KR100751334B1 - OLED and method for fabricating the same - Google Patents

Abstract

The present invention provides an organic light emitting device that can improve the characteristics of the anode electrode by applying a positive voltage to the short bar that commonly connects the anode electrode to the ozone ion to impact the anode electrode with a stronger force during the plasma treatment And a preparation method thereof.

Method of manufacturing an organic light emitting device of the present invention comprises the steps of providing a disk having a plurality of organic light emitting unit; Forming a plurality of first electrodes, a plurality of electrode terminal portions for providing a predetermined signal to the first electrodes, and short bars for energizing the plurality of electrode terminals; Providing a predetermined voltage to the first electrode; Surface-treating only the surface of the first electrode using plasma by a voltage applied to the first electrode; Forming an organic film having a light emitting layer on the substrate; Forming a plurality of second electrodes on the substrate; Sealing each of the plurality of organic light emitting units by using the plurality of encapsulation means; Cutting the disc.

Description

Organic electroluminescent device and manufacturing method thereof {OLED and method for fabricating the same}

1 is a plan view for explaining a plasma processing process of a conventional organic electroluminescent device;

2 is a schematic perspective view of a substrate for an organic light emitting diode according to an embodiment of the present invention;

3A is a plan view of an organic light emitting diode according to an embodiment of the present invention;

3B is a cross-sectional view of an organic light emitting diode according to an embodiment of the present invention;

4 is a plan view for explaining a plasma processing process of an organic light emitting diode according to an embodiment of the present invention;

5A is a characteristic diagram before and after plasma surface treatment in a conventional organic light emitting device,

5B is a view showing characteristics before and after plasma surface treatment in the organic EL device of the present invention;

Explanation of symbols on the main parts of the drawings

100: substrate for the organic EL device 110: disc

120: anode electrode 125: anode electrode terminal portion

130: organic layer 140: cathode electrode

145: cathode electrode terminal portion 150; Sealing board

127: Short Bar

The present invention relates to an organic light emitting device, and more particularly, by applying a positive voltage to a short bar that commonly connects the anode electrode to allow ozone ions to impact the anode electrode with a stronger force during plasma treatment, thereby providing an anode. The present invention relates to an organic light emitting device capable of improving the characteristics of an electrode, and a method of manufacturing the same.

The organic light emitting device includes an anode electrode arranged in one direction at a predetermined interval on a substrate, a cathode electrode arranged at a predetermined interval to intersect the anode electrode, and an organic light emitting layer interposed between the anode electrode and the cathode electrode. The light emitting device is a light emitting device in which light is emitted to an organic light emitting layer between two electrodes according to a voltage provided to an anode electrode and a cathode electrode.

The organic light emitting device, which is a self-light emitting device, is widely used as a display device because of its advantages such as excellent resolution, impact resistance, and full color. One of the most important elements required in such an organic light emitting device is luminous efficiency and long life. The luminous efficiency of the light emitted from the light emitting layer of the organic light emitting device is highly dependent on the interface characteristics between the anode electrode and the organic film layer formed on the anode electrode, the luminous efficacy affects the life of the device.

Various methods for improving the luminous efficiency of the organic light emitting device have been tried. One method of increasing the luminous efficiency is to increase the work function of the ITO film used as the anode electrode to increase the carrier injection into the organic light emitting layer. One of the methods of increasing the work function of such an ITO film is to surface-treat the surface of the anode electrode.

Korean Patent Publication No. 2001-0057125 discloses a method of manufacturing an organic light emitting device for treating the surface of the ITO film by SF plasma. That is, the method of manufacturing an organic light emitting device of the domestic patent comprises forming an ITO film with an anode electrode on a substrate and then cleaning the surface of the ITO film; Surface treating the washed ITO film using SF plasma; Forming a light emitting layer on the ITO film; It is a technique for improving the efficiency of the device by providing a cathode, thereby increasing the work function of the anode electrode to facilitate the injection of holes from the anode electrode to the light emitting layer.

