KR101245296B1 - 전기 응답 디바이스 - Google Patents
전기 응답 디바이스 Download PDFInfo
- Publication number
- KR101245296B1 KR101245296B1 KR1020077022508A KR20077022508A KR101245296B1 KR 101245296 B1 KR101245296 B1 KR 101245296B1 KR 1020077022508 A KR1020077022508 A KR 1020077022508A KR 20077022508 A KR20077022508 A KR 20077022508A KR 101245296 B1 KR101245296 B1 KR 101245296B1
- Authority
- KR
- South Korea
- Prior art keywords
- electrical response
- delete delete
- electrode material
- electrode
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
- G01N9/002—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Manufacturing & Machinery (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Micromachines (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66893305P | 2005-04-06 | 2005-04-06 | |
| US60/668,933 | 2005-04-06 | ||
| PCT/US2006/012491 WO2006107961A2 (en) | 2005-04-06 | 2006-04-05 | Electrically responsive device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20080007552A KR20080007552A (ko) | 2008-01-22 |
| KR101245296B1 true KR101245296B1 (ko) | 2013-03-19 |
Family
ID=36717063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020077022508A Expired - Fee Related KR101245296B1 (ko) | 2005-04-06 | 2006-04-05 | 전기 응답 디바이스 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8536037B2 (https=) |
| EP (1) | EP1872474A2 (https=) |
| JP (1) | JP5078873B2 (https=) |
| KR (1) | KR101245296B1 (https=) |
| WO (1) | WO2006107961A2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11626648B2 (en) | 2018-08-21 | 2023-04-11 | Lg Energy Solution, Ltd. | Battery module including bus bar plate |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10224567B4 (de) * | 2002-06-03 | 2014-10-23 | Boehringer Ingelheim Vetmedica Gmbh | Sensor-Anordnung und Verfahren zum Betreiben einer Sensor-Anordnung |
| US7497133B2 (en) * | 2004-05-24 | 2009-03-03 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
| US7942056B2 (en) * | 2006-01-23 | 2011-05-17 | Drexel University | Self-exciting, self-sensing piezoelectric cantilever sensor |
| US8171795B1 (en) | 2006-01-23 | 2012-05-08 | Drexel University | Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
| US8286486B2 (en) * | 2006-05-10 | 2012-10-16 | Drexel University | Molecular control of surface coverage |
| US8481335B2 (en) * | 2006-11-27 | 2013-07-09 | Drexel University | Specificity and sensitivity enhancement in cantilever sensing |
| US7992431B2 (en) * | 2006-11-28 | 2011-08-09 | Drexel University | Piezoelectric microcantilevers and uses in atomic force microscopy |
| WO2008067386A2 (en) * | 2006-11-28 | 2008-06-05 | Drexel University | Piezoelectric microcantilever sensors for biosensing |
| EP2115448A4 (en) | 2007-02-01 | 2013-01-30 | Univ Drexel | PORTABLE PHASE SHIFT DETECTOR FOR SENSOR APPLICATIONS |
| US8512947B2 (en) * | 2007-02-16 | 2013-08-20 | Drexel University | Detection of nucleic acids using a cantilever sensor |
| WO2008101199A1 (en) | 2007-02-16 | 2008-08-21 | Drexel University | Enhanced sensitivity of a cantilever sensor via specific bindings |
| FR2916271B1 (fr) * | 2007-05-14 | 2009-08-28 | St Microelectronics Sa | Circuit electronique permettant la mesure de masse de materiau biologique et procede de fabrication |
| US7993854B2 (en) * | 2007-05-30 | 2011-08-09 | Drexel University | Detection and quantification of biomarkers via a piezoelectric cantilever sensor |
| US20090120168A1 (en) * | 2007-11-08 | 2009-05-14 | Schlumberger Technology Corporation | Microfluidic downhole density and viscosity sensor |
| US8241569B2 (en) | 2007-11-23 | 2012-08-14 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
| US8236508B2 (en) * | 2008-01-29 | 2012-08-07 | Drexel University | Detecting and measuring live pathogens utilizing a mass detection device |
| US8741663B2 (en) | 2008-03-11 | 2014-06-03 | Drexel University | Enhanced detection sensitivity with piezoelectric sensors |
| WO2009140660A2 (en) | 2008-05-16 | 2009-11-19 | Drexel University | System and method for evaluating tissue |
| IT1392736B1 (it) | 2008-12-09 | 2012-03-16 | St Microelectronics Rousset | Dispositivo a microbilancia torsionale integrata in tecnologia mems e relativo processo di fabbricazione |
| US8722427B2 (en) * | 2009-10-08 | 2014-05-13 | Drexel University | Determination of dissociation constants using piezoelectric microcantilevers |
| US20110086368A1 (en) * | 2009-10-08 | 2011-04-14 | Drexel University | Method for immune response detection |
| CN104596906B (zh) * | 2015-01-16 | 2017-08-25 | 上海大学 | 多测量头的水氧透气率测量系统 |
| CN106404849B (zh) * | 2015-01-22 | 2019-04-26 | 江西师范大学 | 基于纳米材料的传感器检测气体的方法 |
