KR100693693B1 - 고효율 잉크 이송 프린트헤드, 잉크 이송 시스템 및 고효율 프린트헤드 제조 방법 - Google Patents

고효율 잉크 이송 프린트헤드, 잉크 이송 시스템 및 고효율 프린트헤드 제조 방법 Download PDF

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Publication number
KR100693693B1
KR100693693B1 KR1020000044089A KR20000044089A KR100693693B1 KR 100693693 B1 KR100693693 B1 KR 100693693B1 KR 1020000044089 A KR1020000044089 A KR 1020000044089A KR 20000044089 A KR20000044089 A KR 20000044089A KR 100693693 B1 KR100693693 B1 KR 100693693B1
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South Korea
Prior art keywords
resistor
printhead
ink
layer
resistor element
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Expired - Fee Related
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KR1020000044089A
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English (en)
Korean (ko)
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KR20010015482A (ko
Inventor
레간마이클제이
레반마지오
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휴렛-팩커드 컴퍼니(델라웨어주법인)
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Publication of KR20010015482A publication Critical patent/KR20010015482A/ko
Application granted granted Critical
Publication of KR100693693B1 publication Critical patent/KR100693693B1/ko
Assigned to 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. reassignment 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 권리의 전부이전등록 Assignors: 휴렛-팩커드 컴퍼니(델라웨어주법인)
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Expired - Fee Related legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14024—Assembling head parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ceramic Products (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
KR1020000044089A 1999-07-29 2000-07-29 고효율 잉크 이송 프린트헤드, 잉크 이송 시스템 및 고효율 프린트헤드 제조 방법 Expired - Fee Related KR100693693B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/364,278 US6336713B1 (en) 1999-07-29 1999-07-29 High efficiency printhead containing a novel nitride-based resistor system
US09/364,278 1999-07-29

Publications (2)

Publication Number Publication Date
KR20010015482A KR20010015482A (ko) 2001-02-26
KR100693693B1 true KR100693693B1 (ko) 2007-03-09

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Application Number Title Priority Date Filing Date
KR1020000044089A Expired - Fee Related KR100693693B1 (ko) 1999-07-29 2000-07-29 고효율 잉크 이송 프린트헤드, 잉크 이송 시스템 및 고효율 프린트헤드 제조 방법

Country Status (5)

Country Link
US (1) US6336713B1 (https=)
EP (1) EP1072418B1 (https=)
JP (1) JP2001071501A (https=)
KR (1) KR100693693B1 (https=)
DE (1) DE60021029T2 (https=)

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US6545339B2 (en) 2001-01-12 2003-04-08 International Business Machines Corporation Semiconductor device incorporating elements formed of refractory metal-silicon-nitrogen and method for fabrication
JP3503611B2 (ja) * 2001-04-13 2004-03-08 ソニー株式会社 プリンタヘッド、プリンタ及びプリンタヘッドの製造方法
US6450622B1 (en) * 2001-06-28 2002-09-17 Hewlett-Packard Company Fluid ejection device
KR100453058B1 (ko) * 2002-10-30 2004-10-15 삼성전자주식회사 잉크젯 프린트헤드
JP2004216889A (ja) * 2002-12-27 2004-08-05 Canon Inc 発熱抵抗体薄膜、これを用いたインクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置
US7249825B2 (en) * 2003-05-09 2007-07-31 Hewlett-Packard Development Company, L.P. Fluid ejection device with data storage structure
US7131714B2 (en) * 2003-09-04 2006-11-07 Lexmark International, Inc. N-well and other implanted temperature sense resistors in inkjet print head chips
US7080896B2 (en) * 2004-01-20 2006-07-25 Lexmark International, Inc. Micro-fluid ejection device having high resistance heater film
KR100560717B1 (ko) * 2004-03-11 2006-03-13 삼성전자주식회사 잉크젯 헤드 기판, 잉크젯 헤드 및 잉크젯 헤드 기판의제조방법
US7293359B2 (en) * 2004-04-29 2007-11-13 Hewlett-Packard Development Company, L.P. Method for manufacturing a fluid ejection device
US7387370B2 (en) * 2004-04-29 2008-06-17 Hewlett-Packard Development Company, L.P. Microfluidic architecture
US7377625B2 (en) * 2004-06-25 2008-05-27 Canon Kabushiki Kaisha Method for producing ink-jet recording head having filter, ink-jet recording head, substrate for recording head, and ink-jet cartridge
US7204574B2 (en) * 2004-06-30 2007-04-17 Lexmark International, Inc. Polyimide thickfilm flow feature photoresist and method of applying same
US7195343B2 (en) * 2004-08-27 2007-03-27 Lexmark International, Inc. Low ejection energy micro-fluid ejection heads
US7448729B2 (en) * 2005-04-04 2008-11-11 Silverbrook Research Pty Ltd Inkjet printhead heater elements with thin or non-existent coatings
US7419249B2 (en) * 2005-04-04 2008-09-02 Silverbrook Research Pty Ltd Inkjet printhead with low thermal product layer
US7901056B2 (en) * 2005-04-04 2011-03-08 Silverbrook Research Pty Ltd Printhead with increasing drive pulse to counter heater oxide growth
US7377623B2 (en) * 2005-04-04 2008-05-27 Silverbrook Research Pty Ltd Printhead heaters with a nanocrystalline composite structure
US7431431B2 (en) * 2005-04-04 2008-10-07 Silverbrook Research Pty Ltd Self passivating transition metal nitride printhead heaters
US7703891B2 (en) * 2005-12-07 2010-04-27 Samsung Electronics Co., Ltd. Heater to control bubble and inkjet printhead having the heater
JP5166970B2 (ja) * 2007-05-30 2013-03-21 キヤノン株式会社 記録ヘッド用素子基板及びその処理方法、記録ヘッド、並びに記録装置
JP5312202B2 (ja) * 2008-06-20 2013-10-09 キヤノン株式会社 液体吐出ヘッド及びその製造方法
KR20100080096A (ko) * 2008-12-31 2010-07-08 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP7786019B2 (ja) * 2021-02-26 2025-12-16 三菱マテリアル株式会社 窒化物絶縁体材料及びその製造方法並びに熱流スイッチング素子と熱電変換素子
US20240186030A1 (en) * 2021-02-26 2024-06-06 Mitsubishi Materials Corporation Nitride insulator material, method for producing same, heat flow switching element, and thermoelectric conversion element
WO2022181521A1 (ja) * 2021-02-26 2022-09-01 三菱マテリアル株式会社 窒化物半導体材料及びこれを備えた熱流スイッチング素子

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Also Published As

Publication number Publication date
DE60021029D1 (de) 2005-08-04
HK1032369A1 (en) 2001-07-20
JP2001071501A (ja) 2001-03-21
DE60021029T2 (de) 2006-06-08
EP1072418A2 (en) 2001-01-31
EP1072418A3 (en) 2001-06-13
EP1072418B1 (en) 2005-06-29
KR20010015482A (ko) 2001-02-26
US6336713B1 (en) 2002-01-08

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