KR100334740B1 - 반도체 설비용 항온항습 공기 공급 방법 및 장치 - Google Patents
반도체 설비용 항온항습 공기 공급 방법 및 장치 Download PDFInfo
- Publication number
- KR100334740B1 KR100334740B1 KR1019990025154A KR19990025154A KR100334740B1 KR 100334740 B1 KR100334740 B1 KR 100334740B1 KR 1019990025154 A KR1019990025154 A KR 1019990025154A KR 19990025154 A KR19990025154 A KR 19990025154A KR 100334740 B1 KR100334740 B1 KR 100334740B1
- Authority
- KR
- South Korea
- Prior art keywords
- air
- housing
- water
- heating
- temperature
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 95
- 239000004065 semiconductor Substances 0.000 title claims abstract description 52
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 46
- 238000010438 heat treatment Methods 0.000 claims abstract description 41
- 238000001816 cooling Methods 0.000 claims abstract description 26
- 238000007791 dehumidification Methods 0.000 claims abstract description 23
- 230000017525 heat dissipation Effects 0.000 claims description 3
- 238000005265 energy consumption Methods 0.000 abstract description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D22/00—Control of humidity
- G05D22/02—Control of humidity characterised by the use of electric means
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Central Air Conditioning (AREA)
- Air Humidification (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Description
Claims (9)
- 삭제
- 삭제
- 삭제
- 삭제
- 하우징과;공정용 공기가 흡입되는 통로를 이루고 상기 하우징의 내부로 공기를 분사하는 노즐부가 구비된 공기 흡입 파이프와;상기 공기흡입파이프의 노즐부를 통해 상기 하우징의 내부에 분사되는 공기가 물 분자와 충돌하면서 제습 및 가습이 동시에 이루어지도록 상기 하우징의 내부로 물을 공급하는 물 공급 수단과;흡열부와 방열부를 구비하여,상기 흡열부에 의해 상기 물 공급 수단의 물을 이슬점 온도로 냉각시킴으로서, 공정용 공기중의 수증기 량이 소용량보다 많은 경우에는 여분의 수증기가 응결되고 소요량보다 적은 경우 포화 상태까지 공기중에 수증기가 공급되도록 하며, 상기 방열부에 의해, 제습 및 가습된 공기가 예열되도록 하는 냉각 수단과;공정용 공기를 반도체 설비측으로 공급하는 공기 배출 파이프와;상기 공기 배출 파이프의 출구측에 설치되는 열선과, 상기 열선에 공급되는 전류량을 가변하기 위한 가변저항 및 가변저항 조절용 레버로 구성되어, 상기 물 공급 수단에 의해 가열된 공기를 소요로 하는 공정용 공기의 온도로 가열하는 가열수단;을 포함하여서 이루어지는 것을 특징으로 하는 반도체 설비용 항온항습 공기 공급장치.
- 삭제
- 제 5 항에 있어서, 상기 냉각 수단은 흡열부와 방열부를 구비하는 반도체 소자인 것을 특징으로 하는 반도체 설비용 항온항습 공기 공급장치.
- 삭제
- 삭제
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990025154A KR100334740B1 (ko) | 1999-06-29 | 1999-06-29 | 반도체 설비용 항온항습 공기 공급 방법 및 장치 |
JP11228509A JP3127401B2 (ja) | 1999-06-29 | 1999-08-12 | 半導体設備用恒温恒湿空気供給方法及び装置 |
US09/406,054 US6279650B1 (en) | 1999-06-29 | 1999-09-27 | Temperature-Humidity controller for semiconductor equipment and controlling method thereof |
TW088117724A TW428220B (en) | 1999-06-29 | 1999-10-13 | Temperature-humidity controller for semiconductor equipment and controlling method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019990025154A KR100334740B1 (ko) | 1999-06-29 | 1999-06-29 | 반도체 설비용 항온항습 공기 공급 방법 및 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010004475A KR20010004475A (ko) | 2001-01-15 |
KR100334740B1 true KR100334740B1 (ko) | 2002-05-04 |
Family
ID=19596703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019990025154A KR100334740B1 (ko) | 1999-06-29 | 1999-06-29 | 반도체 설비용 항온항습 공기 공급 방법 및 장치 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6279650B1 (ko) |
JP (1) | JP3127401B2 (ko) |
KR (1) | KR100334740B1 (ko) |
TW (1) | TW428220B (ko) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100701578B1 (ko) * | 2000-02-01 | 2007-04-02 | 동경 엘렉트론 주식회사 | 기판처리장치 및 기판처리방법 |
