KR100577612B1 - The device of vaccum evaporation using element of electroluminescence and that manufacture method - Google Patents

Abstract

The present invention enables to manufacture a plurality of organic electroluminescent devices in one process at the same time to be able to manufacture a plurality of devices under the same manufacturing process conditions to enable efficient evaluation in the evaluation of organic matter and to develop an optimal device structure The present invention relates to a deposition apparatus for an organic EL device and a method of manufacturing the organic EL device using the same,

The deposition apparatus of the organic electroluminescent device of the present invention includes a chamber having a predetermined space for depositing an organic light emitting material on a substrate according to a pattern by a predetermined mask; In order to be able to manufacture a plurality of devices arranged in M rows and N columns at the same time, the mask has M / 2 hole injection through holes for forming the hole injection layer (HIL) in units of two rows, and one row. One hole transfer through hole for forming the hole transfer layer (HTL) in units, N electron transfer through holes for forming the electron transfer layer (ETL) in units of one column, and metal common in two rows M / 2 electrode through-holes for forming the membrane, i.e., the cathode, are formed at predetermined intervals. At this time, the chamber is preferably provided with at least one substrate transfer means or mask transfer means capable of moving the substrate or mask relatively.

Description

Evaporation apparatus of organic electroluminescent element and manufacturing method of organic electroluminescent element using same {THE DEVICE OF VACCUM EVAPORATION USING ELEMENT OF ELECTROLUMINESCENCE AND THAT MANUFACTURE METHOD}             

1A to 1E are views for schematically illustrating a process of manufacturing an organic electroluminescent device according to a conventional technique.

2A to 2D are views for schematically explaining a process of manufacturing an organic EL device according to the present invention.

3 is a view for explaining a region where deposition is performed by the present invention.

<Explanation of symbols for the main parts of the drawings>

184: chamber 192: substrate

194: mask 211: first hole injection through hole

212: second hole injection through hole 220: hole transfer through hole

231: first electron transfer through hole 232: second electron transfer through hole

233: third electron transfer through hole 234: fourth electron transfer through hole

310: first row 320: second row

330: third row 340: fourth row

410: first column 420: second column

430: third column 440: fourth column

The present invention relates to a deposition apparatus for an organic electroluminescent device and a method of manufacturing an organic electroluminescent device using the same, and more particularly, it is possible to manufacture a plurality of organic electroluminescent devices in one step to evaluate the efficient evaluation of organic matter. The present invention relates to a vapor deposition apparatus for an organic electroluminescent element, and a manufacturing method of an organic electroluminescent element using the same.

In general, an organic electroluminescence (EL) device is an ultra-thin display device that realizes a color image by self-emission of an organic material, and has been attracting attention as a next-generation display device due to its simple structure and high light efficiency.

The structure of the organic electroluminescent device is typically a cathode made of indium tin oxide (ITO) and a cathode made of aluminum (Al) formed on a substrate made of glass, and a multilayer between them. The organic material layer is stacked by function, and emits light as an electric field is applied.

In this case, the multilayer organic material layer alternately deposits organic materials having a high refractive index and organic materials having a small refractive index to form a DBR layer, which includes a hole injection layer (HIL), a hole transporting layer (HTL), and an organic layer. A light emitting layer (EML) and an electron transporting layer (ETL) are sequentially stacked.

In the above configuration, light is emitted through recombination of holes and electrons transferred from the hole transport layer (HTL) and the electron transport layer (ETL) in the organic light emitting layer.

Apparatus for manufacturing the organic electroluminescent device as described above is a vacuum chamber, a heater (heater) to deposit the organic material by the heating method when placed in the vacuum chamber, a crucible containing the organic material, a deposited organic material Thickness measurement assembly to detect deposition rate, substrate fixing assembly to hold the deposited substrate, mask fixing assembly used to blow organic materials and metal, substrate moving assembly configured to move the substrate and mask, and vacuum It is composed of a substrate detachment assembly and the like configured to remove the substrate to the outside in the state.

1A to 1E are views for schematically explaining a process of manufacturing an organic EL device according to the related art.

