KR100540471B1 - System for automatically operating single wafer type equipment used in manufacturing semiconductor and method using for the same - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

The present invention relates to an automated system and method of sheetfed equipment for semiconductor manufacturing and a recording medium for realizing the same.

2. The technical problem to be solved by the invention

The present invention provides a cassette containing a lot to be processed in a corresponding process without direct intervention by an operator using an automatic transportation means in a semiconductor manufacturing process operated by an integrated automation system for semiconductor line management, and automatically processing process data. The present invention aims to provide an automated system and method for the production of sheetfed equipment for semiconductor manufacturing and management, and a computer readable recording medium for realizing the same.

3. Summary of Solution to Invention

The present invention includes a first step of setting on-line between the equipment server and the sheet type equipment in response to an equipment mode change command input from an operator interface process; A second step of providing a cassette to the sheet type equipment by the automatic transportation means receiving the cassette providing request message from the equipment server; A third step of storing and managing data generated to process the lot provided from the automatic transportation means; And a fourth step in which the automatic transportation means recovers the cassette containing the processed lot from the sheet type equipment.

4. Important uses of the invention

The present invention is used for the automation of sheetfed equipment.

Equipment server, sheet type equipment, automatic transportation means, trace data, process data

Description

Sheet type equipment automation system and method for manufacturing semiconductors {SYSTEM FOR AUTOMATICALLY OPERATING SINGLE WAFER TYPE EQUIPMENT USED IN MANUFACTURING SEMICONDUCTOR AND METHOD USING FOR THE SAME}             

1 is a block diagram showing a schematic configuration of a conventional sheet type equipment operating system for semiconductor manufacturing.

2A and 2B are SECS-II message flow charts applied to the system of FIG. 1 to operate sheetfed equipment.

Figure 3 is a block diagram showing the schematic configuration of a sheet type equipment automation system for semiconductor manufacturing according to the present invention.

Figure 4 is an embodiment flow for carrying out the method for automated sheetfed equipment for semiconductor manufacturing according to the present invention.

5A and 5B are SECS-II message flow diagrams for carrying out the method of automated sheetfed equipment for semiconductor fabrication of FIG.

* Explanation of symbols for the main parts of the drawings

300: operator interface process 302: equipment server

304: automatic transport means 306: stocker

104: Sheetfed Equipment 310: Trace Data File

312: Data Collection Server 314: Master Database

The present invention relates to an automated system and method of single wafer type equipment by an integrated automation system for semiconductor line management, and a computer-readable recording medium for realizing the same.

In general, the sheetfed equipment has two ports, when the cassette is provided to the equipment, the operator directly inputs the door opening / closing command of the equipment to the sheetfed equipment, and the operator directly inputs the cassette to the port of the sheetfed equipment. to provide.

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 With reference to the accompanying Figures 1 to 2b will be described briefly with respect to the schematic configuration and operation method of a conventional sheet type equipment operating system for semiconductor manufacturing.

First, referring to the system configuration, as shown in FIG. 1, an operator interface process 100 for receiving an operator's command and providing the operator's command to the equipment server, and receiving the operator's command from the operator interface processor, is provided to the sheet type equipment. An equipment server 102 for generating a trace data file by receiving a trace data which is a condition of a previous process for transmitting a command, sending and receiving a message to each other, and setting process data and process conditions, and the equipment server 102. Send and receive messages and proceed with the process, and the single-sheet equipment 104 for transmitting the trace data and process data to the equipment server 102, and the trace data for storing the trace data provided from the equipment server 102 File 106 and the data for processing the process data provided from the equipment server 102 and stored in the master database Data collection server 108, and the master database 110 for storing the process data provided by the data collection server 108.

Referring now to Figures 2A and 2B, a description will be given of a conventional Semi Equipment Communications Standard-II (SECS-II) message flow for operating sheetfed equipment on the system of Figure 1.

First, when the operator instructs the mode change to the sheet type equipment 104 (200), the sheet type equipment 104 and the equipment server 102 mutually present a presence confirmation message (S1F1) and the online setting message (S1F2) Send and receive, and set the online by sending and receiving a date / time request message (S2F17) and a date / time request response message (S2F18).