US7051801B1 (en) | 2000-07-28 | 2006-05-30 | Hydrogenics Corporation | Method and apparatus for humidification and temperature control of incoming fuel cell process gas |
CN1314154C (zh) * | 2000-07-28 | 2007-05-02 | 洁能氏公司 | 对引入燃料电池的过程气体进行增湿和温度控制的方法和装置 |
KR100487549B1 (ko) * | 2002-09-26 | 2005-05-03 | 삼성전자주식회사 | 반도체 제조 설비를 위한 공기 공급 장치 |
KR100938842B1 (ko) * | 2003-07-10 | 2010-01-26 | 주식회사 지음 | 동 파이프 격리형 냉각 유닛 |
JP4177796B2 (ja) * | 2004-07-30 | 2008-11-05 | エスペック株式会社 | 冷却装置 |
EP1710516B1 (de) * | 2005-03-29 | 2008-10-22 | Martin Dr.-Ing. Möritz | Vorrichtung und Verfahren zur Befeuchtung eines Luftstromes |
WO2009148435A1 (en) * | 2008-06-02 | 2009-12-10 | Takumi Ichinomiya | Water mist cooling system |
CN104930628A (zh) * | 2015-06-24 | 2015-09-23 | 张坚胜 | 一种与风扇结合使用的水雾降温装置 |
CN104964377A (zh) * | 2015-06-24 | 2015-10-07 | 张坚胜 | 一种电子制冷式超声波水雾发生器 |
CN104930631A (zh) * | 2015-06-24 | 2015-09-23 | 张坚胜 | 一种超声波冷水雾发生器 |
CN104964362A (zh) * | 2015-06-24 | 2015-10-07 | 张坚胜 | 一种能与风扇结合的分离式冷水雾发生装置 |
CN108019824A (zh) * | 2016-11-02 | 2018-05-11 | 青岛海尔空调器有限总公司 | 空调器及其恒温除湿方法 |
CN108317634B (zh) * | 2018-04-27 | 2023-07-25 | 珠海格力电器股份有限公司 | 换热组件及穿墙机 |
CN110749008A (zh) * | 2019-10-25 | 2020-02-04 | 邳州绍鼎电子科技有限公司 | 一种家用净化除湿一体式空调扇 |
CN111389185A (zh) * | 2020-03-27 | 2020-07-10 | 宁夏企程科技有限公司 | 一种除湿机构、柜结构及基于物联网的智能柜系统 |
CN113983633B (zh) * | 2021-11-30 | 2023-01-31 | 东莞市洁美净化机电工程有限公司 | 一种配合智能家居的空气净化除湿器 |
CN114413374B (zh) * | 2021-12-17 | 2023-09-15 | 安徽京宜泓环境科技有限公司 | 一种高压雾喷式加湿器控制装置 |
CN115076781B (zh) * | 2022-06-27 | 2024-06-18 | 珠海格力电器股份有限公司 | 一种用于空调室内机的加湿装置及空调的控制方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2284914A (en) * | 1937-07-16 | 1942-06-02 | Honeywell Regulator Co | Air conditioning system |
US2419119A (en) * | 1943-07-02 | 1947-04-15 | Westinghouse Electric Corp | Apparatus for treating and storing meat |
US2545491A (en) * | 1945-10-25 | 1951-03-20 | American Instr Co Inc | Apparatus for precision control of climatic conditions |
US3424231A (en) * | 1967-03-23 | 1969-01-28 | Andrew Truhan | Environmental chamber |
US3415313A (en) * | 1967-06-12 | 1968-12-10 | Niagara Blower Co | Apparatus for producing air at widely different temperatures and relative humidities |
US4711294A (en) * | 1985-08-14 | 1987-12-08 | Jacobs Alphonse F | Temperature and humidity control system |
US4870208A (en) * | 1988-06-03 | 1989-09-26 | Monsanto Company | Asymmetric hydrogenolysis of epoxides |
US5072590A (en) * | 1991-02-11 | 1991-12-17 | Ebtech, Inc. | Bottled water chilling system |
US5590532A (en) * | 1994-02-04 | 1997-01-07 | Bunn-O-Matic Corporation | Solid state liquid temperature processor |
-
1999
- 1999-06-29 KR KR1019990025154A patent/KR100334740B1/ko not_active IP Right Cessation
- 1999-08-12 JP JP11228509A patent/JP3127401B2/ja not_active Expired - Fee Related
- 1999-09-27 US US09/406,054 patent/US6279650B1/en not_active Expired - Fee Related
- 1999-10-13 TW TW088117724A patent/TW428220B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2001012776A (ja) | 2001-01-19 |
KR20010004475A (ko) | 2001-01-15 |
JP3127401B2 (ja) | 2001-01-22 |
TW428220B (en) | 2001-04-01 |
US6279650B1 (en) | 2001-08-28 |
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