| JP6945357B2 (ja) * | 2017-06-08 | 2021-10-06 | 東京エレクトロン株式会社 | 制御装置。 |
| CN109450401B (zh) * | 2018-09-20 | 2022-03-18 | 天津大学 | 柔性单晶兰姆波谐振器及其形成方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4278492A (en) | 1980-01-21 | 1981-07-14 | Hewlett-Packard Company | Frequency trimming of surface acoustic wave devices |
| US20030020367A1 (en) | 2001-01-10 | 2003-01-30 | Yoshio Maeda | Surface acoustic wave device and its manufacturing method |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4364016A (en) * | 1980-11-03 | 1982-12-14 | Sperry Corporation | Method for post fabrication frequency trimming of surface acoustic wave devices |
| WO1989008336A1 (en) | 1988-02-29 | 1989-09-08 | The Regents Of The University Of California | Plate-mode ultrasonic sensor |
| US5189914A (en) | 1988-02-29 | 1993-03-02 | The Regents Of The University Of California | Plate-mode ultrasonic sensor |
| US5490034A (en) | 1989-01-13 | 1996-02-06 | Kopin Corporation | SOI actuators and microsensors |
| JPH0325343A (ja) * | 1989-06-23 | 1991-02-04 | Nec Corp | センサ装置 |
| US4952832A (en) * | 1989-10-24 | 1990-08-28 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device |
| JPH0497611A (ja) * | 1990-08-15 | 1992-03-30 | Clarion Co Ltd | 弾性表面波素子の製造方法 |
| JPH04199906A (ja) * | 1990-11-29 | 1992-07-21 | Kokusai Electric Co Ltd | 弾性表面波共振子 |
| US5668303A (en) | 1992-04-30 | 1997-09-16 | Forschung E.V Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten | Sensor having a membrane as part of an electromechanical resonance circuit forming receiver and transmitter converter with interdigital structures spaced apart from one another |
| US5836203A (en) | 1996-10-21 | 1998-11-17 | Sandia Corporation | Magnetically excited flexural plate wave apparatus |
| US6091182A (en) | 1996-11-07 | 2000-07-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element |
| JP3470031B2 (ja) * | 1997-12-22 | 2003-11-25 | 京セラ株式会社 | 弾性表面波装置の製造方法 |
| US6323580B1 (en) | 1999-04-28 | 2001-11-27 | The Charles Stark Draper Laboratory, Inc. | Ferroic transducer |
| WO2001071336A1 (en) | 2000-03-20 | 2001-09-27 | The Charles Stark Draper Laboratory, Inc. | Flexural plate wave sensor and array |
| US6455980B1 (en) | 2000-08-28 | 2002-09-24 | The Charles Stark Draper Laboratory, Inc. | Resonator with preferred oscillation mode |
| US6506620B1 (en) | 2000-11-27 | 2003-01-14 | Microscan Systems Incorporated | Process for manufacturing micromechanical and microoptomechanical structures with backside metalization |
| US6946314B2 (en) | 2001-01-02 | 2005-09-20 | The Charles Stark Draper Laboratory, Inc. | Method for microfabricating structures using silicon-on-insulator material |
| CA2433738C (en) | 2001-01-02 | 2012-07-24 | The Charles Stark Draper Laboratory, Inc. | Method for microfabricating structures using silicon-on-insulator material |
| US6511915B2 (en) | 2001-03-26 | 2003-01-28 | Boston Microsystems, Inc. | Electrochemical etching process |
| EP1423990A2 (en) | 2001-08-28 | 2004-06-02 | Michael Thompson | Electromagnetic piezoelectric acoustic sensor |
| JP4281327B2 (ja) * | 2002-10-28 | 2009-06-17 | 株式会社村田製作所 | 表面波装置の製造方法 |
| JP4345328B2 (ja) * | 2003-03-13 | 2009-10-14 | セイコーエプソン株式会社 | 弾性表面波デバイス及びその製造方法 |
| US7045407B2 (en) | 2003-12-30 | 2006-05-16 | Intel Corporation | Amorphous etch stop for the anisotropic etching of substrates |
-
2006
- 2006-04-05 US US11/398,308 patent/US8536037B2/en not_active Expired - Fee Related
- 2006-04-05 WO PCT/US2006/012491 patent/WO2006107961A2/en not_active Ceased
- 2006-04-05 EP EP06749241A patent/EP1872474A2/en not_active Withdrawn
- 2006-04-05 JP JP2008505449A patent/JP5078873B2/ja not_active Expired - Fee Related
- 2006-04-05 KR KR1020077022508A patent/KR101245296B1/ko not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4278492A (en) | 1980-01-21 | 1981-07-14 | Hewlett-Packard Company | Frequency trimming of surface acoustic wave devices |
| US20030020367A1 (en) | 2001-01-10 | 2003-01-30 | Yoshio Maeda | Surface acoustic wave device and its manufacturing method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11626648B2 (en) | 2018-08-21 | 2023-04-11 | Lg Energy Solution, Ltd. | Battery module including bus bar plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008536395A (ja) | 2008-09-04 |
| EP1872474A2 (en) | 2008-01-02 |
| JP5078873B2 (ja) | 2012-11-21 |
| KR20080007552A (ko) | 2008-01-22 |
| US8536037B2 (en) | 2013-09-17 |
| US20060228657A1 (en) | 2006-10-12 |
| WO2006107961A2 (en) | 2006-10-12 |
| WO2006107961A3 (en) | 2007-04-12 |
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