KR101066672B1 - Array type capacitance sensor - Google Patents

Array type capacitance sensor Download PDF

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Publication number
KR101066672B1
KR101066672B1 KR1020087029009A KR20087029009A KR101066672B1 KR 101066672 B1 KR101066672 B1 KR 101066672B1 KR 1020087029009 A KR1020087029009 A KR 1020087029009A KR 20087029009 A KR20087029009 A KR 20087029009A KR 101066672 B1 KR101066672 B1 KR 101066672B1
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South Korea
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substrate
array type
electrode
capacitance sensor
board
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KR1020087029009A
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Korean (ko)
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KR20090017546A (en
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사토시 노조에
야스시 시모모토
카즈노부 이토나가
다이스케 쿠즈야마
마사오 하시모토
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오므론 가부시키가이샤
오므론 헬스캐어 가부시키가이샤
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Priority to JP2006144680A priority Critical patent/JP4143653B2/en
Priority to JPJP-P-2006-144680 priority
Application filed by 오므론 가부시키가이샤, 오므론 헬스캐어 가부시키가이샤 filed Critical 오므론 가부시키가이샤
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/146Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Detecting, measuring or recording for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
    • A61B5/021Measuring pressure in heart or blood vessels

Abstract

In the array type capacitance sensor 1, a slit 2b extending in parallel to the movable electrode 6 is provided between the movable electrodes 6 on the movable electrode side substrate 2. Thereby, it is possible to provide an array type capacitive sensor which can be manufactured at low cost and can accurately and stably measure pressure even on a curved surface.

Description

Array type capacitive sensor {ARRAY TYPE CAPACITANCE SENSOR}

TECHNICAL FIELD The present invention relates to a sensor for measuring a pressure fluctuation waveform, and more particularly, to an array type capacitance sensor.

In general, as a sensing method for measuring pressure, in addition to a sensing method using a torsional resistance element, a sensing method using a capacitive element is known. In the sensing method using the capacitive element, since the structure of the sensor element is simpler than that of the torsional resistance element, there is a merit that it can be manufactured at low cost without using a semiconductor manufacturing process that requires expensive manufacturing cost.

As a sensing method using this capacitive element, there exist a tactile sensor as described in Nonpatent Literature 1, and a tactile sensor as described in Non Patent Literature 2, for example. Since these are pressure sensors in which capacitive elements are arranged in an array on the sensing surface, they are suitable for measuring the pressure fluctuation waveform.

Hereinafter, the tactile sensor described in the non-patent document 2 will be described in detail. FIG. 26 is an external perspective view of the pressure detection unit of the tactile sensor described in Non-Patent Document 2, and FIG. 27 is an exploded perspective view of the pressure detection unit illustrated in FIG. 26. FIG. 28A is a plan view when the pressure detection unit shown in FIG. 26 is viewed from above, and FIG. 28B is a schematic diagram showing the layout of the capacitive element. FIG. 29 is a circuit configuration diagram of a tactile sensor including a pressure detector shown in FIG. 26.

As shown to FIG. 26 and FIG. 27, the tactile sensor 1E described in the said nonpatent literature 2 mainly includes the lower electrode 11, the upper electrode 21, and the spacer member 31. As shown in FIG. The lower electrode 11 consists of the several strip | belt-shaped copper foil electrode extended in substantially linear form provided in row shape so that it may run alongside each other. The upper electrode 21 consists of the several strip | belt-shaped copper foil electrode extended in substantially linear form provided in the column shape so that it may mutually mutually exist in the direction orthogonal to the said lower electrode 11. As shown in FIG. A spacer member 31 made of silicon rubber is disposed between the lower electrode 11 and the upper electrode 21.

At the intersection of the lower electrode 11 and the upper electrode 21 arranged in a matrix, a portion of the lower electrode 11 and a portion of the upper electrode 21 face each other with a predetermined distance by the spacer member 31. Is placed. As a result, a capacitance element 41 (see FIG. 28A) as a sensor element is formed at this intersection.

As shown in Figs. 28A and 28B, in the tactile sensor 1E having the above configuration, when the pressure detection unit is viewed in plan, the capacitive elements 41 are arranged in an array shape. Will be deployed. Each capacitance element 41 is twisted in a direction approaching each other by the pressure applied to the upper electrode 21 or the lower electrode 11, so that the capacitance changes.

Therefore, as shown in FIG. 29, the power supply 60 is connected to the one electrode of the lower electrode 11 or the upper electrode 21 arrange | positioned in matrix form through the multiplexer 50, and to the other electrode. Similarly, the capacitor 70 connected to the detector 70 via the multiplexer 50 is configured, and the capacitive elements arranged in an array form are selected by selecting the specific lower electrode 11 and the upper electrode 21 by the multiplexer 50. The capacitance of one of the capacitors 41 can be obtained through the detector 70. For example, in Fig. 29, when the second lower electrode 11 from the top and the upper electrode 21 of the third column from the left side are selected, the capacitance of one capacitance element indicated by 42 is output. Therefore, it becomes possible to measure the pressure in arbitrary positions of the sensor surface of the tactile sensor 1E.

Moreover, as another technique which can measure a pressure fluctuation waveform, the surface pressure distribution sensor of patent document 1 using the capacitance element, and the piezoelectric wave sensor of patent document 2 using the piezoelectric sheet. And pressure pulse wave analyzers.

It is a schematic block diagram of the surface pressure distribution sensor of the said patent document 1. As shown in FIG. As shown in the same figure, the surface pressure distribution sensor 101 is provided with the row wiring part 11 and the column wiring part 12 arrange | positioned opposingly spaced through the spacer 18 at predetermined intervals. The row wiring portion 11 includes a glass substrate 13, row wirings 14 arranged in parallel in a first direction on the glass substrate 13, and an insulating film 15 covering the row wirings 14. The heat wiring part 12 consists of the flexible film 16 and the heat wiring 17 arrange | positioned in parallel in the 2nd direction by the flexible film 16 many.

It is a schematic block diagram of the pressure pulse wave sensor of the said patent document 2. As shown in FIG. As shown in the figure, the pressure pulse wave sensor 102 arranges a plurality of band-like piezoelectric sheets 16 mounted on a body surface in order to detect pulse waves from a living body in the width direction thereof. In the state in which it was made, it has the same structure as the 1st sensor part 12 which fixed the plurality of piezoelectric sheets 16 to the flexible sheet 18, and the 1st sensor part 12, and the 1st The 2nd sensor part 14 rotated 90 degrees in the horizontal plane with respect to the sensor part 12 is laminated | stacked, and is comprised.

[Non-Patent Document 1] R.S.Fearing, "Tactile Sensing Mechanisms", The International Journal of Robotics Research, June 1990, Vol. 9, No. 3, pp. 3-23

[Non-Patent Document 2] D. A. Kontarinis et al., "A Tactile Shape Sensing and Disp1ay System for Teleoperated Manipu1ation", IEEE International Conference on Robotics and Automation, 1995, pp. 641-646

Patent Document 1: Japanese Patent Application Laid-Open No. 2004-317403 (published date: November 11, 2004)

Patent Document 2: Japanese Unexamined Patent Publication No. 2004-208711 (published: July 29, 2004)

DISCLOSURE OF INVENTION

By the way, the said conventional structure has the following problems.

