KR100998127B1 - 불소 함유 규소 화합물, 실리콘 수지, 그를 이용한레지스트 조성물 및 패턴 형성 방법 - Google Patents
불소 함유 규소 화합물, 실리콘 수지, 그를 이용한레지스트 조성물 및 패턴 형성 방법 Download PDFInfo
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- KR100998127B1 KR100998127B1 KR1020070024369A KR20070024369A KR100998127B1 KR 100998127 B1 KR100998127 B1 KR 100998127B1 KR 1020070024369 A KR1020070024369 A KR 1020070024369A KR 20070024369 A KR20070024369 A KR 20070024369A KR 100998127 B1 KR100998127 B1 KR 100998127B1
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- WMOVHXAZOJBABW-UHFFFAOYSA-N tert-butyl acetate Chemical compound CC(=O)OC(C)(C)C WMOVHXAZOJBABW-UHFFFAOYSA-N 0.000 description 1
- CROWJIMGVQLMPG-UHFFFAOYSA-N tert-butyl benzimidazole-1-carboxylate Chemical compound C1=CC=C2N(C(=O)OC(C)(C)C)C=NC2=C1 CROWJIMGVQLMPG-UHFFFAOYSA-N 0.000 description 1
- WIURVMHVEPTKHB-UHFFFAOYSA-N tert-butyl n,n-dicyclohexylcarbamate Chemical compound C1CCCCC1N(C(=O)OC(C)(C)C)C1CCCCC1 WIURVMHVEPTKHB-UHFFFAOYSA-N 0.000 description 1
- JAELLLITIZHOGQ-UHFFFAOYSA-N tert-butyl propanoate Chemical compound CCC(=O)OC(C)(C)C JAELLLITIZHOGQ-UHFFFAOYSA-N 0.000 description 1
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 1
- 125000005931 tert-butyloxycarbonyl group Chemical group [H]C([H])([H])C(OC(*)=O)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000003510 tertiary aliphatic amines Chemical class 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- YBDQLHBVNXARAU-ZCFIWIBFSA-N tetrahydro-2-methyl-2H-pyran Natural products C[C@@H]1CCCCO1 YBDQLHBVNXARAU-ZCFIWIBFSA-N 0.000 description 1
- 125000004192 tetrahydrofuran-2-yl group Chemical group [H]C1([H])OC([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000004187 tetrahydropyran-2-yl group Chemical group [H]C1([H])OC([H])(*)C([H])([H])C([H])([H])C1([H])[H] 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 150000007979 thiazole derivatives Chemical class 0.000 description 1
- RAOIDOHSFRTOEL-UHFFFAOYSA-O thiolan-1-ium Chemical compound C1CC[SH+]C1 RAOIDOHSFRTOEL-UHFFFAOYSA-O 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- ABVVEAHYODGCLZ-UHFFFAOYSA-N tridecan-1-amine Chemical compound CCCCCCCCCCCCCN ABVVEAHYODGCLZ-UHFFFAOYSA-N 0.000 description 1
- SWZDQOUHBYYPJD-UHFFFAOYSA-N tridodecylamine Chemical compound CCCCCCCCCCCCN(CCCCCCCCCCCC)CCCCCCCCCCCC SWZDQOUHBYYPJD-UHFFFAOYSA-N 0.000 description 1
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
- AANIRNIRVXARSN-UHFFFAOYSA-M trifluoromethanesulfonate;trimethylsulfanium Chemical compound C[S+](C)C.[O-]S(=O)(=O)C(F)(F)F AANIRNIRVXARSN-UHFFFAOYSA-M 0.000 description 1
- 125000001889 triflyl group Chemical group FC(F)(F)S(*)(=O)=O 0.000 description 1
- RKBCYCFRFCNLTO-UHFFFAOYSA-N triisopropylamine Chemical compound CC(C)N(C(C)C)C(C)C RKBCYCFRFCNLTO-UHFFFAOYSA-N 0.000 description 1
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 238000010626 work up procedure Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
- C07F7/1804—Compounds having Si-O-C linkages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/108—Polyolefin or halogen containing
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Silicon Polymers (AREA)
Abstract
Description
Claims (6)
- 삭제
- 하기 화학식 1로 표시되는 불소 함유 규소 화합물.<화학식 1>식 중, X1, X2 및 X3은 수소 원자, 수산기, 할로겐 원자, 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상의 알콕시기, 또는 탄소수 1 내지 20의 직쇄상, 분지상, 환상 또는 다환상 골격을 갖는 1가의 유기기를 나타낸다. Y는 지환족을 포함하는 2가의 유기기를 나타낸다. R1 및 R2는 각각 독립적으로 수소 원자, 또는 탄소수 1 내지 20의 직쇄상, 분지상, 환상 또는 다환상 골격을 갖는 1가의 유기기를 나타낸다. R1과 R2는 서로 결합하여 이들이 결합하는 탄소 원자와 함께 환을 형성할 수도 있다.