The sheet type equipment 104 transmits a mode change report message S1F65 to the equipment server 102 indicating that the mode of the equipment has been changed to a semi-mode.

The equipment server 102 and the sheet type equipment 104 transmits and receives an equipment status report request message (S1F5) and equipment status report (S1F6).

Thereafter, the equipment server 102 and the sheet type equipment 104 transmit and receive a cassette provision request (S4F65) and a cassette provision request response message (S4F66) to port 1 of the sheet type equipment, and provide a cassette to port 2. The request S4F65 and the cassette provision request response message S4F66 are transmitted and received to the port 2.

Then, the sheet type equipment 104 transmits its chamber status report message S1F75 to the equipment server 102.

When the operator inputs the open equipment door opening command through the operator interface process 100 (202), the single sheet equipment 104 opens the door of the equipment (204), the worker the single sheet equipment 104 After providing the cassette to port 1 of < RTI ID = 0.0 > 1, < / RTI > inputting the door closing command of the sheetfed equipment (206), the sheetfed equipment 104 closes the door that was open (208).

The equipment server 102 and the sheet type equipment 104 transmit and receive a cassette providing complete message (S4F69) and a cassette providing complete response message (S4F70) to each other, and further, a process progress command (S2F41) and a process progress command receiving message ( S2F42) is transmitted and received.

The sheet type equipment 104 transmits the first lot process progress message (S1F71) to the equipment server 102, and the lot provided in port 1 proceeds with the process (210).

The equipment server 102 and the sheet type equipment 104 transmit and receive a Port 1 trace data initialization message (S2F23) and a Port 1 trace data initialization response message (S2F24) to each other, and the sheet type equipment 104 is The trace data S6F1 is transmitted to the equipment server 102.

At this time, the equipment server 102 stores the data received from the sheet type equipment 104 in the trace data file 106.

When an operator inputs an equipment door opening command using the operator interface process 100 (212), the sheet type equipment 104 opens the equipment door (214), and the operator provides a cassette to port 2 of the equipment. After entering the equipment door closing command (216), the refurbished equipment 104 closes the equipment door (218).

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The equipment server 102 and the sheet type equipment 104 transmit and receive a cassette provision complete message (S4F69) and a cassette provision complete response message (S4F70) between each other, and a process progress command (S2F41) and a process progress command reception message (S2F42). Send and receive).

Subsequently, the sheet type equipment 104 transmits a second lot process progress message (S1F71) to the equipment server 102, and the sheet type equipment 104 proceeds to process the lot provided to the port 2 (220). .

The equipment server 102 and the sheet type equipment 104 transmit and receive a port 2 trace data file initialization message (S2F23) and a port 2 trace data file initialization response message (S2F24) to each other. 104 transmits the trace data S6F1 to the equipment server 102.

At this time, the equipment server 102 stores the data received from the sheet type equipment 104 in the trace data file 106.

When the sheet type equipment 104 transmits the process data of the first lot to the equipment server 102 (S6F9), the equipment server 102 sends the process data reception message S6F10 of the first lot to the sheet type equipment 104. To send). At this time, the equipment server 102 provides the process data received from the single-leaf equipment 104 to the data collection server 108, the data collection server 108 stores the process data in the master database 110 do.

Next, the sheet type equipment 104 sends the first lot process completion report message (S1F71) to the equipment server (102).

Thereafter, the equipment server 102 and the sheet type equipment 104 transmit and receive the cassette retrieval request message (S4F65) of the port 1 and the cassette retrieval request response message (S4F66) of the port 1 with each other.

Subsequently, when the operator inputs the sheet type equipment door open command using the operator interface process 100 (222), the sheet type equipment 104 opens the door of the equipment (224), the worker is a port of the equipment The cassette is recovered at 1 (226).

The equipment server 102 and the sheet type equipment 104 transmit and receive a port 1 cassette recovery completion message (S4F69) and a port 1 cassette recovery completion response message (S4F70) to each other. The equipment door closing command is input using the method 100, and the sheet type equipment 104 closes the equipment door 230.

The equipment server 102 and the sheet type equipment 104 transmit and receive a cassette provision request (S4F65) to the port 1 and a cassette provision request response message (S4F66) to the port 1, and the process data (S6F9) of the second lot and The process data reception message S6F10 of the second lot is transmitted and received, and the sheet type equipment 104 transmits the second lot process completion report message S1F71 to the equipment server 102.