That is, in the structures of the tactile sensors of the non-patent literatures 1 and 2, as shown in Figs. 32A and 32B, when affixed to the uneven portion (curved surface), the substrate constituting the electrode pattern Compression stress is applied to the inner diameter side and tensile stress is applied to the outer diameter side, and the distance between the counter electrodes becomes small. FIG. 32A shows the side surface of the tactile sensor in normal (planar view), and FIG. 32B shows the side surface of the tactile sensor in bending. Therefore, the sensor characteristic at the time of bending shown in FIG. 32 (b) will fluctuate largely from the sensor characteristic at the time of a plane shown in FIG. 32 (a), and the problem that the sensitivity of a sensor will fall will arise. . In addition, since the distance between the counter electrodes becomes small and is measured as it is while the compressive stress is applied, there is a problem that the initial output increases.

These problems are also perfect in the above-mentioned patent documents 1 and 2, and specifically, in the structure of the surface pressure distribution sensor of patent document 1, even if a flexible film does not have independence in each heat wiring, patent document 2 In the configuration of the piezoelectric pulse sensor, since the arranged piezoelectric sheets are fixed to a flexible sheet or an elastic substrate, there arises a problem that the sensor characteristics fluctuate at the time of measurement on each curved surface.

The present invention has been made in view of the above problems, and an object thereof is to provide an array type capacitive sensor which can be manufactured at low cost and can accurately and stably measure pressure even on a curved surface.

In order to solve the said subject, the array type capacitance sensor of this invention is the 1st board | substrate with which the 1st electrode or more of 1st board | substrate which extends in parallel with each other, and the said 1st board | substrate surface are predetermined distances. An array type capacitive sensor having a second substrate provided opposite to each other and having at least two or more rows of second electrodes extending in parallel with each other in a direction crossing the extending direction of the first electrode. A slit shape extending in parallel with the first electrode or the second electrode between the plurality of first electrodes or the plurality of second electrodes in the first substrate or the second substrate. The substrate slit portion is provided.

According to the said structure, between the said 1st board | substrate or the said 2nd board | substrate, between the said 1st electrode or the said 2nd electrode, The said 1st electrode or said 2nd electrode The slit-shaped board | substrate slit part extended in parallel is provided.

Thereby, the board | substrate slit part is arrange | positioned in the vicinity of the capacitance element formed by the 1st electrode and the 2nd electrode. That is, the substrate slit portion is interposed between the capacitive element and at least one capacitive element adjacent to the capacitive element.

In the conventional array type capacitance sensor, since the substrate slit portion is not provided on either the first substrate or the second substrate, the substrate slit portion is not interposed between adjacent capacitive elements. . Therefore, when the said 1st board | substrate or a 2nd board | substrate deform | transforms at the time of a pressure measurement, a tensile stress or a compressive stress acts on the said 1st electrode and the said 2nd electrode which oppose, respectively. As a result, since a pressure other than the pressure applied from the measurement target is applied to the capacitive element, the initial output is increased and accurate and stable pressure measurement cannot be performed.

On the other hand, in the array type capacitance sensor of the present invention, since the substrate slit portion is interposed between adjacent capacitance elements, the first substrate or the second substrate is deformed in a curved surface or the like at the time of pressure measurement. In one case, the first electrode or the second electrode is deformed independently of the adjacent electrode. Therefore, the influence from the adjacent board | substrate and an electrode in the capacitance element corresponding to a deformation | transformation point can be reduced. Therefore, the pressure applied from the measurement object can be measured accurately and stably. In addition, since it is not influenced by the adjacent substrate and the electrode, crosstalk can be reduced as compared with the conventional array type capacitance sensor. Moreover, since it is a simple structure which provides a board | substrate slit part in the said 1st board | substrate or a 2nd board | substrate, the array type capacitance sensor which can measure pressure accurately and stably can be manufactured at low cost.

The array type capacitance sensor of the present invention is the array type capacitance sensor described in the above, wherein the substrate slit portion has a bending direction of the first substrate or the second substrate at the time of measurement. It is preferable that is provided in the direction orthogonal to each other.

According to the said structure, the said board | substrate slit part is provided in the direction orthogonal to the bending direction of the said 1st board | substrate or the said 2nd board | substrate at the time of a measurement.

Here, for example, when an array type capacitance sensor is used for arterial wave measurement, the first substrate or the second substrate is bent in accordance with the shape of the wrist. In addition, said bending direction means the direction bend | folded, ie, the direction orthogonal to the direction of extending | stretching of an artery, when an array type capacitance sensor is attached to a wrist of a test subject.

Therefore, when the said board | substrate slit part is provided in the direction orthogonal to a bending direction, since the said 1st board | substrate or the 2nd board | substrate bends on the said board | substrate slit part boundary, when providing the said board | substrate slit part in the bending direction On the contrary, the influence of the strains which are adjacent to each other in the adjacent capacitance elements can be reduced. Therefore, the pressure applied from the measurement object can be measured more accurately and stably. In addition, since the influence from the adjacent substrate and the electrode can be further reduced, crosstalk can be further reduced.

In addition, the array type capacitance sensor of the present invention, in the array type capacitance sensor described above, further comprises a spacer for maintaining the predetermined distance between the first substrate and the second substrate. It is preferable that the spacer is provided with a spacer opening extending in the direction intersecting in the longitudinal direction of the substrate slit portion in the projection region of the first electrode or the second electrode to the spacer.

According to the said structure, the said spacer is provided with the spacer opening part extended in the direction which cross | intersects the longitudinal direction of the said board | substrate slit part in the projection area | region of the said 1st electrode or the said 2nd electrode to the said spacer.

As a result, the plurality of capacitance elements formed by the first electrode and the second electrode are surrounded by the substrate slit portion and the spacer, respectively. That is, a substrate opening part or a spacer is interposed between adjacent capacitive elements. Therefore, since a spacer is interposed between the capacitive elements which do not interpose a board | substrate slit part, the influence of the deformation of adjacent capacitive elements can further be reduced. Therefore, the pressure applied from the measurement object can be measured more accurately and stably, and crosstalk can be further reduced.

The array capacitive sensor of the present invention is a plurality of array capacitive sensors as described above, wherein the spacers extend in parallel to the substrate slit portion in the projection region of the substrate slit portion to the spacer. It is preferable that the slit-shaped spacer slit part is provided.

According to the said structure, since the spacer slit part of the same direction is provided in the board | substrate slit part, the deformation | transformation of the said 1st board | substrate or the 2nd board | substrate at the time of a pressure measurement becomes easy. Therefore, since the first electrode or the second electrode can be easily deformed, the response of the array type capacitance sensor can be improved. In addition, crosstalk can be further reduced.

Moreover, the array type capacitance sensor of this invention is a surface on the opposite side to the said 2nd board | substrate side in the said 1st board | substrate, or the said 2nd in the array type capacitance sensor as described above. It is preferable that the stabilizing member which has the groove part in which the projection area | region to the said board | substrate slit part coincides in the surface on the opposite side to the said 1st board | substrate side in the board | substrate of the said board | substrate is provided.

According to the said structure, since the stabilizing member which has the groove part of the same direction is provided in the board | substrate slit part, deformation of the said 1st board | substrate or a 2nd board | substrate at the time of a pressure measurement becomes easy. Therefore, since the first electrode or the second electrode can be easily deformed, the response of the array type capacitance sensor can be improved. That is, more accurate and stable pressure measurement can be performed, and crosstalk can be further reduced. In addition, since the planarity of the first electrode or the second electrode forming the capacitive element can be maintained, the first electrode and the second electrode are parallel to each other, and the variation in the sensor characteristics during bending can be reduced. have.

Moreover, in the array type capacitance sensor of the present invention, in the array type capacitance sensor described above, the first substrate or the second substrate provided with the substrate slit portion has flexibility. desirable.