On the other hand, Japanese Patent Application Laid-Open No. 2000-133466 discloses a charge injection type light emitting device in which an interface between an anode electrode and an organic film layer is improved by surface treatment of an ITO film using oxygen ions or electrons.

That is, forming an ITO film as an anode electrode on the substrate; Generating an oxygen plasma to surface treat the surface of the ITO film; Forming a light emitting layer; It is a technique for increasing the efficiency of the device by modifying the surface of the ITO to increase the work function of the ITO film, including forming a cathode electrode.

FIG. 1 schematically illustrates a plan view of an organic light emitting device for explaining a method of plasma treating an ITO film, which is a conventional anode electrode.

Referring to FIG. 1, the organic light emitting diode 10 includes a plurality of first electrodes 20 arranged in one direction on a substrate, and an insulating film 23 is arranged between the plurality of first electrodes 20. . The first electrode terminal part 25 for providing a predetermined signal to the plurality of first electrodes 20 is arranged, and the first electrode terminal part 25 is connected to each other by a short bar 27 so as to be energized. .

Although not shown in the drawing, a plurality of second electrodes intersecting with the first electrode 20 are arranged, and an organic film layer including an emission layer is interposed between the first electrode 20 and the second electrode.

Attached to the surface of the ITO pattern constituting 15 to first electrode 20 by giving sprayed uniformly on the substrate prior art, ozone (O3 ^{- -)} made of oxygen into a plasma state to create a 15, ozone (O3) Particles, etc., were removed, and active oxygen, that is, ozone (O 3 ⁻ ) 15 was injected to the surface of the ITO pattern.

Therefore, when the plasma treatment is performed in the same manner as the conventional method, as shown in FIG. 5A, the hole injection efficiency of the ITO pattern surface-treated using O2 plasma is improved as compared to the pure ITO pattern without the surface treatment. Can be.

However, the surface treatment method using the conventional O2 plasma can be seen that when the organic light emitting device is used for a long time, the oxygen concentration is lowered while oxygen is decomposed and the hole injection efficiency is lower than that without the surface treatment. Accordingly, there is a problem that the luminance of the organic light emitting device is lowered and the lifespan is shortened.

In addition, in the conventional plasma processing method, not only the ITO pattern which is the first electrode, but also the surface of the insulating film arranged between the ITO patterns is in contact with ozone (O3 ⁻ ), thereby causing physical roughness on the surface of the insulating film.

The surface roughness of the insulating film becomes rough when grains of the second electrode made of Al formed in a subsequent process become rough, thereby easily forming an interfacial oxide film between the insulating film and the second electrode. The oxide film formed at the interface between the insulating film and the second electrode has a problem of shrinking the second electrode or deteriorating the device.

The present invention is to solve the problems of the prior art as described above, the organic light emitting device that can improve the brightness and life by applying a predetermined voltage to the ITO pattern of the anode electrode and then performing a surface treatment and its manufacture The purpose is to provide a method.

In addition, another object of the present invention is to apply a predetermined voltage to the ITO pattern of the anode electrode and then perform a surface treatment to suppress the occurrence of physical roughness on the surface of the insulating film to prevent degradation of the organic light emitting device It is to provide an element and a method of manufacturing the same.

In order to achieve the above object, the present invention comprises the steps of providing a disk having a plurality of organic light emitting unit; Forming a plurality of first electrodes, a plurality of electrode terminal portions for providing a predetermined signal to the first electrodes, and short bars for energizing the plurality of electrode terminals; Providing a predetermined voltage to the first electrode; Surface-treating only the surface of the first electrode using plasma by a voltage applied to the first electrode; Forming an organic film having a light emitting layer on the substrate; Forming a plurality of second electrodes on the substrate; Sealing each of the plurality of organic light emitting units by using the plurality of encapsulation means; It provides a method for producing an organic light emitting device comprising the step of cutting the disc.

The first electrode includes an ITO pattern, and a positive voltage of a predetermined level is applied to the first electrode through a short bar.

