KR100898600B1 - Head socket for to contact probe card and interface and wafer test apparatus of therein - Google Patents

Head socket for to contact probe card and interface and wafer test apparatus of therein Download PDF

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Publication number
KR100898600B1
KR100898600B1 KR1020080076529A KR20080076529A KR100898600B1 KR 100898600 B1 KR100898600 B1 KR 100898600B1 KR 1020080076529 A KR1020080076529 A KR 1020080076529A KR 20080076529 A KR20080076529 A KR 20080076529A KR 100898600 B1 KR100898600 B1 KR 100898600B1
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KR
South Korea
Prior art keywords
slit
connection
connector
socket
pin
Prior art date
Application number
KR1020080076529A
Other languages
Korean (ko)
Other versions
KR20090009762A (en
Inventor
한성규
Original Assignee
(주)퓨쳐하이테크
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Application filed by (주)퓨쳐하이테크 filed Critical (주)퓨쳐하이테크
Priority to KR1020080076529A priority Critical patent/KR100898600B1/en
Publication of KR20090009762A publication Critical patent/KR20090009762A/en
Application granted granted Critical
Publication of KR100898600B1 publication Critical patent/KR100898600B1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0491Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889Interfaces, e.g. between probe and tester

Abstract

The present invention provides a socket housing having a slit into which a connector is inserted; A pin fixing bar provided inside the socket housing; A plurality of connecting pins fixed to the pin fixing bar in two rows and positioned inside the slits and having a predetermined elasticity in a direction orthogonal to the direction in which the connector is inserted into the slits; A head socket for connecting a probe card, the head socket for connecting the probe card including an adhesion lever installed in the slit to elastically deform each row of the connection pins to be in close contact with the connection pattern of the connector; Provided is a wafer test apparatus.

Description

Head socket for to contact probe card and interface and wafer test apparatus of therein}

The present invention relates to a head socket and interface for connecting a probe card and a wafer test apparatus including the same. In particular, the connection between the probe card and the test head is made simple, and at the same time, the connector or the head socket is damaged when the probe card and the test head are connected. The present invention relates to a probe and a head socket for connecting a probe card and a wafer test apparatus including the same.

A wafer test apparatus is a device for inspecting a semiconductor device by contacting the needles of a probe card with electrode pads of a plurality of semiconductor devices constituting a wafer, applying a test signal from a test head to detect an output signal from the semiconductor device. In general, a wafer test apparatus is provided with a connector and a head socket, respectively, as an interface for electrically connecting the probe card and the test head. That is, the probe card and the test head are electrically connected to each other by connecting the connection patterns or the connection pins provided at both sides of the connector provided in the probe card to the head socket provided in the test head. At this time, the connector is forcibly fitted to the head socket, so that both of the connectors are not detached in an electrically connected state.

However, such a conventional wafer test apparatus has the following problems.

As described above, in the related art, both are not arbitrarily removed by the interference fit of the connector and the head socket. Therefore, there is a disadvantage that the operation of inserting the connector into the head socket is not easy.

In addition, in the process of forcibly fitting the connector to the head socket, it may occur that both are not inserted into the correct position. Therefore, the connection pattern and the connection pin may be damaged in the process of inserting the connector into the head socket.

The present invention is to solve the conventional problems as described above, an object of the present invention is to provide a probe and the head test apparatus for connecting the probe card and the head socket is configured to be more easily combined.

Another object of the present invention is to provide a probe and a head test apparatus for connecting the probe and the head socket and interface configured to prevent damage in the bonding process.

The above object is the socket housing is provided with a slit into which the connector is inserted; A pin fixing bar provided inside the socket housing; A plurality of connecting pins fixed to the pin fixing bar in two rows and positioned inside the slits and having a predetermined elasticity in a direction orthogonal to the direction in which the connector is inserted into the slits; It is achieved by a probe card connection head socket which is installed inside the slit and comprises a close lever to elastically deform each row of the connection pin to selectively adhere to the connection pattern of the connector.