Next, when the equipment server 102 and the sheet type equipment 104 transmit and receive a cassette retrieval request message (S4F65) of the port 2 and the cassette retrieval request response message (S4F66) of the port 2 with each other, the operator is the operator interface The process 100 enters an equipment door open command 232, and the refurbished equipment 104 opens the equipment door 234.

When the worker recovers the cassette from port 2 of the sheet type equipment 104, the equipment server 102 and the sheet type equipment 104 mutually respond to the port 2 cassette collection completion message (S4F69) and the port 2 cassette collection completion response. Send and receive a message (S4F70).

When an operator inputs an equipment door closing command using the operator interface process 100 (238), the sheet type equipment 104 closes the equipment door (240), and the equipment server 102 and sheet type equipment The 104 receives a lot from the sheet type equipment 104 and continuously proceeds by transmitting and receiving a cassette provision request message (S4F65) to the port 2 and a cassette provision request response message (S4F66) to each other.

However, the operation method of sheetfed equipment which performs the above series of processes is not limited to the fact that the operator has to provide and retrieve the cassettes to the sheetfed equipment periodically and input computer data as well. Inadvertent care has been a major factor in significantly lowering production yields due to errors in data entry or failure to provide cassettes on time for equipment.
In addition, there is a concern that the worker's health may be impaired because the operator cannot directly leave for a long time and must directly intervene in such a series of processes, and there is a problem that requires additional manpower for frequent replacement of the worker.

Therefore, the present invention devised to solve the above problems, in the semiconductor manufacturing process operated by the integrated automation system for semiconductor line management, by using the automatic transport means a lot to be processed in the process without direct intervention of the operator. It is an object of the present invention to provide an automated system and method of a sheet type equipment for semiconductor manufacturing, which provides a cassette and automatically generates and manages process data, and a computer readable recording medium for realizing the same.

In accordance with one aspect of the present invention, there is provided a method for automating sheetfed equipment for semiconductor manufacturing according to an embodiment of the present invention, comprising: a first step of setting an online state between a equipment server and a sheetfed equipment according to an input of a mode change command from an operator interface processor; A second step of providing a cassette to the sheet type equipment by the automatic transportation means receiving the cassette providing request message from the equipment server; A third step of storing and managing data generated when the process is performed on the lot provided from the automatic transportation means; And a fourth step of the equipment transportation means recovering the cassette containing the lot in which the process is completed in the sheet type equipment.

In addition, the present invention provides a first function of setting an on-line state between the equipment server and the sheet type equipment according to the equipment mode change command input from the operator interface processor; A second function of providing a cassette to the sheet type equipment by the automatic transportation means receiving the cassette providing request message from the equipment server; A third function of storing and managing data generated when the process is performed on the lot provided from the automatic transportation means; And a computer readable recording medium having recorded thereon a program for realizing a fourth function for the automatic transport means to recover a cassette containing a processed lot from the sheet type equipment.
In addition, the automation system of the sheet type equipment for semiconductor manufacturing of the present invention, the operator interface means for receiving a mode change command of the sheet type equipment from the outside; receiving the mode change command of the sheet type equipment from the operator interface means to the sheet type equipment Equipment control means for transmitting and receiving a trace data, which is data generated when the lot proceeds, so as to determine whether the process data of the previous lot meets a predetermined criterion; Automatic transport means for transmitting and receiving a message with the equipment control means and providing a cassette to the sheet type equipment; Data storage means for receiving and storing process data and trace data from the equipment control means; And lot storage means for storing a lot to be provided to the sheet-type equipment.

Single wafer type equipment to which the present invention is applied has two ports for receiving a cassette, and has a structure in which the door of the equipment is automatically opened and closed when the cassette is provided / recovered. It is an implementation of the method of automating the structured sheet type equipment.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings of FIGS. 3 to 5B.

