KR100752378B1 - Organic electroluminescence device and Method for fabricating the same - Google Patents

Organic electroluminescence device and Method for fabricating the same Download PDF

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Publication number
KR100752378B1
KR100752378B1 KR1020050097163A KR20050097163A KR100752378B1 KR 100752378 B1 KR100752378 B1 KR 100752378B1 KR 1020050097163 A KR1020050097163 A KR 1020050097163A KR 20050097163 A KR20050097163 A KR 20050097163A KR 100752378 B1 KR100752378 B1 KR 100752378B1
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South Korea
Prior art keywords
angle
electroluminescent device
layer
organic electroluminescent
electrode
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KR1020050097163A
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Korean (ko)
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KR20070041240A (en
Inventor
김은아
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삼성에스디아이 주식회사
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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
    • H01L51/52Details of devices
    • H01L51/5203Electrodes
    • H01L51/5206Anodes, i.e. with high work-function material
    • H01L51/5218Reflective anodes, e.g. ITO combined with thick metallic layer
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
    • H01L51/52Details of devices
    • H01L51/5262Arrangements for extracting light from the device
    • H01L51/5271Reflective means

Abstract

The present invention provides a tapered edge surface having a taper angle of at least 15 degrees in order to solve the problem that the contrast ratio is significantly lowered by the reflected light when external light is incident on the organic electroluminescent device at an angle similar to that of the user. The present invention relates to an organic electroluminescent device and a method of manufacturing the same, which solve the above problems by forming scattered reflected light.
Exterior light, reflected light, contrast ratio

Description

Organic electroluminescence device and method for manufacturing same {Organic electroluminescence device and Method for fabricating the same}

1 is a schematic diagram illustrating a problem of a conventional organic electroluminescent device.

2 is a cross-sectional view illustrating a principle of diffuse reflection of external light of an organic light emitting display device according to an exemplary embodiment.

3 is a cross-sectional view of a process of manufacturing an organic electroluminescent device according to one embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

310: semiconductor layer 315: gate insulating film

320: gate electrode 325: interlayer insulating film

335 source / drain electrodes 340 source / drain electrode patterns

342: taper angle 344: tapered edge

350: reflective film 360: first electrode

370: organic film layer 375: second electrode

The present invention relates to an organic electroluminescent device and a method of manufacturing the same, and more particularly to a tapered edge surface having a taper angle of at least 15 degrees to prevent the contrast ratio of the organic electroluminescent device from being reduced by external light incident and the reflected light. The present invention relates to an organic electroluminescent device and a method of manufacturing the same, in which a reflective film is formed to scatter reflected light to improve display capability.

Recently, a liquid crystal display device, an organic electroluminescence device, or a plasma display plane, which solve the shortcomings of the conventional display device, which are heavy and large, such as a cathode ray tube. A flat panel display device such as) is attracting attention.

At this time, since the liquid crystal display is not a light emitting device but a light receiving device, there is a limit in brightness, contrast, viewing angle, and large area, and although the PDP is a self-light emitting device, it is heavier than other flat panel display devices and consumes more weight. On the other hand, the organic electroluminescent device is excellent in viewing angle, contrast, etc., because it is a self-luminous device, and because it does not require a backlight, it is possible to be light and thin, and in terms of power consumption. It is advantageous.

In addition, since it is possible to drive DC low voltage, fast response speed, and all solid, it is resistant to external shock, wide use temperature range, and has a simple and inexpensive manufacturing method.

1 is a schematic diagram illustrating a problem of a conventional organic electroluminescent device.

Referring to FIG. 1, a user 110 using a display device such as the organic electroluminescent device 100 generally has an organic electric field within a predetermined angle with respect to the vertical of the plane of the organic electroluminescent device 100. The screen of the light emitting device 100 is viewed.

In this case, FIG. 1 illustrates that the user 110 is looking in the direction 120 perpendicular to the screen of the organic electroluminescent device 100. In addition, the predetermined angle viewed by the user 110 is within a range of 15 degrees to the top 130a and 15 degrees to the bottom 130b in the vertical direction 120.

In this case, the external light 140 (light generated from outside, such as sunlight or fluorescent light, incident on the organic electroluminescent device 100) is perpendicular to the predetermined angle (that is, the plane of the organic electroluminescent device 100). In the case of incident within 30 degrees of each of the upper (130a) and the lower (130b) of the lower (130b) is reflected by the reflected light at the same angle as the reflected light 110 the user 110 sees the reflected light.

Thus, the user 110 sees not only the light generated by the organic electroluminescent device 100 but also the reflected light of the external light. As a result, the contrast ratio of the light generated by the organic electroluminescent device 100 is Will be significantly lower.

