JPWO2024100489A1 - - Google Patents

Info

Publication number
JPWO2024100489A1
JPWO2024100489A1 JP2024556822A JP2024556822A JPWO2024100489A1 JP WO2024100489 A1 JPWO2024100489 A1 JP WO2024100489A1 JP 2024556822 A JP2024556822 A JP 2024556822A JP 2024556822 A JP2024556822 A JP 2024556822A JP WO2024100489 A1 JPWO2024100489 A1 JP WO2024100489A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024556822A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024100489A1 publication Critical patent/JPWO2024100489A1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/68Floating-gate IGFETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/69IGFETs having charge trapping gate insulators, e.g. MNOS transistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0123Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
JP2024556822A 2022-11-07 2023-10-30 Pending JPWO2024100489A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022178191 2022-11-07
PCT/IB2023/060887 WO2024100489A1 (ja) 2022-11-07 2023-10-30 半導体装置、半導体装置の作製方法、及び電子機器

Publications (1)

Publication Number Publication Date
JPWO2024100489A1 true JPWO2024100489A1 (https=) 2024-05-16

Family

ID=91032024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024556822A Pending JPWO2024100489A1 (https=) 2022-11-07 2023-10-30

Country Status (2)

Country Link
JP (1) JPWO2024100489A1 (https=)
WO (1) WO2024100489A1 (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7234110B2 (ja) * 2017-07-06 2023-03-07 株式会社半導体エネルギー研究所 メモリセル及び半導体装置
KR102864089B1 (ko) * 2020-11-11 2025-09-23 삼성전자주식회사 전계 효과 트랜지스터, 전계 효과 트랜지스터 어레이 구조 및 전계 효과 트랜지스터 제조 방법

Also Published As

Publication number Publication date
WO2024100489A1 (ja) 2024-05-16

Similar Documents

Publication Publication Date Title
JPWO2024116037A1 (https=)
JPWO2024100489A1 (https=)
JPWO2024089571A1 (https=)
BR102023008688A2 (https=)
BR102023007252A2 (https=)
BR102023005164A2 (https=)
BY13172U (https=)
BY13168U (https=)
CN307049449S (https=)
CN307049431S (https=)
CN307048084S (https=)
CN307047939S (https=)
CN307047596S (https=)
CN307047556S (https=)
CN307047206S (https=)
CN307046878S (https=)
CN307046032S (https=)
CN307046003S (https=)
CN307045601S (https=)
CN307044454S (https=)
BY23981C1 (https=)
BY23963C1 (https=)
BY13175U (https=)
BY13174U (https=)
BY13160U (https=)