The voltage applied to the first electrode is characterized in that it has a range of 0.1kV to 10kV.

In the surface treatment step, O 3 ⁻ ions are accelerated and injected only into the surface of the ITO pattern by a positive voltage applied to the first electrode using an O 2 plasma.

In addition, the present invention includes a plurality of first electrodes formed on a substrate, with an insulating film interposed therebetween; A plurality of second electrodes arranged to intersect the first electrode; Providing an organic light emitting device having an organic layer interposed between a first electrode and a second electrode, wherein the first electrode includes an ITO pattern, and the surface of the ITO pattern of the first electrode is O 2 plasma; It is characterized by.

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

2 is a partial perspective view of a substrate for an organic light emitting diode according to an embodiment of the present invention.

Referring to FIG. 2, the substrate 100 for an organic light emitting device of the present invention is provided with a single large mother board 110. The disc 110 includes a glass substrate or a plastic substrate. The disc 110 is provided with a plurality of organic light emitting units (105 in Figure 3a).

Organic light emitting devices 101 are arranged in the organic light emitting unit 105 of the disc 110, and each organic light emitting device 101 is provided with a plurality of first electrodes 120 and a plurality of organic light emitting devices 101, as shown in FIG. The second electrode 140 is provided. The organic light emitting unit 105 is sealed by the sealing means 150 using a sealing material (170 in FIG. 3b). The encapsulation means 150 includes a glass substrate, a plastic substrate or a metal cap.

A plurality of first electrode terminals 125 are connected to the first electrode 120 at one edge of the encapsulation means 150 to provide a predetermined voltage, for example, a positive voltage, to the first electrode 120. A plurality of second electrode terminal portions connected to the second electrode 140 at other edges of the encapsulation means 150 to provide a predetermined voltage, for example, a negative voltage, to the second electrode 140. 145 is withdrawn.

In the embodiment of the present invention, the first electrode terminal portion 125 and the second electrode terminal portion 145 are respectively configured to be drawn out from different side edges of the encapsulation means 150, but the first electrode terminal portion 125 and the second electrode portion 145 are drawn out. The electrode terminal unit 145 may be configured to be drawn out from one edge at the same time.

In this case, the first electrode terminal portion 125 and the second electrode terminal portion 145 are connected to be energized by the short bar 127 for testing or aging in a subsequent test process. The energized first electrode terminal 125 and the second electrode terminal 145 are cut along the scribe lines 181 and 185 in a subsequent cutting process, so that the organic light emitting device 101 When made into individual elements, they are separated individually.

3A illustrates a schematic plan view of an organic light emitting diode according to an embodiment of the present invention, and FIG. 3B illustrates a schematic cross-sectional view of an organic light emitting diode according to an embodiment of the present invention. 3B is a cross-sectional view of the organic light emitting diode 101 taken along line III-III of FIG. 3A.

The organic light emitting device 101 includes a plurality of first electrodes 120, anode electrodes arranged at predetermined intervals in one direction on the organic light emitting unit 105 of the disc 110, and the first electrode 120 and the first electrode 120. The organic light emitting unit 105 is provided with a plurality of second electrodes 140 which are cathode electrodes arranged at regular intervals to cross each other. The first electrode 120 includes an ITO film, and the second electrode includes an Al film.

An organic layer 130 including an emission layer is interposed between the first electrode 120 and the second electrode 140. The organic layer 130 may include an organic layer selected from a hole injection layer, a hole transport layer, an organic light emitting layer, an electron injection layer and an electron transport layer, a hole suppression layer.

In the outer portion 111 of the organic light emitting unit 101, a plurality of first electrode terminals 125 drawn out from one side edge of the encapsulation substrate 150 and a plurality of agents drawn out from the other edge of the encapsulation substrate 150. The two electrode terminal portion 145 is arranged. The first electrode terminal 125 is connected to the plurality of first electrodes 120 arranged in the organic light emitting unit 101, and the second electrode terminal unit 145 is arranged in the organic light emitting unit 101. Are respectively connected to the second electrode 140.

