KR101250931B1 - An Improved Discharge Structure of Dispensing Nozzle Device, and A Dispensing Nozzle Device and a Coating Apparatus Having the Same - Google Patents

Abstract

The present invention discloses an improved discharging structure of a dispensing nozzle device, and a dispensing nozzle device and a coating device having the same.
The discharging structure of the dispensing nozzle apparatus according to the present invention includes a plurality of guide portions having a step S in which a second lower portion of the second lip extends below the first lower portion of the first lip, wherein the plurality of guide portions Each of the first lips is formed in a position corresponding to the plurality of discharge ports formed in the first lower portion.

Description

An Improved Discharge Structure of Dispensing Nozzle Device, and A Dispensing Nozzle Device and a Coating Apparatus Having the Same}

The present invention relates to an improved discharging structure of a dispensing nozzle device, and to a dispensing nozzle device and a coating device having the same.

More specifically, the present invention has a step in which a second lower portion of the second lip of the two ribs of the dispensing nozzle device has a step extending below the first lower portion of the first lip, and corresponds to a plurality of discharge ports of the first lip. By forming a plurality of discharge guides at the positions, the coating liquid is applied along the guides to enable fine application, and the phenomenon of neighboring patterns being merged is prevented, thereby improving dispensing to minimize the possibility of defects in the final product. A discharge structure of a nozzle device, and a dispensing nozzle device and a coating device having the same.

Generally, in order to manufacture flat panel displays (FPDs) or solar cells such as PDPs, LCDs, and organic LEDs (OLEDs), a substrate or work piece (hereinafter referred to as a "substrate") such as glass is used. In order to apply | coat a coating liquid to it, the coating apparatus provided with the dispensing nozzle apparatus is used.

More specifically, in a coater 100 used to fabricate a flat panel display (FPD) schematically shown in FIG. 1A, the substrate 110 is placed on a stage 112 and then gantry. A method of applying the necessary coating liquid onto the substrate 110 while moving the dispensing nozzle apparatus 120 attached to the gantry 125 in the horizontal direction is used.

FIG. 1B is a schematic perspective view of a dispensing nozzle apparatus used in the coating apparatus according to the prior art shown in FIG. 1A, and FIG. 1C is a dispensing used in the coating apparatus according to the prior art shown in FIG. 1B. A schematic side cross-sectional view and a bottom view of a nozzle apparatus are shown.

1B and 1C, the dispensing nozzle apparatus 120 according to the prior art includes a pair of first lip 122a and a second lip 122b that face each other based on a traveling direction thereof. It is composed. The coating liquid supply part (not shown) and the chamber 126 are formed in any one of the 1st lip 122a or the 2nd lip 122b. In the embodiment of FIG. 1C, for convenience of description, the chamber 126 is exemplarily illustrated as being formed inside the first lip 122a, which will be described below. A plurality of discharge ports 128 are formed on the inner side surface of the first lip 122a in the downward direction of the chamber 126. The plurality of discharge holes 128 form a gap L between the first lip 122a and the second lip 122b. The plating liquid is discharged through the plurality of discharge ports 128 to form, for example, a photoresist liquid (PR liquid) on the surface of the substrate 110 (see FIG. 1A) to form a predetermined pattern. In pattern formation, the dispensing nozzle apparatus 120 and the substrate 110 are relatively moved (see FIG. 1A). In one example, the color filter is manufactured by sequentially applying black, red, blue, and green coating liquid onto the substrate 110 using the dispensing nozzle apparatus 120.

In the dispensing nozzle apparatus 120 used for the coating apparatus 100 according to the related art, the first lower portion 124a of the first lip 122a and the second lower portion 124b of the second lip 122b are It is formed in the same height, and the some discharge port 128 is formed in the 1st lip 122a. As a result, the following problems occur in the dispensing nozzle apparatus 120 and the coating apparatus 100 having the same according to the prior art.

