KR101064152B1 - Screw type vacuum pump having direct cooling device - Google Patents

Screw type vacuum pump having direct cooling device Download PDF

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Publication number
KR101064152B1
KR101064152B1 KR1020110059472A KR20110059472A KR101064152B1 KR 101064152 B1 KR101064152 B1 KR 101064152B1 KR 1020110059472 A KR1020110059472 A KR 1020110059472A KR 20110059472 A KR20110059472 A KR 20110059472A KR 101064152 B1 KR101064152 B1 KR 101064152B1
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South Korea
Prior art keywords
rotor
shaft
cooling
vacuum pump
lubricating oil
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KR1020110059472A
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Korean (ko)
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서인우
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주식회사 에스백
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Priority to KR1020110059472A priority Critical patent/KR101064152B1/en
Application granted granted Critical
Publication of KR101064152B1 publication Critical patent/KR101064152B1/en
Priority to PCT/KR2012/004141 priority patent/WO2012176991A2/en
Priority to CN201280030392.5A priority patent/CN103688059B/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/51—Bearings for cantilever assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F04C2240/603—Shafts with internal channels for fluid distribution, e.g. hollow shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0071—Couplings between rotors and input or output shafts acting by interengaging or mating parts, i.e. positive coupling of rotor and shaft

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

본 발명은 진공펌프의 로터(rotor) 내부를 직접 냉각하는 스크루식 진공펌프에 관한 것으로서, 진공을 생산하는 로터, 모터의 회전을 기어로 연결하여 로터를 회전시키는 로터축 및 로터의 회전을 지지하는 회전고정축으로 구성되어 있다.
로터 내부를 냉각하는 냉각수가 회전고정축에 형성된 주입관과 배출관으로 흘러가면서 로터 내부에서 발생한 열을 효율적으로 냉각시키고, 로터에 삽입된 베어링으로 회전고정축에 지지되어 회전하는 단순한 구조이고, 로터축 회전 나사를 통하여 윤활유가 베어링에 공급되어 효율적인 냉각과 윤활작용을 하는 것이 특징이다.The present invention relates to a screw-type vacuum pump that directly cools the inside of a rotor of a vacuum pump, and includes a rotor for producing a vacuum, a rotor shaft for rotating the rotor by connecting a rotation of the motor to a gear, and supporting the rotation of the rotor. It consists of a fixed rotation shaft.
Cooling water that cools inside the rotor flows into the injection and discharge pipes formed on the fixed shaft, and efficiently cools the heat generated inside the rotor, and is a simple structure that is supported and rotated on the fixed shaft by the bearing inserted into the rotor. Lubricant is supplied to the bearing through the rotating screw for efficient cooling and lubrication.

Description

직접 냉각 스크루식 진공펌프{Screw type vacuum pump having direct cooling device}Screw type vacuum pump having direct cooling device

본 발명은 진공펌프의 로터(rotor) 내부를 직접 냉각하는 스크루식 진공펌프에 관한 것으로서, 더욱 상세하게는 로터 내부를 냉각하는 냉각수가 회전고정축에 형성된 주입관과 배출관을 통하여 흘러가면서 로터 내부에서 발생한 열을 효율적으로 냉각시키고, 로터축에 형성된 나사선을 통하여 윤활유가 베어링 등에 공급되어 효율적인 냉각과 윤활작용을 하며, 로터에 삽입된 베어링에 의하여 로터가 회전고정축에 지지되어 회전하는 단순한 구조가 특징인 진공펌프에 관한 것이다.The present invention relates to a screw-type vacuum pump that directly cools the inside of a rotor of a vacuum pump. More specifically, the cooling water for cooling the inside of the rotor flows through an injection pipe and an discharge pipe formed on a rotating shaft, and thus inside the rotor. It cools the generated heat efficiently, and the lubricating oil is supplied to the bearing through the screw thread formed on the rotor shaft for efficient cooling and lubrication, and the simple structure that the rotor is supported on the rotating fixed shaft and rotates by the bearing inserted in the rotor It relates to a phosphorus vacuum pump.

