KR101270643B1 - Tunneling field effect transistor and manufacturing method thereof - Google Patents
Tunneling field effect transistor and manufacturing method thereof Download PDFInfo
- Publication number
- KR101270643B1 KR101270643B1 KR1020120079375A KR20120079375A KR101270643B1 KR 101270643 B1 KR101270643 B1 KR 101270643B1 KR 1020120079375 A KR1020120079375 A KR 1020120079375A KR 20120079375 A KR20120079375 A KR 20120079375A KR 101270643 B1 KR101270643 B1 KR 101270643B1
- Authority
- KR
- South Korea
- Prior art keywords
- recess
- source
- gate
- drain
- region
- Prior art date
Links
- 230000005641 tunneling Effects 0.000 title claims abstract description 54
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000002353 field-effect transistor method Methods 0.000 title description 2
- 230000005669 field effect Effects 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 239000004065 semiconductor Substances 0.000 claims abstract description 30
- 239000002019 doping agent Substances 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims description 38
- 238000005530 etching Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000002513 implantation Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 210000000746 body region Anatomy 0.000 description 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66931—BJT-like unipolar transistors, e.g. hot electron transistors [HET], metal base transistors [MBT], resonant tunneling transistor [RTT], bulk barrier transistor [BBT], planar doped barrier transistor [PDBT], charge injection transistor [CHINT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/7311—Tunnel transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/737—Hetero-junction transistors
- H01L29/7371—Vertical transistors
- H01L29/7376—Resonant tunnelling transistors
Abstract
The tunneling field effect transistor according to the present invention comprises a semiconductor substrate having a gate recess having a predetermined depth, a gate formed through a gate insulating layer in the recess, and a first conductive dopant. A drain doped with a source and a second conductivity type dopant formed on one side of the gate recess deeper than the depth of the recess and formed deeper than the depth of the gate recess on the other side of the recess (drain).
Description
The present invention relates to a tunneling field effect transistor and a method of manufacturing the same.
Currently, MOSFETs (Metal Oxide Semiconductor Field Effect Transistors) continue to be miniaturized and integrated. Following this trend, the channel length of the Field Effect Transistor has been continuously reduced, resulting in drain induced barrier lowering (DIBL), punchthrough, impact ionization and subthreshold leakage currents. Short channel effects such as subthreshold leakage current occur. Power consumption, along with the short channel effect, is one of the other important issues in current nanoelectronics. Scaling the supply reduces the energy required for switching, but in today's integrated circuits an increase in gate voltage of at least 60 mV is required to increase the current by about 10 times at room temperature.
To overcome these limitations, Tunneling Field Effect Transistors (TFETs), which can inject charge carriers into channels using quantum mechanical effects called band-to-band tunneling, are proposed. It became. The operation mechanism of the tunneling field effect transistor will be described with reference to FIG. 1. The band diagram before biasing the n-channel TFET is shown in Figure 1 (a). It is very unlikely that electrons located in the valence band before being biased are injected into the body region by tunneling the band. However, if, for example, a constant potential is applied to the source and the drain and a predetermined potential is applied to the gate, the band of the body is shifted down by a certain amount by the applied potential as shown in FIG. do. Therefore, electrons located in the source side balance band are injected into the body region by tunneling the band. This phenomenon is called Band To Band Tunneling (BTBT), which is the main operating mechanism of the TFET.
Conventional TFETs have a drawback in that the width of the channel through which the current flows is formed in a straight line so that the maximum amount of current that can flow is limited. In order to remedy these shortcomings, a method of using a double gate structure, a vertical pillar nanowire structure, and a group III-V compound semiconductor has been proposed. The disadvantage is that it is difficult.
The present invention is to overcome the above-mentioned disadvantages of the prior art, and to provide a structure of a TFET having improved current driving performance by increasing the width of the channel. Another object of the present invention is to provide a structure of a TFET having improved current driving performance using a conventional MOS process. It is another object of the present invention to provide a method for manufacturing a TFET having an increased channel width and an improved current driving performance. It is another object of the present invention to provide a method of manufacturing a TFET having improved current driving performance by using a current MOS process.
A tunneling field effect transistor according to the present invention includes a semiconductor substrate having a gate recess having a predetermined depth, a gate formed through a gate insulating film in the recess, and a first conductive dopant. Doped with a source and a second conductivity type dopant formed on one side of the gate recess deeper than the depth of the recess and formed deeper than the depth of the gate recess on the other side of the recess. It includes a drain.