1. The first lower portion 124a of the first lip 122a and the second lower portion 124b of the second lip 122b are formed at the same height, so that the plurality of discharge ports 128 in a high pressure state where the plating liquid is very narrow. After passing through, the diffusion occurs due to a sudden pressure change when discharged onto the substrate 110 in a low pressure state. As a result of the diffusion discharge of the coating liquid, neighboring patterns formed on the substrate 110 may merge with each other over time. The merging of these neighboring patterns is much more frequent, especially when low viscosity liquids are used.

2. As described above, when the neighboring pattern is combined, a defect occurs in the substrate 110 and the entire substrate 110 must be cleaned and reused or the substrate 110 must be disposed of. Therefore, the overall process time according to the additional cleaning process of the substrate 110 is increased, or the overall manufacturing cost due to the disposal of the expensive substrate 110 is increased.

3. Since the discharging structure of the dispensing nozzle apparatus 120 according to the prior art cannot form a fine pattern having a narrow line width, it is impossible to manufacture a flat panel display (FPD) or a solar cell, which requires a large area and high definition. .

Therefore, a new method for solving the above-mentioned problems is required.

The present invention is to solve the above-mentioned problems of the prior art, wherein the second lower portion of the second lip of the two lips of the dispensing nozzle device has a step extending below the first lower portion of the first lip, the first By forming a plurality of ejection guide portions at positions corresponding to the plurality of ejection openings of the lip, the coating liquid is applied along the guide portion to enable fine application, and the phenomenon in which neighboring patterns are merged is prevented, and thus a possibility of defects in the final product may occur. It is to provide a discharge structure of an improved dispensing nozzle device which is minimized, and a dispensing nozzle device and a coating device having the same.

The discharging structure of the dispensing nozzle apparatus according to the first aspect of the present invention includes a plurality of guide parts having a step S in which a second lower portion of the second lip extends below the first lower portion of the first lip. The plurality of guides may be formed at positions corresponding to the plurality of discharge ports formed in the first lower portion of the first lip, respectively.

Dispensing nozzle apparatus according to a second aspect of the present invention comprises a pair of first and second lips facing each other; A coating liquid supply part formed inside the first lip; A chamber connected with the coating liquid supply part; And a plurality of discharge holes formed in an inner side surface of the first lip in a downward direction of the chamber, wherein the second lower portion of the second lip extends below the first lower portion of the first lip. And a discharge structure having a plurality of guide parts having a plurality of guide parts, wherein the plurality of guide parts are respectively formed at positions corresponding to the plurality of discharge holes formed in the first lower part.

According to a third aspect of the present invention, a coating apparatus includes a stage; A substrate located on the stage; A gantry for linear reciprocating motion on the stage; And a dispensing nozzle device attached to the gantry for dispensing a coating liquid on the substrate, wherein the dispensing nozzle device comprises: a pair of first and second lips facing each other; A coating liquid supply part formed inside the first lip; A chamber connected with the coating liquid supply part; And a plurality of discharge holes formed on an inner side surface of the first lip in a downward direction of the chamber, wherein the second lower portion of the second lip extends below the first lower portion of the first lip. And a discharge structure having a plurality of guide parts having a plurality of guide parts, wherein the plurality of guide parts are respectively formed at positions corresponding to the plurality of discharge holes formed in the first lower part.

In the discharge structure of the improved dispensing nozzle apparatus of the present invention, and the dispensing nozzle apparatus and the coating apparatus having the same, the following advantages are achieved.

1. After the coating liquid passes through the plurality of discharge ports, it is applied along a plurality of guide portions having a step or vertical guide grooves formed in the plurality of guide portions, so that diffusion of the coating liquid is minimized, and thus neighboring patterns formed on the substrate are timed. Even after this, the possibility of merging with each other is minimized.

2. In addition, since the coating liquid is applied along a plurality of guide portions or vertical guide grooves formed in the plurality of guide portions, the coating liquid does not experience a sudden pressure change, so that the coating thickness of the coating liquid applied on the substrate is lowered, resulting in consolidation between patterns. Is further reduced, enabling the formation of fine line width patterns.