진공펌프는 밀폐된 용기 내의 기체분자를 흡인 압축하여 대기 중으로 배출하여 용기 속의 진공도를 높이는 장치로서, 흡인 압축하는 작동방법에 따라 왕복식, 회전식, 봉수식, 확산식 등 다양한 방식이 있으며, 본 발명과 관련되는 스크루식은 회전축에 로터(회전자)가 달려 있어 회전을 하면서 기체를 밀어내어 진공도를 높이는 회전식 진공펌프의 일종이다.Vacuum pump is a device for increasing the degree of vacuum in the container by sucking and compressing the gas molecules in the sealed container to the atmosphere, there are various methods such as reciprocating, rotary, sealing, diffusion depending on the method of suction compression, the present invention The related screw type is a type of rotary vacuum pump that has a rotor (rotator) attached to the rotating shaft to push the gas while rotating to increase the degree of vacuum.

진공펌프의 로터는 기체분자를 밀어내기 때문에 마찰열과 압축열이 발생하고, 회전축에는 베어링, 기어 및 실(seal) 부재 등에서 마찰열이 발생하므로 안정적으로 운전을 하기 위하여 발생한 열을 효율적으로 냉각시켜야 한다.Since the rotor of the vacuum pump pushes gas molecules, friction heat and compression heat are generated, and friction heat is generated in the bearing, gear, and seal member on the rotating shaft, so the heat generated in order to operate stably must be cooled efficiently.

도 1은 특허문헌 1에서 제안한 로터를 냉각시키는 종래의 기술로서, 스크루(10)는 중공체의 배기측 샤프트부(11), 배기측 샤프트부(11)의 중공부와 연통되는 냉각 중공부가 구비된 다단의 압축 이송스크루부, 압축 이송스크루부에 이어지며 흡입용량을 결정하는 흡입스크류부 및 흡입스크류부에 이어진 비중공 흡기측 샤프트부로 구성되고, 배기측 샤프트부(11)에 냉각수관(51)이 인입 설치되어 있어 스크루(10)를 직접 냉각시키는 것이 특징이다. 1 is a conventional technique for cooling the rotor proposed in Patent Document 1, wherein the screw 10 is provided with a cooling hollow portion communicating with the hollow portion of the exhaust side shaft portion 11 and the exhaust side shaft portion 11 of the hollow body. And a non-hollow intake side shaft portion which is connected to the multistage compression transfer screw portion, the compression transfer screw portion, which determines the suction capacity and the suction screw portion, which is connected to the suction screw portion. ) Is installed in the inlet to directly cool the screw 10.

그러나 특허문헌 1의 방식은 냉각 효과는 우수하지만, 회전하는 샤프트에 냉각수관이 설치되어 있어 고정된 냉각수 주입관과 회전하는 샤프트와의 연결부위에서 냉각수 누설의 위험성이 있고 출수 쪽에 물통이 형성되어 있어 장치가 복잡하고 커지는 단점이 있다.However, the method of Patent Document 1 is excellent in cooling effect, but the cooling water pipe is installed on the rotating shaft, there is a risk of leakage of the cooling water at the connection between the fixed cooling water injection pipe and the rotating shaft, and the water tank is formed on the discharge side. Has the disadvantage of being complicated and large.

도 2는 특허문헌 2에서 제시된 로터를 냉각시키는 기술로서, 회전장치는 나사 로터(5)와 샤프트(6)로 구성되고, 샤프트(6)는 중공으로 형성되어 로터와 일체로 형성되고, 샤프트(6)에 서로 이격된 두 개의 베어링(7, 8)을 갖는 플로팅 로터 베어링이 로터(5)의 공동부(31) 외측에 있으며, 중공의 샤프트를 관통하는 냉각 파이프(33)가 공동부(31)로 냉각제를 공급하는 것을 특징으로 하고 있다.2 is a technique for cooling the rotor proposed in Patent Document 2, the rotating device is composed of a screw rotor (5) and a shaft (6), the shaft (6) is formed hollow and integrally formed with the rotor, the shaft ( A floating rotor bearing having two bearings 7, 8 spaced apart from each other in 6) is outside the cavity 31 of the rotor 5, and a cooling pipe 33 penetrating the hollow shaft is provided in the cavity 31. ) Is supplied with a coolant.