According to the said structure, since the said 1st board | substrate or the said 2nd board | substrate with which the said board | substrate slit part is provided is flexible, deformation of the said 1st board | substrate or a 2nd board | substrate at the time of a pressure measurement is carried out. This becomes easier. Therefore, since the first electrode or the second electrode can be deformed more easily, the response of the array type capacitance sensor can be further improved. That is, more accurate and stable pressure measurement can be performed, and crosstalk can be further reduced.

In the array type capacitance sensor of the present invention, in the array type capacitance sensor described above, the spacer preferably has flexibility.

According to the said structure, since the said spacer is flexible, the deformation | transformation of the said 1st board | substrate or a 2nd board | substrate at the time of a pressure measurement becomes easy more. Therefore, since the first electrode or the second electrode can be deformed more easily, the response of the array type capacitance sensor can be further improved. That is, more accurate and stable pressure measurement can be performed, and crosstalk can be further reduced.

Other objects, features, and excellent points of the present invention will be fully appreciated by the description below. Further advantages of the present invention will become apparent from the following description with reference to the accompanying drawings.

1 is an exploded perspective view of an array type capacitance sensor according to Embodiment 1 of the present invention.

Fig. 2 is a partial sectional view of the array type capacitance sensor of Embodiment 1 as seen in the a-a direction.

FIG. 3 is a diagram showing a movable electrode side substrate in the array type capacitance sensor of Embodiment 1, (a) shows a plane of the movable electrode side substrate viewed from the movable electrode side, and (b) Partial enlargement of (a) is shown, (c) is a figure which shows the plane which looked at the said movable electrode side board | substrate from the detection surface side (back surface).

FIG. 4 is a diagram showing a movable electrode side substrate in the array type capacitance sensor of Embodiment 1, (a) shows a plane view of the fixed electrode side substrate seen from the fixed electrode side, and (b) Partial enlargement of (a) is shown, (c) is a figure which shows the plane which looked at the fixed electrode side board | substrate from the side (back surface) in which the fixed electrode was not provided.

FIG. 5 is a plan view of a spacer viewed from above in the array type capacitance sensor of Embodiment 1. FIG.

FIG. 6 is a diagram schematically showing a movable electrode side substrate when the array type capacitance sensor of Embodiment 1 is mounted on a body surface (wrist) of a test subject. FIG.

Fig. 7A is an exploded perspective view schematically showing a capacitance element in a conventional array type capacitance sensor.

Fig. 7B is a cross sectional view schematically showing a capacitance element in the case where a conventional array type capacitance sensor is mounted on a detection surface.

FIG. 8A is an exploded perspective view schematically showing a capacitance element in the array type capacitance sensor of Embodiment 1. FIG.

FIG. 8B is a cross sectional view schematically showing a capacitance element in the case where the array type capacitance sensor of Embodiment 1 is attached to a detection surface; FIG.

Fig. 9A is a graph showing the relationship between pressure and capacitance in a conventional array type capacitance sensor.

FIG. 9B is a graph showing a relationship between pressure and capacitance in the array type capacitance sensor of Embodiment 1 in which slits are provided on the movable electrode side substrate. FIG.

Fig. 10 is a cross sectional view schematically showing a capacitance element in a case where a conventional array type capacitance sensor is mounted on a detection surface, wherein (a) and (b) are shown in the array type capacitance sensor. A diagram showing the transition of deformation of the movable electrode when pressure is applied.

FIG. 11 is a cross sectional view schematically showing a capacitance element in the case where the array type capacitance sensor of Embodiment 1 is attached to a detection surface, wherein (a) and (b) are Embodiment 1 of FIG. A diagram showing the transition of deformation of the movable electrode when pressure is applied to the array type capacitance sensor.

12 is a graph showing the result of crosstalk in a conventional array type capacitance sensor.

FIG. 13 is a graph showing the result of crosstalk in the array type capacitance sensor of Embodiment 1. FIG.

FIG. 14 is a diagram showing a schematic configuration of an array type capacitance sensor of Embodiment 1, wherein (a) is an extension of a slit in the array type capacitance sensor to cut off both ends of the movable electrode side substrate; (B) is a figure which shows the cross section at the time of using a conductive adhesive for the spacer in the said array type capacitance sensor.

Fig. 15 is an exploded perspective view of the array type capacitance sensor in accordance with the second exemplary embodiment of the present invention.

16 is a diagram showing a schematic configuration of a spacer in Embodiment 2, (a) shows a plane of the schematic configuration of the spacer, and (b) shows a perspective view of the schematic configuration of the spacer. Drawing.

17 is an exploded perspective view of an array type capacitance sensor in accordance with Embodiment 3 of the present invention;

FIG. 18 is a diagram showing a schematic configuration of an array type capacitance sensor in Embodiment 3, (a) shows a plane viewed from above of the movable electrode side substrate of the array type capacitance sensor; b) shows the plane which looked at the fixed electrode side board | substrate of the array type capacitance sensor from below, (c) is a figure which shows the aa cross section of the array type capacitance sensor shown to (a).

19 is a view showing a schematic configuration of a stabilizing member in Embodiment 3, (a) shows a perspective view of a schematic configuration of the stabilizing member, and (b) shows the stabilizing member shown in (a) as Y. FIG. A figure which shows the side seen from the direction.

FIG. 20 is a view showing a step of attaching a stabilizing member to a fixed electrode side substrate in Embodiment 3. FIG.

Fig. 21 is an exploded perspective view of an array type capacitive sensor in embodiment 4 of the present invention.

Fig. 22 is a partial sectional view of the array type capacitance sensor according to the fourth embodiment as seen in the a-a direction;

FIG. 23 is a view showing a schematic configuration of a member constituting the array type capacitance sensor in Embodiment 4, (a) shows a plane of a gap stabilizing member, and (b) shows a plane of an adhesive sheet. (C) is a figure which shows the plane of a spacer.

The figure which shows schematic structure before assembling to an adhesive sheet in the gap stabilization member of Embodiment 4. FIG.

FIG. 25 is a diagram showing a step of assembling the spacer in Embodiment 4; FIG.

Fig. 26 is an external perspective view of a pressure detection unit of a conventional capacitive pressure sensor.

27 is an exploded perspective view of the pressure detection unit of the capacitive pressure sensor shown in FIG. 26.

FIG. 28A is a plan view when the pressure detection unit shown in FIG. 26 is viewed from above. FIG.

FIG. 28B is a schematic diagram showing the layout of a capacitive element in the capacitive pressure sensor shown in FIG. 26.

FIG. 29 is a circuit configuration diagram of a capacitive pressure sensor including the pressure detection unit shown in FIG. 26.

30 is a schematic configuration diagram of a conventional surface pressure distribution sensor.

31 is a schematic configuration diagram of a conventional pressure pulse wave sensor.

FIG. 32 is a side view of the capacitive pressure sensor shown in FIG. 26, (a) shows a side surface of the pressure sensor in normal (planar view), and (b) shows a side surface of the pressure sensor in bending. The figure which shows.

(Explanation of symbols for the main parts of the drawing)

1, 20, 30, 40: array type capacitive sensor

2: movable electrode side board | substrate (1st board | substrate, 2nd board | substrate)

2b: slit (substrate slit part)

3: spacer

3a: opening (spacer opening)

3b: slit (spacer slit part)

5: fixed electrode side substrate (first substrate, second substrate)

6: movable electrode (first electrode, second electrode)

7: fixed electrode (first electrode, second electrode)

8: stabilizing member

8c: groove

EMBODIMENT OF THE INVENTION One embodiment of this invention is described below with reference to drawings. The array type capacitive sensor is applicable to various fields as a sensor that detects a physical quantity by a change in capacitance. However, in the present embodiment, as an example, the intraarterial pressure in a living body is used. An example of measuring a waveform of will be described.

