KR100944818B1 - 쇼트 아크 고압 방전 램프 - Google Patents
쇼트 아크 고압 방전 램프 Download PDFInfo
- Publication number
- KR100944818B1 KR100944818B1 KR1020047013779A KR20047013779A KR100944818B1 KR 100944818 B1 KR100944818 B1 KR 100944818B1 KR 1020047013779 A KR1020047013779 A KR 1020047013779A KR 20047013779 A KR20047013779 A KR 20047013779A KR 100944818 B1 KR100944818 B1 KR 100944818B1
- Authority
- KR
- South Korea
- Prior art keywords
- cathode
- pressure discharge
- short arc
- high pressure
- discharge lamp
- Prior art date
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- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052753 mercury Inorganic materials 0.000 claims abstract description 13
- 239000000945 filler Substances 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 8
- 239000010937 tungsten Substances 0.000 claims abstract description 8
- 239000011261 inert gas Substances 0.000 claims abstract description 7
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims abstract description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract 5
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract 5
- 229910021193 La 2 O 3 Inorganic materials 0.000 claims description 18
- 239000010406 cathode material Substances 0.000 claims description 7
- 210000003739 neck Anatomy 0.000 claims description 3
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 3
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000011888 foil Substances 0.000 description 6
- 229910052724 xenon Inorganic materials 0.000 description 6
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 6
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 4
- 229910052776 Thorium Inorganic materials 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000001393 microlithography Methods 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
- H01J61/0737—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode characterised by the electron emissive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
Abstract
Description
Claims (11)
- 직류 전류 동작용 쇼트 아크 고압 방전 램프(1, 28)로서,상기 쇼트 아크 고압 방전 램프는, 정반대로 대향하는 2개의 연결부(neck)들(4; 30, 31)을 포함하며 적어도 하나의 불활성 기체를 포함하는 충전재를 포함하는 방전 용기(2, 29)를 포함하고, 상기 연결부들 안으로 각각 텅스텐으로 만들어지는 애노드(26, 36)와 캐소드(7, 33)가 기체밀폐식으로 융합되며,적어도 캐소드 팁의 재료는, 텅스텐에 부가하여, 란탄 산화물(lanthanum oxide) La2O3를 포함하고, 하프늄 산화물(hafnium oxide) HfO2 및 지르코늄 산화물(zirconium oxide) ZrO2로 이루어진 그룹으로부터 선택된 적어도 하나의 추가적인 산화물을 포함하고,캐소드 재료의 상기 La2O3의 함유량은 무게비율로 1.0부터 3.5% 까지이며,상기 지르코늄 산화물 ZrO2과 상기 하프늄 산화물 HfO2의 추가적인 몰량(molar quantity)은 상기 캐소드 재료에서의 상기 La2O3의 몰량을 초과하지 않는, 쇼트 아크 고압 방전 램프.
- 제 1 항에 있어서, 상기 캐소드(7, 34) 전체의 상기 캐소드 재료는 La2O3와, HfO2 및 ZrO2로 이루어진 그룹으로부터 선택된 적어도 하나의 추가적인 산화물을 포함하는, 쇼트 아크 고압 방전 램프.
- 삭제
- 제 1 항 또는 제 2 항에 있어서, 상기 캐소드 재료의 상기 La2O3의 함유량은 무게비율로 1.5부터 3.0% 까지인, 쇼트 아크 고압 방전 램프.
- 삭제
- 제 1 항 또는 제 2 항에 있어서, 상기 지르코늄 산화물 ZrO2과 상기 하프늄 산화물 HfO2의 추가적인 몰량은 상기 La2O3의 몰량의 적어도 2%에 해당하는, 쇼트 아크 고압 방전 램프.
- 제 1 항에 있어서, 상기 방전 용기(2)에서 애노드(26)와 캐소드(7) 사이의 전극 간격은 0보다 크고 8㎜이하인, 쇼트 아크 고압 방전 램프.
- 제 1 항에 있어서, 상기 방전 용기(29)에서 애노드(36)와 캐소드(33) 사이의 전극 간격은 0보다 크고 15㎜이하인, 쇼트 아크 고압 방전 램프.
- 제 1 항에 있어서, 상기 램프(1, 28)가 동작하고 있을 때의 램프 전류는 20A 보다 큰, 쇼트 아크 고압 방전 램프.
