIG. 6 (b), in the state where the upper brake bars 6a and 6b are lowered, the upper brake bars 6a and 6b become obstructed and the LTCC substrate 1 is formed using the imaging device 20. Unable to image the alignment mark 8 provided on the image, alignment cannot be performed. However, as shown in Fig. 6 (a), in the state where the upper brake bars 6a and 6b are raised at an angle upwards, the upper brake bars 6a and 6b do not interfere with the imaging and are provided above. The imaging device 20 can image the positioning mark 8 provided on the LTCC substrate 1.
In addition, the method which enables the imaging by the imaging device 20 is not limited to the method of raising the above-mentioned upper brake bars 6a and 6b obliquely upward, For example, the upper brake bars 6a and 6b. ) Is provided with a horizontal moving mechanism capable of moving in a substantially horizontal direction with respect to the substrate support plate 2, and when the alignment is performed, the upper brake bars 6a, You may make 6b) move to the left-right direction toward FIG.
As described above, according to the present embodiment, the lower brake bar 5 is pressed along the scribe line 11 on the side opposite to the side on which the scribe lines 11, 11, ... are formed, and the lower brake bar 5 By braking with the upper brake bar 6b in a state where the LTCC substrate 1, which is a brittle material, is sandwiched by the upper brake bar 6a, the brake can be reliably braked along the scribe line 11, so that the positioning of the brake position is accurate. It becomes possible to perform well. In addition, by supporting the brake position from above and below, even when braking at a small pitch, unexpected cracks do not occur, and the likelihood of unevenness in the broken end surface is low.
In addition, the object to be braked is not limited to the LTCC substrate, and is not particularly limited as long as it is a substrate made of a brittle material that needs to be braked at a small pitch. In addition, needless to say, various modifications, substitutions and the like are possible within the scope of the gist of the present invention.
1: brittle material substrate (LTCC substrate)
2: substrate support plate
3: dicing frame (film crimping mechanism)
4: elastic film
5: break brake bar
6, 6a, 6b: upper brake bar
7: opening
8: mark for alignment (alignment mark)
11: scribe line
20: imaging device

Claims (4)

  1. A substrate brake apparatus for braking a brittle material substrate having a scribe line formed on its surface along the scribe line.
    A substrate support plate on which a rectangular opening is formed corresponding to the shape of the brittle material substrate;
    An elastic film covering the opening on the upper surface of the substrate support plate to fix the brittle material substrate;
    A first upper brake bar and a second upper brake bar, which are braked along the scribe line, so as to be able to move upward and downward in the elastic film;
    A lower brake bar for braking along the scribe line, the lower brake bar being installed to be able to move in an up and down direction from below the elastic film,
    The first upper brake bar and the second upper brake bar are configured to be individually liftable,
    Compress the lower brake bar along the scribe line on the side opposite to the side on which the scribe line is formed, and brake the second upper brake bar while the brittle material substrate is engaged with the lower brake bar and the first upper brake bar. The board | substrate brake apparatus characterized by the above-mentioned.
  2. The method of claim 1,
    The said elastic film is fixed to the said board | substrate support plate with the film crimping mechanism provided around the four sides of the said opening part, The board | substrate brake apparatus characterized by the above-mentioned.
  3. The method according to claim 1 or 2,
    An imaging device is provided above the first upper brake bar and the second upper brake bar,
    The imaging device is configured to image the mark given to the brittle material substrate and to adjust the installation position of the brittle material substrate.
    And a tilt movement mechanism capable of moving the first upper brake bar and the second upper brake bar in an inclined direction with respect to the substrate support plate at a predetermined angle.
  4. The method according to claim 1 or 2,
    An imaging device is provided above the first upper brake bar and the second upper brake bar.
    The imaging device is configured to image the mark given to the brittle material substrate and to adjust the installation position of the brittle material substrate.
    And a horizontal moving mechanism capable of moving the first upper brake bar and the second upper brake bar in a horizontal direction with respect to the substrate support plate.
KR1020117015981A 2009-01-30 2010-01-29 Substrate breaking apparatus KR101275540B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009020447A JP5330845B2 (en) 2009-01-30 2009-01-30 Substrate break device
JPJP-P-2009-020447 2009-01-30
PCT/JP2010/051185 WO2010087424A1 (en) 2009-01-30 2010-01-29 Substrate breaking apparatus

Publications (2)

Publication Number Publication Date
KR20110095936A KR20110095936A (en) 2011-08-25
KR101275540B1 true KR101275540B1 (en) 2013-06-17

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JP (1) JP5330845B2 (en)
KR (1) KR101275540B1 (en)
CN (1) CN102300688B (en)
TW (1) TWI432304B (en)
WO (1) WO2010087424A1 (en)

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