그러나 특허문헌 2의 방식도 냉각 효과는 우수하지만, 특허문헌 1과 마찬가지로 회전하는 샤프트에 냉각수관이 설치되어 있어 고정된 냉각수 주입관과 회전하는 샤프트와의 연결부위에서 냉각수 누설의 위험성이 있고 출수 쪽에 물통이 형성되어 있어 장치가 복잡하고 커지는 문제점이 있다.However, although the method of Patent Literature 2 is excellent in cooling effect, like Patent Literature 1, a cooling water pipe is installed on the rotating shaft, so there is a risk of cooling water leakage at the connection portion between the fixed cooling water injection pipe and the rotating shaft. There is a problem that the device is complicated and large.

1. 등록특허 제0811360호(2008.03.10.)1. Registered Patent No. 0811360 (2008.03.10.) 2. 등록특허 제0517788호(2005.09.30.)2. Registered Patent No. 0517788 (2005.09.30.)

본 발명은 위에서 제기된 종래 기술의 문제점을 해결하고자 제안하는 것으로서, 냉각수의 유입 및 배출구를 회전고정축에 함께 인입 설치하여 냉각수 누수에 대한 펌프의 안정성을 높이고 간단한 구조로서 효율적으로 냉각이 되는 스크루식 진공펌프의 냉각구조를 제공하고자 한다.The present invention proposes to solve the problems of the prior art raised above, by installing the inlet and outlet of the cooling water in the rotation fixed shaft together to increase the stability of the pump against cooling water leakage and screw type cooling efficiently as a simple structure It is intended to provide a cooling structure of a vacuum pump.

또한, 윤활유를 로터축의 회전을 이용하여 안정적이고 자동으로 공급하여 마찰 부재에 대하여 효과적인 냉각을 제공하고자 한다.In addition, to provide a stable and automatic supply of lubricating oil using the rotation of the rotor shaft to provide effective cooling for the friction member.

상기의 해결하려는 과제를 위한 본 발명에 따른 직접 냉각 진공펌프의 구성은, 진공을 생산하는 로터, 모터의 회전을 기어로 전달하여 상기 로터를 회전시키는 로터축 및 상기 로터의 회전을 지지하는 회전고정축을 포함하고, 로터는 내부가 중공으로 형성되어 냉각부가 형성되고 냉각수 주입관이 삽입 설치되어 있고, 냉각수를 주입하는 주입관과 열교환된 냉각수를 배출하는 배출관이 상기 회전고정축 상부에 함께 고정 형성되어 있고, 회전고정축의 외주면은 로터에 삽입한 베어링의 내륜에 의하여 로터의 회전을 지지하는 것을 특징으로 한다.The configuration of the direct cooling vacuum pump according to the present invention for solving the above problems, a rotor for producing a vacuum, a rotor shaft for rotating the rotor by transmitting the rotation of the motor to the gear and a rotation fixing to support the rotation of the rotor It includes a shaft, the rotor is formed inside the hollow to form a cooling unit and the cooling water injection tube is inserted, the injection pipe for injecting the cooling water and the discharge pipe for discharging the heat exchanged cooling water is fixed to the upper part of the rotating fixed shaft The outer peripheral surface of the rotation fixed shaft is characterized in that for supporting the rotation of the rotor by the inner ring of the bearing inserted into the rotor.

본 발명의 일 실시예로서, 냉각수 주입관과 배출관은 로터 하우징 외부의 상부에서 동일 선상에 형성되고, 회전고정축은 로터 하우징에 고정 설치되는 것을 특징으로 한다. In one embodiment of the present invention, the coolant injection pipe and the discharge pipe is formed on the same line in the upper portion of the rotor housing, characterized in that the rotation fixed shaft is fixed to the rotor housing.