First, the outline | summary of the array type capacitance sensor of this embodiment is demonstrated briefly.

The array type capacitive sensor of the present embodiment can measure the pressure fluctuation waveform of the arterial pressure by pressing the body surface of the living body, for example, and is orthogonal to the extending direction of the artery at the time of pressing. A fixed electrode side substrate having three rows of fixed electrodes arranged in parallel to each other so as to extend in a straight line in a direction to be crossed with the fixed electrode, and having a predetermined distance to the fixed electrodes, and facing each other at a direction crossing the extending direction of the fixed electrode. The movable electrode side board | substrate which has 24 rows of movable electrodes arrange | positioned in parallel with each other so that it may increase, and 72 capacitance elements formed in the intersection part of the said 3rd fixed electrode and the 24 rows of movable electrodes are provided. Moreover, the said 24 rows of movable electrodes are provided with the slit between each, and it is a structure which deforms independently with respect to the pressure applied to the movable electrode side board | substrate.

In general, an array type capacitive sensor used for measuring the waveform of intraarterial pressure is pressurized by an air bag or the like from above to press the body surface of a living body. Thus, the arterial pressure can be measured by bringing the movable electrode side substrate into close contact with the shape (unevenness) of the subject's measurement site and detecting the capacitance of the capacitance element.

Below, the detailed structure of the array type capacitance sensor in this embodiment is demonstrated. In addition, about the term defined in Embodiment 1, unless it rejects especially, it shall use according to the definition also in other embodiment mentioned later.

Embodiment 1

1 is an exploded perspective view of an array type capacitance sensor according to Embodiment 1 of the present invention, and FIG. 2 is a partial cross-sectional view of the array type capacitance sensor viewed from the a-a direction. As shown in FIG. 1 and FIG. 2, the array type capacitance sensor 1 includes a movable electrode side substrate 2, a spacer 3, a dielectric film 4, and a fixed electrode side substrate 5. ).

The movable electrode side substrate (1st board | substrate, 2nd board | substrate) 2 was in contact with a detection surface (here body surface of a living body), and received the intraarterial pressure to be measured, and is opposite to the said detection surface In addition, the sheet-like movable electrode (1st electrode, 2nd electrode) 6 which has flexibility is provided, and the connector connection part 2a is provided in the both ends of the movable electrode 6. The movable electrode side board | substrate 2 is comprised with the insulating glass-epoxy board | substrate, a polyimide film, PET film, an epoxy resin film, etc., for example. The detail of the movable electrode side board | substrate 2 and the movable electrode 6 is mentioned later.

The fixed electrode side substrate (1st board | substrate, 2nd board | substrate) 5 is arrange | positioned facing the said movable electrode side board | substrate 2 on the opposite side to the said detection surface in the movable electrode side board | substrate 2, While the fixed electrode (1st electrode, 2nd electrode) 7 is provided, the connector connection part 5a is provided in the edge part of the fixed electrode 7. The fixed electrode side board | substrate 5 is comprised from the insulating glass-epoxy board | substrate, a polyimide film, PET film, an epoxy resin film, etc. similarly to the movable electrode side board | substrate 2, for example. The detail of the fixed electrode side board | substrate 5 and the fixed electrode 7 is mentioned later.

The spacer 3 is made of silicon rubber or the like, and is arranged to secure a predetermined distance (gap) between the movable electrode side substrate 2 and the fixed electrode side substrate 5. The gap between the movable electrode 6 and the fixed electrode 7 is maintained by holding the gap (space) between the movable electrode side substrate 2 and the fixed electrode side substrate 5. The size of the gap is arbitrarily set according to the width of the magnitude of the physical quantity to be detected by the array type capacitance sensor 1 and the deformation amount of the movable electrode side substrate 2. The detail of the spacer 3 is mentioned later.

The dielectric film 4 prevents a short circuit caused by the contact between the movable electrode 6 of the movable electrode side substrate 2 and the fixed electrode 7 of the fixed electrode side substrate 5, and increases capacitance. It is to let. It is preferable that the thickness of the dielectric film 4 is thinner, for example, it consists of an epoxy film of 20 micrometers in thickness.

Here, the detailed structure of the movable electrode side board | substrate 2, the fixed electrode side board | substrate 5, and the spacer 3 is demonstrated using FIG.

FIG. 3 is a diagram showing a movable electrode side substrate in the array type capacitance sensor of Embodiment 1, (a) shows a plane view of the movable electrode side substrate seen from the movable electrode side, and (b) Shows a partial enlargement of (a), (c) shows the plane which looked at the said movable electrode side board | substrate from the detection surface side (rear surface). In addition, in this embodiment and each embodiment mentioned later, the extending | stretching direction of the several strip | belt-shaped electrode in which the movable electrode 6 was formed is made into the Y direction, orthogonal to a Y direction, and is made to the movable electrode side board | substrate 2 surface. Assume that the parallel direction is the X direction.

As shown in Figs. 3A and 3B, the movable electrodes 6 are formed of strip-shaped electrodes extending in a straight line in 24 rows in the Y direction, and are arranged to be parallel to each other at equal intervals. . In addition, in this embodiment, although the movable electrode 6 uses 24 strip | belt-shaped electrodes, it is not limited to this, What is necessary is just two or more rows. In addition, the movable electrode 6 is formed on the movable electrode side board | substrate 2 by copper foil etc. using the sputtering method or the vapor deposition method, and the deformation | transformation of the movable electrode side board | substrate 2 according to the pressure received from a detection surface. It is the structure which can be deformed with. Each strip | belt-shaped electrode is connected to either one of the two connector connection parts 2a for 12ch at the edge part.

As shown to (b) and (c) of FIG. 3, the movable electrode side board | substrate 2 respond | corresponds to the clearance gap of each other in the above-mentioned strip | belt-shaped electrode extended linearly in 24 rows. (Substrate slit part) 2b is provided in parallel in parallel. Thereby, when the movable electrode side board | substrate 2 receives the pressure from a detection surface, each strip | belt-shaped electrode which comprises the movable electrode 6 can be deformed independently of the adjacent strip | belt-shaped electrode.

FIG. 4 is a diagram showing a movable electrode side substrate in the array type capacitance sensor of Embodiment 1, (a) shows a plane view of the fixed electrode side substrate from the fixed electrode side, and (b) (A) shows the partial enlargement of (a), (c) has shown the plane which looked at the said fixed electrode side board | substrate from the side (back surface) in which the fixed electrode was not provided.

As shown in Figs. 4A and 4B, the fixed electrodes 7 are formed of strip-shaped electrodes extending in three straight lines in the X direction, and are arranged to be parallel to each other at equal intervals. In addition, in this embodiment, although the fixed electrode 7 is made into three strip | belt-shaped electrodes, it is not limited to this, What is necessary is just two rows or more. In addition, the fixed electrode 7 is formed on the fixed electrode side board | substrate 5 by copper foil etc. using the sputtering method or the vapor deposition method, and is a structure which is not influenced by the pressure received from a detection surface. Each strip | belt-shaped electrode is connected to the connector connection part 5a for 3ch at the edge part.