- 하기 화학식 2로 표시되는 불소 함유 규소 화합물.<화학식 2>식 중, X1, X2 및 X3은 수소 원자, 수산기, 할로겐 원자, 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상의 알콕시기, 또는 탄소수 1 내지 20의 직쇄상, 분지상, 환상 또는 다환상 골격을 갖는 1가의 유기기를 나타낸다. R1 및 R2는 각각 독립적으로 수소 원자, 또는 탄소수 1 내지 20의 직쇄상, 분지상, 환상 또는 다환상 골격을 갖는 1가의 유기기를 나타낸다. R1과 R2는 서로 결합하여 이들이 결합하는 탄소 원자와 함께 환을 형성할 수도 있다. W1 및 W2는 각각 독립적으로 메틸렌기 또는 산소 원자를 나타낸다. R6은 수소 원자, 메틸기, 불소 원자 또는 트리플루오로메틸기를 나타낸다. p 및 q는 각각 독립적으로 0 또는 1을 나타낸다.
- 하기 화학식 1a 또는 2a로 표시되는 반복 단위를 갖는 것을 특징으로 하는 불소 함유 실리콘 수지.<화학식 1a><화학식 2a>식 중, X1a, X2a 및 X3a 중 1개 이상은 산소 원자를 나타내고, 나머지는 수소 원자, 수산기, 할로겐 원자, 탄소수 1 내지 20의 직쇄상, 분지상, 환상 또는 다환상 골격을 갖는 1가의 유기기, 또는 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상의 알콕시기를 나타낸다. Y는 2가의 유기기를 나타낸다. R1 및 R2는 각각 독립적으로 수소 원자, 또는 탄소수 1 내지 20의 직쇄상, 분지상, 환상 또는 다환상 골격을 갖는 1가의 유기기를 나타낸다. R1과 R2는 서로 결합하여 이들이 결합하는 탄소 원자와 함께 환을 형성할 수도 있다. W1 및 W2는 각각 독립적으로 메틸렌기 또는 산소 원자를 나타낸다. R6은 수소 원자, 메틸기, 불소 원자 또는 트리플루오로메틸기를 나타낸다. p 및 q는 각각 독립적으로 0 또는 1을 나타낸다.
- (A) 제4항에 기재된 실리콘 수지,(B) 산 발생제,(C) 유기 용제를 함유하여 이루어지는 레지스트 조성물.
- (1) 제5항에 기재된 레지스트 조성물을 기판 위에 도포하는 공정과,(2) 이어서 가열 처리한 후, 포토마스크를 통해 파장 300 ㎚ 이하의 고에너지선 또는 전자선으로 노광하는 공정과,(3) 필요에 따라 가열 처리한 후, 현상액을 이용하여 현상하는 공정을 포함하는 것을 특징으로 하는 패턴 형성 방법.
