KR100661284B1 - 유동층 반응기를 이용한 다결정실리콘 제조 방법 - Google Patents

유동층 반응기를 이용한 다결정실리콘 제조 방법 Download PDF

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Publication number
KR100661284B1
KR100661284B1 KR1020060013973A KR20060013973A KR100661284B1 KR 100661284 B1 KR100661284 B1 KR 100661284B1 KR 1020060013973 A KR1020060013973 A KR 1020060013973A KR 20060013973 A KR20060013973 A KR 20060013973A KR 100661284 B1 KR100661284 B1 KR 100661284B1
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South Korea
Prior art keywords
pressure
gas
silicon
fluidized bed
reaction
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Expired - Fee Related
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KR1020060013973A
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English (en)
Korean (ko)
Inventor
김희영
윤경구
박용기
최원춘
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한국화학연구원
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Priority to KR1020060013973A priority Critical patent/KR100661284B1/ko
Application granted granted Critical
Publication of KR100661284B1 publication Critical patent/KR100661284B1/ko
Priority to ES07708931T priority patent/ES2429568T3/es
Priority to RU2008136843/15A priority patent/RU2397953C2/ru
Priority to PCT/KR2007/000781 priority patent/WO2007094607A1/en
Priority to CN2007800054832A priority patent/CN101384510B/zh
Priority to US12/160,145 priority patent/US7771687B2/en
Priority to EP07708931.6A priority patent/EP1986956B1/en
Priority to JP2008555148A priority patent/JP4910003B2/ja
Assigned to 주식회사 케이에너지 reassignment 주식회사 케이에너지 권리의 전부이전등록 Assignors: 한국화학연구원
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
    • A01M1/00—Stationary means for catching or killing insects
    • A01M1/14—Catching by adhesive surfaces
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
    • A01M1/00—Stationary means for catching or killing insects
    • A01M1/02—Stationary means for catching or killing insects with devices or substances, e.g. food, pheronones attracting the insects
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
    • A01M2200/00—Kind of animal
    • A01M2200/01—Insects
    • A01M2200/012—Flying insects

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Pest Control & Pesticides (AREA)
  • Insects & Arthropods (AREA)
  • Engineering & Computer Science (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • Environmental Sciences (AREA)
  • Silicon Compounds (AREA)
  • Photovoltaic Devices (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
KR1020060013973A 2006-02-14 2006-02-14 유동층 반응기를 이용한 다결정실리콘 제조 방법 Expired - Fee Related KR100661284B1 (ko)

Priority Applications (8)

Application Number Priority Date Filing Date Title
KR1020060013973A KR100661284B1 (ko) 2006-02-14 2006-02-14 유동층 반응기를 이용한 다결정실리콘 제조 방법
JP2008555148A JP4910003B2 (ja) 2006-02-14 2007-02-14 流動層反応器を利用した多結晶シリコンの製造方法
PCT/KR2007/000781 WO2007094607A1 (en) 2006-02-14 2007-02-14 Method for preparing granular polycrystalline silicon using fluidized bed reactor
RU2008136843/15A RU2397953C2 (ru) 2006-02-14 2007-02-14 Способ производства гранулированного поликристаллического кремния в реакторе с псевдоожиженным слоем
ES07708931T ES2429568T3 (es) 2006-02-14 2007-02-14 Método para la producción de silicio policristalino granular utilizando un reactor de lecho fluidizado
CN2007800054832A CN101384510B (zh) 2006-02-14 2007-02-14 使用流化床反应器制备颗粒多晶硅的方法
US12/160,145 US7771687B2 (en) 2006-02-14 2007-02-14 Method for preparing granular polycrystalline silicon using fluidized bed reactor
EP07708931.6A EP1986956B1 (en) 2006-02-14 2007-02-14 Method for preparing granular polycrystalline silicon using fluidized bed reactor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060013973A KR100661284B1 (ko) 2006-02-14 2006-02-14 유동층 반응기를 이용한 다결정실리콘 제조 방법

Publications (1)

Publication Number Publication Date
KR100661284B1 true KR100661284B1 (ko) 2006-12-27

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Family Applications (1)

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KR1020060013973A Expired - Fee Related KR100661284B1 (ko) 2006-02-14 2006-02-14 유동층 반응기를 이용한 다결정실리콘 제조 방법

Country Status (8)

Country Link
US (1) US7771687B2 (https=)
EP (1) EP1986956B1 (https=)
JP (1) JP4910003B2 (https=)
KR (1) KR100661284B1 (https=)
CN (1) CN101384510B (https=)
ES (1) ES2429568T3 (https=)
RU (1) RU2397953C2 (https=)
WO (1) WO2007094607A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012170888A3 (en) * 2011-06-10 2013-06-20 Rec Silicon Inc Production of high purity silicon-coated granules
KR101450532B1 (ko) 2013-01-15 2014-10-14 주식회사 실리콘밸류 다결정 실리콘 제조장치
US9815041B2 (en) 2013-04-16 2017-11-14 Jiangsu Zhongneng Polysilicon Technology Development Co., Ltd. Fluidized bed reactor and a process using same to produce high purity granular polysilicon
KR20180031226A (ko) * 2016-09-19 2018-03-28 한화케미칼 주식회사 3염화 실란 합성용 유동층 반응기