5 is a plan view when the spacer 3 is viewed from above. The spacer 3 is disposed between the movable electrode side substrate 2 and the fixed electrode side substrate 5 to maintain a constant distance between them. The spacer 3 is provided with three rows of openings (spacer openings) 3a on a straight line in the X direction in accordance with the arrangement of the fixed electrodes 7 so as not to cover the fixed electrodes 7. It is preferable that the width and length of the opening 3a are equal to or greater than the width and length of the fixed electrode 7.

Next, the assembling method of the array type capacitance sensor 1 which consists of the above-mentioned structural member is demonstrated.

As shown in FIG. 1, the movable electrode side board | substrate 2 which has the movable electrode 6, and the fixed electrode side board | substrate 5 which has the fixed electrode 7 are each strip | belt-shaped electrode, 24 The stripe electrodes in rows and the stripe electrodes in three columns are stacked to intersect. In addition, the spacer 3 has the movable electrode side board | substrate 2 and the fixed electrode side board | substrate 5 so that the opening part 3a of the spacer 3 and the fixed electrode 7 of the fixed electrode side board | substrate 5 may match. ) Is placed between. In addition, a dielectric sheet is disposed between the movable electrode side substrate 2 and the fixed electrode side substrate 5 in addition to the spacer 3. These structural members are laminated | stacked by the sputtering method, vapor deposition method, etc., and are mutually joined.

In the array type capacitance sensor 1 assembled as described above, at the intersection of the movable electrode 6 and the fixed electrode 7 arranged in a matrix, the movable electrode 6 and the fixed electrode 7 The predetermined distance (for example, about 100 micrometers) is maintained by the spacer 3 which consists of silicone rubber etc., and a space area | region is formed. As a result, a part of the movable electrode 6 and a part of the fixed electrode 7 are disposed to face each other via the space region, and a capacitance element as a sensor element is formed in this intersection. In the array type capacitance sensor 1 of this embodiment, 72 capacitive elements in total are formed by electrodes of 3 rows x 24 columns.

Next, the method and principle of using the array type capacitance sensor 1 will be described. FIG. 6 is a diagram schematically showing the movable electrode side substrate 2 when the array type capacitance sensor 1 is mounted on the body surface (for example, a wrist) of the test subject.

As shown in FIG. 6, the array type capacitance sensor 1 is formed such that the longitudinal direction of the linear slit 2b of the movable electrode side substrate 2 coincides with the extending direction of the artery 100 of the subject. The surface opposite to the surface on which the movable electrode 6 in the movable electrode side substrate 2 is provided is pressed to the wrist. In addition, in order to bring the movable electrode side substrate 2 into close contact with the wrist, a pressing force is applied by the air bag 1a (see FIG. 7B) from above the fixed electrode side substrate 5. Thus, since the movable electrode side board | substrate 2 is mounted by pressing on the detection surface (wrist) 1b (refer FIG.7 (b)), the movable electrode side board | substrate 2 and the movable electrode 6 are wrists. It will be deformed according to the shape of. At this time, since the slit 2b is provided in the movable electrode side board | substrate 2 in parallel with the strip | belt-shaped electrode which comprises the movable electrode 6, each strip | belt-shaped electrode is changed by the deformation | transformation at the time of mounting conventionally. Compression stress and tensile stress do not work.

As a result, the movable electrode 6 forming the capacitive element deforms toward the fixed electrode 7 side by receiving the intraarterial pressure from the wrist. As the movable electrode 6 deforms, the distance between the movable electrode 6 and the fixed electrode 7 changes, and the capacitance (charged electric charge) changes. By converting the changed capacitance into a voltage, the pressure applied to the movable electrode side substrate 2 can be detected.

As described above, in the array type capacitance sensor 1 according to the present embodiment, the longitudinal direction of the linear slit 2b of the movable electrode side substrate 2 and the extending direction of the artery 100 of the test subject approximately coincide with each other. When the movable electrode side board | substrate 2 is attached to the detection surface 1b, the strip | belt-shaped electrode which comprises the movable electrode 6 will deform each independently according to the shape of the detection surface 1b. Therefore, the plurality of capacitive elements formed in the array type capacitive sensor 1 do not influence deformation of each other. This point will be described in more detail with reference to FIGS. 7 and 8.

FIG. 7 is a diagram schematically showing a capacitive element, and FIG. 7A is an exploded perspective view schematically showing a capacitive element in a conventional array type capacitive sensor, and FIG. b) is a cross-sectional view schematically showing a capacitance element in the case where a conventional array type capacitance sensor is mounted on the detection surface 1b. 8A is an exploded perspective view schematically showing the capacitance element in the array type capacitance sensor 1 of the present embodiment, and FIG. 8B is the array type of the present embodiment. It is a cross-sectional view which shows typically the capacitive element in the case where the capacitive sensor 1 is attached to the detection surface 1b. 7A and 8A, the movable electrodes 6a and 6b adjacent to the arterial extending direction (arrow X direction in the figure) and the direction orthogonal to the X direction (arrow Y direction in the figure) The movable electrodes 6a and 6c adjacent to) are shown. In addition, the capacitive elements (not shown) corresponding to the movable electrodes 6a, 6b, and 6c are shown as capacitive elements a, b, and c, respectively.

In the conventional array type capacitive sensor, when the array type capacitive sensor 1 is pressed and mounted on the subject's wrist, each stripe electrode is arranged on one continuous movable electrode side substrate 2 As a result, the plurality of stripe electrodes deform according to the uneven portion of the detection surface (wrist) 1b. Specifically, as shown in FIG. 7B, the movable electrode 6c adjacent to the movable electrode 6a in the capacitive element a of the portion in contact with the recess of the wrist corresponds to the movable electrode. Tensile stress acts on 6a, and compressive stress acts on the fixed electrode 7a. As a result, the distance between the movable electrode 6a and the fixed electrode 7a becomes small, so that the capacitance of the capacitive element a fluctuates so that the array type capacitance sensor 1 is not mounted on the wrist. Compared with the state or the plane mounting, the initial output is increased. In addition, at the time of measurement, since the said stress always acts, the change of capacitance with respect to the pressure (pulse pressure) from the detection surface (wrist) 1b becomes small, ie, the response of the capacitance element a. The performance deteriorates, and the sensitivity of the array type capacitance sensor 1 deteriorates. As described above, in the conventional array type capacitance sensor, since the capacitive element a receiving the pulse pressure is affected by the adjacent capacitive element c, accurate and stable pressure measurement cannot be performed.

In contrast, in the array type capacitance sensor 1 according to the present embodiment, a linear slit 2b is provided between the strip-shaped electrodes on the movable electrode side substrate 2, and the longitudinal direction of the slit 2b Since the array type capacitive sensor 1 is mounted on the subject's wrist so that the direction of extension of the artery of the subject (the arrow X direction in the figure) is roughly coincident, the plurality of movable electrodes 6 depend on the uneven portion of the wrist. Transform independently. Specifically, as shown in FIG. 8B, in the capacitance element a in the portion pressurized by the air bag 1a, the movable electrode 6a is different from the adjacent movable electrode 6c. Independently separated. Therefore, the tensile stress by the movable electrode 6c does not act on the movable electrode 6a. Therefore, even when the array-type capacitive sensor 1 is mounted on the uneven surface, the relationship between the capacitive elements a and c is the same as the environment in which the plane is mounted, that is, the capacitive elements a and b. Becomes That is, even when the array type capacitance sensor 1 is mounted on the uneven surface such as the bent portion or the curved portion, only the appearance deformation occurs, and the capacitive elements a to c are the array type capacitance sensor 1 ) Is the same as the state without mounting on the uneven surface. Therefore, the initial output does not increase as in the prior art, and accurate and stable pressure measurement is possible.