본 발명의 일 실시예로서, 로터 하우징에 냉각수를 순환시켜 냉각하기 위한 하우징 냉각 재킷과 로터와 로터축 사이의 연결부에 냉각수를 순환시킬 수 있는 중간부 냉각 재킷을 더 포함하는 것을 특징으로 한다.As an embodiment of the present invention, the rotor cooling housing further comprises a cooling jacket for circulating the cooling water and the intermediate cooling jacket for circulating the cooling water in the connection portion between the rotor and the rotor shaft.

본 발명의 일 실시예로서, 로터축 하단부의 내부 요입(凹入)부에 암나사를 형성하고 고정핀에 끼워 조립한 구조로서, 상기 로터축이 회전하면 로터축 하단부의 나사선을 따라 윤활유 통의 윤활유가 유입 상승하고, 나사선과 연통하여 로터축의 내부에 형성된 윤활유 통로를 거쳐 윤활유 스프레이를 통하여 윤활유를 공급하면, 로터축 외주면을 따라 윤활유가 흘러 내려가면서 베어링 및 로터축기어 등에 윤활유를 공급하여 마찰열을 냉각시키고 마모를 방지하는 윤활유 공급장치를 더 포함한다.According to one embodiment of the present invention, a female screw is formed in an internal concave portion of the lower end of the rotor shaft and is fitted into a fixing pin. When the rotor shaft rotates, the lubricant of the lubricating oil cylinder is along the screw thread of the lower end of the rotor shaft. Flows up and communicates with the screw thread to supply lubricating oil through the lubricating oil passage through the lubricating oil passage formed inside the rotor shaft. And a lubricating oil supply device for preventing wear.

본 발명에 따른 직접 냉각 진공펌프의 냉각구조는 회전고정축(130)에 냉각수 주입관(131)과 냉각수 배출관(132)이 함께 고정 설치되어 있어, 회전부를 따라 냉각수가 배출되는 종래의 기술과는 달리, 냉각수가 회전하는 베어링 등의 부품으로 누수되지 않아 안정적으로 운전이 가능하며, 배출관으로 직접 배출되기 때문에 배출을 위한 물통이 필요 없어 냉각 효율이 우수하면서 펌프의 외형 크기를 줄여 소형화할 수 있다.The cooling structure of the direct cooling vacuum pump according to the present invention has a cooling water injection pipe 131 and the cooling water discharge pipe 132 is fixedly installed together on the rotation fixed shaft 130, and the conventional technology that the cooling water is discharged along the rotating portion In contrast, the cooling water is not leaked by parts such as rotating bearings, so that it can be stably operated, and since it is directly discharged to the discharge pipe, there is no need for a bucket for discharge, so the cooling efficiency is excellent, and the size of the pump can be reduced and miniaturized.

또한, 본 발명에 따른 직접 냉각 진공펌프는 로터(110)가 베어링(141)에 의해 내측의 회전고정축(130)에 지지되어 회전되므로 구조가 간단하여 제작이 용이하다.In addition, the direct cooling vacuum pump according to the present invention is easy to manufacture because the rotor 110 is supported by the rotating fixed shaft 130 on the inside by the bearing 141 and is simple to rotate.

또한, 직접 냉각 진공펌프의 윤활유 공급장치는 직접 윤활유를 공급하기 어려운 부분에 로터축의 회전력을 이용하여 자동으로 공급함으로써 진공펌프의 내구수명이 연장되며 안정적으로 펌프를 유지 관리할 수 있다. In addition, the lubricating oil supply device of the direct cooling vacuum pump is automatically supplied to the parts that are difficult to supply the lubricating oil by using the rotational force of the rotor shaft, thereby extending the service life of the vacuum pump and stably maintaining the pump.