As shown in FIG. 3, the sheet type automation system for manufacturing a semiconductor according to the present invention includes an operator interface processor 300 for receiving an operator's command and providing the equipment to an equipment server and an operator from the operator interface processor 300. To receive trace data and transmit it to refurbished equipment, and to generate trace data files by receiving trace data, which is data generated when the lot proceeds to determine whether the process data of the previous lot meets a predetermined standard. A server 302, an automatic transport means 304 for sending and receiving messages to and from the equipment server 302, acquiring a cassette from the stocker, and providing the cassette to the sheet-fed equipment, and a stocker for storing the lot to be provided to the sheet-fed equipment ( 306) send and receive messages to and from the equipment server, proceed with the process, and transmit trace data and process data to the equipment. Single sheet type equipment 308 for transmitting to the server 302, the trace data file 310 for storing the trace data provided by the equipment server, and the process data provided by the equipment server to process and store in the master database It is provided with a data collection server 312, and a master database 314 for storing the process data provided by the data collection server.
4 is a flow chart for carrying out the method for automating the sheet type equipment for semiconductor manufacturing according to the present invention.
First, when the operator instructs the mode change to the sheet type equipment 308 (S400), the sheet type equipment 308 and the equipment server 302 transmits a presence confirmation message and an online setting message between each other, the date / time Sending and receiving the request message and the date / time request response message to set the online (S402), the sheet type equipment 308 sends a mode change report message indicating that the mode of the equipment has been changed to full auto-mode (full auto-mode) Transmission to the equipment server 302.
After the equipment server 302 and the sheet type equipment 308 which received the mode change report message from the sheet type equipment 308 transmit and receive the equipment status report request message and the equipment status report, and the equipment server 302 The sheet type equipment 308 mutually transmits and receives a cassette provision request and a cassette provision request response message to port 1, and also transmits and receives a cassette provision request and cassette provision request response message to port 2.
Then, the sheet type equipment 308 transmits a chamber status report message of the equipment to the equipment server 302, and the equipment server 302 automatically transmits a cassette provision request message to port 1 304 ), The automatic transport means 304 transmits a cassette provision request response message to the equipment server 302.
The automatic transport means 304 having sent the cassette providing request response message to the equipment server 302 to the port 1 acquires the cassette to be provided to the port 1 of the sheet type equipment 308 at the stocker 306 and is rewound. Upon arriving at the equipment 308, the sheetfed equipment 308 automatically opens the door of the equipment, and the automatic transportation means 304 receives the cassette obtained from the stocker 306 in the port of the sheetfed equipment 308. If provided to 1, the sheet type equipment 308 automatically closes the door of the equipment that was open (S404).
Thereafter, the equipment server 302 and the sheet type equipment 308 transmit and receive a cassette provision complete message and a cassette provision complete response message to each other, and when the process progress command and the process progress command reception message are transmitted and received, the sheet type equipment ( 308 transmits the first lot process progress message to the equipment server 302, and the lot provided in port 1 proceeds with the process (S406).
Next, the equipment server 302 and the sheet type equipment 308 transmit and receive a Port 1 trace data initialization message and a Port 1 trace data initialization response message to each other, and the sheet type equipment 308 transmits the trace data. To transmit to the equipment server 302. In this case, the equipment server 302 stores the trace data received from the sheet type equipment 308 in the trace data file 310.
The equipment server 302 and the automatic transport means 304 mutually transmit and receive a cassette provision request message to the port 2 and the cassette provision request response message to the port 2, the automatic transport means 304 is the stocker 306 in the Upon obtaining the cassette to be provided to port 2 of the sheet type equipment 308 and arriving at the sheet type equipment 308, the sheet type equipment 308 automatically opens the door of the equipment.