Referring to the manufacturing process of the organic electroluminescent device with reference to the drawings, as shown in Figure 1a, the substrate 1 is loaded into a vacuum chamber (not shown) with a high vacuum of more than 1 * 10E-6. At this time, the substrate 1 to be loaded is formed with an anode electrode 2 made of ITO, an anode terminal wiring 3 connected thereto, and a cathode terminal wiring 4 to be connected to a cathode electrode to be formed by a later process. .

The number of organic electroluminescent elements manufactured according to the number of formation of the anode electrode 2 is determined. In the accompanying drawings, a process of manufacturing eight organic electroluminescent elements is illustrated in FIGS. 1A to 1E.

As described above, after the substrate 1 is loaded into the vacuum chamber, a process of depositing an organic material is performed. For this, the organic film mask 5 is fastened to the substrate 1 as shown in FIG. The organic material deposition process and the mask removal process are then performed. At this time, the organic material deposition process is made by stacking in the order of the hole injection layer (HIL), the hole transport layer (HTL), the light emitting layer (EML), the electron transport layer (ETL), according to the organic as shown in Figure 1c The film 6 is formed.

After the organic layer 6 is formed as described above, a cathode electrode process made of aluminum (Al) is performed. For this, the metal mask 7 is fastened to the substrate 1 as shown in FIG. 1D.

When the metal mask 7 is fastened and the metal deposition process is performed, and the metal mask 7 is removed, the cathode electrode 8 is formed as shown in FIG. 1E. In this case, the cathode electrode 8 is formed to be connected to the cathode terminal wiring 4 described with reference to FIG. 1A.

Meanwhile, in the development process of the organic EL device, the thickness of the hole transport layer (HTL), the light emitting layer (EML), and the electron transport layer (ETL) is varied and the organic matter is evaluated, and the optimum device structure is determined according to the organic material. There is a need for manufacturing a plurality of organic EL devices having various thicknesses.

However, according to the process according to the prior art as described above, there is a problem that a sample must be separately prepared for each structure for this purpose when experimenting to find the optimal device structure.

For example, if the thickness of the hole transport layer (HTL) and the electron transport layer (ETL) are changed to four thicknesses and the device is made to find the optimal conditions, a total of 16 devices should be made.

In particular, when the devices are made separately, manufacturing process conditions such as equipment deposition process and substrate state are not always the same. In this case, if repeated three times in order to improve the reliability, 48 devices need to be manufactured. Accordingly, there is a problem that the deposition time for determining the optimum structure of the device is long and the reliability of the manufactured device is lowered.

Due to the above reasons, a lot of difficulties arise in the evaluation of organic matter, and a lot of difficulties arise in finding an optimal device structure.

The present invention has been made to solve the problems of the prior art as described above, the object is to be able to manufacture a plurality of organic electroluminescent devices in one process at the same time to manufacture a plurality of devices in the same manufacturing process conditions The present invention provides a vapor deposition apparatus for an organic EL device and a method of manufacturing an organic EL device using the same.

In addition, another object of the present invention is to deposit an organic electroluminescent device and an organic electroluminescence using the same so that a plurality of devices manufactured under the same process conditions each have a different structure and characteristics to enable efficient evaluation in organic matter evaluation It is to provide a method of manufacturing a device.

According to a first aspect of the present invention for achieving the above object, a deposition apparatus of an organic electroluminescent device comprising a chamber having a predetermined space for depositing an organic light emitting material on a substrate according to a pattern by a predetermined mask. To

In order to be able to manufacture a plurality of devices arranged in M rows and N columns at the same time, the mask has M / 2 hole injection through holes for forming the hole injection layer (HIL) in units of two rows, and one row. One hole transfer through hole for forming the hole transfer layer (HTL) in units, N electron transfer through holes for forming the electron transfer layer (ETL) in units of one column, and metal common in two rows Provided is an evaporation apparatus for an organic electroluminescent device, wherein M / 2 electrode through holes for forming a film, that is, cathode electrodes, are formed at predetermined intervals.

At this time, according to an additional feature of the present invention, it is preferable that at least one substrate transfer means or mask transfer means is provided within the chamber to move the substrate or mask relatively. At this time, the substrate transfer means or mask transfer means using a micro motor, the minimum unit of the moving distance is preferably 1㎛.