도 1은 종래의 기술에 따른 직접 냉각 진공펌프의 단면도이다.
도 2는 종래의 기술에 따른 직접 냉각 진공펌프의 단면도이다.
도 3은 본 발명의 일실시 예에 따른 직접 냉각 진공펌프의 단면도이다.
도 4는 도3 의 냉각구조를 확대 도시한 단면도이다.
도 5는 도 3의 윤활유 공급장치를 확대 도시한 단면도이다.1 is a cross-sectional view of a direct cooling vacuum pump according to the prior art.
2 is a cross-sectional view of a direct cooling vacuum pump according to the prior art.
3 is a cross-sectional view of a direct cooling vacuum pump according to an embodiment of the present invention.
4 is an enlarged cross-sectional view of the cooling structure of FIG. 3.
5 is an enlarged cross-sectional view of the lubricant supply device of FIG. 3.

이하, 본 발명에 따른 직접 냉각 스크루식 진공펌프의 바람직한 실시예에 대하여 도면을 참조하여 설명한다. 예시된 도면은 발명의 내용을 명확하게 하기 위하여 확대 또는 축소 도시하였고, 동일한 기능을 하는 구성에 대하여 동일한 도면부호를 사용하였고, 비본질적인 구성들은 생략하여 도시하였으므로 도면에 한정하여 해석하여서는 아니 된다. Hereinafter, a preferred embodiment of a direct cooling screw type vacuum pump according to the present invention will be described with reference to the drawings. The illustrated drawings are enlarged or reduced in order to clarify the contents of the present invention, and the same reference numerals are used for components having the same function, and non-essential components are omitted and should not be construed as limited to the drawings.

도 3은 본 발명에 따른 직접 냉각 스크루식 진공펌프의 단면도를 보여주는 것으로서, 진공을 생산하는 한 쌍의 로터(110), 모터의 회전을 기어로 연결하여 로터(110)를 회전시키는 로터축(120) 및 로터(110)의 회전을 지지하는 회전고정축(130)로 구성되어 있다. 로터(110)는 내부가 중공으로 형성되어 냉각부가 형성되고 냉각수 주입관(131)이 삽입 설치되어 있고, 회전고정축(130)의 상부에는 냉각수를 주입하는 주입관(131)과 순환된 냉각수를 배출하는 배출관(132)이 같이 고정 형성되어 있으며, 회전고정축(130)의 외주면은 로터(110)에 삽입한 베어링(141)의 내륜에 의하여 로터(110)의 회전을 지지한다. 윤활유와 냉각수의 누출을 방지하기 위하여 베어링(141)의 상하에는 실(142) 부재가 형성된다.3 is a cross-sectional view of a direct cooling screw type vacuum pump according to the present invention, a pair of rotors 110 for producing a vacuum, the rotor shaft 120 to rotate the rotor 110 by connecting the rotation of the motor with gears ) And a rotation fixing shaft 130 supporting the rotation of the rotor 110. The rotor 110 is formed in a hollow to form a cooling unit, and a cooling water injection tube 131 is inserted and installed in the upper portion of the rotation fixed shaft 130. Discharge pipe 132 is discharged is formed in the same, the outer circumferential surface of the rotation fixing shaft 130 supports the rotation of the rotor 110 by the inner ring of the bearing 141 inserted into the rotor 110. Seal 142 members are formed above and below the bearing 141 to prevent leakage of lubricant and cooling water.

진공펌프의 구동은 회전력을 발생시키는 모터에 의하여 모터기어(151)가 회전하여 구동기어(152)에 전달하게 된다. 모터 회전력은 구동축 연결기어(152)에 치합된 피동기어인 로터축 기어(153)가 회전하면서 로터축(120)에 전달하고 로터축(120)에 연결된 로터(110)가 회전하여 인입구(미도시)로부터 기체를 압축하여 배출구(미도시)로 내보내어 진공을 만든다.In the driving of the vacuum pump, the motor gear 151 is rotated by the motor generating the rotational force and transmitted to the driving gear 152. The motor rotational force is transmitted to the rotor shaft 120 while the rotor shaft gear 153, which is a driven gear engaged with the drive shaft connecting gear 152, is rotated, and the rotor 110 connected to the rotor shaft 120 rotates so that the inlet (not shown) is rotated. The gas is compressed into a discharge port (not shown) to create a vacuum.