3. In particular, even in the case of using a low viscosity liquid, the frequency of occurrence of the merge between neighboring patterns is much reduced, thereby expanding the technical field or application field using the low viscosity liquid.

4. According to the effects of 1 to 3, the possibility of failure of the substrate 110 is minimized, and the overall process time and manufacturing cost are significantly reduced.

5. It is possible to form a pattern with a fine line width, so that large area high definition of flat panel display (FPD) or solar cell can be realized.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

1A is a schematic illustration of a coating apparatus for manufacturing a flat panel display (FPD) of the prior art.
FIG. 1B is a schematic perspective view of the dispensing nozzle apparatus used in the coating apparatus according to the prior art shown in FIG. 1A.
FIG. 1C shows a schematic side cross-sectional and bottom view of a dispensing nozzle apparatus for use in the coating apparatus according to the prior art shown in FIG. 1B.
2A is a schematic side cross-sectional view and a bottom view of a dispensing nozzle apparatus according to an embodiment of the present invention.
2B is a schematic front view of the dispensing nozzle apparatus according to the embodiment of the present invention.
FIG. 2C is a partial enlarged front view of the lower portion of the dispensing nozzle apparatus according to the exemplary embodiment of the present invention illustrated in FIG. 2B.
FIG. 2D shows a partially enlarged front view of the lower portion of the dispensing nozzle apparatus according to the first alternative embodiment of the invention. FIG.
FIG. 2E illustrates a partially enlarged front view of a lower portion of the dispensing nozzle device according to a second alternative embodiment of the invention. FIG.
FIG. 2F illustrates a partially enlarged front view of a lower portion of the dispensing nozzle device according to a third alternative embodiment of the invention. FIG.
FIG. 2G shows a partially enlarged front view and a bottom view of a lower portion of a dispensing nozzle apparatus according to a fourth alternative embodiment of the invention. FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to embodiments and drawings of the present invention.

FIG. 2A is a schematic side cross-sectional view and a bottom view of a dispensing nozzle apparatus according to an embodiment of the present invention, and FIG. 2B is a schematic front view of the dispensing nozzle apparatus according to an embodiment of the present invention. FIG. 2C is a partial enlarged front view of a lower portion of the dispensing nozzle apparatus according to the exemplary embodiment of the present invention illustrated in FIG. 2B. It should be noted that in the embodiment of FIG. 2B, the first lip 222a and the first lower portion 224a and the second lip 222b and the second lower portion 224 are slightly shifted to distinguish each other.

2A to 2C, in the dispensing nozzle apparatus 220 according to an exemplary embodiment, the second lower portion 224b of the second lip 222b may have a first lower portion (1) of the first lip 222a. The same configuration as the prior art dispensing nozzle apparatus 120 shown in FIGS. 1B and 1C is provided except that it has a plurality of guide portions 223 having a step S extending downward from 224a. Have In addition, the first lip 224a is the front lip and the second lip 224b is the rear lip based on the traveling direction A of the dispensing nozzle apparatus 220. However, for example, when the traveling direction of the dispensing nozzle apparatus 220 is the opposite direction to the traveling direction A shown in FIG. 2A, the first lip 224a is the rear lip and the second lip 224b is the front. It will be apparent to those skilled in the art that the lip.

2A to 2C again, in the discharging structure 201 of the dispensing nozzle apparatus 220 according to the exemplary embodiment, the second lower portion 224b of the second lip 222b may have the first lip ( And a plurality of guide portions 223 having a step S extending downward from the first lower portion 224a of the 222a, wherein the plurality of guide portions 223 are respectively formed in the lip of the first lip 222a. It is formed in a position corresponding to the plurality of discharge ports 228 formed in the first lower portion 224a.