The connecting pin has a fixed portion whose tip extends by a predetermined angle toward the inlet of the slit in a state where one end thereof is fixed through the pin fixing bar, and toward the side of the slit adjacent to the front end of the fixed portion. It is preferably composed of an extension that extends toward the inlet of the slit inclined by a predetermined angle so that when the connector is inserted into the slit, the connection pattern of the connector is in contact with the connection portion of the fixing portion and the extension.

In addition, the connecting pin is a fixed portion of which the tip extends toward the inlet of the slit in a state where one end thereof is fixed through the pin fixing bar, and a predetermined angle toward the side of the slit adjacent from the tip of the fixing part. A first extension extending obliquely toward the inlet of the slit, a second extension extending obliquely toward the inlet of the slit at a predetermined angle in a direction spaced apart from the side of the adjacent slit at the tip of the first extension; It consists of a third extension extending from the distal end of the second extension toward the side of the adjacent slit by a predetermined angle toward the inlet of the slit, when the connector is inserted into the slit, the connection pattern of the connector is extended to the second extension and the third extension. It is desirable to make contact with the negative connection.

In addition, each row of the connection pins is provided on the pin fixing bar so that at least a part of the connection pins are spaced apart by the interval of the connection pattern, the contact lever is preferably elastically deformed in the direction to space each row of the connection pins from the connection pattern. .

The close lever is rotatably installed in the column direction of the connection pin in the slit corresponding to each row of the connection pins, and the close lever is the inside of the slit corresponding to each row of the connection pins. A rotation shaft provided in the column direction of the connection pin, the diameter of which is at least a distance between each row of the connection pins, and both ends of which extend outwardly of the socket housing; It is provided on the outer circumferential surface of the rotating shaft to correspond to each row of the connecting pins, at least a portion of the connecting pins having a thickness greater than or equal to the interval between the rows of connecting pins, when the rotating shaft is rotated, the contact protrusions from the connecting pattern It is preferable to elastically deform in the direction of separation.

In addition, the axis of rotation is a rod-like shape having the same diameter as the interval between each row of the connecting pin, the length of the long side of the contact protrusion exceeds the distance between each row of the connecting pin and the length of the short side is the angle of the connecting pin It is desirable to have a bar shape having a rectangular cross section which is equal to or less than the interval between rows.

The above object is a connector provided on the probe card having a plurality of needles for inspecting the electrical characteristics of the chips constituting the wafer, the connector is provided with a connection pattern; Also provided by a test head electrically connected to the probe card, the probe card connection interface is characterized in that it comprises a head socket connected to the connector.

The above object is a probe card having a plurality of needles for inspecting the electrical characteristics of the chips constituting the wafer, and a connector provided with a connection pattern; It is also achieved by a wafer test apparatus comprising a test head having a head socket to which the connector is connected.

According to the probe card connection head socket and interface configured as described above and the wafer test apparatus including the same, the following effects can be expected.

First, when the connector is inserted into the head socket in a state in which the contact pin is elastically deformed by the close lever, the close contact lever rotates to restore the connection pin so that the connector closely contacts the connection pattern, whereby the connector is more easily connected to the head socket. Has an effect.

Second, the contact between the connection pin and the connection pattern is selectively made by the rotation of the close lever, thereby minimizing damage to the connection pin or / and the connection pattern in the process of the connector being inserted into or detached from the head socket. Have

Hereinafter, a probe card connection head socket according to the present invention will be described as a first embodiment and a second embodiment, and a probe card connection interface adopting the first and second embodiments, respectively, and a wafer test including the same. Preferred embodiments of the device are described in more detail with reference to the accompanying drawings.

First, Figure 1 is a perspective view showing the structure of the first preferred embodiment of the probe card connection interface, that is, the socket housing 11 and the connector according to the present invention, Figure 2 is a connecting pin of the first preferred embodiment of the present invention 19 is a perspective view showing main portions of the pinned bar 17, and FIG. 3 is a longitudinal sectional view showing the structure of FIG. 2, which is a first preferred embodiment of the present invention.

As shown in the first embodiment, the socket housing 11 of the head socket 10 is formed in a substantially flat hexahedral shape. Hereinafter, for convenience of description, the front and rear surfaces of the socket housing 11, the front and rear surfaces of the socket housing 11, and the upper and lower surfaces thereof are referred to as upper and lower surfaces.

