JPWO2024070630A1 - - Google Patents
Info
- Publication number
- JPWO2024070630A1 JPWO2024070630A1 JP2024550010A JP2024550010A JPWO2024070630A1 JP WO2024070630 A1 JPWO2024070630 A1 JP WO2024070630A1 JP 2024550010 A JP2024550010 A JP 2024550010A JP 2024550010 A JP2024550010 A JP 2024550010A JP WO2024070630 A1 JPWO2024070630 A1 JP WO2024070630A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Program-controlled manipulators
- B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Warehouses Or Storage Devices (AREA)
- Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022153344 | 2022-09-27 | ||
| JP2022153344 | 2022-09-27 | ||
| PCT/JP2023/033029 WO2024070630A1 (ja) | 2022-09-27 | 2023-09-11 | 搬送装置及び保管装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2024070630A1 true JPWO2024070630A1 (https=) | 2024-04-04 |
| JPWO2024070630A5 JPWO2024070630A5 (https=) | 2025-05-20 |
| JP7831619B2 JP7831619B2 (ja) | 2026-03-17 |
Family
ID=90477474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024550010A Active JP7831619B2 (ja) | 2022-09-27 | 2023-09-11 | 搬送装置及び保管装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7831619B2 (https=) |
| CN (1) | CN119836392A (https=) |
| TW (1) | TW202421548A (https=) |
| WO (1) | WO2024070630A1 (https=) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58188193U (ja) * | 1982-06-10 | 1983-12-14 | 株式会社シマノ | 作業用ロボツト |
| JPS60238286A (ja) * | 1984-05-10 | 1985-11-27 | ダイキン工業株式会社 | 組立て作業用ロボツト |
| JPS6464787A (en) * | 1987-09-04 | 1989-03-10 | Nippon Seiko Kk | Joint type robot |
| JPH02237783A (ja) * | 1989-03-13 | 1990-09-20 | Hitachi Ltd | 産業用ロボット |
| JP2004071925A (ja) * | 2002-08-08 | 2004-03-04 | Nikon Corp | 基板ローダ及び露光装置 |
| JP2016055988A (ja) * | 2014-09-10 | 2016-04-21 | 村田機械株式会社 | 移載装置 |
-
2023
- 2023-09-11 CN CN202380064192.XA patent/CN119836392A/zh active Pending
- 2023-09-11 JP JP2024550010A patent/JP7831619B2/ja active Active
- 2023-09-11 WO PCT/JP2023/033029 patent/WO2024070630A1/ja not_active Ceased
- 2023-09-25 TW TW112136587A patent/TW202421548A/zh unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58188193U (ja) * | 1982-06-10 | 1983-12-14 | 株式会社シマノ | 作業用ロボツト |
| JPS60238286A (ja) * | 1984-05-10 | 1985-11-27 | ダイキン工業株式会社 | 組立て作業用ロボツト |
| JPS6464787A (en) * | 1987-09-04 | 1989-03-10 | Nippon Seiko Kk | Joint type robot |
| JPH02237783A (ja) * | 1989-03-13 | 1990-09-20 | Hitachi Ltd | 産業用ロボット |
| JP2004071925A (ja) * | 2002-08-08 | 2004-03-04 | Nikon Corp | 基板ローダ及び露光装置 |
| JP2016055988A (ja) * | 2014-09-10 | 2016-04-21 | 村田機械株式会社 | 移載装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN119836392A (zh) | 2025-04-15 |
| JP7831619B2 (ja) | 2026-03-17 |
| TW202421548A (zh) | 2024-06-01 |
| WO2024070630A1 (ja) | 2024-04-04 |
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