When the automatic transport means 304 provides the cassette obtained from the stocker 306 to port 2 of the sheet type equipment 308, the sheet type equipment 308 automatically closes the door of the opened equipment ( S408).
Thereafter, the equipment server 302 and the sheet type equipment 308 transmit and receive a cassette provision complete message and a cassette provision complete response message to each other, and transmit and receive a process progress command and a process progress command reception message.
Receiving a process progress command from the equipment server 302, the sheet type equipment 308 transmits a second lot process progress message to the equipment server 302, and the lot provided to the port 2 in the sheet type equipment 308 The process proceeds (S410).
The equipment server 302 and the sheet type equipment 308 transmit and receive a Port 2 trace data file initialization message and a Port 2 trace data file initialization response message to each other, and the sheet type equipment 308 is a trace. The data is transmitted to the equipment server 302. In this case, the equipment server 302 stores the trace data received from the sheet type equipment 308 in the trace data file 310.
When the sheet type equipment 308 transmits the process data of the first lot to the equipment server 302, the equipment server 302 transmits the process data reception message of the first lot to the sheet type equipment 308. At this time, the equipment server 302 provides the process data received from the sheet type equipment 308 to the data collection server 312, the data collection server 312 stores the process data in the master database 314 (S412).
Next, after the sheetfed equipment 308 transmits the first lot process completion report to the equipment server 302, the equipment server 302 and the sheetfed equipment 308 mutually request a cassette retrieval of port 1 from each other. Send and receive a message and a cassette number request response message on port 1.
When the equipment server 302 transmits a port 1 cassette collection request message to the automatic transportation means 304, the automatic transportation means 304 transmits a port 1 cassette provision request response message to the equipment server 302, and When the automatic transport means 304 arrives at the sheetfed equipment 308, the sheetfed equipment 308 automatically opens the door of the equipment, and the automatic transport means 304 of the sheetfed equipment 308 After collecting the finished cassette at port 1 (S414), the equipment server 302 and the sheet type equipment 308 transmit and receive a cassette collection completion report message and a cassette collection completion report response message to each other, The equipment 308 closes the door of the equipment that was open.
The equipment server 302 and the sheet type equipment 308 transmit and receive a cassette provision request to port 1 and a cassette provision request response message to each other. At this time, the equipment server 302 receiving the request message of the next cassette from the sheet type equipment 308 obtains data from the trace data file 310 to provide to the sheet type equipment 308, The equipment server 302 and the sheet type equipment 308 transmit and receive a process data of a second lot and a process data of a second lot, and the sheet type equipment 308 sends a second lot process completion report message to the equipment. Send to server 302. At this time, the equipment server 302 provides the process data received from the sheet type equipment 308 to the data collection server 312, the data collection server 312 stores the process data in the master database 314 (S416).
Next, the equipment server 302 and the sheet type equipment 308 transmit and receive the cassette recovery request message of the port 2 and the cassette recovery request response message of the port 2 with each other.
When the equipment server transmits the port 2 cassette collection request message to the automatic transportation means 304, the automatic transportation means 304 transmits the port 2 cassette provision request response message to the equipment server 302, and then the automatic transportation. When the means 304 arrives at the refurbished equipment 308, the refurbished equipment 308 automatically opens the door of the equipment.
Next, the automatic transportation means 304 recovers the cassette which has finished the process at port 2 of the sheet type equipment 308 (S418), and the equipment server 302 and the sheet type equipment 308 are mutually cassettes. When sending and receiving a recovery completion report message and a cassette recovery completion report response message, the sheet type equipment 308 automatically closes the door of the equipment, and then the equipment server 302 and the sheet type equipment 308 are connected to each other. By sending and receiving a cassette provision request 2 and a cassette provision request response message to port 2, the sheet type equipment 308 receives a lot and continues the process.

