KR100323648B1 - Cu-CVD 공정용 원료와 Cu-CVD 장치 - Google Patents
Cu-CVD 공정용 원료와 Cu-CVD 장치 Download PDFInfo
- Publication number
- KR100323648B1 KR100323648B1 KR1019990007931A KR19990007931A KR100323648B1 KR 100323648 B1 KR100323648 B1 KR 100323648B1 KR 1019990007931 A KR1019990007931 A KR 1019990007931A KR 19990007931 A KR19990007931 A KR 19990007931A KR 100323648 B1 KR100323648 B1 KR 100323648B1
- Authority
- KR
- South Korea
- Prior art keywords
- raw material
- film
- tmvs
- hhfac
- cvd
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000000463 material Substances 0.000 title description 2
- 239000002994 raw material Substances 0.000 claims abstract description 74
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims description 31
- 238000006243 chemical reaction Methods 0.000 claims description 24
- 230000008016 vaporization Effects 0.000 claims 1
- 230000006911 nucleation Effects 0.000 abstract description 8
- 238000010899 nucleation Methods 0.000 abstract description 8
- 239000003054 catalyst Substances 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 79
- 239000010949 copper Substances 0.000 description 69
- 239000007789 gas Substances 0.000 description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000000654 additive Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000006200 vaporizer Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000003446 ligand Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- -1 trimethylvinylsilyl Chemical group 0.000 description 2
- PXNXMEXSPOKKSW-UHFFFAOYSA-N 1,1,1,5,5,5-hexafluoropentane-2,4-dione;dihydrate Chemical compound O.O.FC(F)(F)C(=O)CC(=O)C(F)(F)F PXNXMEXSPOKKSW-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000004699 copper complex Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000004677 hydrates Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- PJYUPDCACOMARB-UHFFFAOYSA-N propan-2-one;dihydrate Chemical compound O.O.CC(C)=O PJYUPDCACOMARB-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/08—Copper compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (3)
- Cu(hfac)(tmvs) 에 대해 tmvs 와 Hhfac·2H2O 를 첨가하여 만들어지는 액체원료로서, 기화되어 반응실내로 도입되고, 이 반응실내에서 가열상태로 배치된 기판 표면에 CVD 법으로 Cu 막을 형성하는 데 사용되는 Cu-CVD 공정용 원료에 있어서,상기 tmvs 의 첨가비율이 1 내지 10 wt% 의 범위내이고, 상기 Hhfac·2H2O 의 첨가비율이 0.1 내지 0.01 wt% 의 범위내인 것을 특징으로 하는 Cu-CVD 공정용 원료.
- 제 1 항에 있어서, 상기 tmvs 의 첨가비율이 5 wt% 이고, 상기 Hhfac·2H2O 의 첨가비율이 0.04 wt% 인 것을 특징으로 하는 Cu-CVD 공정용 원료.
- Cu(hfac)(tmvs) 에 대해 tmvs 와 Hhfac·2H2O 를 첨가하여 만들어진 액체원료를 수용하는 원료용기와, 이 원료용기로부터 액체배관을 통해 상기 액체원료가 공급되고, 또한 이것을 기화시키는 기화기를 구비하고, 기화된 원료를 도입하여 CVD 법으로 기판 표면에 Cu 막을 형성하는 반응실로 이루어진 Cu-CVD 장치에 있어서,상기 원료용기에 수용되는 상기 액체원료는 제 1 항 또는 제 2 항에 기재된 원료인 것을 특징으로 하는 Cu-CVD 장치.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35391198 | 1998-11-27 | ||
JP98-353911 | 1998-11-27 | ||
JP01309599A JP4338246B2 (ja) | 1998-11-27 | 1999-01-21 | Cu−CVDプロセス用原料とCu−CVD装置 |
JP99-13095 | 1999-01-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000034825A KR20000034825A (ko) | 2000-06-26 |
KR100323648B1 true KR100323648B1 (ko) | 2002-02-07 |
Family
ID=26348826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019990007931A KR100323648B1 (ko) | 1998-11-27 | 1999-03-10 | Cu-CVD 공정용 원료와 Cu-CVD 장치 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4338246B2 (ko) |
KR (1) | KR100323648B1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20240077927A (ko) | 2022-11-25 | 2024-06-03 | (주) 딥스마텍 | 화학기상증착 공정을 위한 레시피가 적용된 증착 원료 단위 공급 장치 및 이를 포함하는 화학 기상 증착 장치 |
KR20240112104A (ko) | 2023-01-11 | 2024-07-18 | (주) 딥스마텍 | 화학 기상 증착 공정을 위한 증착원료 균일 공급 장치 및 이를 포함하는 화학 기상 증착 장치 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002057126A (ja) * | 2000-08-10 | 2002-02-22 | Fujitsu Ltd | 半導体装置とその製造方法 |
KR100380163B1 (ko) * | 2001-06-29 | 2003-04-11 | 주식회사 하이닉스반도체 | 반도체 소자의 트랜지스터 제조 방법 |
US7311946B2 (en) | 2003-05-02 | 2007-12-25 | Air Products And Chemicals, Inc. | Methods for depositing metal films on diffusion barrier layers by CVD or ALD processes |
CN101780439B (zh) * | 2009-12-18 | 2012-01-18 | 江苏华大离心机制造有限公司 | 离心机中的卸料装置 |
US20170022598A1 (en) * | 2013-12-06 | 2017-01-26 | Uwe Schüssler | Depositing arrangement, deposition apparatus and methods of operation thereof |
WO2015186430A1 (ja) | 2014-06-05 | 2015-12-10 | Jx日鉱日石金属株式会社 | 塩化銅、cvd原料、銅配線膜及び塩化銅の製造方法 |
-
1999
- 1999-01-21 JP JP01309599A patent/JP4338246B2/ja not_active Expired - Fee Related
- 1999-03-10 KR KR1019990007931A patent/KR100323648B1/ko not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20240077927A (ko) | 2022-11-25 | 2024-06-03 | (주) 딥스마텍 | 화학기상증착 공정을 위한 레시피가 적용된 증착 원료 단위 공급 장치 및 이를 포함하는 화학 기상 증착 장치 |
KR20240112104A (ko) | 2023-01-11 | 2024-07-18 | (주) 딥스마텍 | 화학 기상 증착 공정을 위한 증착원료 균일 공급 장치 및 이를 포함하는 화학 기상 증착 장치 |
Also Published As
Publication number | Publication date |
---|---|
KR20000034825A (ko) | 2000-06-26 |
JP2000219968A (ja) | 2000-08-08 |
JP4338246B2 (ja) | 2009-10-07 |
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