KR100491019B1 - 다점계측 두께 측정계 - Google Patents
다점계측 두께 측정계 Download PDFInfo
- Publication number
- KR100491019B1 KR100491019B1 KR10-2002-0010420A KR20020010420A KR100491019B1 KR 100491019 B1 KR100491019 B1 KR 100491019B1 KR 20020010420 A KR20020010420 A KR 20020010420A KR 100491019 B1 KR100491019 B1 KR 100491019B1
- Authority
- KR
- South Korea
- Prior art keywords
- thickness
- measured
- measurement
- box
- ionizing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/04—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/06—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring the deformation in a solid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/08—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2001-00056817 | 2001-03-01 | ||
JP2001056817 | 2001-03-01 | ||
JPJP-P-2002-00013937 | 2002-01-23 | ||
JP2002013937A JP3948965B2 (ja) | 2001-03-01 | 2002-01-23 | 多点計測厚み計 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020070824A KR20020070824A (ko) | 2002-09-11 |
KR100491019B1 true KR100491019B1 (ko) | 2005-05-24 |
Family
ID=26610434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2002-0010420A KR100491019B1 (ko) | 2001-03-01 | 2002-02-27 | 다점계측 두께 측정계 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP3948965B2 (ja) |
KR (1) | KR100491019B1 (ja) |
CN (1) | CN1223827C (ja) |
TW (1) | TWI272371B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10307356A1 (de) * | 2003-02-21 | 2004-09-16 | Sikora Ag | Verfahren und Vorrichtung zur Bestimmung der Dicke der Isolation eines Flachkabels in Bereichen der metallischen Leiterbahnen |
JP2006170883A (ja) * | 2004-12-17 | 2006-06-29 | Toshiba Corp | 厚さプロファイル測定装置 |
JP2009098095A (ja) * | 2007-10-19 | 2009-05-07 | Yasuto Ioka | 電離箱型x線異物検出装置および筒状電離箱 |
KR100921417B1 (ko) * | 2007-12-17 | 2009-10-14 | 한국원자력연구원 | 단일 지점 동위원소 방사선원을 이용한 다면적 두께 측정장치 및 측정 방법 |
JP5847674B2 (ja) * | 2012-09-10 | 2016-01-27 | 株式会社東芝 | X線厚さ計 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5890112A (ja) * | 1981-11-26 | 1983-05-28 | Toshiba Corp | 放射線厚さ計 |
JPS60230008A (ja) * | 1984-04-28 | 1985-11-15 | Toshiba Corp | 放射線厚さ計 |
KR100319430B1 (ko) * | 1993-04-26 | 2002-06-20 | 쟝 가브리엘 메날드 | 평평한제품의두께프로파일을측정하는어셈블리를위한교정장치및그교정방법 |
-
2002
- 2002-01-23 JP JP2002013937A patent/JP3948965B2/ja not_active Expired - Lifetime
- 2002-02-25 TW TW091103292A patent/TWI272371B/zh not_active IP Right Cessation
- 2002-02-27 KR KR10-2002-0010420A patent/KR100491019B1/ko active IP Right Grant
- 2002-02-28 CN CNB02119825XA patent/CN1223827C/zh not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5890112A (ja) * | 1981-11-26 | 1983-05-28 | Toshiba Corp | 放射線厚さ計 |
JPS60230008A (ja) * | 1984-04-28 | 1985-11-15 | Toshiba Corp | 放射線厚さ計 |
KR100319430B1 (ko) * | 1993-04-26 | 2002-06-20 | 쟝 가브리엘 메날드 | 평평한제품의두께프로파일을측정하는어셈블리를위한교정장치및그교정방법 |
Also Published As
Publication number | Publication date |
---|---|
KR20020070824A (ko) | 2002-09-11 |
CN1223827C (zh) | 2005-10-19 |
JP3948965B2 (ja) | 2007-07-25 |
JP2002328016A (ja) | 2002-11-15 |
TWI272371B (en) | 2007-02-01 |
CN1378067A (zh) | 2002-11-06 |
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