- 제 1 항에 있어서, 상기 캐소드(7)가 형태가, 상기 램프가 동작하고 있을 때, 상기 캐소드의 상기 팁에서부터 0.5㎜의 거리에서 램프 축에 수직인 상기 캐소드의 단면으로부터 야기된 영역에 대하여 전류 밀도(J), 즉, A 단위의 램프 전류와 ㎟ 단위의 유효 캐소드 표면적의 비가,수은/불활성 기체 충전재의 경우, 5 ≤J≤ 150순수 불활성 기체 충전재의 경우, 25 ≤J ≤200을 만족하도록 하는, 쇼트 아크 고압 방전 램프.
- 제 1 항에 있어서, 상기 충전재는 수은을 포함하는, 쇼트 아크 고압 방전 램프.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10209426A DE10209426A1 (de) | 2002-03-05 | 2002-03-05 | Kurzbogen-Hochdruckentladungslampe |
DE10209426.8 | 2002-03-05 | ||
PCT/DE2003/000707 WO2003075310A1 (de) | 2002-03-05 | 2003-03-05 | Kurzbogen-hochdruckentladungslampe |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050004792A KR20050004792A (ko) | 2005-01-12 |
KR100944818B1 true KR100944818B1 (ko) | 2010-03-03 |
Family
ID=27762648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020047013779A KR100944818B1 (ko) | 2002-03-05 | 2003-03-05 | 쇼트 아크 고압 방전 램프 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7279839B2 (ko) |
EP (1) | EP1481418B8 (ko) |
JP (1) | JP4741190B2 (ko) |
KR (1) | KR100944818B1 (ko) |
CN (1) | CN1639833A (ko) |
DE (1) | DE10209426A1 (ko) |
TW (1) | TWI288943B (ko) |
WO (1) | WO2003075310A1 (ko) |
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CN101292324B (zh) | 2003-05-26 | 2012-11-14 | 皇家飞利浦电子股份有限公司 | 具有改进的颜色稳定性的无钍电极 |
JP4815839B2 (ja) * | 2005-03-31 | 2011-11-16 | ウシオ電機株式会社 | 高負荷高輝度放電ランプ |
JP4696697B2 (ja) * | 2005-06-03 | 2011-06-08 | ウシオ電機株式会社 | 超高圧水銀ランプ |
US7652430B1 (en) * | 2005-07-11 | 2010-01-26 | Kla-Tencor Technologies Corporation | Broadband plasma light sources with cone-shaped electrode for substrate processing |
DE102006026940A1 (de) | 2006-06-09 | 2007-12-13 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Hochdruckentladungslampe |
WO2008055550A1 (de) * | 2006-11-10 | 2008-05-15 | Osram Gesellschaft mit beschränkter Haftung | Elektrode, insbesondere kathode, für eine entladungslampe |
DE112006004087A5 (de) | 2006-12-07 | 2009-10-15 | Osram Gesellschaft mit beschränkter Haftung | Entladungslampe und Verfahren zum Herstellen eines Kolbenhalses für eine Entladungslampe |
DE102006061375B4 (de) * | 2006-12-22 | 2019-01-03 | Osram Gmbh | Quecksilber-Hochdruckentladungslampe mit einer Wolfram und Kalium enthaltenden Anode, die eine Kornzahl größer 200 Körner pro mm2 und eine Dichte größer 19,05g/cm3 aufweist |
US8264148B2 (en) | 2007-10-09 | 2012-09-11 | Osram Ag | Discharge lamp |
JP2009259790A (ja) * | 2008-03-26 | 2009-11-05 | Harison Toshiba Lighting Corp | 高圧放電ランプ |
CN101990696B (zh) * | 2008-04-01 | 2015-04-22 | 奥斯兰姆有限公司 | 用于提供高压放电灯的方法、用于借助高压放电灯提供光的方法以及数字视频投影仪 |
EP2375438B1 (en) * | 2008-12-08 | 2013-05-29 | A.L.M.T. Corp. | Tungsten electrode material and method of manufacturing said material |
JP4486163B1 (ja) * | 2008-12-08 | 2010-06-23 | 株式会社アライドマテリアル | タングステン電極材料およびタングステン電極材料の製造方法 |
JP5239828B2 (ja) | 2008-12-22 | 2013-07-17 | ウシオ電機株式会社 | 放電ランプ |