Families Citing this family (36)

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KR100756310B1 (ko) * 2006-02-07 2007-09-07 한국화학연구원 입자형 다결정실리콘 제조용 고압 유동층반응기
KR100783667B1 (ko) * 2006-08-10 2007-12-07 한국화학연구원 입자형 다결정 실리콘의 제조방법 및 제조장치
DE102007021003A1 (de) 2007-05-04 2008-11-06 Wacker Chemie Ag Verfahren zur kontinuierlichen Herstellung von polykristallinem hochreinen Siliciumgranulat
WO2010002815A2 (en) 2008-06-30 2010-01-07 Memc Electronic Materials, Inc. Fluidized bed reactor systems and methods for reducing the deposition of silicon on reactor walls
CN103058194B (zh) 2008-09-16 2015-02-25 储晞 生产高纯颗粒硅的反应器
DE102009043947B4 (de) 2009-09-04 2011-07-07 G+R Technology Group AG, 93128 Anlage zur Herstellung von polykristallinem Silizium mit Vorrichtung zum Ausleiten gasförmiger Messproben
US9023425B2 (en) 2009-11-18 2015-05-05 Rec Silicon Inc Fluid bed reactor
KR20120110109A (ko) 2009-12-29 2012-10-09 엠이엠씨 일렉트로닉 머티리얼즈, 인크. 주변 실리콘 테트라염화물을 이용하여 반응기 벽 상의 실리콘의 퇴적을 감소시키는 방법
JP2011219286A (ja) * 2010-04-06 2011-11-04 Koji Tomita シリコン及び炭化珪素の製造方法及び製造装置
KR101329030B1 (ko) * 2010-10-01 2013-11-13 주식회사 실리콘밸류 유동층 반응기
US20120100061A1 (en) 2010-10-22 2012-04-26 Memc Electronic Materials, Inc. Production of Polycrystalline Silicon in Substantially Closed-loop Processes
US8449848B2 (en) 2010-10-22 2013-05-28 Memc Electronic Materials, Inc. Production of polycrystalline silicon in substantially closed-loop systems
US9156705B2 (en) 2010-12-23 2015-10-13 Sunedison, Inc. Production of polycrystalline silicon by the thermal decomposition of dichlorosilane in a fluidized bed reactor
US8849584B2 (en) 2010-12-29 2014-09-30 Sunedison, Inc. Systems and methods for particle size determination and control in a fluidized bed reactor for use with thermally decomposable silicon-containing gas
US8452547B2 (en) 2010-12-29 2013-05-28 Memc Electronic Materials, Inc. Systems and methods for particle size determination and control in a fluidized bed reactor
KR101329032B1 (ko) * 2011-04-20 2013-11-14 주식회사 실리콘밸류 다결정 실리콘 제조장치 및 이를 이용한 다결정 실리콘의 제조방법
WO2013049325A1 (en) * 2011-09-30 2013-04-04 Memc Electronic Materials, Inc. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
WO2013049314A2 (en) 2011-09-30 2013-04-04 Memc Electronic Materials, Inc. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor
US9212421B2 (en) 2013-07-10 2015-12-15 Rec Silicon Inc Method and apparatus to reduce contamination of particles in a fluidized bed reactor
US9587993B2 (en) 2012-11-06 2017-03-07 Rec Silicon Inc Probe assembly for a fluid bed reactor
CN103172381B (zh) * 2013-04-08 2014-03-26 无锡中彩科技有限公司 冷壁流化床的制备方法及其应用
CN103449442B (zh) * 2013-09-03 2015-03-18 浙江精功新材料技术有限公司 一种流化床多晶硅颗粒的制备系统及利用该系统制备多晶硅的工艺
US9585199B2 (en) * 2013-10-30 2017-02-28 Atomic Energy Council—Institute of Nuclear Energy Research Hybrid heating apparatus applicable to the moving granular bed filter
CN103673607B (zh) * 2013-12-04 2015-12-09 中国科学院过程工程研究所 一种可视化加热炉
JP6256073B2 (ja) * 2014-02-12 2018-01-10 日立化成株式会社 反応管及び触媒担持方法
US9238211B1 (en) 2014-08-15 2016-01-19 Rec Silicon Inc Segmented silicon carbide liner
US9446367B2 (en) 2014-08-15 2016-09-20 Rec Silicon Inc Joint design for segmented silicon carbide liner in a fluidized bed reactor
US9662628B2 (en) 2014-08-15 2017-05-30 Rec Silicon Inc Non-contaminating bonding material for segmented silicon carbide liner in a fluidized bed reactor
DE102015224099A1 (de) 2015-12-02 2017-06-08 Wacker Chemie Ag Wirbelschichtreaktor und Verfahren zur Herstellung von polykristallinem Siliciumgranulat
WO2017100564A1 (en) * 2015-12-11 2017-06-15 Sunedison, Inc. Reactor systems having multiple pressure balancers
WO2017100404A1 (en) * 2015-12-11 2017-06-15 Sunedison, Inc. Reactor systems having external pressure balancer
CN113840648B (zh) * 2019-03-28 2023-02-28 瑞科硅公司 流化床反应器的基于压力的控制
EP3878546A1 (de) 2020-03-13 2021-09-15 Linde GmbH Reaktor und verfahren zur durchführung einer chemischen reaktion
EP3900817A1 (de) 2020-04-23 2021-10-27 Linde GmbH Reaktor und verfahren zur durchführung einer chemischen reaktion
EP3900818A1 (de) * 2020-04-23 2021-10-27 Linde GmbH Reaktor und verfahren zur durchführung einer chemischen reaktion
CN114225849A (zh) * 2021-12-06 2022-03-25 亚洲硅业(青海)股份有限公司 一种硅颗粒生产装置及方法