In one embodiment, the source and drain have a predetermined thickness and are located between the substrate and the buried insulating film.
In one embodiment, the outer perimeter of the gated recess does not substantially exceed the outer and inner circumferential surfaces of the source.
In one embodiment, the side portions of the gate, the source and the drain are planar, and the bottom portion is formed in a curved surface.
In one embodiment, the side and bottom portions of the source and drain are both planar.
In one embodiment, a channel is formed parallel to the side and bottom portions of the gate recess.
In one embodiment, the source and the drain are each heavily doped.
The tunneling field effect transistor according to the present invention includes a semiconductor substrate in which a plurality of recesses are formed, a gate formed through a gate insulating film inside a gate recess having a first depth, and a recess having a second depth. A drain is formed around the recess in which the source is formed and the gate is formed in a direction opposite to the source, and surrounds another recess having a second depth, and the recess in which the source is formed and the other recess in which the drain is formed. A buried insulating film is included.
The source and drain have a predetermined thickness and are located between the substrate and the buried insulating film.
In one embodiment, the outer perimeter of the gate recess does not substantially exceed the outer and inner circumferential surfaces of the source.
In one embodiment, the side portion of the recess in which the gate recess and the source are formed is planar, and the bottom portion is formed in a curved surface.
In one embodiment, the gate recess, the side portion and the bottom portion of the one recessed source are all formed in a plane.
In one embodiment, a channel is formed along the side and bottom portions of the gate recess.
In one embodiment, the source and the drain are each heavily doped.
The method of manufacturing a tunneling field effect transistor according to the present invention comprises the steps of preparing a semiconductor substrate, implanting dopants of different conductivity types to form a spaced apart source and drain regions, respectively, between the source region and the drain region. Etching the semiconductor substrate to form a gate recess in contact with the source region and the drain region, forming a gate insulating layer in the gate recess, and forming a gate in the gate recess; Etching a portion of the source region and the drain region, respectively, to form a source region recess and a drain region recess, and filling an insulating layer in the source region recess and the drain region recess.
In one embodiment, the step of forming the source region and the drain region, respectively, is performed by injecting a high concentration of dopants of different conductivity types.
In example embodiments, the forming of the gate recess may be performed by etching the semiconductor substrate so as not to deviate from outer peripheral surfaces of the source region and the drain region.
In example embodiments, the forming of the drain region and the forming of the source region by implanting the dopant may be performed such that a doping profile of the bottom surface of the drain region and the bottom surface of the source region is curved.
In example embodiments, the forming of the gate recess may be performed by etching the semiconductor substrate to form a bottom surface of the gate recess.
In an embodiment, the forming of the source and the drain may be performed by injecting the dopants at different concentrations.
According to the present invention, there is provided a tunneling field effect transistor and a method of manufacturing the same, which overcome the disadvantages of the prior art. In other words, the channel width of the tunneling field effect transistor is increased by the recess and the recess bottom part, so that the current driving performance of the tunneling field effect transistor is improved, and a method for manufacturing the tunneling field effect transistor is provided. In addition, the conventional MOS process is provided with the advantage that it is possible to manufacture a tunneling field effect transistor with improved current driving characteristics than the prior art.
1 is a diagram illustrating a band-to-band tunneling mechanism of a tunneling field effect transistor.
2 is a transparent schematic diagram according to an embodiment of the present invention.
3 and 4 are cross-sectional views A-A 'and BB' of FIG. 2, respectively.
5 is a transparent schematic diagram according to another embodiment of the present invention.
6 and 7 are cross-sectional views illustrating the characteristics of one embodiment of the present invention.
8 to 13 are process cross-sectional views showing an outline of a method of manufacturing a tunneling field effect transistor according to an embodiment of the present invention.
14 is a view showing a comparative example according to the prior art for comparison with the embodiment of the present invention.
15 is a diagram illustrating an embodiment of the present invention.
16 is a diagram illustrating an IV characteristic curve of an embodiment of the present invention.
Description of the present invention is only an embodiment for structural or functional description, the scope of the present invention should not be construed as limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas.
Meanwhile, the meaning of the terms described in the present application should be understood as follows.