In addition, even when the array type capacitance sensor 1 is mounted as described above, adjacent capacitive elements a and c are influenced by the deformation of the movable electrode side substrate 2 and the movable electrode 6 with each other. Since it is not received, crosstalk can be reduced as compared with the conventional array type capacitance sensor.

As described above, the array type capacitance sensor 1 of the present embodiment is configured to be mounted such that the extending direction of the movable electrode 6 and the extending direction of the slit 2b coincide with the extending direction of the artery of the subject. I am doing it. That is, the slit 2b is provided in the direction orthogonal to the bending direction of the movable electrode side board | substrate 2 at the time of mounting of the array type capacitance sensor 1. The bending direction is a direction that is bent when the array type capacitive sensor 1 is mounted on the subject's wrist, and is a direction that is substantially orthogonal to the extending direction of the artery. Thus, by mounting the array type capacitance sensor 1 so that the slits 2b between the movable electrodes 6 are perpendicular to the bending direction, the effect of the slits 2b, that is, independent of the movable electrodes 6 The deformation effect can be increased.

In addition, the array type capacitance sensor 1 is not limited to the above-described configuration, and for example, the extending direction of the movable electrode 6 and the extending direction of the slit 2b and the extending direction of the artery of the subject It is good also as a structure mounted in the direction orthogonal to each other. Even in this configuration, since the slit 2b is interposed between the movable electrode 6a and the movable electrode 6c, the movable electrode 6a and the movable electrode 6c may not be affected by deformation. none. Therefore, the initial output does not increase as in the prior art, and accurate and stable pressure measurement is possible.

Thus, it is preferable that the array type capacitance sensor 1 in this embodiment is a structure which a some capacitance element can each independently deform | transform. Specifically, it is preferable that the slit 2b is provided on the movable electrode 6 side, or the spacer 3 is provided between two adjacent capacitance elements.

(Experiment result)

Here, the experimental result for demonstrating the above-mentioned effect is shown below. In this experiment, the capacitance change of any specific capacitive element was measured when pressure was applied to the entire array type capacitance sensor 1. FIG. 9A is a graph showing a relationship between pressure and capacitance in a conventional array type capacitance sensor, and FIG. 9B is a slit on the movable electrode side substrate 2. It is a graph which shows the relationship between a pressure and a capacitance in the array type capacitance sensor 1 of this embodiment which provided (2b). 9 (a) and 9 (b), the dotted line shows the measurement result when the array type capacitance sensor 1 is attached in a planar shape (planar view), and the solid line, The measurement result when the array type capacitance sensor 1 is attached to the jig of R10 (when bending) is shown.

In addition, each array type capacitance sensor 1 used for this experiment satisfies the following design conditions. That is, the movable electrode side board | substrate 2 has a thickness of 125 micrometers, and 24 movable electrodes 6 of 0.8 mm in width and 22 mm in length are arrange | positioned by 1 mm pitch. The fixed electrode side board | substrate 5 has the thickness of 125 micrometers, and arrange | positions three fixed electrodes 7 of width 2mm and length 25mm by 10 mm pitch. The spacer 3 consists of a polyester film with a thickness of 100 micrometers, and the dielectric film 4 consists of an epoxy film with a thickness of 20 micrometers. In addition, the difference between the conventional array type capacitance sensor and the array type capacitance sensor 1 of this embodiment is the movable electrode side board | substrate 2 in the array type capacitance sensor 1 of this embodiment. This is a point where 25 slits 2b each having a width of 0.2 mm are provided at a pitch of 1 mm.

In the conventional array type capacitance sensor, as shown in Fig. 9A, it was confirmed that the initial output is different in planar view and in bending, and the initial output increases in particular in bending. As described above, only the array type capacitance sensor 1 is mounted on the uneven member, and compressive stress and tensile stress act on the movable electrode 6 and the fixed electrode 7, This is because the pressure is added. Moreover, it was confirmed from the change of the inclination of the straight line at the time of planar and bending that the tendency of the capacitance increase at the time of planar and bending fluctuates with the increase of the applied pressure. Specifically, it was found that the inclination of the straight line at the time of bending becomes smaller than the inclination of the straight line at the time of planarity. This is considered to be due to the influence of the above-mentioned compressive stress and tensile stress. That is, since compressive stress and tensile stress always act on the capacitive element, the change in capacitance with respect to the change in the increase in the pressure applied from the uneven member becomes small. Thus, in the conventional array type capacitance sensor, it turned out that a measurement result changes with the shape of a measurement object. Therefore, in the conventional array type capacitance sensor, when the deformation | transformation has arisen in the movable electrode 6 attached to the uneven | corrugated member etc., it was confirmed that high-precision stable pressure measurement was not possible.

On the other hand, in the array type capacitance sensor 1 of this embodiment, as shown to FIG. 9 (b), it was confirmed that a difference does not arise in initial stage output in planar view and bending time. In addition, it was confirmed from the inclination of the straight line at the time of planar and bending, with the increase of the applied pressure, the tendency of the increase of the capacitance at the time of planar and bending becomes substantially the same. That is, it turned out that the measurement result of the array type capacitance sensor 1 of this embodiment does not change with the shape of a measurement object. Therefore, it was found that the array type capacitance sensor 1 of the present embodiment has the same characteristics as the planar view in which the array type capacitance sensor 1 is not mounted even when mounted on the uneven member or the like. That is, it was confirmed that high-precision stable pressure measurement could be performed even when deformation occurred in the movable electrode 6 by attaching to an uneven member or the like.

Next, the experimental results for verifying crosstalk in the conventional array type capacitance sensor and the array type capacitance sensor 1 of the present embodiment described above are shown below. In this experiment, the electrostatic capacitance to the amount of change in capacitance when the array type capacitance sensor 1 is attached to the jig of R10 similar to the above-described experiment and a pressure is applied to a specific capacitance element 0ch. The ratio of the change amount of the capacitance in the capacitance element around the capacitor 0ch was measured. Fig. 10 is a cross sectional view schematically showing a capacitive element in the case where a conventional array type capacitance sensor is mounted on a detection surface, wherein (a) and (b) are the array type capacitance sensors. Is a diagram showing the transition of deformation of the movable electrode 6 when a pressure is applied, and FIG. 12 is a graph showing the result of the change in capacitance in the conventional array type capacitance sensor. 11 is a cross-sectional view schematically showing the capacitive element in the case where the array-type capacitive sensor 1 of the present embodiment is mounted on the detection surface. (A) and (b) are It is a figure which shows the transition of the deformation | transformation of the movable electrode 6 when a pressure is applied to the said array type capacitance sensor 1, and FIG. 13 is the capacitance in the said array type capacitance sensor 1 Is a graph showing the result of the change.

In the conventional array type capacitance sensor, since the movable electrode 6 cannot fluctuate independently when a pressure is applied, as shown in FIGS. 10A and 10B, a plurality of movable electrodes ( 6) will fluctuate. This was also apparent from the graph shown in Fig. 12, and it was confirmed that the influence of the pressure applied to the specific capacitive element 0ch also affects other capacitive elements, that is, the crosstalk is large. In particular, it was found that about 70% of the pressure applied to the particular capacitive element applied to the adjacent capacitive element.