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5A and 5B are flowcharts of a Semi Equipment Communications Standard-II (SECS-II) message for performing a method for automating sheetfed equipment for semiconductor manufacturing according to the present invention.

First, when an operator instructs the change of mode to the sheet type equipment 308 (500), the sheet type equipment 308 and the equipment server 302 mutually exist between the presence confirmation message (S1F1) and the online setting message (S1F2) Send and receive, and set the online by sending and receiving a date / time request message (S2F17) and a date / time request response message (S2F18).

Next, the sheet type equipment 308 transmits a mode change report message S1F65 to the equipment server 302 informing that the mode of the equipment has been changed to a full auto-mode, and the equipment server ( After the 302 and the sheet type equipment 308 transmit and receive the equipment status report request message (S1F5) and the equipment status report (S1F6), the equipment server 302 and the sheet type equipment 308 are cassettes in port 1 with each other. Sending / receiving request (S4F65) and cassette providing request response message (S4F66) to port 1, sending and receiving cassette providing request (S4F65) to port 2 and cassette providing request response message (S4F66) to port 2.

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The sheet type equipment 308 transmits a chamber status report message S1F75 of the equipment to the equipment server 302, and the equipment server 302 sends a cassette provision request message S64F3 to port 1. When transmitting to the automatic transport means 304, the automatic transport means 304 transmits a cassette provision request response message (S64F4) to the equipment server 302 on port 1.

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Subsequently, when the automatic transportation means 304 acquires a cassette to be provided to port 1 of the sheet type equipment 308 at the stocker 306 and arrives at the sheet type equipment 308 (502), the sheet type equipment ( 308 automatically opens the door of the equipment (504), and if the automatic transport means 304 provides the cassette 1 obtained from the stocker 306 to port 1 of the sheet type equipment 308 (506), The lobe equipment 308 automatically closes the door of the equipment (508).

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Next, the equipment server 302 and the sheet type equipment 308 transmit and receive a cassette provision complete message (S4F69) and a cassette provision complete response message (S4F70) between each other, and receive a process progress command (S2F41) and a process progress command. After sending and receiving the message (S2F42), the sheet type equipment 308 transmits the first lot process progress message (S1F71) to the equipment server 302, the lot provided in port 1 proceeds to the process (510)

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Thereafter, the equipment server 302 and the sheet type equipment 308 transmit and receive a Port1 trace data initialization message (S2F23) and a Port1 trace data initialization response message (S2F24) to each other, and the sheet type equipment 308 ) Transmits the trace data S6F1 to the equipment server 302, the equipment server 302 stores the trace data received from the sheet type equipment 308 in the trace data file 310. .

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When the equipment server 302 transmits the cassette providing request message S64F3 to the port 2 to the automatic transportation means 304, the automatic transportation means 304 sends the cassette providing request response message S64F4 to the port 2 of the equipment server. Transfer to 302, the stocker 306 acquires a cassette to be provided to port 2 of the sheetfed equipment 308 and arrives at the sheetfed equipment 308 (512). The door of the equipment is opened (514).

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When the door of the sheet type equipment 308 is opened, when the automatic transportation means 304 provides the cassette obtained from the stocker 306 to port 2 of the sheet type equipment 308 (516), the sheet type equipment 308 automatically closes the door of the equipment (518), the equipment server 302 and single-leaf equipment 308 mutually provides the cassette providing complete message (S4F69) and the cassette providing complete response message (S4F70) Transmit and receive, and transmit and receive the process progress command (S2F41) and the process progress command reception message (S2F42). (See Figure 5b)

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Subsequently, the sheet type equipment 308 transmits a second lot process progress message S1F71 to the equipment server 302, and the lot provided to the port 2 in the sheet type equipment 308 proceeds with the process (420).

The equipment server 302 and the sheet type equipment 308 transmit and receive a port 2 trace data file initialization message (S2F23) and a port 2 trace data file initialization response message (S2F24) to each other, and the sheet type equipment. When 308 transmits the trace data S6F1 to the equipment server 302, the equipment server 302 transmits the trace data received from the sheet type equipment 308 to the trace data file 310. Save it.

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When the sheet type equipment 308 transmits the process data of the first lot to the equipment server 302 (S6F9), the equipment server 302 sends the process data reception message S6F10 of the first lot to the sheet type equipment 308. To send). At this time, the equipment server 302 provides the process data received from the sheet type equipment 308 to the data collection server 312, the data collection server 312 stores the process data in the master database 314 do.

Next, the sheet type equipment 308 transmits the first lot process completion report (S1F71) to the equipment server 302, and then the equipment server 302 and the sheet type equipment 308 are mutually When transmitting and receiving a cassette retrieval request message (S4F65) and a cassette retrieval request response message (S4F66), the automatic transport means 304 transmits a port 1 cassette provision request response message (S64F4) to the equipment server 302, and Upon arrival at sheetfed equipment 308 (522), sheetfed equipment 308 automatically opens the door of the equipment. (524)

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Subsequently, the automatic transporting means 304 recovers the finished cassette at port 1 of the sheet type equipment 308 (526), and the equipment server 302 and the sheet type equipment 308 recover the cassettes from each other. When sending and receiving a completion report message (S4F69) and a cassette recovery completion report response message (S4F70), the sheet type equipment 308 automatically closes the door of the equipment (528), the equipment server 302 and sheet type The equipment 308 transmits and receives a cassette provision request (S4F65) and a cassette provision request response message (S4F66) to Port1. At this time, the equipment server 302 that receives the offer request message (S4F65) of the next cassette from the sheet type equipment 308 obtains data from the trace data file 310 to the sheet type equipment 308. to provide.