진공펌프의 운전중에 로터(110)에 발생한 압축열 및 마찰열은 로터 내부에 냉각부(133)를 설치하여 냉각수를 순환시켜 냉각시키는 것에 더하여 로터 하우징(170)에 냉각 재킷(172)을 설치하여 냉각수를 순환시켜 냉각 효율을 높인다. 또한, 로터 내부의 냉각부(133)와 하우징(170)내의 냉각 재킷(172)의 냉각 범위가 미치지 못하는 로터(110)와 로터축(120) 사이의 중간 연결부에 냉각수를 수용하는 중간부 냉각 재킷(171)을 형성하고 냉각수를 순환 공급시켜 냉각할 수 있다. 중간부 냉각 재킷(171)은 주물로 형성할 수도 있고, 케이싱을 별도로 제작하여 조립할 수 있다.Compression heat and frictional heat generated in the rotor 110 during the operation of the vacuum pump is provided with a cooling unit 133 inside the rotor to circulate and cool the cooling water, and install a cooling jacket 172 in the rotor housing 170 to cool the water. Circulation to increase the cooling efficiency. In addition, an intermediate cooling jacket for receiving cooling water at an intermediate connection between the rotor 110 and the rotor shaft 120 that the cooling range of the cooling unit 133 in the rotor and the cooling jacket 172 in the housing 170 is not within the cooling range. 171 may be formed, and cooling water may be circulated and cooled. The intermediate cooling jacket 171 may be formed of a casting, or the casing may be manufactured and assembled separately.

도 4는 도 3의 A부분(냉각구조)을 확대 도시한 것으로서, 본 발명의 특징적 구성을 보여준다. 본 발명의 냉각구조는 회전고정축(130)에 냉각수 주입관(131)과 냉각수 배출관(132)이 함께 고정 설치되어 있어, 회전부를 따라 냉각수가 배출되는 종래의 기술과는 달리, 본 발명은 냉각수 주입관(131)과 배출관(132)은 로터 하우징(170) 외부의 상부에서 동일 선상에 형성되고, 회전고정축(130)은 로터 하우징(170)에 고정 설치되기 때문에 냉각수가 회전하는 베어링(141) 등의 부품으로 누수되지 않아 안정적으로 운전이 가능하며, 배출관(132)으로 직접 배출되기 때문에 배출을 위한 물통이 필요 없어 펌프의 외형 크기를 줄여 소형화할 수 있다.FIG. 4 is an enlarged view of a portion A (cooling structure) of FIG. 3 and shows a characteristic configuration of the present invention. In the cooling structure of the present invention, the cooling water injection pipe 131 and the cooling water discharge pipe 132 are fixedly installed together on the rotation fixed shaft 130, unlike the conventional technology in which the cooling water is discharged along the rotating part. The injection pipe 131 and the discharge pipe 132 are formed in the same line on the outside of the rotor housing 170, and the rotating fixed shaft 130 is fixed to the rotor housing 170, so that the cooling water rotates the bearing 141 It is possible to operate stably because it is not leaked by parts such as), and since it is directly discharged to the discharge pipe 132, it does not need a bucket for discharge, thereby reducing the size of the pump and miniaturizing it.

본 발명의 또 다른 특징은 로터(110)가 베어링(141)에 의해 내측의 회전고정축(130)에 지지되어 회전되므로 구조가 간단한 것이 특징이다. 종래의 펌프의 회전축은 베어링에 의해 외측의 하우징에 지지연결되어 구조가 복잡하다.Still another feature of the present invention is that the rotor 110 is supported by the rotating fixed shaft 130 on the inside by the bearing 141, so the structure is simple. The rotating shaft of the conventional pump is supported by the bearing to the outer housing is complicated in structure.