On the other hand, in the array type capacitance sensor 1 of this embodiment, since the slit 2b is provided in the movable electrode side board | substrate 2 when a pressure is applied, the movable electrode 6 can fluctuate independently. have. Therefore, as shown in Figs. 11A and 11B, only the movable electrode 6 located on the fluctuating detection surface 1b fluctuates. As is clear from the graph shown in FIG. 13, it was confirmed that the influence of the pressure applied to the specific capacitive element 0ch did not reach other capacitive elements. In addition, the same result was obtained also in other capacitance elements other than 0ch. As described above, it was confirmed that the array type capacitance sensor 1 of the present embodiment can reduce cross talk as compared with the conventional array type capacitance sensor.

12 and 13, the pressure measurement is performed with high accuracy by providing the slit 2b on the movable electrode side substrate 2 having the movable electrode 6 forming the capacitance element. In addition to this, it has been found that crosstalk can be reduced as compared with the related art.

In addition, in this embodiment, as shown to Fig.3 (a), the slit 2b is provided in the movable electrode side board | substrate 2 along the 24 strip | belt-shaped movable electrode 6, and it is movable Although both ends of the electrode side substrate 2 are integrally formed, as another configuration, for example, as shown in FIG. 14 (a), the slit 2b is extended to extend the movable electrode side substrate 2. Both ends may be cut and separated. Thereby, the movable electrode side board | substrate 2 provided with 24 independent movable electrodes 6 is formed. According to this structure, the effect of the slit 2b mentioned above can be improved. That is, since the flexibility of the movable electrode 6 improves, more accurate pressure measurement is attained. In addition, since the adjacent movable electrodes 6 are completely cut and separated, it is possible to further reduce crosstalk. In the above configuration, as shown in Fig. 14B, it is preferable to use a conductive adhesive for the spacer 3, whereby the wiring 5b disposed on the fixed electrode side substrate 5 is used. Thus, the wiring pattern on the movable electrode 6 side can be dragged around the fixed electrode 7 side.

[Embodiment 2]

Embodiment 2 of this invention is demonstrated based on FIG. 15 and FIG. 16 as follows. In addition, for the convenience of description, the same code | symbol is attached | subjected to the member which has the same function as the member shown by the said Embodiment 1, and the description is abbreviate | omitted.

15 is an exploded perspective view of the array type capacitance sensor 20 according to the second embodiment of the present invention. The array type capacitance sensor 20 according to the present embodiment adds an improvement to the spacer 3 of the array type capacitance sensor 1 according to the first embodiment.

FIG. 16: is a figure which shows schematic structure of the spacer 3 in this embodiment, (a) shows the plane of the schematic structure of the said spacer 3, (b) shows the spacer 3 A schematic of the schematic configuration is shown. As shown in Fig. 16, the spacers 3, when stacked and joined, do not cover the fixed electrodes 7 arranged on the fixed electrode side substrate 5, so that the openings of the fixed columns 7 in three rows ( While 3a) is provided, a slit (spacer slit part) 3b is provided at the same position as the slit 2b provided on the movable electrode side substrate 2.

Thereby, when the array type capacitance sensor 20 is attached to the uneven member, the movable electrode 6 is more easily deformed according to the uneven surface than in the case of the first embodiment. Also in this case, since the movable electrode 6 can be deformed independently of the other movable electrodes 6, the compressive stress and the tensile stress do not act on the capacitive element corresponding to the deformable portion. Therefore, according to the array type capacitance sensor 20 of the present embodiment, the flexibility of the movable electrode 6 is further improved as compared with the array type capacitance sensor 1 of the first embodiment. As a result, pressure fluctuations can be measured more accurately, and crosstalk can be further reduced.

In addition, similarly to the first embodiment, when the slit 2b of the movable electrode side substrate 2 is extended and cut off, and the strip-shaped movable electrode 6 is cut and separated completely, the above-described effects Can be further improved.

[Embodiment 3]

Embodiment 3 of this invention is demonstrated based on FIG. 17 to FIG. 19 as follows. In addition, for the convenience of description, the same code | symbol is attached | subjected to the member which has the same function as the member shown in the said Embodiment 1 and 2, and the description is abbreviate | omitted.

17 is an exploded perspective view of the array type capacitance sensor 30 according to Embodiment 3 of the present invention. FIG. 18: is a figure which shows schematic structure of the array type capacitance sensor 30 in this embodiment, (a) shows the movable electrode side board | substrate 2 of the array type capacitance sensor 30 above. Is a plan view seen from (b), (b) shows a plane view from below of the fixed electrode side substrate 5 of the array type capacitance sensor 30, and (c) is an array type electrostatic shown in (a). The aa cross section of the capacitive sensor 30 is shown. The array type capacitance sensor 30 according to the present embodiment is configured to include the stabilizing member 8 in the array type capacitance sensor 20 according to the second embodiment.

FIG. 19: is a figure which shows schematic structure of the stabilizing member 8 in this embodiment, (a) shows the perspective of the schematic structure of the stabilizing member 8, (b) is shown to (a) The side surface which looked at the stabilizing member 8 to Y direction is shown. As shown in the same figure, the stabilization member 8 is equipped with the some groove part. Specifically, the stabilizing member 8 includes a plurality of thin films (for example, an adhesive sheet) 8a and a plurality of stones that extend in parallel at equal intervals on a straight line on the thin film 8a. It consists of the board | substrate 8b. In addition, although FIG. 19 (a) and (b) show the state in which only five protrusion boards 8b are provided for convenience, the number of protrusion boards 8b is movable in the movable electrode side board | substrate 2 It is preferable that the number of the electrodes 6 is equal to 24 (here, 24), and the gap between the adjacent protrusions 8b, that is, the width of the groove 8c is mutually different when the stabilizing member 8 deforms. It is preferable that the projection board 8b is set to such an extent that it does not buffer. In addition, it is preferable that the width | variety of the short side direction of the said projection board 8b is substantially the same as the width | variety of the short side direction of the movable electrode 6. As shown in FIG.

The stabilizing member 8 includes a fixed electrode 7 on the fixed electrode side substrate 5 so that the projection positions of the plurality of movable electrodes 6 and the plurality of protrusions 8b coincide with each other. It is provided in the surface on the opposite side to the surface provided. At this time, the slit 2b of the movable electrode side board | substrate 2, the slit 3b of the spacer 3, and the position of the groove part 8c in the stabilization member 8 correspond.

Thereby, when the array type capacitance sensor 30 is attached to the uneven member, the movable electrode 6 is bent at the boundary between the two slits 2b and 3b and the groove 8c. Therefore, the planarity of the movable electrode 6 and the fixed electrode 7 in which the capacitance element was formed can be ensured, maintaining the flexibility of the array type capacitance sensor 30. Therefore, the array type capacitance sensor 30 in the present embodiment can measure the change in pressure more accurately than the array type capacitance sensors 1 · 20 in the first and second embodiments. In addition, crosstalk can be further reduced.

In addition, similarly to the second embodiment, the slit 2b of the movable electrode side substrate 2 may be extended and cut off, and the strip-shaped movable electrode 6 may be completely cut and separated.

Here, an example of the attachment method of the stabilizing member 8 to the fixed electrode side board | substrate 5 is demonstrated below using FIG. 20A to 20D show a step of attaching the stabilizing member 8 to the fixed electrode side substrate 5. First, the stabilizing member 8 is brought into close contact with the release sheet made of the PET film 8d and the release material 8e, and the adhesive sheet 8a is pressed against the stabilizing member 8. (FIG. 20A). Next, the stabilizing member 8 is cut by press working (half cut) (FIG. 20B). And it arrange | positions on the fixed electrode side board | substrate 5, heat-presses the adhesive sheet 8e (FIG. 20 (c)), and peels off a release sheet, and is completed (FIG. 20 (d)).