As an example, the first electrode terminal 125 has a stacked structure of an ITO pattern 121 constituting the first electrode 120 and a metal pattern 122 such as Cr, and the second electrode terminal 145 is also formed. Although not shown in the drawings, the ITO pattern constituting the first electrode 120 and a metal pattern such as Cr have a stacked structure.

The organic light emitting unit 105 is encapsulated by the sealing means 150 by the sealing material 170. Although not shown in the drawings, the inner surface of the sealing means 150 may be provided with a moisture absorbent.

The method of manufacturing the substrate for an organic light emitting device of the present invention having the configuration as described above and the method of manufacturing the organic light emitting device using the same will be described with reference to FIGS. 2, 3A, 3B and 4 as follows. .

First, a large disc 110 to prepare a plurality of organic EL devices is prepared. As the disc 110, a substrate made of a glass substrate or a plastic substrate is used. The disc 110 includes a plurality of organic light emitting units 105.

Subsequently, a transparent conductive film, for example, an ITO film, is deposited on the disc 110 and then patterned by photolithography to form a plurality of first electrodes 120 having an ITO pattern in one direction. The first electrode 120 acts as an anode electrode.

When the first electrode 120 is formed, a plurality of first electrode terminals 125 connected to the first electrode 120 are formed on the outer portion 111 of the organic light emitting unit 105 of the disc 110. At the same time, a second electrode terminal portion 145 connected to the second electrode 140 to be formed in a subsequent process is formed.

In this case, the first electrode terminal 125 has a laminated structure of the ITO pattern 121 and the metal pattern 122 such as Cr, and is formed to be energized by the short bar 127. Similarly, the second electrode terminal portion 145 includes an ITO pattern and a Cr pattern.

Subsequently, an insulating film 123 is formed between the first electrodes 120 of the original plate 110, and then plasma treatment is performed on the surface of the ITO pattern, which is the first electrode 120. That is, as shown in FIG. 4, the first electrode receives a positive voltage within a predetermined level, for example, in the range of 0.1 kV to 10 kV through the first electrode terminal 125 that is energized with each other by the short bar 127. To (120).

After applying a positive voltage to the first electrode 120, oxygen is brought into a plasma state to form ozone (O3 ⁻ ) 115. The negatively charged ozone (O3 ⁻ ) 115 is accelerated to the surface of the first electrode 115 to which a positive voltage is applied. That is, the negatively charged ozone (O3 ⁻ ) 115 is not accelerated to the surface of the insulating film 123 but is accelerated only to the surface of the first electrode 120 by the electric force, and thus the first electrode 120. Ozone (O3 ⁻ ) 115 is injected only on the surface of the oxygen to increase the concentration of oxygen as shown in FIG. 5B.

The surface treatment method of the first electrode using the O2 plasma of the present invention intensively increases the concentration of oxygen on the surface of the first electrode 120, the increased oxygen concentration interface characteristics with the organic light emitting layer formed in a subsequent process This improves the luminance and increases the lifespan of the organic light emitting device.

In addition, in the surface treatment method of the present invention, as shown in FIG. 4, the short bar 127 is applied to the first electrode 120 such that ozone (O 3 ⁻ ) 115 strikes only the surface of the first electrode 120. applying a positive voltage through the by giving the surface of the insulating film 123, ozone (O3 ^-) is the 115 not collide. Therefore, no physical surface roughness is formed on the surface of the insulating film 123, and an oxide film is formed at the interface between the insulating film 123 and the second electrode 140 when the second electrode 140 made of Al is formed. This is suppressed.

The surface of the first electrode is plasma treated, and then the organic layer 130 is formed by a conventional method, and then the second electrode 140 arranged to intersect the first electrode 120 is formed. In this case, the second electrode 140 includes a metal film, for example, an Al film, and is formed to be connected to the second electrode terminal part 145. At this time, the second electrode terminal portion 145 is also configured to be connected so as to be energized by the short bar as shown in FIG.