A slit 13 is formed in the socket housing 11, and the slit 13 is formed to extend in the longitudinal direction of the socket housing 11 through the upper and lower surfaces of the socket housing 11. In addition, through holes 15 are respectively provided on both sides of the socket housing 11 in the short side direction. The through hole 15 is formed to communicate with the slit 13 on the front and rear surfaces of the socket housing 11.

In addition, a pin fixing bar 17 is provided inside the socket housing 11, that is, inside the slit 13, and the pin fixing bar 17 is provided below the slit 13. The pinned bar 17 is formed in the shape of a cube having a cross section corresponding to the cross section of the slit 13.

In addition, the pin fixing bar 17 is provided with a plurality of connecting pins 19, and the connecting pins 19 are provided in two rows penetrating both ends of the longitudinal direction of the pin fixing bar 17 up and down.

In this case, each row of the connection pins 19 is formed by a plurality of connection pins 19 provided on the pin fixing bar 17 so that at least a part of the connection pins are spaced apart from each other by the thickness of the connector 30, the connection pins 19 is in contact with the connection pattern 31 of the connector 30 to be described later, the direction perpendicular to the direction in which the connector 30 is inserted into the slit 13, that is, the pin fixing bar 17 It is formed to have a predetermined elasticity in the width direction.

As shown in FIG. 3, the connection pins 19 include fixing parts 19a and first to third extension parts 19b, 19c, and 19d, respectively.

One end of the fixing part 19a is installed to penetrate the pin fixing bar 17 up and down. At this time, one end of the fixing part 19a is spaced apart from the side surface of the slit 13 by a predetermined interval. It penetrates up and down 17 and protrudes below the slit 13.

In addition, one end of the fixing portion 19a protruding downward of the slit 13 is connected to a coaxial cable (not shown) for connection with a test head, and the upper end of the fixing portion 19a is upward, that is, It extends vertically towards the inlet of the slit 13.

The first extension portion 19b extends inclined at a predetermined angle toward the side of the slit 13 adjacent to each other at the tip of the fixing portion 19a, and the second extension portion 19c extends the first extension portion. It extends inclined by a predetermined angle in the direction away from the side of the adjacent slit 13 at the upper end of (19b).

In addition, the third extension part 19d extends inclined by a predetermined angle in a direction spaced apart from the side surface of the slit 13 adjacent to the upper end of the second extension part 19c.

Thus, the first to third extension portions 19b, 19c, and 19d are formed, so that the connecting portions of the first extension portion 19b and the second extension portion 19c substantially face both sides of the slit 13. Respectively protruding toward each other, and the connection portions of the second extension portion 19c and the third extension portion 19d protrude in directions facing each other, thereby connecting the second extension portion 19c and the third extension portion 19d to each other. It is in close contact with this connection pattern 31 selectively.

On the other hand, a close lever 21 is provided in each of the slits 13 corresponding to each row of the connecting pin 19, the close lever 21, the connection pin 19 is elastically deformed by The connection pin 19 serves to selectively adhere to the connection pattern 31, the contact lever 21 is configured to include a rotating shaft 23 and the contact protrusion 25.

The rotating shaft 23 is provided in the column direction of the connecting pin 19, that is, the longitudinal direction of the slit 13 in the slit 13 corresponding to each row of the connecting pin 19, the rotary shaft ( 23 is rotatably installed at both ends of the through hole 15 to protrude to the outside of the slit 13, the rotation shaft 23 is equal to the spacing between the rows of the connecting pin (19). It is formed into a rod shape having a circular longitudinal cross section of diameter.

And, the contact protrusion 25 is provided on at least a portion of the outer circumferential surface of the rotation shaft 23 so as to correspond to each row of the connection pin 19, the contact protrusion 25 is connected to the connection pin ( 19) is elastically deformed in the direction away from the connection pattern 31.

Therefore, the contact protrusion 25 has the length of the long side exceeds the interval between each row of the connection pin 19, more specifically, the interval between the fixing portion 19a of the connection pin 19 and the short side thereof. The length of is formed in the shape of a bar having a rectangular longitudinal cross-section equal to the interval between the fixing portion 19a of each row of the connecting pin 19.