[Embodiment 4]

Embodiment 4 of the present invention will be described with reference to FIGS. 21 through 23 as follows. In addition, for the convenience of description, the same code | symbol is attached | subjected to the member which has the same function as the member shown in the said Embodiment 1 thru | or 3, and the description is abbreviate | omitted.

FIG. 21 is an exploded perspective view of the array type capacitance sensor 40 according to Embodiment 4 of the present invention, and FIG. 22 is a partial cross-sectional view of the array type capacitance sensor 40 viewed from the a-a direction. The array type capacitance sensor 40 according to the present embodiment further improves the spacer 3 of the array type capacitance sensor 20 according to the second embodiment.

FIG. 23C shows a plan view of a schematic configuration of the spacer 3 in the present embodiment. As shown in the same figure, the spacer 3 consists of the gap stabilization member 9 and the adhesive sheet 10. FIG. 23A illustrates a plane of the schematic configuration of the gap stabilizing member 9, and FIG. 23B illustrates the plane of the schematic configuration of the adhesive sheet 10.

The gap stabilizing member 9 has the same flexibility as the movable electrode side substrate 2 and the fixed electrode side substrate 5, and is the same as the movable electrode side substrate 2 and the fixed electrode side substrate 5. It has an equal compressive strength. Specifically, the gap stabilization member 9 is made of polyimide, PET (film), epoxy resin (film), or the like.

In addition, the adhesive sheet 10 has the opening part 3a corresponding to the fixed electrode 7 and the slit 3b corresponding to the slit 2b of the movable electrode 6 similarly to the spacer 3 of the said Embodiment 2 ), And as shown in Fig. 23B, a plurality of notches 10a extending in parallel at equal intervals in a straight line for accommodating the gap stabilizing member 9 are formed. It is. In addition, this notch part 10a is located between several slits (not shown) in the adhesive sheet 10, and when the movable electrode side board | substrate 2 and the fixed electrode side board | substrate 5 are laminated | stacked, the movable electrode is carried out. It is formed in the position where the movable electrode 6 of the side board | substrate 2 and the projection position of this notch part 10a correspond mutually. In addition, the adhesive sheet 10 consists of polyester resin, an epoxy resin, a polyurethane resin, a silicone resin, etc., for example.

Here, the assembly method of the spacer 3 comprised from these gap stabilization members 9 and the adhesive sheet 10 is demonstrated. FIG. 24: is a figure which shows schematic structure before assembling to the adhesive sheet 10 in the gap stabilization member 9. FIG. After processing the gap stabilizing member 9 shown in FIG. 24 to assemble to the notch part 10a of the adhesive sheet 10 (FIG. 23 (a)), as shown to FIG. 23 (c). The gap stabilizing member 9 and the adhesive sheet 10 are combined.

In addition, another assembling method of the spacer 3 will be described with reference to FIG. 25. 25 is a diagram illustrating an assembling process of the spacer 3. First, the gap stabilizing member 9 is brought into close contact with the release sheet made of the PET film 9a and the release material 9b (FIG. 25A). Next, only the gap stabilization member 9 is cut by press working (half cut) to form an array (Fig. 25 (b)). And it arrange | positions on the movable electrode side board | substrate 2, the adhesive force of a mold release material is reduced by thermosetting (FIG. 25 (c)), and a mold release sheet is peeled off and it completes (FIG. 25 (d)). In addition, the array type capacitive sensor 40 can be manufactured by processing the slit 3b in the spacer 3 after that, and thermally hardening by overlapping the fixed side board | substrate.

According to the array type capacitive sensor 40 having the spacer 3 described above, the gap stabilizing member 9 has the same function as the stabilizing member 8 shown in the third embodiment. The same effect as that of the array type capacitive sensor 30 in Mode 3 can be obtained. That is, when the array type capacitance sensor 40 is mounted on the uneven member, the movable electrode 6 is deformed (bended) at the boundary between the slit 3b and the gap stabilizing member 9. . Therefore, the planarity of the movable electrode 6 and the fixed electrode 7 which form a capacitance element can be ensured, maintaining the flexibility of the array type capacitance sensor 40. Therefore, the array type capacitance sensor 40 according to the present embodiment can measure the change in pressure more accurately and can further reduce crosstalk.

In addition, similarly to the second embodiment, the slit 2b of the movable electrode side substrate 2 may be extended and cut off, and the strip-shaped movable electrode 6 may be completely cut and separated.

In addition, this invention is not limited to embodiment mentioned above, A various change is possible in the range shown by a claim. That is, embodiment obtained by combining the technical means suitably changed in the range shown to the claim is also included in the technical scope of this invention.

The array type capacitance sensor of the present invention is, as described above, between the plurality of first electrodes or the plurality of second electrodes in the first substrate or the second substrate. The slit-shaped board | substrate slit part extended in parallel with the 1st electrode or the said 2nd electrode is provided.

Thereby, the capacitance element corresponding to a deformation | transformation part is not influenced by the adjacent board | substrate and an electrode. Therefore, it is possible to provide an array type capacitive sensor which can be manufactured at low cost and can measure pressure accurately and stably on a curved surface.

Specific embodiments or examples made in the detailed description of the present invention are intended to clarify the technical contents of the present invention to the last, and should not be construed as limited only by such specific examples. It can be variously changed and implemented within the mind and claims of the following.

Since the array type capacitance sensor of the present invention can measure the pressure change accurately and stably, it can be applied to the measurement of minute pressure changes such as the measurement of the pressure pulse wave of a living body.

Claims (7)

  1. A first substrate provided with at least two rows or more of first electrodes extending in parallel with each other, and disposed to face each other at a predetermined distance from the first substrate surface, in a direction intersecting with a extending direction of the first electrodes; An array type capacitance sensor comprising a second substrate provided with at least two or more second electrodes extending in parallel with each other,
    A slit shape extending in parallel with the first electrode or the second electrode between the plurality of first electrodes or the plurality of second electrodes in the first substrate or the second substrate. Substrate slit portion is provided,
    Also provided with a spacer for maintaining the predetermined distance between the first substrate and the second substrate,
    The spacer is provided with a spacer opening extending in a direction crossing in the longitudinal direction of the substrate slit portion in a projection area of the first electrode or the second electrode to the spacer.
    The spacer is not formed in a region where the first electrode and the second electrode face each other.
    When the first substrate or the second substrate is deformed, the first electrodes that are adjacent to each other or the second electrodes that are adjacent to each other are independently of each other while maintaining the predetermined distance. Array type capacitive sensor, characterized in that the deformation.
  2. The method of claim 1,
    The said substrate slit part is provided in the direction orthogonal to the bending direction of the said 1st board | substrate or the said 2nd board | substrate at the time of a measurement, The array type capacitance sensor.
  3. delete
  4. The method of claim 1,
    And the spacer is provided with a plurality of slit-shaped spacer slit portions which extend in parallel to the substrate slit portion in a projection region of the substrate slit portion to the spacer.
  5. The method of claim 1,
    Projection to the substrate slit portion on the surface on the side opposite to the second substrate side in the first substrate or on the surface on the side opposite to the first substrate side in the second substrate An array type capacitive sensor, comprising: a stabilizing member having groove portions coincident with regions.
  6. The method of claim 1,
    Said 1st board | substrate or said 2nd board | substrate with which the said board | substrate slit part is provided has flexibility, The array type capacitance sensor characterized by the above-mentioned.
  7. The method of claim 1,
    The spacer has an array type capacitance sensor, characterized in that the flexibility.
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