KR100699271B1 - 이송장치 - Google Patents
이송장치 Download PDFInfo
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- KR100699271B1 KR100699271B1 KR1020050112039A KR20050112039A KR100699271B1 KR 100699271 B1 KR100699271 B1 KR 100699271B1 KR 1020050112039 A KR1020050112039 A KR 1020050112039A KR 20050112039 A KR20050112039 A KR 20050112039A KR 100699271 B1 KR100699271 B1 KR 100699271B1
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- trolley
- guide
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Non-Mechanical Conveyors (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Abstract
Description
Claims (6)
- 제1방향과 제2방향으로 분기되는 분기부를 갖는 이송트랙과, 상기 이송트랙을 따라 이동하는 대차(vehicle)를 포함하는 이송장치에 있어서,상기 분기부의 일측에 마련되어 상기 대차가 상기 제1방향으로 주행하도록 유도하는 제1방향자기안내부와;상기 분기부의 타측에 마련되어 상기 대차가 상기 제2방향으로 주행하도록 유도하는 제2방향자기안내부와;상기 대차의 측면에 상기 제1방향자기안내부와 상기 제2방향자기안내부에 대응되도록 각각 마련되어 상기 제1방향자기안내부와 상기 제2방향자기안내부 중 전압이 인가된 어느 일측으로 자기유도되어 상기 분기부에서의 상기 대차의 이송경로를 안내하는 한 쌍의 자기유도안내판을 포함하는 것을 특징으로 하는 이송장치.
- 제1항에 있어서,상기 대차는,소정 물품이 적재되는 본체프레임과;상기 본체프레임의 하단부에 마련되며 양측에 상기 자기유도안내판을 갖는 자기유도안내판부와;상기 자기유도안내판부의 하단부에 마련되어 상기 본체프레임에 적재된 상기 물품의 하중을 지지하는 주바퀴과;상기 자기유도안내판부의 측면에 마련되어 상기 대차의 이송경로를 안내하는 측면바퀴를 포함하는 것을 특징으로 하는 이송장치.
- 제2항에 있어서,상기 이송트랙은,상면에 상기 주바퀴를 지지하는 주레일과;측면에 상기 측면바퀴를 지지하며 상기 본체가 상기 이송트랙을 따라 이송되도록 구속하는 측면레일을 포함하는 것을 특징으로 하는 이송장치.
- 제3항에 있어서,상기 제1방향자기안내부와 상기 제2방향자기안내부는,상기 측면레일의 분기부측에 마련되는 것을 특징으로 하는 이송장치.
- 제3항 또는 제4항에 있어서,상기 측면레일은,상기 자기안내판과 소정 간격 이격되도록 마련되는 것을 특징으로 하는 이송장치.
- 제1항 내지 제4항 중 어느 한 항에 있어서,상기 제1방향자기안내부와 상기 제2방향자기안내부는 전자석을 포함하는 것을 특징으로 하는 이송장치.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050112039A KR100699271B1 (ko) | 2005-11-22 | 2005-11-22 | 이송장치 |
CNA2006101371790A CN1970410A (zh) | 2005-11-22 | 2006-10-23 | 传送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050112039A KR100699271B1 (ko) | 2005-11-22 | 2005-11-22 | 이송장치 |
Publications (1)
Publication Number | Publication Date |
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KR100699271B1 true KR100699271B1 (ko) | 2007-03-28 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020050112039A KR100699271B1 (ko) | 2005-11-22 | 2005-11-22 | 이송장치 |
Country Status (2)
Country | Link |
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KR (1) | KR100699271B1 (ko) |
CN (1) | CN1970410A (ko) |
Cited By (4)
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KR101854046B1 (ko) | 2016-10-31 | 2018-05-02 | 세메스 주식회사 | Oht 장치 |
KR20190047905A (ko) * | 2017-10-30 | 2019-05-09 | 세메스 주식회사 | 비히클 및 이를 갖는 oht 장치 |
CN109881544A (zh) * | 2019-04-24 | 2019-06-14 | 北京九州动脉隧道技术有限公司 | 一种电磁道岔装置 |
EP4061752A4 (en) * | 2019-11-22 | 2023-08-23 | Abb Schweiz Ag | CONVEYOR, CONVEYOR SYSTEM AND METHOD OF MAKING CONVEYOR |
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US8616134B2 (en) | 2009-01-23 | 2013-12-31 | Magnemotion, Inc. | Transport system powered by short block linear synchronous motors |
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JP2001057712A (ja) | 1999-08-18 | 2001-02-27 | Toyota Autom Loom Works Ltd | リニアモータ駆動搬送車 |
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2005
- 2005-11-22 KR KR1020050112039A patent/KR100699271B1/ko active IP Right Grant
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2006
- 2006-10-23 CN CNA2006101371790A patent/CN1970410A/zh active Pending
Patent Citations (1)
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JP2001057712A (ja) | 1999-08-18 | 2001-02-27 | Toyota Autom Loom Works Ltd | リニアモータ駆動搬送車 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101854046B1 (ko) | 2016-10-31 | 2018-05-02 | 세메스 주식회사 | Oht 장치 |
KR20190047905A (ko) * | 2017-10-30 | 2019-05-09 | 세메스 주식회사 | 비히클 및 이를 갖는 oht 장치 |
KR102037955B1 (ko) | 2017-10-30 | 2019-11-26 | 세메스 주식회사 | 비히클 및 이를 갖는 oht 장치 |
CN109881544A (zh) * | 2019-04-24 | 2019-06-14 | 北京九州动脉隧道技术有限公司 | 一种电磁道岔装置 |
EP4061752A4 (en) * | 2019-11-22 | 2023-08-23 | Abb Schweiz Ag | CONVEYOR, CONVEYOR SYSTEM AND METHOD OF MAKING CONVEYOR |
US11780688B2 (en) | 2019-11-22 | 2023-10-10 | Abb Schweiz Ag | Conveyor, conveying system and manufacturing method of conveyor |
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Publication number | Publication date |
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CN1970410A (zh) | 2007-05-30 |
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