That is, in the conventional organic electroluminescent device 100, the user 110 generally views the screen of the organic electroluminescent device 100 at an angle (30 degrees of 15 degrees each of the upper side 130a and the lower side 130b). When light is incident, the reflected light generated by the reflection of the external light also proceeds within 30 degrees. As a result, the user 110 sees the light and the reflected light generated by the organic electroluminescent device 100 simultaneously, so that the contrast ratio of the organic electroluminescent device 100 may appear to be reduced.

Accordingly, the present invention is to solve the above-mentioned disadvantages and problems of the prior art, to form a reflective film including a tapered edge surface having a taper angle of 15 degrees or more to scatter the reflected light to improve the display capability It is an object of the present invention to provide an apparatus and a method of manufacturing the same.

The object of the present invention is a substrate including a pixel area consisting of a plurality of unit pixels; A reflection film disposed on the unit pixel and including at least one tapered edge surface having a taper angle satisfying the following equation; And an organic electroluminescent device positioned on the reflective film and comprising a first electrode, an organic film layer including at least an organic light emitting layer, and a second electrode.

At this time, the equation is a first angle (a)> 1/2 (second angle (b) + third angle (c)).

In addition, the above object of the present invention comprises the steps of preparing a substrate; A semiconductor layer, a gate insulating film, a gate electrode, an interlayer insulating film, and a source / drain electrode are formed on the substrate, and when any one of the semiconductor layer, the gate electrode, or the source / drain electrode is formed, on the pixel region of the substrate. Forming at least one of a semiconductor layer pattern, a gate electrode pattern, or a source / drain electrode whose taper angle satisfies the following equation; Forming a planarization layer on the substrate; Forming a reflective film on the planarization layer; And forming a first electrode, an organic film layer including at least an organic light emitting layer, and a second electrode on the reflective film.

At this time, the equation is a first angle (a)> 1/2 (second angle (b) + third angle (c)).

Details of the above object and technical configuration of the present invention and the effects thereof according to the present invention will be more clearly understood by the following detailed description with reference to the drawings showing preferred embodiments of the present invention. In the drawings, the length, thickness, etc. of layers and regions may be exaggerated for convenience. Like numbers refer to like elements throughout.

2 is a cross-sectional view illustrating a principle of diffuse reflection of external light of an organic light emitting display device according to an exemplary embodiment.

Referring to FIG. 2, the reflective film 210 on the pixel area of the unit pixel of the organic EL device 200 is formed to include the tapered edge surface 215 having the first angle a.

The user 220 may use the organic electroluminescent device 200 having the reflective film 210 including the tapered edge surface 215 having the first angle a with respect to the main plane of the organic electroluminescent device 200. It is assumed that the organic electroluminescent device 200 is viewed within a second angle upward or downward with respect to the vertical direction 230, respectively. 2 illustrates only the second angle b viewed downward.

The external light 230 is incident at the third angle c, which is smaller than the second angle b, which is the angle seen by the user 220 in the direction 230 perpendicular to the main plane. In the external light 230, the reflected light 235 travels at a fourth angle d in a direction perpendicular to the main plane.

In this case, the fourth angle d, which is the reflection angle of the reflected light 235, may be calculated as '2 × first angle (a) to third angle (c)'. At this time, the fourth angle (d), which is the reflection angle of the reflected light 235, should be at least larger than the second angle (b), which is the angle that the user 220 sees, and must satisfy Equation 1 below.

2 x 1st angle (a)-3rd angle (c)> 2nd angle (b)

In addition, when [Equation 1] is arranged as a formula for the first angle a of the tapered edge surface 215, it may be summarized as Equation 2 below.

First angle (a)> 1/2 (second angle (b) + third angle (c))

Therefore, the angle formed between the tapered edge surface 215 and the main plane of the organic electroluminescent device should be formed at an angle larger than half of the second angle b and the third angle c. It can be seen that a problem such as a decrease in contrast ratio of the organic electroluminescent device does not occur.

In this case, if the second angle b, which is the angle that the user 220 sees, is assumed to be 15 degrees, the third angle c of the incident external light 230 is smaller than 15 degrees. do.

Therefore, when the angles of the second angle b and the third angle c are input and calculated in [Equation 2], the first angle a, that is, the taper of the tapered edge surface 215 It can be seen that the angle should be at least 15 degrees.

3 is a cross-sectional view of a process of manufacturing an organic electroluminescent device according to one embodiment of the present invention.

Referring to FIG. 3, after the buffer layer 305 is formed on a transparent insulating substrate 300 such as glass or plastic, an amorphous silicon layer is formed on the buffer layer, the amorphous silicon layer is crystallized to be polycrystalline or A single crystal silicon layer is formed and patterned to form a semiconductor layer 310.