The terms "first "," second ", and the like are used to distinguish one element from another and should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.
It is to be understood that when an element is referred to as being "on" or "on" another element, it may be directly on top of the other element, but other elements may be present in between. On the other hand, when an element is referred to as being "in contact" with another element, it should be understood that there are no other elements in between. On the other hand, other expressions that describe the relationship between components, such as "intervening" and "intervening", between "between" and "immediately" or "neighboring" Direct neighbors "should be interpreted similarly.
Singular expressions should be understood to include plural expressions unless the context clearly indicates otherwise, and terms such as "include" or "have" refer to features, numbers, steps, operations, components, parts, or parts thereof described. It is to be understood that the combination is intended to be present, but not to exclude in advance the possibility of the presence or addition of one or more other features or numbers, steps, operations, components, parts or combinations thereof.
Each step may occur differently from the stated order unless the context clearly dictates the specific order. That is, each step may occur in the same order as described, may be performed substantially concurrently, or may be performed in reverse order.
The drawings referred to for explaining embodiments of the present disclosure are exaggerated in size, height, thickness, and the like intentionally for convenience of explanation and understanding, and are not enlarged or reduced in proportion. In addition, any component illustrated in the drawings may be intentionally reduced in size, and other components may be intentionally enlarged in size.
All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Terms such as those defined in the commonly used dictionaries should be construed to be consistent with the meanings in the context of the related art and should not be construed as having ideal or overly formal meanings unless expressly defined in this application. .
Hereinafter, with reference to the accompanying drawings will be described embodiments of the present invention. FIG. 2 is a perspective schematic view of a tunneling field effect transistor (TFET) according to an embodiment of the present invention, FIG. 3 is a sectional view taken along line AA ′ of FIG. 1, and FIG. 4 is a sectional view taken along line BB ′ of FIG. 1. to be. For reference, in FIG. 2, the
In one embodiment, the outer circumferential surface of the gate recess R does not substantially exceed the outer circumferential surface and the inner circumferential surface of the
2 to 3, the bottom portion of the gated recess R, the bottom portion of the
In another embodiment, the bottom portion of the gated recess R, the bottom portion of the
Next, a method of manufacturing a tunneling field effect transistor according to an embodiment of the present invention will be described with reference to FIGS. 8 to 13. 8 to 13 are cross-sectional views illustrating an outline of a process of manufacturing a tunneling field effect transistor according to an embodiment of the present invention. Referring to FIG. 8, a
Referring to FIG. 9, the gate substrate R is formed by etching the
Referring to FIG. 10, a
Referring to FIG. 11, a
12 and 13 are cross-sectional views taken along line X-X ', unlike FIGS. Referring to FIG. 12, portions of the
Referring to FIG. 13, a buried insulating layer 160 is formed in the source region recess SR and the drain region recess DR. In one embodiment, the buried insulating
Comparative example
14 is a view showing a comparative example, which is a planar tunneling field effect transistor according to the prior art. The characteristics of the device are as follows. Source and drain doping concentration is 9X10 ^ 19 / cm ^ 3, doping concentration in channel region is 1X10 ^ 19 / cm ^ 3, channel length is 30nm, channel width is 60nm, and hafnium oxide (HfO2) as gate insulating film Was used and the thickness was formed at 2 nm. As shown in FIG. 14, the band-to-band tunneling part is shown in orange, and the band-to-band tunneling part is simply formed in a planar shape.
Example
An embodiment of a tunneling transistor according to an embodiment of the present invention will be described with reference to FIGS. 15 to 16. Device characteristics of the tunneling field effect transistor shown in FIG. 15 are as follows. Source and drain doping concentration is 9X10 ^ 19 / cm ^ 3, doping concentration in channel region is 9X10 ^ 19 / cm ^ 3, recess depth is 230nm, channel length is 30nm, channel width is piX30 + 2X200nm, gate Hafnium oxide (HfO2) was used as the insulating film, and the thickness was formed to 2 nm. That is, all other characteristics except the channel width according to the recess are the same as in the comparative example. FIG. 15 is a perspective view showing an orange region of band-to-band tunneling. FIG. It can be seen that the channel is formed along the shape of the cross section of the gate contacting the source. In comparison with FIG. Since band-to-band tunneling is performed, it can be seen that the area difference is large. From this, it is expected that driving current characteristics of the tunneling field effect transistor according to the embodiment of the present invention are superior to those of the comparative example.