본 발명에 따른 또 다른 냉각 방식은 윤활유를 로터축(120)의 회전을 이용하여 자동으로 공급하여 베어링, 기어, 실(seal)과 같은 마찰 부재를 효과적으로 냉각한다. 마찰 부재는 하우징 내부에 설치되어 있기 때문에 직접적으로 윤활유를 공급하기가 매우 어렵다.Another cooling method according to the present invention is to automatically supply lubricating oil using the rotation of the rotor shaft 120 to effectively cool friction members such as bearings, gears, and seals. Since the friction member is installed inside the housing, it is very difficult to supply lubricant directly.

도 5는 도 3의 B부분(윤활유 공급장치)을 확대 도시한 것으로서, 로터축(120) 하단부의 내부 요입(凹入)부에 암나사(163)를 형성하고 고정핀(162)에 끼워 조립하여 로터축(120)을 고정한 구조로서, 상기 로터축(120)이 회전하면 로터축 하단부의 나사선(163)을 따라 윤활유 통(161)의 윤활유가 유입 상승하고, 나사선(163)과 연통하여 로터축(120)의 내부에 형성된 윤활유통로(164)를 거쳐 윤활유 스프레이(165)를 통하여 윤활유를 공급하면 로터축 외주면을 따라 윤활유가 흘러 내려가면서 베어링(142)과 로터축기어(153) 등에 윤활유를 공급하여 마찰 부재의 마찰열을 냉각시키고 마모를 감소시킨다. 로터축(120) 하단부에 불순물 제거망(165)를 추가 설치하여 불순물 유입을 막을 수 있다.FIG. 5 is an enlarged view of a portion B (lubricating oil supply device) of FIG. 3, wherein an internal thread 163 is formed at an inner concave portion of the lower end of the rotor shaft 120, and then assembled to the fixing pin 162. The rotor shaft 120 is fixed in structure. When the rotor shaft 120 rotates, the lubricating oil of the lubricating oil barrel 161 flows in and rises along the threaded line 163 of the lower end of the rotor shaft, and communicates with the screwed line 163 to the rotor shaft. When lubricating oil is supplied through the lubricating oil passage 164 formed inside the 120 through the lubricating oil spray 165, the lubricating oil flows along the outer circumferential surface of the rotor shaft to supply lubricating oil to the bearing 142 and the rotor shaft gear 153. Thereby cooling the frictional heat of the friction member and reducing wear. An impurity removal net 165 may be further installed at the lower end of the rotor shaft 120 to prevent the inflow of impurities.

본 발명에 따른 윤활유 공급장치는 직접 윤활유를 공급하기 어려운 부분에 회전력을 이용하여 자동으로 공급함으로써 안정적으로 펌프를 유지 관리할 수 있다. The lubricating oil supply device according to the present invention can maintain the pump in a stable manner by automatically supplying a rotational force to a portion where it is difficult to directly supply lubricating oil.

110: 로터 120: 로터축
130: 회전고정축 131: 냉각수 주입관
132: 냉각수 배출관 141: 베어링
142: 베어링 실(seal) 151: 모터축 기어
152: 구동축 연결기어 153: 로터축 기어
161: 윤활유 통 162: 고정핀
163: 암나사 (나사선) 165: 불순물 제거망
170: 로터 하우징 171: 하우징 냉각 재킷
172: 중간부 냉각 재킷110: rotor 120: rotor shaft
130: fixed rotation shaft 131: coolant injection pipe
132: coolant discharge pipe 141: bearing
142: bearing seal 151: motor shaft gear
152: drive shaft connecting gear 153: rotor shaft gear
161: lube sump 162: fixing pin
163: female thread (thread) 165: impurity removal network
170: rotor housing 171: housing cooling jacket
172: middle cooling jacket

Claims (3)