In this case, the buffer layer 305 serves to prevent the diffusion of moisture or impurities generated in the lower substrate or to control the rate of heat transfer during crystallization, thereby making crystallization of the semiconductor layer 310 possible.

In this case, the amorphous silicon may be chemical vapor deposition (Physical Vapor Deposition) or physical vapor deposition (Physical Vapor Deposition). In addition, when the amorphous silicon is formed or after the formation of the dehydrogenation process may be carried out to lower the concentration of hydrogen. The crystallization method is RTA (Rapid Thermal Annealing) process, SPC (Solid Phase Crystallization), MIC (Metal Induced Crystallization), MILC (Metal Induced Lateral Crystallization), SGS (Super Grain Silicon), ELA (Excimer Laser) Crystallization) or SLS method (Sequential Lateral Solidification) may be used.

Subsequently, a gate insulating layer 315 is formed on the entire surface of the substrate on which the semiconductor layer 310 is formed, a gate electrode forming material is formed on the gate insulating layer 315, and then patterned to form the gate electrode 320. After the gate electrode 320 is formed, an impurity ion implantation process may be performed using the gate electrode 320 as a mask to define a source / drain and a channel region in the semiconductor layer 320. .

Subsequently, an interlayer insulating film 325 is formed on the entire surface of the substrate, and the interlayer insulating film 325 is formed to protect elements or be formed under the electrical insulation. In this case, the buffer layer 305, the gate insulating film 315, and the interlayer insulating film 325 are formed using an oxide film or a nitride film such as a silicon oxide film or a silicon nitride film.

Subsequently, a contact hole 330 is formed on the substrate on which the interlayer insulating film 325 is formed to expose the source / drain regions formed in the semiconductor layer 310, and a source / drain electrode material is deposited on the entire surface of the substrate. Patterning to form the source / drain electrodes 335.

In this case, when the source / drain electrode material is patterned to form the source / drain electrode 335, the source / drain electrode pattern 340 is formed on the interlayer insulating layer 325 on the pixel region P.

In this case, the source / drain electrode pattern 340 has a tapered edge surface 344 having a taper angle 342 that follows the formula of Equation 2 described above with reference to the plane of the interlayer insulating layer 325. It is formed to include).

Although not illustrated in FIG. 3, when the semiconductor layer 310 or the gate electrode 320 is formed, the buffer layer 305 and the gate insulating layer 315 are formed on the buffer layer 305 and the gate insulating layer 315 in the same manner as the source / drain electrode pattern 340. The semiconductor layer pattern or the gate electrode pattern may be formed in each.

Next, a planarization layer 345 is formed over the entire surface of the substrate.

Subsequently, a reflective film 350 is formed on the pixel region P. FIG.

In this case, the planarization layer 345 is formed along the morphology of the lower source / drain electrode pattern 340, and the same also applies to the reflective film 350 formed on the planarization layer 345. Therefore, the reflective film 350 formed on the planarization layer 345 has a taper angle according to [Equation 2].

Subsequently, a portion of the planarization layer 345 is etched to form a via hole 355 exposing a portion of the source / drain electrode 335.

Subsequently, a transparent conductor such as indium tin oxide (ITO) or indium zinc oxide (IZO) is deposited over the entire surface of the substrate, and then patterned to form a first electrode 360.

Subsequently, a pixel definition layer 365 exposing a predetermined region of the first electrode 360 is formed on the substrate on which the first electrode 360 is formed.

Subsequently, an organic layer 370 including at least an organic light emitting layer is formed on the first electrode 360. In this case, the organic film layer preferably further comprises a hole injection layer, a hole transport layer, an electron transport layer and an electron injection layer.

Subsequently, a second electrode 375 is formed on the organic layer 370.

Accordingly, an organic electroluminescent device manufactured according to an embodiment of the present invention forms a thin film transistor including a semiconductor layer, a gate electrode, and a source / drain electrode, that is, the semiconductor layer, the gate electrode, and / or the source / When patterning the material for forming the drain electrode, a semiconductor layer pattern, a gate electrode pattern, and / or a source / drain electrode pattern are formed on the pixel area, and the taper angles satisfying the equation of [Equation 2] are angled. Form them. In addition, the reflective film located on the upper part of the pattern forms a reflective film including a tapered edge surface having a taper angle that satisfies the equation of [Equation 2] under the influence of the morphology of the lower patterns. By scattering the external light by the principle described above in 2 to prevent the reflected light from affecting the user, the contrast ratio of the organic electroluminescent device exposed to the external light is not reduced.

The present invention has been shown and described with reference to the preferred embodiments as described above, but is not limited to the above embodiments and those skilled in the art without departing from the spirit of the present invention. Various changes and modifications will be possible.