As a result, in the state where the long side portion of the contact protrusion 25 is located between the fixing portions 19a of the connection pin 19, the fixing portion 19a of the connection pin 19 is connected to the long side portion of the contact protrusion 25. By opening to both sides by, the connecting pin 19 is elastically deformed to be spaced apart from the connecting pattern 31.

In addition, in the state where the short side portion of the contact protrusion 25 is positioned between the fixing portions 19a of each row of the connection pins 19, no external force is applied to the connection pins 19, so that the connection pins 19 are formed. It is in close contact with the connection pattern 31.

Meanwhile, a frictional force having at least the elastic force of the connecting pin 19 between the contact portion of the socket housing 11 and the contact lever 21, that is, the inner circumference of the through hole 15 and the outer surface of the contact lever 21. It is preferable to be given. This is a state in which the connecting pin 19 is in close contact with the connection pattern 31, that is, the long side portion of the close contact protrusion 25 of the close contact lever 21 is in close contact with the fixing portion 19a of the connecting pin 19. In close contact with the lever 21 is configured to be freely moved.

Of course, the locking means (not shown) may be provided separately to prevent the contact lever 21 is randomly moved in a state in which the connection pin 19 is in close contact with the connection pattern 31.

Meanwhile, the connector 30 inserted into the slit 13 is provided in a probe card (not shown), and the connector 30 is formed in a hexahedral shape corresponding to the slit 13.

And, both sides of the connector 30 is provided with a connection pattern 31, the connection pattern 31 is the second extension portion 19c of the connection pin 19 when the connector 30 is inserted into the slit 13 ) And the connecting portion of the third extension portion 19d.

Hereinafter, a description will be given of an operation process of a preferred embodiment of a wafer test apparatus including the probe and the head socket for connecting the probe card according to the first embodiment of the present invention with reference to the accompanying drawings.

4A to 4C are operational state diagrams showing an operation process of a preferred embodiment of a probe and a head socket and interface for connecting a probe card to which the first embodiment of the present invention is applied and including the same.

First, as shown in Figure 4a, by rotating the rotary shaft 23 of the contact lever 21 clockwise (or counterclockwise) so that the long side portion of the contact protrusion 25 is fixed to the connecting pin 19 ( Close contact with 19a).

Therefore, the connecting pin 19 is elastically deformed by the close lever 21, thereby preventing interference between the connecting pin 19 and the connecting pattern 31 in the process of inserting the connector 30 into the slit 13. .

In this state, as shown in FIG. 4B, the connector 30 is inserted into the slit 13.

Therefore, as described above, since the interference between the connection pin 19 and the connection pattern 31 is prevented, the connection pin 19 or / and the connection pattern 19 in the process of inserting the connector 30 into the slit 13 ( 31) is prevented from being damaged.

Next, as shown in FIG. 4C, when the connector 30 is completely inserted into the slit 13, the close lever 21 is rotated clockwise (or counterclockwise).

Then, when the close lever 21 rotates by 90 ° and the short side portion is in close contact with the fixing portion 19a of the connecting pin 19, the connecting pin 19 is not elastically deformed so that the thickness of the connector 30 is reduced. Since the first state spaced apart by the above interval is maintained, the connecting portion of the second extension portion 19c and the third extension portion 19d of the connection pin 19 is in close contact with the connection pattern 31.

In this state, the close lever 21 does not rotate arbitrarily by the frictional force with the socket housing 11. Accordingly, the connection pin 19 maintains the state in close contact with the connection pattern 31. The card and test head will remain connected.

On the other hand, Figure 5 is a perspective view showing the structure of the second preferred embodiment of the probe card connection interface according to the present invention, that is, the socket housing 11 and the connector 30, Figure 6 is a second preferred embodiment of the present invention Fig. 7 is a perspective view showing the structure of the connecting pin 17, which is an essential part of the example, and Fig. 7 is a longitudinal sectional view showing the longitudinal section of Fig. 6 as the second preferred embodiment of the present invention.