In the discharging structure 201 of the dispensing nozzle apparatus 220 according to the exemplary embodiment of the present invention, the plating liquid discharged through the plurality of discharge ports 228 formed in the first lower portion 224a of the first lip 222a. Instead of being immediately applied onto the substrate 110 (see FIG. 1A), the CL may flow along the plurality of guide portions 223. Therefore, since the coating liquid CL flows down along the some guide part 223, it does not experience a sudden pressure change, and diffusion is prevented considerably.

The step S of the plurality of guide parts 223 described above preferably has a range of approximately 100 to 500 µm.

In addition, each of the plurality of guide parts 223 may have a lower width W2 equal to the upper width W1 or smaller than the upper width W1. To this end, the guide parts 223 adjacent to each other are connected to the cutting parts 223a having various shapes. The plurality of guide parts 223 have a cutting part 223a to prevent the coating liquid CL discharged through the plurality of discharge ports 228 from flowing down along the plurality of guide parts 223 and not joining each other. .

More specifically, in the discharging structure 201 of the dispensing nozzle apparatus 220 according to the exemplary embodiment of the present invention illustrated in FIG. 2C, the guide parts 223 adjacent to each other are formed by the trapezoidal cutting parts 223a. The plurality of guide parts 223 connected to each other have an inverted trapezoidal shape.

FIG. 2D shows a partially enlarged front view of the lower portion of the dispensing nozzle apparatus according to the first alternative embodiment of the invention. FIG.

Referring to FIG. 2D, in the discharging structure 201 of the dispensing nozzle apparatus 220 according to the first exemplary embodiment of the present invention, the guide parts 223 adjacent to each other are formed by the rectangular cutting parts 223a. The plurality of guide parts 223 are connected to each other and have a rectangular shape.

FIG. 2E illustrates a partially enlarged front view of a lower portion of the dispensing nozzle device according to a second alternative embodiment of the invention. FIG.

Referring to FIG. 2E, in the discharging structure 201 of the dispensing nozzle apparatus 220 according to the second exemplary embodiment of the present invention, the guide parts 223 adjacent to each other are formed by the cutting parts 223a having a triangular shape. The plurality of guide parts 223 connected to each other have an inverted trapezoidal shape.

FIG. 2F illustrates a partially enlarged front view of a lower portion of the dispensing nozzle device according to a third alternative embodiment of the invention. FIG.

Referring to FIG. 2F, in the discharging structure 201 of the dispensing nozzle apparatus 220 according to the third exemplary embodiment of the present invention, the guide parts 223 adjacent to each other are formed by the rounded cutting parts 223a. The plurality of guide parts 223 are connected to each other to have an inverse crown shape.

As described above, the cutting parts 223a of various shapes illustrated in FIGS. 2C to 2F may be finely processed by, for example, a profiling method.

On the other hand, Figure 2g is a view showing a partial enlarged front view and bottom view of the lower portion of the dispensing nozzle device according to an alternative fourth embodiment of the present invention.

2G, in the discharging structure 201 of the dispensing nozzle apparatus 220 according to the fourth exemplary embodiment of the present invention, a plurality of guide parts 223 are formed along the plurality of discharge ports 228, respectively. It has a vertical guide groove 225. Here, the width of the vertical guide groove 225 is a cutting portion formed to connect the width (W) (35 to 50㎛) of the plurality of discharge holes 228 that can be implemented at present and the plurality of guide portions 223 adjacent to each other. In consideration of the processability of (223a), it is preferable to have a range of approximately 30 to 100 µm. The vertical guide groove 225 may be finely processed by, for example, a profiling method.

In the above-described embodiment of FIG. 2G, the guide portions 223 where the vertical guide grooves 225 are adjacent to each other are connected by a trapezoidal cutting portion 223a to a plurality of guide portions 223 each having an inverted trapezoidal shape. Illustrated as being formed. However, those skilled in the art will appreciate that the guide portions 223 where the vertical guide grooves 225 are adjacent to each other are connected by the rectangular cutting portions 223a, so that the plurality of guide portions 223 having the inverted trapezoidal shape (the implementation of FIG. 2D). Or formed in a plurality of guide portions 223 (the embodiment of FIG. 2E) each having a guide portion 223 adjacent to each other or connected to each other by a triangular cut portion 223a. It is sufficient that the guide portions 223 adjacent to each other can be formed in a plurality of guide portions 223 (the embodiment of FIG. 2F) each connected by a round-shaped cutting portion 223a and having an inverse crown shape. I can understand.