16 illustrates I-V characteristics of a tunneling field effect transistor according to a comparative example and a tunneling field effect transistor according to an embodiment of the present invention. The curve shown in blue in FIG. 16 shows the IV characteristics of the tunneling field effect transistor according to the comparative example, and the curve shown in red shows the recess depth of 230 nm and the bottom portion of the recess having a curved surface. IV characteristics of the tunneling field effect transistor according to the present invention are shown. Referring to the enlarged drawings, it appears that the driving current characteristics of the tunneling field effect transistor according to the present invention are approximately 10 times better under the same conditions.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of illustration, It will be appreciated that other embodiments are possible. Accordingly, the true scope of the present invention should be determined by the appended claims.
110: semiconductor substrate 120: gate insulating film
130: gate 140: source
142: source region 150: drain
152: drain region 160: buried insulating film
R: Gate recess SOP: Source peripheral surface
SIP: circumferential surface of the source RP: circumferential surface of the gate recess
TR: Tunneling Zone
Claims (19)
A gate formed through the gate insulating layer in the recess;
A source doped with a first conductivity type dopant and formed on one side of the gate recess deeper than the depth of the recess; And
A drain doped with a second conductivity type dopant and partially embedded in the other side of the recess with a buried insulating film formed deeper than a depth of the gate recess, wherein the source and the drain are partially filled with the buried insulating film A tunneling field effect transistor formed by being buried.
And an outer perimeter of the recess in which the gate is formed does not substantially exceed the outer and inner circumferential surfaces of the source.
A tunneling field effect transistor having side surfaces of the gate, the source, and the drain, and a bottom surface thereof is curved.
And a side portion and a bottom portion of the source and drain are planar.
And a channel is formed in parallel to side and bottom portions of the gate recess.
And the source and the drain are each heavily doped.
A gate formed through the gate insulating layer in the gate recess having the first depth;
A source shaped around a recess having a second depth;
A drain surrounding another recess having a second depth and positioned in a direction facing the source with respect to the recess in which the gate is formed; And
And a buried insulating film filling a recess in which the source is formed and another recess in which the drain is formed.
And the source and the drain have a predetermined thickness and are positioned between the substrate and the buried insulating film.
And an outer perimeter of the gate recess does not substantially exceed an outer circumferential surface and an inner circumferential surface of the source.
The tunneling field effect transistor of claim 1, wherein a side surface portion of the recess in which the gate recess and the source are formed is planar, and a bottom surface thereof is curved.
The tunneling field effect transistor of which the gate recess, the side portion and the bottom surface portion of the recess in which the source is formed are all formed in a plane.
And a channel is formed along side and bottom portions of the gate recess.
And the source and the drain are each heavily doped.
Implanting dopants of different conductivity types to form source and drain regions spaced apart from each other;
Etching the semiconductor substrate between the source region and the drain region to form a gate recess in contact with the source region and the drain region;
Forming a gate insulating film in the gate recess;
Forming a gate in the gate recess;
Etching a portion of the source region and the drain region, respectively, to form a source region recess and a drain region recess, and
A method of fabricating a tunneling field effect transistor comprising embedding an insulating film in a source region recess and a drain region recess.
And forming the source region and the drain region, respectively, by implanting different conductive dopants in high concentrations.
Forming the gate recess,
And fabricating the semiconductor substrate so as not to deviate from outer peripheral surfaces of the source region and the drain region.
And forming the drain region by implanting the dopant and forming the source region, wherein the doping profiles of the bottom surface of the drain region and the bottom surface of the source region are formed to have a curved surface.
Forming the gate recess,
And etching the semiconductor substrate such that the bottom surface of the gate recess is curved.