As shown in the second embodiment, the socket housing 11 of the head socket 10 is formed in a substantially flat hexahedral shape. Hereinafter, for convenience of description, the front and rear surfaces of the socket housing 11, the front and rear surfaces of the socket housing 11, and the upper and lower surfaces thereof are referred to as upper and lower surfaces.

A slit 13 is formed in the socket housing 11, and the slit 13 extends in the longitudinal direction of the socket housing 11 through the upper and lower surfaces of the socket housing 11.

In addition, through openings 15 are respectively provided on both sides of the socket housing 11 in the short side direction, and the through openings 15 are formed to communicate with the slit 13 on the front and rear surfaces of the socket housing 11.

In addition, a pin fixing bar 17 is provided inside the socket housing 11, that is, inside the slit 13, and the pin fixing bar 17 is provided below the slit 13.

The pin fixing bar 17 is formed in a hexahedron shape having a cross section corresponding to the cross section of the slit 13, and a plurality of connecting pins 19 are fixed to the pin fixing bar 17.

The connecting pins 19 are provided in two rows penetrating both ends of the longitudinal direction of the pin fixing bar 17 up and down. In this case, each row of the connecting pins 19 is a predetermined distance from each other, that is, in FIG. As shown, it is formed by a plurality of connecting pins 19 provided on the pin fixing bar 17 to be spaced apart by a thickness or more than the thickness of the connector 30.

The connecting pin 19 is in contact with the connection pattern 31 to be described later, in a direction perpendicular to the direction in which the connector 30 is inserted into the slit 13, that is, in the width direction of the pin fixing bar 17. It is formed to have a predetermined elastic force, and as shown in FIG. 7, the connecting pins 19 include fixing parts 19a and first to third extension parts 19b, 19c, and 19d, respectively. It is composed.

One end of the fixing part 19a is installed to penetrate the pin fixing bar 17 up and down. At this time, one end of the fixing part 19a is spaced apart from the side surface of the slit 13 by a predetermined interval. A coaxial cable for connection with a test head is provided at one end of the fixing portion 19a which penetrates the pin fixing bar 17 up and down and protrudes downward of the slit 13, and protrudes downward of the slit 13. C) and the like, and the upper end of the fixing part 19a extends upwardly, that is, vertically toward the entrance of the slit 13.

The first extension portion 19b extends inclined at a predetermined angle toward the side of the adjacent slits 13 at the tip of the fixing portion 19a, and the second extension portion 19c extends in a first extension portion ( It extends inclined by a predetermined angle in the direction away from the side of the adjacent slit 13 at the upper end of 19b).

In addition, the third extension portion 19d extends inclined by a predetermined angle in a direction spaced apart from the side surface of the adjacent slit 13 at the upper end of the second extension portion 19c.

Therefore, as described above, the first to third extension portions 19b, 19c, and 19d are formed, so that the connecting portions of the first extension portion 19b and the second extension portion 19c are substantially slit ( Protruding toward both sides of the 13, respectively, and the connecting portion of the second extension portion 19c and the third extension portion 19d protrude in a direction facing each other.

As a result, the connecting portion of the first extension portion 19b and the second extension portion 19c is selectively in close contact with the sliding lever 41 to be described later, and the second extension portion 19c and the third extension portion ( The connection portion of 19d) is selectively in close contact with the connection pattern 31.

On the other hand, the interlocking lever 41 is provided inside the slit 13 corresponding to each side of both sides of the slit 13 and each row of the connecting pin 19 adjacent thereto, the interlocking lever 41 is substantially As a result of elastic deformation of the connecting pin 19, the connecting pin 19 serves to selectively adhere to the connection pattern 31.

The interlocking lever 41 is installed to be horizontally movable in the same direction as the elastic force of the connecting pin 19, that is, in the width direction of the pin fixing bar 17 in association with the movement of the driving lever 45 to be described below.

The interlocking lever 41 is formed in a plate shape having a length of at least the length of each row of the connecting pin 19, one surface of the interlocking lever 41 is in close contact with the connecting pin 19, the interlocking lever 41 of the On the other side, the plurality of interlocking protrusions 42 and the driving grooves 43 are alternately formed.