In the discharging structure 201 of the dispensing nozzle apparatus 220 according to the fourth alternative embodiment described above, the coating liquid CL is discharged along the vertical guide grooves 225 formed in the plurality of guide portions 223. Since it is applied to the substrate 110 (see Fig. 1A), it is possible to form a pattern of fine line width.

Hereinafter, a dispensing nozzle apparatus and a coating apparatus according to an embodiment of the present invention will be described in detail.

Referring again to FIGS. 2A-2G, the dispensing nozzle apparatus 220 according to an embodiment of the present invention includes a pair of first lips 222a and a second lip 222b facing each other; A coating liquid supply part (not shown) formed in the first lip 222b; A chamber 226 connected to the coating liquid supply part; And a plurality of discharge holes 228 formed on an inner side surface of the first lip 222a in a downward direction of the chamber 226, wherein the second lower portion 224b of the second lip 222b is formed of the first lip 222b. And a discharge structure 201 having a plurality of guide portions 223 having a step S extending downward from the first lower portion 224a of one lip 222a, wherein the plurality of guide portions 223 Are each formed at positions corresponding to the plurality of discharge holes 228 formed in the first lower portion 224a.

In addition, the coating apparatus according to an embodiment of the present invention has the conventional technique shown in FIG. 1A except that the second lower portion of the second lip constituting the dispensing nozzle apparatus includes a plurality of guide portions having a step. Substantially the same as the coating apparatus.

Thus, referring to FIGS. 2A-2G together with FIG. 1A, a coating apparatus according to an embodiment of the present invention may include a stage 112; A substrate (110) positioned on the stage (112); A gantry 125 for linear reciprocating motion on the stage 112; And a dispensing nozzle device 220 attached to the gantry 125 to apply the coating liquid onto the substrate 110, wherein the dispensing nozzle device 220 is a pair of first facing each other. Lip 222a and second lip 222b; A coating liquid supply part (not shown) formed in the first lip 222b; A chamber 226 connected to the coating liquid supply part; And a plurality of discharge holes 228 formed on an inner side surface of the first lip 222a in a downward direction of the chamber 226, wherein the second lower portion 224b of the second lip 222b is formed of the first lip 222b. And a discharge structure 201 having a plurality of guide portions 223 having a step S extending downward from the first lower portion 224a of one lip 222a, wherein the plurality of guide portions 223 Are each formed at positions corresponding to the plurality of discharge holes 228 formed in the first lower portion 224a.

Specific configurations and operations of the discharging structure 201 including the dispensing nozzle apparatus 220 and the plurality of guide parts 223 used in the coating apparatus having the same according to the exemplary embodiment of the present invention are illustrated in FIGS. Since it was described in detail with reference to Figure 2g it will be omitted.

As described above, in the present invention, the diffusion is minimized after the coating liquid passes through the plurality of discharge ports by the plurality of guide parts having a step, so that neighboring patterns formed on the substrate may merge with each other over time. The advantage of minimizing to enable pattern formation of fine line widths is achieved.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

100: coating apparatus 110: substrate
112: stage 125: gantry
120,220: dispensing nozzle apparatus 122a, 222a: 1st lip
122b, 222b: second rib 124a, 224a: first lower portion
124b, 224b second lower part 126,226 chamber
128,228: discharge port 201: discharge structure
223: guide portion 223a: cutting portion
225: vertical guide groove

Claims (18)