In addition, according to another additional feature of the present invention, it is preferable that any one of thermal deposition, sputter deposition, and chemical vapor deposition (CVD) deposition processes be used in the chamber.

On the other hand, according to a second aspect of the present invention for achieving the above object, in the method of manufacturing an organic electroluminescent device using the vapor deposition apparatus shown above,

The hole injection layer HIL, the hole transfer layer HTL, the light emitting layer and the electron transfer layer ETL, and the cathode are sequentially formed while the deposition position is changed by driving the substrate transfer means or the mask transfer means. Provided is a method of manufacturing an organic electroluminescent device using a deposition apparatus for an organic electroluminescent device.

The above object and various advantages of the present invention will become more apparent from the preferred embodiments of the present invention described below with reference to the accompanying drawings by those skilled in the art.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2A to 2D are views for schematically explaining a process of manufacturing an organic EL device according to the present invention, and FIG. 3 is a view for explaining a region where deposition is performed according to the present invention.

The main feature of the present invention is a substrate transfer means that can change the shape of the mask 194 and relatively move the substrate 192 or the mask 194 in the deposition apparatus of the general organic electroluminescent device as described above (not shown) C) or a mask transfer means (not shown) is provided.

As described above, a conventional organic electroluminescent device deposition apparatus for implementing the present invention is a vacuum chamber, a heater (heater) to be deposited by the heating method, the organic material is contained in the vacuum chamber Crucibles, thickness measurement assemblies that can detect the deposition rate of the deposited organic matter, substrate holding assemblies that hold the deposited substrate, mask fixing assemblies used to blow organics and metals, substrates and masks It can be configured as a substrate transfer assembly configured to be able to, and a substrate release assembly configured to remove the substrate to the outside in a vacuum state.

According to an exemplary embodiment of the mask 194 according to the present invention, as illustrated in FIG. 2A, the first and second hole injection through holes 211 and 212 and the hole transfer layer HTL for forming the hole injection layer HIL are illustrated. Hole transfer through-holes 220 for the formation of the electron transport holes, first, second, third, and fourth electron transfer through-holes 231, 232, 233, and 234 for forming the electron transfer layer (ETL), and the metal common layer. That is, the first and second electrode through holes 241 and 242 for forming the cathode electrode are formed at predetermined intervals.

The deposition apparatus of the organic EL device according to the present invention has a structure in which the mask 194 is replaceable, and the deposition position is changed by driving a substrate transfer means (not shown) or a mask transfer means (not shown). The injection layer HIL, the hole transport layer HTL, the light emitting layer, the electron transport layer ETL, and the cathode are sequentially formed.

The substrate transfer means (not shown) or the mask transfer means (not shown) is preferably used as a micro motor, the minimum unit of the distance that can move the mask 194 is preferably 1㎛.

In addition, in the deposition apparatus of the organic electroluminescent device according to the present invention, all deposition processes such as thermal sputter deposition and chemical vapor deposition (CVD) may be used.

It will be described a process for manufacturing an organic EL device using the deposition apparatus of the organic EL device according to the present invention having the configuration as described above.

In the following description, a process of simultaneously depositing and fabricating 16 devices arranged in 4 rows and 4 columns will be described as an example. In this case, the description of the operation is omitted for the portion that normally proceeds.

First, when the substrate 192 as shown in FIG. 3 is loaded into the chamber, the first and second rows 310 and 320 are formed by the first hole injection through holes 211 as shown in FIG. 2A. ) Is exposed and deposition is performed while the third and fourth rows 330 and 340 are exposed by the second hole injection through hole 212 to form the hole injection layer HIL.

Subsequently, mask replacement is performed by a substrate transfer means (not shown) or a mask transfer means (not shown). As shown in FIG. 2B, the first row 310 is exposed by the hole transfer through hole 220. Form a hole transport layer (HTL) in the first row 310 by deposition in a state, and then move the substrate 192 or mask 194 by a predetermined distance to the hole transport through hole 220. As a result, deposition is performed while the second row 320 is exposed to form a hole transport layer HTL in the second row 320. This process is repeated to form the hole transport layer HTL in the third row 330 and the fourth row 340. In this case, all of the thicknesses of the hole transport layer HTL formed in the first, second, third, and fourth rows 310, 320, 330, and 340 are deposited differently.

