KR101004828B1 - ＸＹθ 이동 스테이지 - Google Patents

ＸＹθ 이동 스테이지 Download PDF

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Publication number
KR101004828B1
KR101004828B1 KR1020070004851A KR20070004851A KR101004828B1 KR 101004828 B1 KR101004828 B1 KR 101004828B1 KR 1020070004851 A KR1020070004851 A KR 1020070004851A KR 20070004851 A KR20070004851 A KR 20070004851A KR 101004828 B1 KR101004828 B1 KR 101004828B1
Authority
KR
South Korea
Prior art keywords
stage
plate
supporting
air
moving
Prior art date
Application number
KR1020070004851A
Other languages
English (en)
Korean (ko)
Other versions
KR20070081419A (ko
Inventor
요네타 다나카
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20070081419A publication Critical patent/KR20070081419A/ko
Application granted granted Critical
Publication of KR101004828B1 publication Critical patent/KR101004828B1/ko

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • H02K5/167—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using sliding-contact or spherical cap bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • H02K5/173—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using bearings with rolling contact, e.g. ball bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/085—Structural association with bearings radially supporting the rotary shaft at only one end of the rotor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
  • Machine Tool Units (AREA)
KR1020070004851A 2006-02-10 2007-01-16 ＸＹθ 이동 스테이지 KR101004828B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00034071 2006-02-10
JP2006034071A JP4702083B2 (ja) 2006-02-10 2006-02-10 ＸＹθ移動ステージ

Publications (2)

Publication Number Publication Date
KR20070081419A KR20070081419A (ko) 2007-08-16
KR101004828B1 true KR101004828B1 (ko) 2010-12-28

Family

ID=38492597

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070004851A KR101004828B1 (ko) 2006-02-10 2007-01-16 ＸＹθ 이동 스테이지

Country Status (4)

Country Link
JP (1) JP4702083B2 (ja)
KR (1) KR101004828B1 (ja)
CN (1) CN101017331B (ja)
TW (1) TW200730293A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230033384A (ko) * 2021-09-01 2023-03-08 심재만 그립력이 향상된 그리퍼 및 경량화 구조를 가지는 링타입 자동 공구 교환장치

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4853836B2 (ja) * 2007-09-19 2012-01-11 株式会社安川電機 精密微動位置決め装置およびそれを備えた微動位置決めステージ
KR101862234B1 (ko) * 2009-08-20 2018-05-29 가부시키가이샤 니콘 물체 처리 장치, 노광 장치와 노광 방법, 및 디바이스 제조 방법
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
KR101017626B1 (ko) * 2009-08-27 2011-02-28 (주)유비프리시젼 Ｌｃｄ검사 장비용 얼라인먼트 스테이지
CN106075879B (zh) * 2016-07-12 2019-04-12 石家庄学院 一种残疾人下围棋装置及辅助残疾人下围棋方法
CN107885037B (zh) 2016-09-30 2020-01-24 上海微电子装备（集团）股份有限公司 一种工件台移入移出装置
CN109482976B (zh) * 2018-10-29 2020-05-08 武汉华电工程装备有限公司 一种金属板材的切割加工系统
CN109500624B (zh) * 2018-10-29 2020-01-10 武汉华电工程装备有限公司 一种h型长梁上用板的加工工艺
CN111761375A (zh) * 2020-05-27 2020-10-13 刘斌兴 一种模型制造专用可调式分切设备
CN113419405B (zh) * 2021-04-28 2022-06-03 厦门理工学院 一种卷对卷铜箔精密ldi曝光机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071860A (ja) 2000-08-28 2002-03-12 Sumitomo Heavy Ind Ltd ステージ装置
JP2003028973A (ja) 2001-07-13 2003-01-29 Sumitomo Heavy Ind Ltd ステージ装置
JP2006020478A (ja) 2004-07-05 2006-01-19 Neomax Co Ltd ステージ装置

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JPS5254108A (en) * 1975-10-30 1977-05-02 Nippon Telegr & Teleph Corp <Ntt> Surface pulse motor
US4706007A (en) * 1985-06-25 1987-11-10 Kabushiki Kaisha Yaskawa Denki Seisakusho Surface pulse motor
JPS62100161A (ja) * 1985-10-23 1987-05-09 Shin Etsu Chem Co Ltd 平面モ−タ
JPH0348557Y2 (ja) * 1986-06-13 1991-10-16
JPH03112393A (ja) * 1989-09-21 1991-05-13 Kao Corp 搬送装置
JP2691672B2 (ja) * 1992-12-29 1997-12-17 株式会社三協精機製作所 直進電機
JPH0731126A (ja) * 1993-07-09 1995-01-31 Yaskawa Electric Corp 平面ステップモータの脱調復帰装置と方法
JPH10256356A (ja) * 1997-03-17 1998-09-25 Nikon Corp 位置決め装置及び該装置を備えた露光装置
WO1999004481A1 (fr) * 1997-07-18 1999-01-28 Nikon Corporation Unite d'excitation, moteur lineaire ou plan utilisant l'unite, dispositif a etage utilisant le moteur et dispositif d'alignement utilisant le dispositif
JPH11195578A (ja) * 1997-12-26 1999-07-21 Nikon Corp 定盤支持装置および露光装置
JP2000137055A (ja) * 1998-10-30 2000-05-16 Shinano Electronics:Kk Ｉｃハンドラ
JP2002112526A (ja) * 2000-06-26 2002-04-12 Nikon Corp 平面モータ、ステージ位置決めシステム、露光装置
JP2003023764A (ja) * 2001-07-06 2003-01-24 Canon Inc リニアパルスモータ、ステージ装置及び露光装置
JP2003229350A (ja) * 2002-02-01 2003-08-15 Nikon Corp ステージ装置及び露光装置
JP4122922B2 (ja) * 2002-10-18 2008-07-23 ウシオ電機株式会社 平面ステージ装置
EP1510867A1 (en) * 2003-08-29 2005-03-02 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2006014391A (ja) * 2004-06-22 2006-01-12 Yaskawa Electric Corp リニアモータ電機子、リニアモータおよび平面モータ
US7148590B1 (en) * 2004-07-23 2006-12-12 Lampson Clark E Polyphase sawyer motor forcer
JP4413826B2 (ja) * 2005-07-13 2010-02-10 住友重機械工業株式会社 平面ステージ装置及びその制御方法
JP4899469B2 (ja) * 2005-12-22 2012-03-21 ウシオ電機株式会社 平面ステージ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071860A (ja) 2000-08-28 2002-03-12 Sumitomo Heavy Ind Ltd ステージ装置
JP2003028973A (ja) 2001-07-13 2003-01-29 Sumitomo Heavy Ind Ltd ステージ装置
JP2006020478A (ja) 2004-07-05 2006-01-19 Neomax Co Ltd ステージ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230033384A (ko) * 2021-09-01 2023-03-08 심재만 그립력이 향상된 그리퍼 및 경량화 구조를 가지는 링타입 자동 공구 교환장치
KR102549372B1 (ko) 2021-09-01 2023-06-29 심재만 그립력이 향상된 그리퍼 및 경량화 구조를 가지는 링타입 자동 공구 교환장치

Also Published As

Publication number Publication date
CN101017331B (zh) 2010-09-22
JP2007214449A (ja) 2007-08-23
KR20070081419A (ko) 2007-08-16
TW200730293A (en) 2007-08-16
TWI375603B (ja) 2012-11-01
JP4702083B2 (ja) 2011-06-15
CN101017331A (zh) 2007-08-15

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