Therefore, the organic electroluminescent device of the present invention and the method of manufacturing the organic electroluminescent device which improves the display ability by forming a reflective film including a tapered edge surface having a taper angle of 15 degrees or more to scatter reflected light by incident external light There is an effect that can provide.

Claims (8)

  1. A substrate including a pixel area formed of a plurality of unit pixels;
    A reflection film disposed on the unit pixel and including one or a plurality of tapered edge surfaces having a taper angle satisfying the following equation; And
    Located on the reflective film, the organic film layer and the second electrode including a first electrode, an organic light emitting layer
    Organic electroluminescent device comprising a.
    [Equation] First angle (a)> 1/2 (second angle (b) + third angle (c))
    In this case, the first angle (a) is the taper angle of the tapered edge, the second angle (b) is the lower angle among the angles at which the user views the organic electroluminescent device, and the third angle (c) is the organic electroluminescent device. Angle of external light perpendicular to the principal plane of
  2. The method of claim 1,
    And one or more of a semiconductor layer pattern, a gate electrode pattern, and a source / drain electrode pattern under the reflective layer.
  3. The method of claim 2,
    And the semiconductor layer pattern, the gate electrode pattern, and the source / drain electrode pattern include a tapered edge surface having a predetermined taper angle.
  4. The method of claim 3, wherein
    And said predetermined taper angle is at least 15 degrees.
  5. The method of claim 1,
    The organic electroluminescent device further includes a thin film transistor including a semiconductor layer, a gate insulating film, a gate electrode, an interlayer insulating film, and a source / drain electrode in the unit pixel, and a planarization layer disposed on the thin film transistor. Electroluminescent device.
  6. The method of claim 1,
    The taper angle of the tapered edge surface is at least 15 degrees.
  7. The method of claim 1,
    And the first electrode is a transparent conductor.
  8. Preparing a substrate;
    A semiconductor layer, a gate insulating film, a gate electrode, an interlayer insulating film, and a source / drain electrode are formed on the substrate, and when any one of the semiconductor layer, the gate electrode, or the source / drain electrode is formed, on the pixel region of the substrate. Forming one or a plurality of semiconductor layer patterns, gate electrode patterns, or source / drain electrodes whose taper angles satisfy the following equations;
    Forming a planarization layer on the substrate;
    Forming a reflective film on the planarization layer; And
    Forming a first electrode, an organic layer including an organic emission layer, and a second electrode on the reflective layer
    Organic electroluminescent device manufacturing method comprising a.
    [Equation] First angle (a)> 1/2 (second angle (b) + third angle (c))
    In this case, the first angle (a) is the taper angle of the tapered edge, the second angle (b) is the lower angle among the angles at which the user views the organic electroluminescent device, and the third angle (c) is the organic electroluminescent device. The angle of external light perpendicular to the principal plane of the plane).
KR1020050097163A 2005-10-14 2005-10-14 Organic electroluminescence device and Method for fabricating the same KR100752378B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9577208B2 (en) 2014-12-01 2017-02-21 Samsung Display Co., Ltd. Organic light emitting diode display

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080111693A (en) 2007-06-19 2008-12-24 삼성모바일디스플레이주식회사 Fabricating method of polycrystalline silicon, tft fabricated using the same, fabricating method of the tft, and organic lighting emitting diode(oled) display device comprising the same
KR101117737B1 (en) 2010-03-02 2012-02-24 삼성모바일디스플레이주식회사 Organic light emitting display apparatus
WO2016060089A1 (en) * 2014-10-16 2016-04-21 シャープ株式会社 Light emitting element, display panel, display device, electronic device and method for producing light emitting element
JP6306207B2 (en) * 2014-11-27 2018-04-04 シャープ株式会社 Light emitting element, display panel, display device, electronic device, light emitting element manufacturing method

Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2002198184A (en) 2000-10-18 2002-07-12 Sharp Corp Light-emitting display element
JP2002251145A (en) 2001-02-23 2002-09-06 Matsushita Electric Ind Co Ltd Light emitting display device
JP2002311854A (en) 2001-04-19 2002-10-25 Sharp Corp Luminous display element and information terminal device
JP2003257662A (en) 2002-03-04 2003-09-12 Sanyo Electric Co Ltd Electroluminescence display device and its manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002198184A (en) 2000-10-18 2002-07-12 Sharp Corp Light-emitting display element
JP2002251145A (en) 2001-02-23 2002-09-06 Matsushita Electric Ind Co Ltd Light emitting display device
JP2002311854A (en) 2001-04-19 2002-10-25 Sharp Corp Luminous display element and information terminal device
JP2003257662A (en) 2002-03-04 2003-09-12 Sanyo Electric Co Ltd Electroluminescence display device and its manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9577208B2 (en) 2014-12-01 2017-02-21 Samsung Display Co., Ltd. Organic light emitting diode display

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