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The equipment server 302 and the sheet type equipment 308 transmit and receive the process data (S6F9) of the second lot and the process data reception message (S6F10) of the second lot to each other, and the sheet type equipment 308 is the second. When the lot process completion report message (S1F71) is sent to the equipment server 302, the equipment server 302 provides the process data received from the sheet type equipment 308 to the data collection server 312, the data The collection server 312 stores the process data in the master database 314.

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After the data collection server 312 stores the process data in the master database 314, the equipment server 302 and the sheet type equipment 308 mutually port 2 cassette recovery request message (S4F65) and port 2 A cassette retrieval request response message (S4F66) is transmitted and received.

When the equipment server 302 transmits the port 2 cassette retrieval request message S64F3 to the automatic transportation means 304, the automatic transportation means 304 transmits the port 2 cassette provision request response message S64F4 to the equipment server 302. When the automatic transport means 304 arrives at the sheetfed equipment 308 (530), the sheetfed equipment 308 automatically opens the door of the equipment (532).

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Next, the automatic transportation means 304 recovers the cassette which has been processed in port 2 of the sheet type equipment 308 (534), and the equipment server 302 and the sheet type equipment 308 mutually draw the cassette. Send and receive a recovery completion report message (S4F69) and a cassette recovery completion report response message (S4F70), and the single-leaf equipment 308 is open and closed the door of the equipment (536), the equipment server 302 and The sheet type equipment 308 transmits and receives a cassette provision request (S4F65) to the port 2 and a cassette provision request response message (S4F66) to the port 2, and thus the sheet type equipment 308 receives the lot and continues the process. .

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The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

The present invention as described above, by the integrated automation system for semiconductor line management provides a cassette containing a lot to be processed by the automatic transport means to the sheet type equipment to complete the process cycle by fully automating and optimizing the operation of the sheet type equipment By minimizing the operator's additional work, such as moving the cassette or inputting the process data, the production process can be significantly improved, the production cost can be minimized, the economy can be improved, and the yield can be improved. .

Claims (13)