In the discharge structure of the dispensing nozzle apparatus,
The second lower part of the second lip includes a plurality of guide parts having a step S extending downward from the first lower part of the first lip, wherein the plurality of guide parts are respectively formed in the first lower part of the first lip. Is formed in a position corresponding to the plurality of discharge openings,
Each of the plurality of guide parts has a lower width W2 formed to be narrower than an upper width W1.
Discharge structure of the dispensing nozzle device. delete The method of claim 1,
Each of the plurality of guide parts is a discharge structure of a dispensing nozzle device having a guide trapezoidal shape adjacent to each other by a trapezoidal cutting portion or a triangular cutting portion having an inverted trapezoidal shape. The method of claim 1,
Each of the plurality of guide parts is a discharge structure of the dispensing nozzle device, the guide parts adjacent to each other are connected by a rectangular shaped cutting portion having a rectangular shape. The method of claim 1,
Each of the plurality of guide parts is a discharge structure of the dispensing nozzle device having a reverse crown shape is connected to each other by the guide portion of the round shape round. 6. The method according to any one of claims 1 to 5,
A discharging structure of a dispensing nozzle apparatus, wherein the plurality of guide portions each includes a vertical guide groove formed along the plurality of discharge ports. Dispensing nozzle apparatus,
A pair of first and second lips facing each other;
A coating liquid supply part formed inside the first lip;
A chamber connected with the coating liquid supply part; And
A plurality of discharge holes formed in the inner surface of the first lip in the downward direction of the chamber;
Including,
The second lower portion of the second lip includes a discharge structure having a plurality of guide portions having a step S extending downward from the first lower portion of the first lip, wherein the plurality of guide portions are each the first lower portion. It is formed at a position corresponding to the plurality of discharge ports formed in the,
Each of the plurality of guide parts has a lower width W2 formed to be narrower than an upper width W1.
Dispensing Nozzle Unit. delete 8. The method of claim 7,
Each of the plurality of guide parts has a dispensing nozzle device having adjacent inverted guide parts connected by a trapezoidal cutting part or a triangular cutting part to have an inverted trapezoidal shape. 8. The method of claim 7,
Dispensing nozzle apparatus of the plurality of guide portion is adjacent to each other guide portion is connected by the rectangular cutting portion has a rectangular shape. 8. The method of claim 7,
Dispensing nozzle apparatus of the plurality of guide portion is adjacent to each other guide portion is connected by a round-shaped cutting portion having a reverse crown shape. The method according to any one of claims 7 and 9 to 11,
And a plurality of vertical guide grooves formed along the plurality of discharge ports, respectively. In the coating apparatus,
stage;
A substrate located on the stage;
A gantry for linear reciprocating motion on the stage; And
Dispensing nozzle device attached to the gantry, for dispensing the coating liquid on the substrate
Including,
The dispensing nozzle device
A pair of first and second lips facing each other;
A coating liquid supply part formed inside the first lip;
A chamber connected with the coating liquid supply part; And
A plurality of discharge holes formed in the inner surface of the first lip in the downward direction of the chamber;
Including;
The second lower portion of the second lip includes a discharge structure having a plurality of guide portions having a step S extending downward from the first lower portion of the first lip, wherein the plurality of guide portions are each the first lower portion. It is formed at a position corresponding to the plurality of discharge ports formed in the,
Each of the plurality of guide parts has a lower width W2 formed to be narrower than an upper width W1.
Coating device. delete The method of claim 13,
Each of the plurality of guide parts is a coating apparatus adjacent to each other by a trapezoidal cutting portion or a triangular-shaped cutting portion is connected to have a trapezoidal shape. The method of claim 13,
Each of the plurality of guide parts may include a guide part adjacent to each other by a cutting part having a rectangular shape to have a rectangular shape. The method of claim 13,
Each of the plurality of guide parts may include a guide part adjacent to each other by a round-shaped cutting part to have an inverse crown shape. The method according to any one of claims 13 and 15 to 17,
And a plurality of guide portions each having a vertical guide groove formed along the plurality of discharge ports.

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