JPWO2024232306A1 - - Google Patents
Info
- Publication number
- JPWO2024232306A1 JPWO2024232306A1 JP2025519406A JP2025519406A JPWO2024232306A1 JP WO2024232306 A1 JPWO2024232306 A1 JP WO2024232306A1 JP 2025519406 A JP2025519406 A JP 2025519406A JP 2025519406 A JP2025519406 A JP 2025519406A JP WO2024232306 A1 JPWO2024232306 A1 JP WO2024232306A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0028—Force sensors associated with force applying means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0061—Force sensors associated with industrial machines or actuators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/02—Measuring coefficient of friction between materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023078642 | 2023-05-11 | ||
| PCT/JP2024/016631 WO2024232306A1 (ja) | 2023-05-11 | 2024-04-30 | 測定装置、測定方法及び校正方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024232306A1 true JPWO2024232306A1 (https=) | 2024-11-14 |
Family
ID=93430189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025519406A Pending JPWO2024232306A1 (https=) | 2023-05-11 | 2024-04-30 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20260056114A1 (https=) |
| JP (1) | JPWO2024232306A1 (https=) |
| KR (1) | KR20260002839A (https=) |
| TW (1) | TW202501702A (https=) |
| WO (1) | WO2024232306A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN120293385B (zh) * | 2025-06-16 | 2025-08-12 | 无锡卓瓷科技有限公司 | 一种陶瓷吸盘吸力测试装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6225706Y2 (https=) * | 1981-06-25 | 1987-07-01 | ||
| JPS5957446A (ja) * | 1982-09-28 | 1984-04-03 | Kokusai Electric Co Ltd | 静電吸着式基板保持装置 |
| JP2648766B2 (ja) * | 1989-03-23 | 1997-09-03 | 東陶機器株式会社 | 静電チャックの吸着力評価方法及び評価装置 |
| JPH06119637A (ja) * | 1992-10-02 | 1994-04-28 | Sumitomo Metal Mining Co Ltd | 磁気ディスクの製造方法 |
| JPH06170670A (ja) * | 1992-12-08 | 1994-06-21 | Fuji Electric Co Ltd | 静電チャック装置およびその運転方法 |
| JP2003110012A (ja) * | 2001-09-28 | 2003-04-11 | Nissin Electric Co Ltd | 基板保持方法およびその装置 |
| JP5670235B2 (ja) | 2011-03-24 | 2015-02-18 | コバレントマテリアル株式会社 | 静電チャック |
| CN103698068B (zh) * | 2013-12-06 | 2014-11-12 | 清华大学 | 一种静电卡盘基本性能检测装置及其检测方法 |
| US10879094B2 (en) * | 2016-11-23 | 2020-12-29 | Applied Materials, Inc. | Electrostatic chucking force measurement tool for process chamber carriers |
-
2024
- 2024-04-30 JP JP2025519406A patent/JPWO2024232306A1/ja active Pending
- 2024-04-30 WO PCT/JP2024/016631 patent/WO2024232306A1/ja not_active Ceased
- 2024-04-30 KR KR1020257036954A patent/KR20260002839A/ko active Pending
- 2024-05-06 TW TW113116669A patent/TW202501702A/zh unknown
-
2025
- 2025-11-04 US US19/378,369 patent/US20260056114A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| KR20260002839A (ko) | 2026-01-06 |
| WO2024232306A1 (ja) | 2024-11-14 |
| US20260056114A1 (en) | 2026-02-26 |
| TW202501702A (zh) | 2025-01-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20251028 |