KR101076611B1 - 태양 전지 및 그 제조 방법 - Google Patents
태양 전지 및 그 제조 방법 Download PDFInfo
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- KR101076611B1 KR101076611B1 KR1020090087477A KR20090087477A KR101076611B1 KR 101076611 B1 KR101076611 B1 KR 101076611B1 KR 1020090087477 A KR1020090087477 A KR 1020090087477A KR 20090087477 A KR20090087477 A KR 20090087477A KR 101076611 B1 KR101076611 B1 KR 101076611B1
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 239000004065 semiconductor Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000012535 impurity Substances 0.000 claims abstract description 8
- 238000000059 patterning Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 53
- 230000008569 process Effects 0.000 claims description 31
- 238000005137 deposition process Methods 0.000 claims description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 12
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 6
- 229910004205 SiNX Inorganic materials 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 239000011368 organic material Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 5
- 210000004027 cell Anatomy 0.000 description 30
- 230000006798 recombination Effects 0.000 description 4
- 238000005215 recombination Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Computer Hardware Design (AREA)
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- Photovoltaic Devices (AREA)
Abstract
Description
Claims (22)
- 제1도전형의 반도체 기판 전면에 상기 제1도전형과 반대 도전형인 제2도전형의 불순물을 주입하여 에미터층을 형성하는 단계;상기 에미터층 상에 제1반사방지막을 형성하는 단계;상기 제1반사방지막에서 전면 전극이 형성될 부분을 패터닝하는 단계;상기 제1반사방지막 및 상기 에미터층 상에 제2반사방지막을 형성하는 단계; 및상기 반도체 기판의 전면에 전면 및 후면에 전극을 형성하는 단계를 포함하되,상기 제1반사방지막에서 전면 전극이 형성될 부분을 패터닝하는 단계는, 상기 제1반사방지막에서 전극이 형성될 부분을 식각하는 식각 공정으로 패터닝하는 것임을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제1반사방지막을 형성하는 단계 후에,상기 이미터층에서 상기 전면 전극이 형성될 부분에 고농도의 불순물을 주입하여 고농도 도핑하는 단계를 더 포함하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제1반사방지막을 형성하는 단계는 열 성장 공정(thermal growing process)을 이용하여 상기 제1반사방지막을 형성하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제3항에 있어서,상기 열 성장 공정은 습식 성장 공정(wet growing process)과 건식 성장 공정(dry growing process)을 포함하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제3항에 있어서,상기 제1반사방지막을 형성하는 단계는 900℃의 온도에서 성장하는 열 성장 공정을 이용하여 상기 제1반사방지막을 형성하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제1반사방지막을 형성하는 단계는 증착 공정을 이용하여 상기 제1반사방지막을 형성하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제6항에 있어서,상기 증착 공정은 플라즈마 화학기상 증착법(Plasma Enhanced Chemical Vapor Deposition, PECVD)으로 수행되는 것을 특징으로 하는 태양전지의 제조 방법.
- 제6항에 있어서,상기 증착 공정에 사용되는 증착가스는 SiH4를 포함하는 것임을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제1반사방지막은 SiO2를 포함하여 이루어지는 것을 특징으로 하는 태양전지의 제조 방법.
- 삭제
- 제1항에 있어서,상기 식각 공정에 사용되는 식각 물질은 고분자 유기물을 포함하는 것임을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제2반사방지막을 형성하는 단계는, 열 성장 공정을 이용하여 상기 제2반사방지막을 형성하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제2반사방지막을 형성하는 단계는 증착 공정을 이용하여 상기 제2반사방지막을 형성하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제13항에 있어서,상기 증착 공정은 플라즈마 화학기상 증착법(PECVD)으로 수행되는 것을 특징으로 하는 태양전지의 제조 방법.
- 제13항에 있어서,상기 증착 공정에 사용되는 증착가스는 SiH4를 포함하는 것임을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제2반사 방지막은 SiNx를 포함하여 이루어지는 것임을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제1반사 방지막은 1.5 내지 2.0의 굴절율을 갖도록 형성되는 것을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 제2반사 방지막은 2.0 내지 2.3의 굴절율을 갖도록 형성되는 것을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 반도체 기판의 전면 및 후면에 전극을 형성하는 단계에서, 인쇄법(Printing)에 의해 전극을 형성하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제1항에 있어서,상기 반도체 기판의 후면 전극은 알루미늄을 포함하여 이루어지는 것을 특징으로 하는 태양전지의 제조 방법.
- 제20항에 있어서,상기 반도체 기판의 후면 전극을 형성하는 단계는,상기 반도체 기판의 후면에 알루미늄을 도포하는 단계; 및상기 알루미늄을 열처리하여 BSF(Back Surface Field) 층을 형성하는 단계를 포함하는 것을 특징으로 하는 태양전지의 제조 방법.
- 제1항 내지 제21항 중 어느 한 항에 따른 제조 방법을 이용하여 제조된 태양 전지.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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KR1020090087477A KR101076611B1 (ko) | 2009-09-16 | 2009-09-16 | 태양 전지 및 그 제조 방법 |
US12/883,812 US20110061729A1 (en) | 2009-09-16 | 2010-09-16 | Solar Cell and Method of Manufacturing the Same |
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KR1020090087477A KR101076611B1 (ko) | 2009-09-16 | 2009-09-16 | 태양 전지 및 그 제조 방법 |
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KR20110029690A KR20110029690A (ko) | 2011-03-23 |
KR101076611B1 true KR101076611B1 (ko) | 2011-10-26 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101786982B1 (ko) | 2011-12-16 | 2017-10-19 | 엘지전자 주식회사 | 태양 전지 및 그의 제조 방법 |
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US8492899B2 (en) * | 2010-10-14 | 2013-07-23 | International Business Machines Corporation | Method to electrodeposit nickel on silicon for forming controllable nickel silicide |
KR101322626B1 (ko) * | 2011-08-29 | 2013-10-29 | 엘지전자 주식회사 | 태양 전지 및 그의 제조 방법 |
CN102709342A (zh) * | 2012-07-05 | 2012-10-03 | 合肥海润光伏科技有限公司 | 太阳能电池的选择性发射极结构及其制备方法 |
KR20160029119A (ko) * | 2013-07-05 | 2016-03-14 | 지티에이티 코포레이션 | 광전지를 위한 폴리실라잔 코팅 |
US9859451B2 (en) | 2015-06-26 | 2018-01-02 | International Business Machines Corporation | Thin film photovoltaic cell with back contacts |
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US4343962A (en) * | 1979-07-16 | 1982-08-10 | Arnost Neugroschel | Oxide charge induced high low junction emitter solar cell |
JP2000269160A (ja) * | 1999-03-17 | 2000-09-29 | Fujitsu Ltd | 半導体装置の製造方法 |
FR2881879B1 (fr) * | 2005-02-08 | 2007-03-09 | Commissariat Energie Atomique | Procede de realisation de contacts metal/semi-conducteur a travers un dielectrique. |
KR100974220B1 (ko) * | 2006-12-13 | 2010-08-06 | 엘지전자 주식회사 | 태양전지 |
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- 2009-09-16 KR KR1020090087477A patent/KR101076611B1/ko active IP Right Grant
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Cited By (1)
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KR101786982B1 (ko) | 2011-12-16 | 2017-10-19 | 엘지전자 주식회사 | 태양 전지 및 그의 제조 방법 |
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