The forming of the source and the drain may include performing the implantation of the dopants at different concentrations.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120079375A KR101270643B1 (en) | 2012-07-20 | 2012-07-20 | Tunneling field effect transistor and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120079375A KR101270643B1 (en) | 2012-07-20 | 2012-07-20 | Tunneling field effect transistor and manufacturing method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
KR101270643B1 true KR101270643B1 (en) | 2013-06-03 |
Family
ID=48866073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020120079375A KR101270643B1 (en) | 2012-07-20 | 2012-07-20 | Tunneling field effect transistor and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR101270643B1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101684798B1 (en) * | 2015-09-03 | 2016-12-20 | 명지대학교 산학협력단 | Tunneling transistor and manufacturing method thereof |
KR102273935B1 (en) | 2019-12-27 | 2021-07-06 | 서강대학교산학협력단 | Tunnel field-effect transistor based on negative differential transconductance |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20060007756A (en) * | 2004-07-21 | 2006-01-26 | 주식회사 하이닉스반도체 | Transistor and forming method thereof |
US20070007571A1 (en) | 2005-07-06 | 2007-01-11 | Richard Lindsay | Semiconductor device with a buried gate and method of forming the same |
KR20090063603A (en) * | 2007-12-14 | 2009-06-18 | 삼성전자주식회사 | Recessed channel transistor and method of manufacturing the same |
KR20120053511A (en) * | 2009-09-27 | 2012-05-25 | 씨에스엠씨 테크놀로지스 에프에이비2 코., 엘티디. | Method for fabricating trench dmos transistor |
-
2012
- 2012-07-20 KR KR1020120079375A patent/KR101270643B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20060007756A (en) * | 2004-07-21 | 2006-01-26 | 주식회사 하이닉스반도체 | Transistor and forming method thereof |
US20070007571A1 (en) | 2005-07-06 | 2007-01-11 | Richard Lindsay | Semiconductor device with a buried gate and method of forming the same |
KR20090063603A (en) * | 2007-12-14 | 2009-06-18 | 삼성전자주식회사 | Recessed channel transistor and method of manufacturing the same |
KR20120053511A (en) * | 2009-09-27 | 2012-05-25 | 씨에스엠씨 테크놀로지스 에프에이비2 코., 엘티디. | Method for fabricating trench dmos transistor |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101684798B1 (en) * | 2015-09-03 | 2016-12-20 | 명지대학교 산학협력단 | Tunneling transistor and manufacturing method thereof |
KR102273935B1 (en) | 2019-12-27 | 2021-07-06 | 서강대학교산학협력단 | Tunnel field-effect transistor based on negative differential transconductance |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI453919B (en) | Diode structures with controlled injection efficiency for fast switching | |
US9129822B2 (en) | High voltage field balance metal oxide field effect transistor (FBM) | |
JP6048317B2 (en) | Silicon carbide semiconductor device | |
US20120043608A1 (en) | Partially Depleted Dielectric Resurf LDMOS | |
US20060001110A1 (en) | Lateral trench MOSFET | |
US9048267B2 (en) | Semiconductor device | |
US9660020B2 (en) | Integrated circuits with laterally diffused metal oxide semiconductor structures and methods for fabricating the same | |
US10388785B2 (en) | LDMOS transistors for CMOS technologies and an associated production method | |
KR20100064263A (en) | A semiconductor device and method for manufacturing the same | |
CN103137661B (en) | Lateral double-diffused metal-oxide semiconductor device and its manufacture method | |
KR102068842B1 (en) | Semiconductor power device | |
US8921933B2 (en) | Semiconductor structure and method for operating the same | |
US9704983B2 (en) | Lateral MOSFET with dielectric isolation trench | |
JP2006505932A (en) | Semiconductor device and manufacturing method thereof | |
KR101270643B1 (en) | Tunneling field effect transistor and manufacturing method thereof | |
KR20110078621A (en) | Semiconductor device, and fabricating method thereof | |
JP5258230B2 (en) | Manufacturing method of semiconductor device | |
KR101315699B1 (en) | Power mosfet having superjunction trench and fabrication method thereof | |
TWI525817B (en) | Semiconductor device and method for manufacturing semiconductor device | |
CN108493248B (en) | Level shift structure and manufacturing method thereof | |
US10756209B2 (en) | Semiconductor device | |
KR102046663B1 (en) | Semiconductor device and manufacturing method thereof | |
TWI628791B (en) | Power metal-oxide-semiconductor field-effect transistor device with three-dimensional super junction and fabrication method thereof | |
WO2021051856A1 (en) | Laterally diffused metal oxide semiconductor device and manufacturing method therefor | |
KR20110037030A (en) | Semiconductor device and a method for manufacturing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20160128 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20170421 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20180425 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20190828 Year of fee payment: 7 |