The interlocking protrusion 42 is formed to have a predetermined thickness on one surface of the interlocking lever 41 to substantially protrude toward one side of the slit 13, that is, one surface of the driving lever 45.

The driving groove 43 is formed by recessing one surface of the interlocking lever 41 provided with the interlocking protrusion 42 into a predetermined shape, and the interlocking protrusion 42 is substantially formed on one surface of the interlocking lever 41. By being provided, a driving groove 43 is formed in the remaining portion of one surface of the interlock lever 41, and the driving protrusion 46 is provided in the driving groove 43 in a state in which the connecting pin 19 is spaced apart from the connection pattern 31. ) Is seated.

The front and rear ends of the interlocking protrusions 42 and the front and rear ends of the driving grooves 43, that is, the inclined guide surfaces are respectively provided on one surface of the interlocking lever 41 substantially corresponding to the boundary between the interlocking protrusions 42 and the driving grooves 43. A 44 is provided, and the inclined guide surface 44 of the interlocking lever 41 is described below with the interlocking protrusion 42 or the driving groove 43 in the process of moving the interlocking lever 41 and the driving lever 45. It is to prevent the interference between the interlocking groove 47 or the driving protrusion 46.

A driving lever 45 is provided in each of the slits 13 corresponding to both side surfaces of the slit 13 and the interlocking lever 41, and the driving lever 45 is moved forward and backward inside the slit 13. It is installed to move horizontally.

Both ends of the driving lever 45 protrude out of the slit 13 through the through opening 15, and the driving lever 45 horizontally interlocks the lever 41 to elastically deform the connecting pin 19. To this end, a plurality of driving protrusions 46 and the interlocking groove 47 are alternately formed in the driving lever 45.

The driving protrusion 46 is formed on one surface of the driving lever 45 facing one surface of the interlocking lever 41 provided with the interlocking protrusion 42 and the driving groove 43, and the driving protrusion 46 is interlocked. Similarly to the projection 42, one surface of the driving lever 45 facing one surface of the interlocking lever 41 is formed to have a predetermined thickness so that one surface of the interlocking lever 41 substantially provided with the interlocking protrusion 42. Protrudes towards

The driving protrusion 46 is in close contact with the interlocking protrusion 42 or seated in the driving groove 43 when the driving lever 45 is moved horizontally forward and backward. For this purpose, the driving protrusion 46 is the driving groove 43. It is formed into a shape to be joined to.

The interlocking groove 47 is formed by recessing one surface of the driving lever 45 having the driving protrusion 46 into a shape that is engaged with the interlocking protrusion 42, and the driving groove 47 is also substantially a driving lever ( Since one surface of 45 is not recessed and formed in a shape that is interlocked with the interlocking protrusion 42, the one surface of the driving lever 45 except for the driving protrusion 46 is recessed relative to the remaining portion of the driving lever 45. The linking protrusions 42 are seated in the groove 47 in a state where the connecting pin 19 is spaced apart from the connecting pattern 31.

A plurality of inclined guide surfaces 48 are also provided on one surface of the driving lever 45 corresponding to the boundary between the driving protrusion 46 and the interlocking groove 47, and the inclined guide surfaces 48 of the driving lever 28 are provided. It is formed in a shape that is mated with the inclined guide surface 44 of the interlocking lever 41 serves to prevent the interference between the driving protrusion 46 or the interlocking groove 47 and the driving groove 43 or the interlocking protrusion 42.

Meanwhile, a frictional force having at least the elastic force of the connecting pin 19 between the contact portion of the socket housing 11 and the driving lever 45, that is, the inner circumference of the through opening 15 and the outer surface of the driving lever 45. It is preferable to be given. This means that the driving lever 45 is not horizontally moved in a state where the connecting pin 19 is in close contact with the connection pattern 31, that is, the interlocking protrusion 42 and the driving protrusion 46 are in close contact with each other. do.

Of course, the locking means (not shown) may be provided separately in order to prevent the drive lever 45 from moving horizontally in the state in which the connection pin 19 is in close contact with the connection pattern 31.