진공을 생산하는 로터, 모터의 회전을 기어로 전달받아 상기 로터를 회전시키는 로터축 및 상기 로터의 회전을 지지하는 회전고정축을 포함하는 진공펌프에 있어서,
상기 로터는 내부가 중공(中空)으로 형성되어 냉각부가 형성되고 냉각수 주입관이 삽입 설치되어 있고,
냉각수를 주입하는 주입관과 열교환된 냉각수를 배출하는 배출관이 상기 회전고정축 상부에 함께 고정 형성되어 있고,
회전고정축의 외주면은 로터에 삽입한 베어링의 내륜에 의하여 로터의 회전을 지지하는 것을 특징으로 하는 직접 냉각 진공펌프In the vacuum pump including a rotor for producing a vacuum, a rotor shaft for receiving the rotation of the motor to the gear to rotate the rotor and a rotation fixed shaft for supporting the rotation of the rotor,
The rotor is formed inside the hollow (hollow) to form a cooling unit is inserted into the cooling water injection tube,
An injection pipe for injecting coolant and a discharge pipe for discharging the heat-exchanging coolant are fixedly formed on the upper part of the rotary fixed shaft,
Direct cooling vacuum pump, characterized in that the outer peripheral surface of the fixed shaft supports the rotation of the rotor by the inner ring of the bearing inserted into the rotor 제1항에 있어서,
로터 하우징에 냉각수를 순환시켜 냉각하기 위한 하우징 냉각 재킷과 상기 로터와 상기 로터축 사이의 연결부에 냉각수를 순환시킬 수 있는 중간부 냉각 재킷을 더 포함하는 것을 특징으로 하는 직접 냉각 진공펌프The method of claim 1,
Direct cooling vacuum pump further comprises a housing cooling jacket for circulating the cooling water in the rotor housing and an intermediate cooling jacket for circulating the cooling water in the connection portion between the rotor and the rotor shaft. 제1항에 있어서,
상기 로터축 하단부의 내부 요입(凹入)부에 암나사를 형성하고 고정핀에 끼워 조립한 구조로서, 상기 로터축이 회전하면 로터축 하단부의 나사선을 따라 윤활유 통의 윤활유가 유입 상승하고, 나사선과 연통하여 로터축의 내부에 형성된 윤활유 통로를 거쳐 윤활유 스프레이를 통하여 윤활유를 공급하면, 로터축 외주면을 따라 윤활유가 흘러 내려가면서 베어링 및 로터축 기어에 윤활유를 공급하여 마찰열을 냉각시키고 마모를 방지하는 윤활유 공급장치를 더 포함하는 직접 냉각 진공펌프The method of claim 1,
A female screw is formed in an internal concave portion of the lower end of the rotor shaft and fitted to a fixing pin. When the rotor shaft rotates, the lubricant in the lubricating oil cylinder flows up and goes along the screw thread of the lower rotor shaft. When lubricating oil is supplied through the lubricating oil spray through the lubricating oil passage formed in the rotor shaft, the lubricating oil flows along the outer circumferential surface of the rotor shaft, supplying lubricating oil to the bearing and the rotor shaft gear to cool the frictional heat and prevent wear. Direct cooling vacuum pump further comprising a device
KR1020110059472A 2011-06-20 2011-06-20 Screw type vacuum pump having direct cooling device KR101064152B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020110059472A KR101064152B1 (en) 2011-06-20 2011-06-20 Screw type vacuum pump having direct cooling device
PCT/KR2012/004141 WO2012176991A2 (en) 2011-06-20 2012-05-24 Screw-type vacuum pump having a direct cooling device
CN201280030392.5A CN103688059B (en) 2011-06-20 2012-05-24 Direct cooling spiral formula vacuum pump

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JP6747572B2 (en) * 2017-02-20 2020-08-26 ダイキン工業株式会社 Screw compressor
CN106762668B (en) * 2017-03-07 2018-06-22 北京艾岗科技有限公司 A kind of vertical type vacuum pump self-circulation lubricating cooling system

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WO2012176991A2 (en) 2012-12-27
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WO2012176991A3 (en) 2013-02-14

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