JPWO2024201924A5 - - Google Patents
Info
- Publication number
- JPWO2024201924A5 JPWO2024201924A5 JP2025509518A JP2025509518A JPWO2024201924A5 JP WO2024201924 A5 JPWO2024201924 A5 JP WO2024201924A5 JP 2025509518 A JP2025509518 A JP 2025509518A JP 2025509518 A JP2025509518 A JP 2025509518A JP WO2024201924 A5 JPWO2024201924 A5 JP WO2024201924A5
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- plating target
- target according
- back surface
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/013271 WO2024201924A1 (ja) | 2023-03-30 | 2023-03-30 | イオンプレーティング用ターゲット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024201924A1 JPWO2024201924A1 (https=) | 2024-10-03 |
| JPWO2024201924A5 true JPWO2024201924A5 (https=) | 2025-10-06 |
Family
ID=92904433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025509518A Pending JPWO2024201924A1 (https=) | 2023-03-30 | 2023-03-30 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2024201924A1 (https=) |
| WO (1) | WO2024201924A1 (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1060631A (ja) * | 1996-08-13 | 1998-03-03 | Kobe Steel Ltd | 気相コーティング用Ｔｉ−Ｈｆ系合金ターゲット材料 |
| JP4706246B2 (ja) * | 2004-12-07 | 2011-06-22 | 大同特殊鋼株式会社 | 多元系ターゲット材及びその製造方法 |
| JP4110175B2 (ja) * | 2006-03-22 | 2008-07-02 | 株式会社神戸製鋼所 | アークイオンプレーティング方法 |
| JP6588418B2 (ja) * | 2016-12-07 | 2019-10-09 | 株式会社神戸製鋼所 | 成膜装置およびそれを用いた成膜物の製造方法、ならびに冷却パネル |
-
2023
- 2023-03-30 JP JP2025509518A patent/JPWO2024201924A1/ja active Pending
- 2023-03-30 WO PCT/JP2023/013271 patent/WO2024201924A1/ja not_active Ceased
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