KR101011841B1 - 트리아진 화합물을 포함하는 반사 방지 조성물 - Google Patents

트리아진 화합물을 포함하는 반사 방지 조성물 Download PDF

Info

Publication number
KR101011841B1
KR101011841B1 KR1020057006597A KR20057006597A KR101011841B1 KR 101011841 B1 KR101011841 B1 KR 101011841B1 KR 1020057006597 A KR1020057006597 A KR 1020057006597A KR 20057006597 A KR20057006597 A KR 20057006597A KR 101011841 B1 KR101011841 B1 KR 101011841B1
Authority
KR
South Korea
Prior art keywords
antireflective coating
coating composition
resin
compound
acid
Prior art date
Application number
KR1020057006597A
Other languages
English (en)
Other versions
KR20050074962A (ko
Inventor
토모유키 에노모토
케이스케 나카야마
라마 풀리가다
Original Assignee
브레우어 사이언스 인코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US10/271,646 priority Critical
Priority to US10/271,646 priority patent/US7038328B2/en
Application filed by 브레우어 사이언스 인코포레이션 filed Critical 브레우어 사이언스 인코포레이션
Publication of KR20050074962A publication Critical patent/KR20050074962A/ko
Application granted granted Critical
Publication of KR101011841B1 publication Critical patent/KR101011841B1/ko

Links