Subsequently, the sealant 170 is applied to the periphery of the organic light emitting part 105, and then the organic light emitting part 105 is sealed by the encapsulation means 150 by the sealant 170. The encapsulation means 150 is bonded to the disc 110 by the sealant 170 at the periphery of the organic light emitting portion 105 to protect the organic light emitting portion 105.

After encapsulation with the sealing means 150, the original plate 110 is cut along the cutting lines 181 and 185 to manufacture the organic light emitting device 101. At this time, as shown in FIG. 1, the first electrode terminal 125 and the second electrode terminal 145 are also cut and separated from each other in a energized form.

In the exemplary embodiment of the present invention, the surface treatment of the O2 plasma is applied by applying a voltage to the ITO pattern used as the anode electrode of the organic light emitting diode. However, the present invention is not limited thereto, and the ITO pattern is used in the display device using the ITO pattern as the electrode. It is also possible to remove particles and the like adhering to the surface of the ITO pattern by applying a voltage to the O2 plasma surface treatment to increase the work function of the ITO pattern.

In addition, in the exemplary embodiment of the present invention, the organic light emitting device having the organic layer interposed between the first electrode and the second electrode arranged to cross each other has been described. However, the present invention is applicable to various types of organic light emitting devices.

According to the embodiment of the present invention as described above, by applying a voltage to the ITO pattern used as the anode electrode of the organic light emitting device and then performing O2 plasma treatment, it is possible to remove the particles and the like attached to the ITO pattern as well. Can increase work function Accordingly, there is an advantage in that the hole injection efficiency from the anode electrode to the light emitting layer can be increased to increase the brightness and extend the lifespan.

In addition, in the O2 plasma treatment method of the present invention, by applying a positive voltage to the ITO pattern used as the anode electrode and then performing O2 plasma treatment, ozone (O3 ⁻ ) is injected only to the surface of the ITO pattern, thereby physically insulating the insulating film. It prevents the formation of surface roughness. Therefore, there is an advantage that the formation of the oxide film at the interface between the insulating film and the second electrode can be suppressed during the formation of the second electrode made of Al, thereby preventing deterioration of the device.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

Claims (7)

Providing a disc having a plurality of organic light emitting units; Forming a plurality of first electrodes, a plurality of electrode terminal portions for providing a predetermined signal to the first electrodes, and short bars for energizing the plurality of electrode terminals; Providing a predetermined voltage to the first electrode; Surface-treating only the surface of the first electrode using plasma by a voltage applied to the first electrode; Forming an organic film having a light emitting layer on the substrate; Forming a plurality of second electrodes on the substrate; Sealing each of the plurality of organic light emitting units using a plurality of sealing means; The method of manufacturing an organic light emitting device comprising the step of cutting the disc. The method of claim 1, The first electrode of claim 1, wherein the organic light emitting device comprises a pattern. The method of claim 2, The voltage applied to the first electrode is a method of manufacturing an organic light emitting device, characterized in that the positive voltage of a predetermined level. The method of claim 3, The surface treatment step is a method of manufacturing an organic light emitting device, characterized in that by injecting O3 ^- ions only on the surface of the ITO pattern by a positive voltage applied to the first electrode using an O2 plasma. The method of claim 4, wherein A method of manufacturing an organic light emitting device according to claim 1, wherein a predetermined voltage is applied to the first electrode through a short bar. The method of claim 3, The voltage applied to the first electrode is a method of manufacturing an organic light emitting device, characterized in that in the range of 0.1kV to 10kV. A plurality of first electrodes formed on the substrate and having an insulating film interposed therebetween; A plurality of second electrodes arranged to intersect the first electrode; An organic film layer interposed between the first electrode and the second electrode, The first electrode includes an ITO pattern, The organic light emitting device of claim 1, wherein only a surface of the ITO pattern of the first electrode is subjected to O2 plasma by applying a predetermined voltage to the first electrode.

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