Subsequently, mask replacement is performed by a substrate transfer means (not shown) or a mask transfer means (not shown) to form the light emitting layer and the electron transfer layer (ETL) again, as shown in FIG. 2C. Deposition is performed in a state where the first column 410 is exposed by the hole 231 to form an electron transport layer ETL in the first column 410, and then the substrate 192 or the mask by a predetermined distance. The electron transport layer ETL is formed in the second column 420 by moving the first electrode 194 by depositing the first column 420 by moving the first electrode 194 by moving the second column 420. By repeating the above process, that is, the third column 430 is exposed by the third electron transfer through hole 233 and the fourth electron transfer through hole 234 while moving the substrate 192 or the mask 194. Evaporation is performed in the state in which the fourth column 440 is exposed to form an electron transport layer ETL in the third column 430 and the fourth column 440. The thicknesses of the ETLs formed in the first, second, third, and fourth columns 410, 420, 430, and 440 are differently deposited.

Subsequently, mask replacement is performed by a substrate transfer means (not shown) or a mask transfer means (not shown) to form a metal common film, that is, a cathode electrode. As shown in FIG. 2D, the first electrode through hole 241 is replaced. The first and second rows 310 and 320 are exposed and the third and fourth rows 330 and 340 are exposed by the second electrode through hole 242 to perform metal deposition to form the cathode electrode. To form.

In each of the above processes, any one of thermal deposition, sputter deposition, and chemical vapor deposition (CVD) is used in the chamber.

Thus, the present invention can manufacture 16 devices in the same vacuum and substrate at the same time, it is possible to produce a sample with high reliability because all the deposition conditions are the same. As a result, by identifying the tendency of the device according to the thickness of each layer it is possible to develop the optimum device structure.

The present invention is not limited to the embodiments described above, and various modifications and changes can be made by those skilled in the art, which are included in the spirit and scope of the present invention as defined in the appended claims.

As described above, according to the deposition apparatus of the organic electroluminescent device and the method of manufacturing the organic electroluminescent device using the same according to the present invention, since a plurality of organic electroluminescent devices can be produced simultaneously in one step, the same manufacturing process conditions In order to manufacture a plurality of devices in the effect that it is possible to manufacture a sample with high reliability.

In addition, since it is possible to grasp the tendency of the device according to the thickness of each layer in a plurality of devices manufactured under the same process conditions, it is possible to efficiently evaluate the organic material evaluation, and thus it is possible to develop an optimal device structure. .

Claims (5)

In the deposition apparatus of the organic electroluminescent device comprising a chamber having a predetermined space for depositing the organic light emitting material on the substrate according to a pattern by a predetermined mask, In order to be able to manufacture a plurality of devices arranged in M rows and N columns at the same time, the mask has M / 2 hole injection through holes for forming the hole injection layer (HIL) in units of two rows, and one row. One hole transfer through hole for forming the hole transfer layer (HTL) in units, N electron transfer through holes for forming the electron transfer layer (ETL) in units of one column, and metal common in two rows M / 2 electrode through-holes for forming a film, i.e., a cathode, are formed at predetermined intervals. The method of claim 1, And at least one substrate transfer means or mask transfer means capable of relatively moving the substrate or mask in the chamber. The method of claim 2, The substrate transfer means or the mask transfer means using a micro motor, the minimum unit of the movement distance of the deposition apparatus of the organic electroluminescent device, characterized in that 1㎛. The method of claim 1, The deposition apparatus of an organic electroluminescent device, wherein any one of thermal deposition, sputter deposition, and chemical vapor deposition (CVD) is used in the chamber. In the manufacturing method of the organic electroluminescent element using the vapor deposition apparatus of the organic electroluminescent element of Claim 1, The hole injection layer HIL, the hole transfer layer HTL, the light emitting layer and the electron transfer layer ETL, and the cathode are sequentially formed while the deposition position is changed by driving the substrate transfer means or the mask transfer means. A method of manufacturing an organic electroluminescent device using a deposition apparatus of an organic electroluminescent device.

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