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JPH0692617A (ja) * 1992-09-07 1994-04-05 Toagosei Chem Ind Co Ltd 種シリコン粒子の製造方法及び顆粒状多結晶シリコンの製造方法
JPH06127918A (ja) * 1992-10-15 1994-05-10 Tonen Chem Corp 多結晶シリコンの製造方法
KR960014593B1 (ko) * 1994-04-19 1996-10-16 재단법인 한국화학연구소 초단파에 의한 유동층 가열 방법에 의한 고순도 입상 다결정 실리콘의 제조 방법
JP2001146412A (ja) 1999-10-06 2001-05-29 Wacker Chemie Gmbh 流動床反応器及び高純度の多結晶シリコンの製造方法
KR100411180B1 (ko) 2001-01-03 2003-12-18 한국화학연구원 다결정실리콘의 제조방법과 그 장치

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JPH0692617A (ja) * 1992-09-07 1994-04-05 Toagosei Chem Ind Co Ltd 種シリコン粒子の製造方法及び顆粒状多結晶シリコンの製造方法
JPH06127918A (ja) * 1992-10-15 1994-05-10 Tonen Chem Corp 多結晶シリコンの製造方法
KR960014593B1 (ko) * 1994-04-19 1996-10-16 재단법인 한국화학연구소 초단파에 의한 유동층 가열 방법에 의한 고순도 입상 다결정 실리콘의 제조 방법
JP2001146412A (ja) 1999-10-06 2001-05-29 Wacker Chemie Gmbh 流動床反応器及び高純度の多結晶シリコンの製造方法
KR100411180B1 (ko) 2001-01-03 2003-12-18 한국화학연구원 다결정실리콘의 제조방법과 그 장치

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012170888A3 (en) * 2011-06-10 2013-06-20 Rec Silicon Inc Production of high purity silicon-coated granules
KR101450532B1 (ko) 2013-01-15 2014-10-14 주식회사 실리콘밸류 다결정 실리콘 제조장치
US9815041B2 (en) 2013-04-16 2017-11-14 Jiangsu Zhongneng Polysilicon Technology Development Co., Ltd. Fluidized bed reactor and a process using same to produce high purity granular polysilicon
KR101851543B1 (ko) * 2013-04-16 2018-04-24 지앙수 중넝 폴리실리콘 테크놀로지 디벨롭먼트 컴퍼니 리미티드 유동층 반응기 및 이를 이용한 고순도 입상 다결정 실리콘의 제조 방법
US10081003B2 (en) 2013-04-16 2018-09-25 Jiangsu Zhongneng Polysilicon Technology Development Co., Ltd. Fluidized bed reactor and a process using same to produce high purity granular polysilicon
KR20180031226A (ko) * 2016-09-19 2018-03-28 한화케미칼 주식회사 3염화 실란 합성용 유동층 반응기
KR101987129B1 (ko) 2016-09-19 2019-06-10 한화케미칼 주식회사 3염화 실란 합성용 유동층 반응기

Also Published As

Publication number Publication date
RU2008136843A (ru) 2010-03-20
EP1986956A1 (en) 2008-11-05
EP1986956A4 (en) 2012-10-10
EP1986956B1 (en) 2013-08-14
WO2007094607A1 (en) 2007-08-23
WO2007094607A8 (en) 2008-07-24
CN101384510A (zh) 2009-03-11
ES2429568T3 (es) 2013-11-15
JP4910003B2 (ja) 2012-04-04
JP2009526734A (ja) 2009-07-23
US20090004090A1 (en) 2009-01-01
US7771687B2 (en) 2010-08-10
CN101384510B (zh) 2012-08-29
RU2397953C2 (ru) 2010-08-27

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