Meanwhile, the connector 30 inserted into the slit 13 is provided in a probe card (not shown), and the connector 30 is formed in a hexahedral shape corresponding to the slit 13.

And, both sides of the connector 30 is provided with a connection pattern 31, the connection pattern 31 is the second extension of the connecting pin 19 when the connector 30 is inserted into the slit 13 ( 19c) is in close contact with the connecting portion of the third extension portion 19d.

Hereinafter, a description will be given of an operation process of a preferred embodiment of a probe test apparatus including a head socket and interface for connecting a probe card according to the second embodiment of the present invention and the same.

8A to 8E are operation state diagrams showing an operation process of a preferred embodiment of the probe and the head socket and interface for connecting the probe card according to the second embodiment of the present invention and the same.

First, as shown in FIGS. 8A and 8B, the interlocking protrusions 42 and the driving protrusions 46 interlock the grooves 47 and the driving grooves 43 by horizontally moving the driving lever 45 forwardly (or backwardly). Each one).

Therefore, the connecting pin 19 is not elastically deformed by the interlocking lever 41, so that the connecting pin 19 maintains the first state spaced apart by the thickness of the connector 30 or more, the connector 30. In the process of being inserted into the slit 13, the interference between the connecting pin 19 and the connection pattern 31 is prevented.

In this state, as shown in FIG. 8C, the connector 30 is inserted into the slit 13. Therefore, as described above, since the interference between the connection pin 19 and the connection pattern 31 is prevented, the connection pin 19 or / and the connection in the process of the connector 30 is inserted into the slit 13 The phenomenon that the pattern 31 is damaged is prevented.

Next, as shown in FIGS. 8D and 8E, when the connector 30 is completely inserted into the slit 13, the driving lever 45 is horizontally moved backwards (or forwards), and the driving lever 45 is moved. ) Moves horizontally to the rear (or front), the interlocking protrusions 42 and the driving protrusions 46 respectively seated in the interlocking grooves 47 and the driving grooves 43 are the interlocking grooves 47 and the driving grooves 43. Are removed from and adhered to each other.

Therefore, the connecting pin 19 is horizontally moved in a direction orthogonal to the moving direction of the driving lever 45, that is, the connecting pin 19 is in close contact with the connecting pattern 31. It elastically deforms and adheres to the connection pattern 31.

In this state, the driving lever 45 does not move horizontally to the rear (or front) arbitrarily by frictional force with the socket housing 11, and thus, the connection pin 19 is connected to the connection pattern 31. By keeping in close contact with each other, the probe card and the test head remain connected.

1 is a perspective view showing a first embodiment of a probe card connection interface according to the present invention;

Figure 2 is a perspective view showing the main parts of the first preferred embodiment of the present invention.

Figure 3 is a longitudinal sectional view showing a first preferred embodiment of the present invention.

Figures 4a to 4c is an operating state diagram showing the operation of the first preferred embodiment of the present invention.

5 is a perspective view showing a second preferred embodiment of a probe card connection interface according to the present invention;

6 is a perspective view showing main parts of a second preferred embodiment of the present invention.

Figure 7 is a longitudinal sectional view showing a second preferred embodiment of the present invention.

8A to 8C are operation state diagrams showing the operation process of the second preferred embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

10: head socket 11: socket housing

13: slit 15: through hole

17: pin fixing bar 19: connecting pin

19a: Fixed part 19b, 19c, 19d: Extension part

21: close contact lever 23: rotating shaft

25: contact protrusion 30: connector

31: connection pattern 41: interlock lever

42: interlocking protrusion 43: driving groove

44: inclined guide surface 45: drive lever

46: driving protrusion 47: interlocking groove

48: slope guide surface

Claims (9)