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JP2006069010A JP4687898B2 (ja) | 2006-03-14 | 2006-03-14 | 含フッ素ケイ素化合物、シリコーン樹脂、それを用いたレジスト組成物、及びパターン形成方法 |
JPJP-P-2006-00069010 | 2006-03-14 |
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JP (1) | JP4687898B2 (ko) |
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TW (1) | TWI348594B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101880798B1 (ko) * | 2015-02-06 | 2018-07-20 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 불소 함유 규소 화합물, 그의 제조 방법, 및 불소 함유 규소 수지의 제조 방법 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4626758B2 (ja) * | 2005-07-07 | 2011-02-09 | 信越化学工業株式会社 | 含フッ素環状構造を有するケイ素化合物及びシリコーン樹脂、それを用いたレジスト組成物、及びパターン形成方法 |
JP4509080B2 (ja) * | 2006-09-28 | 2010-07-21 | 信越化学工業株式会社 | シルセスキオキサン系化合物混合物及び加水分解性シラン化合物、その製造方法及びそれを用いたレジスト組成物並びにパターン形成方法及び基板の加工方法 |
US8034965B2 (en) * | 2007-11-09 | 2011-10-11 | Shin-Etsu Chemical Co., Ltd. | Norbornane skeleton structure-containing organosilicon compound and method of producing same |
TWI516527B (zh) * | 2009-12-10 | 2016-01-11 | 信越化學工業股份有限公司 | 光固化性樹脂組成物,圖案形成法和基板保護膜,以及使用該組成物之膜狀黏著劑及黏著片 |
JP5726632B2 (ja) * | 2011-05-19 | 2015-06-03 | メルクパフォーマンスマテリアルズIp合同会社 | 感光性シロキサン樹脂組成物 |
TWI567498B (zh) | 2012-04-06 | 2017-01-21 | Az電子材料盧森堡有限公司 | 負型感光性矽氧烷組成物 |
TWI567497B (zh) * | 2012-04-06 | 2017-01-21 | Az電子材料盧森堡有限公司 | 負型感光性矽氧烷組成物 |
US10634999B2 (en) * | 2014-07-24 | 2020-04-28 | Nissan Chemical Industries, Ltd. | Resin composition for forming color filter underlayer film |
JP6451599B2 (ja) * | 2015-11-10 | 2019-01-16 | 信越化学工業株式会社 | 重合性単量体、高分子化合物、レジスト材料、及びパターン形成方法 |
JP7111031B2 (ja) * | 2018-03-23 | 2022-08-02 | 信越化学工業株式会社 | 感光性樹脂組成物、感光性樹脂積層体、及びパターン形成方法 |
CN111825840B (zh) * | 2020-06-23 | 2022-04-22 | 湖北航天化学技术研究所 | 一种含巯基氟硅树脂、uv光固化超疏水防护涂料及制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004256562A (ja) * | 2003-02-24 | 2004-09-16 | Central Glass Co Ltd | 含フッ素化合物、含フッ素重合性単量体、含フッ素高分子化合物、それらを用いたレジスト材料とパターン形成方法、及び含フッ素化合物の製造方法 |
JP2005114942A (ja) * | 2003-10-07 | 2005-04-28 | Shin Etsu Chem Co Ltd | 感放射線性樹脂組成物並びにこれを用いたパターン形成方法 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3830183B2 (ja) | 1995-09-29 | 2006-10-04 | 東京応化工業株式会社 | オキシムスルホネート化合物及びレジスト用酸発生剤 |
JP3587413B2 (ja) | 1995-12-20 | 2004-11-10 | 東京応化工業株式会社 | 化学増幅型レジスト組成物及びそれに用いる酸発生剤 |
JP3798458B2 (ja) | 1996-02-02 | 2006-07-19 | 東京応化工業株式会社 | オキシムスルホネート化合物及びレジスト用酸発生剤 |
TW432257B (en) | 1997-01-31 | 2001-05-01 | Shinetsu Chemical Co | High molecular weight silicone compound, chemically amplified positive resist composition and patterning method |
JP3505990B2 (ja) | 1997-01-31 | 2004-03-15 | 信越化学工業株式会社 | 高分子シリコーン化合物、化学増幅ポジ型レジスト材料及びパターン形成方法 |
TW550439B (en) | 1997-07-01 | 2003-09-01 | Ciba Sc Holding Ag | New oxime sulfonates as latent acids and compositions and photoresists comprising said oxime sulfonates |
JP3533951B2 (ja) | 1997-08-06 | 2004-06-07 | 信越化学工業株式会社 | 高分子シリコーン化合物、レジスト材料及びパターン形成方法 |
