KR101061946B1 - 기판 세정 방법, 기판 세정 장치 및 프로그램 기록 매체 - Google Patents

기판 세정 방법, 기판 세정 장치 및 프로그램 기록 매체 Download PDF

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Publication number
KR101061946B1
KR101061946B1 KR1020070030913A KR20070030913A KR101061946B1 KR 101061946 B1 KR101061946 B1 KR 101061946B1 KR 1020070030913 A KR1020070030913 A KR 1020070030913A KR 20070030913 A KR20070030913 A KR 20070030913A KR 101061946 B1 KR101061946 B1 KR 101061946B1
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KR
South Korea
Prior art keywords
cleaning
cleaning liquid
tank
cleaning tank
supply
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KR1020070030913A
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English (en)
Korean (ko)
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KR20070101768A (ko
Inventor
츠카사 와타나베
나오키 신도
Original Assignee
도쿄엘렉트론가부시키가이샤
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Publication of KR20070101768A publication Critical patent/KR20070101768A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0416—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Cleaning By Liquid Or Steam (AREA)
KR1020070030913A 2006-04-13 2007-03-29 기판 세정 방법, 기판 세정 장치 및 프로그램 기록 매체 Active KR101061946B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00110957 2006-04-13
JP2006110957A JP4890919B2 (ja) 2006-04-13 2006-04-13 基板洗浄方法、基板洗浄装置、プログラム、および記録媒体

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020110020020A Division KR101062255B1 (ko) 2006-04-13 2011-03-07 기판 세정 방법, 기판 세정 장치 및 프로그램 기록 매체

Publications (2)

Publication Number Publication Date
KR20070101768A KR20070101768A (ko) 2007-10-17
KR101061946B1 true KR101061946B1 (ko) 2011-09-05

Family

ID=38230031

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020070030913A Active KR101061946B1 (ko) 2006-04-13 2007-03-29 기판 세정 방법, 기판 세정 장치 및 프로그램 기록 매체
KR1020110020020A Expired - Fee Related KR101062255B1 (ko) 2006-04-13 2011-03-07 기판 세정 방법, 기판 세정 장치 및 프로그램 기록 매체

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020110020020A Expired - Fee Related KR101062255B1 (ko) 2006-04-13 2011-03-07 기판 세정 방법, 기판 세정 장치 및 프로그램 기록 매체

Country Status (6)

Country Link
US (1) US8449684B2 (https=)
EP (1) EP1848023B1 (https=)
JP (1) JP4890919B2 (https=)
KR (2) KR101061946B1 (https=)
DE (1) DE602007000223D1 (https=)
TW (1) TW200746284A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103567169A (zh) * 2012-08-07 2014-02-12 东京毅力科创株式会社 基板清洗装置、基板清洗系统以及基板清洗方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100910190B1 (ko) * 2007-12-17 2009-07-30 주식회사 실트론 웨이퍼 세정장치
KR20100050403A (ko) * 2008-11-04 2010-05-13 주식회사 실트론 대상물의 습식 처리 장치 및 방법과 이에 사용되는 유체 확산판
TW201026849A (en) * 2009-01-09 2010-07-16 Univ Nat Taiwan Cell pattern and method producing thereof
CN102218413B (zh) * 2011-05-18 2013-08-21 益阳晶益电子有限公司 石英晶片的清洗方法及清洗装置
CN103721973B (zh) * 2013-12-31 2015-09-30 长沙理工大学 一种恒温数控超声波清洗的方法及装置
JP6914050B2 (ja) * 2017-02-15 2021-08-04 東京エレクトロン株式会社 基板処理装置
CN109604253A (zh) * 2018-11-12 2019-04-12 湖南图强科技开发有限公司 一种医用手术设备大批量清洗装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004193329A (ja) * 2002-12-11 2004-07-08 Dainippon Screen Mfg Co Ltd 基板処理装置

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JPH04199714A (ja) * 1990-11-29 1992-07-20 Kawasaki Steel Corp 超音波洗浄方法及びその装置
US5427622A (en) * 1993-02-12 1995-06-27 International Business Machines Corporation Method for uniform cleaning of wafers using megasonic energy
JP3259412B2 (ja) * 1993-02-22 2002-02-25 ソニー株式会社 ウエハ洗浄方法
US5656097A (en) * 1993-10-20 1997-08-12 Verteq, Inc. Semiconductor wafer cleaning system
JP3473063B2 (ja) * 1993-11-15 2003-12-02 松下電器産業株式会社 シリコン基板の洗浄方法
US5505785A (en) * 1994-07-18 1996-04-09 Ferrell; Gary W. Method and apparatus for cleaning integrated circuit wafers
JPH0839025A (ja) * 1994-07-28 1996-02-13 Olympus Optical Co Ltd 洗浄方法
JPH10109072A (ja) * 1996-10-04 1998-04-28 Puretetsuku:Kk 高周波洗浄装置
JP3331168B2 (ja) * 1997-12-09 2002-10-07 ティーディーケイ株式会社 洗浄方法および装置
US6039055A (en) * 1998-01-08 2000-03-21 International Business Machines Corporation Wafer cleaning with dissolved gas concentration control
US6372051B1 (en) * 1998-12-04 2002-04-16 Texas Instruments Incorporated Positive flow, positive displacement rinse tank
JP3658257B2 (ja) * 1998-12-24 2005-06-08 キヤノン株式会社 洗浄方法及び洗浄装置及び電子写真感光体及び電子写真感光体の製造方法
JP2002093765A (ja) * 2000-09-20 2002-03-29 Kaijo Corp 基板洗浄方法および基板洗浄装置
JP2003037093A (ja) * 2001-07-06 2003-02-07 Pacific Internatl Stg Inc 超音波振動装置及びそれを備えた超音波洗浄装置
US7111632B2 (en) * 2003-09-22 2006-09-26 Seagate Technology Llc Ultrasonic cleaning device for removing undesirable particles from an object
US7111517B2 (en) * 2004-07-29 2006-09-26 Agere Systems, Inc. Apparatus and method for in-situ measuring of vibrational energy in a process bath of a vibrational cleaning system
JP4999338B2 (ja) * 2006-03-15 2012-08-15 東京エレクトロン株式会社 基板洗浄方法、基板洗浄装置、プログラム、および記録媒体

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004193329A (ja) * 2002-12-11 2004-07-08 Dainippon Screen Mfg Co Ltd 基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103567169A (zh) * 2012-08-07 2014-02-12 东京毅力科创株式会社 基板清洗装置、基板清洗系统以及基板清洗方法
CN103567169B (zh) * 2012-08-07 2016-12-28 东京毅力科创株式会社 基板清洗装置、基板清洗系统以及基板清洗方法

Also Published As

Publication number Publication date
US8449684B2 (en) 2013-05-28
TW200746284A (en) 2007-12-16
US20070240736A1 (en) 2007-10-18
KR20070101768A (ko) 2007-10-17
EP1848023A1 (en) 2007-10-24
JP4890919B2 (ja) 2012-03-07
KR20110038000A (ko) 2011-04-13
JP2007287790A (ja) 2007-11-01
EP1848023B1 (en) 2008-11-05
DE602007000223D1 (de) 2008-12-18
TWI358761B (https=) 2012-02-21
KR101062255B1 (ko) 2011-09-06

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