  1. delete
  2. delete
  3. In the head socket is connected to the connector is formed on both sides of the connection pattern;
    A socket housing provided with a slit into which the connector is inserted;
    A pin fixing bar provided inside the socket housing;
    It is fixed to the pin fixing bar in two rows and positioned inside the slit, has a predetermined elasticity in a direction orthogonal to the direction in which the connector is inserted into the slit, and the tip of the slit in the state where one end is fixed through the pin fixing bar. A fixing portion extending toward the inlet, a first extending portion extending toward the inlet of the slit inclined by a predetermined angle toward the side of the adjacent slit at the tip of the fixing portion, and a slit adjacent at the tip of the first extension portion A second extension that extends toward the inlet of the slit inclined at a predetermined angle in a direction spaced from the side surface of the inlet and extends toward the inlet of the slit at an inclined angle toward the side of the adjacent slit at the tip of the second extension; When the connector is inserted into the slit, the connection pattern of the connector is connected to the second extension portion and the third extension portion A plurality of connecting plates in contact;
    And a close lever installed inside the slit to elastically deform each row of the connection pins so as to selectively adhere to the connection pattern of the connector.
  4. The method of claim 3,
    Each row of the connection pins are provided on the pin fixing bar so that at least a part thereof is spaced apart by the interval of the connection pattern,
    The close lever is a probe socket connection head socket, characterized in that for each column of the connection pin elastically deformed in a direction away from the connection pattern.
  5. The method of claim 4, wherein
    The close lever is a probe socket connection head socket, characterized in that the inside of the slit corresponding to each row of the connection pin is installed rotatably in the column direction of the connection pin.
  6. The method of claim 5,
    The close lever is,
    A rotating shaft provided in the slit corresponding to each row of the connection pins in a row direction of the connection pins, having a diameter of at least a distance between each row of the connection pins, and both ends of which extend outwardly of the socket housing; and;
    It is provided on the outer circumferential surface of the rotating shaft to correspond to each row of the connecting pins, at least a portion of the connecting pins having a thickness greater than or equal to the interval between the rows of connecting pins, when the rotating shaft is rotated, the contact protrusions from the connecting pattern A head socket for connecting a probe card, characterized by elastic deformation in a spaced apart direction.
  7. The method of claim 6,
    The rotating shaft is rod-shaped having the same diameter as the interval between the rows of connecting pins,
    The close contact protrusion is a probe socket head socket, characterized in that the length of the long side exceeds the interval between each row of the connecting pin and the length of the short side has a rectangular cross-section that is less than the interval between each row of the connection pin. .
  8. A connector provided on a probe card having a plurality of needles for inspecting electrical characteristics of a chip constituting the wafer, the connector including a connection pattern;
    The probe card connection interface, characterized in that provided in the test head electrically connected to the probe card, the head socket of any one of claims 3 to 7, which is connected to the connector.
  9. A probe card having a plurality of needles for inspecting electrical characteristics of a chip constituting the wafer, and a connector having a connection pattern;
    Wafer test apparatus, characterized in that it comprises a test head having a head socket of any one of claims 3 to 7, wherein the connector is connected.
KR1020080076529A 2008-08-05 2008-08-05 Head socket for to contact probe card and interface and wafer test apparatus of therein KR100898600B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080076529A KR100898600B1 (en) 2008-08-05 2008-08-05 Head socket for to contact probe card and interface and wafer test apparatus of therein

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080076529A KR100898600B1 (en) 2008-08-05 2008-08-05 Head socket for to contact probe card and interface and wafer test apparatus of therein

Publications (2)

Publication Number Publication Date
KR20090009762A KR20090009762A (en) 2009-01-23
KR100898600B1 true KR100898600B1 (en) 2009-05-21

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100987702B1 (en) 2010-04-12 2010-10-13 (주)케미텍 Connector

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100987703B1 (en) * 2010-04-13 2010-10-13 (주)케미텍 Connector

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10208822A (en) 1997-01-23 1998-08-07 Sumitomo Wiring Syst Ltd Connector for sheet conducting path
KR20020042494A (en) * 2000-11-30 2002-06-05 추후제출 low insertion force type connector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10208822A (en) 1997-01-23 1998-08-07 Sumitomo Wiring Syst Ltd Connector for sheet conducting path
KR20020042494A (en) * 2000-11-30 2002-06-05 추후제출 low insertion force type connector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100987702B1 (en) 2010-04-12 2010-10-13 (주)케미텍 Connector

Also Published As

Publication number Publication date
KR20090009762A (en) 2009-01-23

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