DE102011084911A1 (de) | 2011-10-20 | 2013-04-25 | Osram Gmbh | Quecksilberdampf-kurzbogenlampe für gleichstrombetrieb mit kreisprozess |
CN106756169B (zh) | 2011-12-20 | 2018-07-17 | 株式会社东芝 | 钨合金、以及使用该钨合金的钨合金部件、放电灯、发射管和磁控管 |
WO2013103100A1 (ja) * | 2012-01-07 | 2013-07-11 | 株式会社 東芝 | タングステン合金、およびそれを用いたタングステン合金部品、放電ランプ、送信管並びにマグネトロン |
WO2013113049A1 (de) | 2012-01-31 | 2013-08-08 | Plansee Se | Wolfram-verbundelektrode |
WO2013179519A1 (ja) | 2012-05-29 | 2013-12-05 | 株式会社 東芝 | タングステン合金部品、ならびにそれを用いた放電ランプ、送信管およびマグネトロン |
US9548196B2 (en) | 2013-06-24 | 2017-01-17 | Ushio Denki Kabushiki Kaisha | Discharge lamp |
EP3016131B1 (en) * | 2013-06-25 | 2017-08-30 | Ushio Denki Kabushiki Kaisha | Discharge lamp |
JP6086253B2 (ja) * | 2014-08-28 | 2017-03-01 | ウシオ電機株式会社 | ロングアーク型放電ランプ |
DE102015218878A1 (de) | 2015-09-30 | 2017-03-30 | Osram Gmbh | Gleichstrom-Gasentladungslampe mit einer thoriumfreien Kathode |
CN105304436B (zh) * | 2015-11-09 | 2017-03-22 | 中国科学院电子学研究所 | 直热式阴极及其制备方法 |
CN110520961B (zh) * | 2017-03-31 | 2022-01-25 | 联合材料公司 | 钨电极材料 |
AT16409U1 (de) * | 2017-05-23 | 2019-08-15 | Plansee Se | Kathodenwerkstoff |
JP1679442S (ko) * | 2020-02-07 | 2021-02-15 | ||
JP7149631B2 (ja) * | 2021-02-26 | 2022-10-07 | 株式会社ユメックス | 箔シール型ショートアーク水銀ランプ |
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2002
- 2002-03-05 DE DE10209426A patent/DE10209426A1/de not_active Withdrawn
-
2003
- 2003-03-03 TW TW092104423A patent/TWI288943B/zh not_active IP Right Cessation
- 2003-03-05 WO PCT/DE2003/000707 patent/WO2003075310A1/de active Application Filing
- 2003-03-05 US US10/506,528 patent/US7279839B2/en not_active Expired - Lifetime
- 2003-03-05 JP JP2003573671A patent/JP4741190B2/ja not_active Expired - Fee Related
- 2003-03-05 CN CNA038052253A patent/CN1639833A/zh active Pending
- 2003-03-05 EP EP03720140A patent/EP1481418B8/de not_active Expired - Lifetime
- 2003-03-05 KR KR1020047013779A patent/KR100944818B1/ko active IP Right Grant
Patent Citations (3)
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JPH07153421A (ja) * | 1993-10-07 | 1995-06-16 | Philips Electron Nv | 高圧金属ハロゲン化物放電ランプ |
JPH10112289A (ja) * | 1996-09-27 | 1998-04-28 | Ushio Inc | ショートアーク型水銀ランプ |
JPH10261383A (ja) * | 1997-03-18 | 1998-09-29 | Ushio Inc | ショートアーク型放電ランプ |
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JP4741190B2 (ja) | 2011-08-03 |
JP2005519435A (ja) | 2005-06-30 |
EP1481418B1 (de) | 2011-11-30 |
EP1481418A1 (de) | 2004-12-01 |
WO2003075310A1 (de) | 2003-09-12 |
TW200307307A (en) | 2003-12-01 |
US7279839B2 (en) | 2007-10-09 |
TWI288943B (en) | 2007-10-21 |
KR20050004792A (ko) | 2005-01-12 |
CN1639833A (zh) | 2005-07-13 |
EP1481418B8 (de) | 2012-03-14 |
DE10209426A1 (de) | 2003-09-18 |
US20050104521A1 (en) | 2005-05-19 |
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