A first step of setting on-line between the equipment server and the sheet type equipment according to the equipment mode change command from the operator interface processor; A second step of providing a cassette to the sheet type equipment by the automatic transportation means receiving the cassette providing request message from the equipment server; A third step of storing and managing data generated when the process is performed on the lot provided from the automatic transportation means; And A fourth step in which the automatic transportation means recovers a cassette containing a lot in which the process is completed in the sheet type equipment; Sheet type equipment automation method for manufacturing a semiconductor comprising a. The method of claim 1, The first step, A fifth step in which the sheet type equipment receives a mode change command from the outside; And The sheet type for semiconductor manufacturing comprising the sixth step of sending and receiving the presence confirmation message and the online setting message between each of the sheet type equipment and the equipment server, and setting the online by sending and receiving a date / time request message and a date / time request response message How to automate equipment. The method of claim 1, The third step, A fifth step of generating process data while performing a predetermined process in the sheet type equipment on the lot provided from the automatic transportation means; A sixth step of receiving the process data generated from the equipment server and the sheet type equipment, and generating a trace data file so as to determine whether the process data is suitable in comparison with the process data of a previous lot; And And a seventh step of transmitting, by the equipment server, the process data of the lot in which the process is completed in the sheet type equipment to a data collection server, and storing the process data in a master database. The method according to claim 1 or 2, The second step, A seventh step of transmitting and receiving a cassette providing request and a cassette providing request response message between the equipment server and the sheet type equipment; An eighth step of the sheet type equipment transmitting a chamber status report message of the equipment to the equipment server; A ninth step of transmitting the cassette providing request response message to the equipment server by the automatic transportation means when the equipment server transmits the cassette providing request message to the automatic transportation means; After performing the ninth step, when the automatic transportation means obtains a cassette to be provided to the port of the sheet type equipment from the stocker and arrives at the sheet type equipment, the step 10 of the sheet type equipment automatically opens the door of the equipment; And After performing the tenth step, the automatic transport means for providing a cassette obtained from the stocker to the port of the sheet type equipment, and the sheet type equipment comprising the eleventh step of automatically closing the door of the equipment for semiconductor manufacturing Method of automating sheetfed equipment. The method of claim 3, wherein The fifth step, An eighth step of the equipment server and the sheet type equipment transmitting and receiving a cassette provision complete message and a cassette provision complete response message to each other, and a process progress command and a process progress command reception message; And And the ninth step of transmitting the first lot process progress message to the equipment server and performing the process of the lot provided to the port. The method of claim 3, wherein The sixth step, An eighth step in which the equipment server and the sheet type equipment transmit and receive a trace data initialization message and a trace data initialization response message to each other, and the sheet type equipment transmits the trace data to the equipment server; And And a ninth step of storing, by the equipment server, the trace data received from the sheet type equipment in a trace data file. The method of claim 3, wherein The seventh step, An eighth step in which the sheet type equipment transmits the process data of the lot to the equipment server, and the equipment server transmits a process data reception message of the lot to the sheet type equipment; And And a ninth step of the equipment server providing process data received from the sheet type equipment to a data collection server, and storing the process data in a master database by the data collection server. The method of claim 1, The fourth step, A fifth step in which the sheet type equipment transmits a lot process completion report to the equipment server; A sixth step of transmitting and receiving a cassette recovery request message and a cassette recovery request response message between the equipment server and the sheet type equipment; A seventh step of, when the equipment server transmits the cassette collection request message to the automatic transportation means, the automatic transportation means transmits a cassette provision request response message to the equipment server; An eighth step in which the automatic transportation means arrives at the sheet type equipment, and the sheet type equipment automatically opens the door of the equipment; And The automatic conveying means recovers the cassette which has been processed by the sheetfed equipment, and when the equipment server and the sheetfed equipment send and receive a cassette recovery completion report message and a cassette recovery completion report response message to each other, the sheetfed equipment automatically Method for automating refurbished equipment for manufacturing a semiconductor comprising the ninth step of closing the door of the equipment. In a system that provides an automated method of sheetfed equipment for semiconductor manufacturing, A first function of setting on-line between the equipment server and the sheet type equipment according to the equipment mode change command input from the operator interface processor; A second function of providing a cassette to the sheet type equipment by the automatic transportation means receiving the cassette providing request message from the equipment server; A third function of storing and managing data generated when the process is performed on the lot provided from the automatic transportation means; And A fourth function of the automatic transportation means recovering a cassette containing a lot in which the process is completed in the sheet type equipment; A computer-readable recording medium having recorded thereon a program for realizing this. Operator interface means for receiving a mode change command of the sheet type equipment from the outside; Trace data, which is data generated when the lot proceeds to receive the mode change command of the sheet type equipment from the operator interface unit, and transmits the mode change command to the sheet type equipment. Equipment control means for receiving and generating a trace data file; Automatic transport means for transmitting and receiving a message with the equipment control means and providing a cassette to the sheet type equipment; Data storage means for receiving and storing process data and trace data from the equipment control means; And Lot storage means for storing a lot to be provided to the sheet type equipment Sheet type equipment automation system for semiconductor manufacturing comprising a. The method of claim 10, The data storage means, A trace data file for storing the trace data provided by the equipment control means; Data collection means for processing and storing the process data provided by the equipment server; And Single sheet type automation system for manufacturing a semiconductor comprising a master database for storing the process data provided by the data collection server. The method of claim 2, The first step is, A seventh step in which the sheet type equipment transmits a mode change report message to the equipment server informing that the mode of the equipment has been changed to a fully automatic mode; And And the eighth step of transmitting and receiving the equipment status report request message and the equipment status report by the equipment server and the sheet type equipment. The method of claim 1, The fourth step is A fifth step of receiving, from the trace data file, data from the trace data file by the equipment server receiving the request message for providing the next cassette from the sheet type equipment; and A method for automating the sheet type apparatus for manufacturing a semiconductor comprising the sixth step of providing a cassette to the sheet type equipment by the automatic transportation means receiving the next cassette providing request message from the equipment server.

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