TW546542B (en) | 1997-08-06 | 2003-08-11 | Shinetsu Chemical Co | High molecular weight silicone compounds, resist compositions, and patterning method |
SG78412A1 (en) | 1999-03-31 | 2001-02-20 | Ciba Sc Holding Ag | Oxime derivatives and the use thereof as latent acids |
JP2001215714A (ja) | 2000-02-02 | 2001-08-10 | Fuji Photo Film Co Ltd | 感放射線性樹脂組成物 |
JP4419311B2 (ja) * | 2000-10-19 | 2010-02-24 | Jsr株式会社 | ケイ素含有脂環式化合物 |
JP2002055346A (ja) | 2000-08-11 | 2002-02-20 | Sony Corp | 液晶配向膜の形成方法および液晶表示装置の製造方法 |
JP2002220471A (ja) | 2001-01-29 | 2002-08-09 | Jsr Corp | ポリシロキサン |
JP4061454B2 (ja) * | 2001-03-13 | 2008-03-19 | 信越化学工業株式会社 | 高分子化合物、レジスト材料及びパターン形成方法 |
JP4534371B2 (ja) * | 2001-03-16 | 2010-09-01 | Jsr株式会社 | 感放射線性樹脂組成物 |
JP2003020335A (ja) | 2001-05-01 | 2003-01-24 | Jsr Corp | ポリシロキサンおよび感放射線性樹脂組成物 |
KR100863119B1 (ko) | 2001-06-29 | 2008-10-14 | 제이에스알 가부시끼가이샤 | 산발생제, 술폰산, 술폰산 유도체 및 감방사선성 수지조성물 |
JP3826777B2 (ja) | 2001-12-05 | 2006-09-27 | Jsr株式会社 | 感放射線性樹脂組成物 |
WO2005037846A1 (ja) * | 2003-10-15 | 2005-04-28 | Jsr Corporation | シラン化合物、ポリシロキサンおよび感放射線性樹脂組成物 |
JP2005222040A (ja) * | 2003-12-30 | 2005-08-18 | Rohm & Haas Electronic Materials Llc | Si−成分を含むフォトレジスト組成物 |
KR20070002016A (ko) * | 2004-03-17 | 2007-01-04 | 제이에스알 가부시끼가이샤 | 감방사선성 수지 조성물 |
US20050277731A1 (en) | 2004-06-11 | 2005-12-15 | Shin-Etsu Chemical Co., Ltd. | Curable perfluoropolyether compositions and rubber or gel articles comprising the same |
JP2006022319A (ja) | 2004-06-11 | 2006-01-26 | Shin Etsu Chem Co Ltd | 硬化性パーフルオロポリエーテル組成物及びその硬化物を用いたゴム及びゲル製品 |
JP4626758B2 (ja) * | 2005-07-07 | 2011-02-09 | 信越化学工業株式会社 | 含フッ素環状構造を有するケイ素化合物及びシリコーン樹脂、それを用いたレジスト組成物、及びパターン形成方法 |
JP4600679B2 (ja) * | 2006-02-13 | 2010-12-15 | 信越化学工業株式会社 | レジスト組成物並びにこれを用いたパターン形成方法 |
-
2006
- 2006-03-14 JP JP2006069010A patent/JP4687898B2/ja not_active Expired - Fee Related
-
2007
- 2007-03-05 US US11/713,709 patent/US7485408B2/en active Active
- 2007-03-13 KR KR1020070024369A patent/KR100998127B1/ko active IP Right Grant
- 2007-03-14 TW TW096108769A patent/TWI348594B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004256562A (ja) * | 2003-02-24 | 2004-09-16 | Central Glass Co Ltd | 含フッ素化合物、含フッ素重合性単量体、含フッ素高分子化合物、それらを用いたレジスト材料とパターン形成方法、及び含フッ素化合物の製造方法 |
JP2005114942A (ja) * | 2003-10-07 | 2005-04-28 | Shin Etsu Chem Co Ltd | 感放射線性樹脂組成物並びにこれを用いたパターン形成方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101880798B1 (ko) * | 2015-02-06 | 2018-07-20 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 불소 함유 규소 화합물, 그의 제조 방법, 및 불소 함유 규소 수지의 제조 방법 |
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US7485408B2 (en) | 2009-02-03 |
US20070218402A1 (en) | 2007-09-20 |
TWI348594B (en) | 2011-09-11 |
JP2007246596A (ja) | 2007-09-27 |
TW200804987A (en) | 2008-01-16 |
KR20070093846A (ko) | 2007-09-19 |
JP4687898B2 (ja) | 2011-05-25 |
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