JPWO2025004211A5 - - Google Patents

Info

Publication number
JPWO2025004211A5
JPWO2025004211A5 JP2025529074A JP2025529074A JPWO2025004211A5 JP WO2025004211 A5 JPWO2025004211 A5 JP WO2025004211A5 JP 2025529074 A JP2025529074 A JP 2025529074A JP 2025529074 A JP2025529074 A JP 2025529074A JP WO2025004211 A5 JPWO2025004211 A5 JP WO2025004211A5
Authority
JP
Japan
Prior art keywords
film deposition
dlc film
target according
deposition target
corner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025529074A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025004211A1 (https=
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/023937 external-priority patent/WO2025004211A1/ja
Publication of JPWO2025004211A1 publication Critical patent/JPWO2025004211A1/ja
Publication of JPWO2025004211A5 publication Critical patent/JPWO2025004211A5/ja
Pending legal-status Critical Current

Links

JP2025529074A 2023-06-28 2023-06-28 Pending JPWO2025004211A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/023937 WO2025004211A1 (ja) 2023-06-28 2023-06-28 Ｄｌｃ成膜用ターゲット

Publications (2)

Publication Number Publication Date
JPWO2025004211A1 JPWO2025004211A1 (https=) 2025-01-02
JPWO2025004211A5 true JPWO2025004211A5 (https=) 2026-03-13

Family

ID=93937847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025529074A Pending JPWO2025004211A1 (https=) 2023-06-28 2023-06-28

Country Status (2)

Country Link
JP (1) JPWO2025004211A1 (https=)
WO (1) WO2025004211A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5226826B2 (ja) * 2011-04-25 2013-07-03 株式会社神戸製鋼所 ダイヤモンドライクカーボン硬質多層膜成形体の製造方法
JP6684270B2 (ja) * 2015-04-22 2020-04-22 東洋炭素株式会社 炭素蒸発源
JP6588418B2 (ja) * 2016-12-07 2019-10-09 株式会社神戸製鋼所 成膜装置およびそれを用いた成膜物の製造方法、ならびに冷却パネル

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