JPWO2024014068A5 - - Google Patents

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Publication number
JPWO2024014068A5
JPWO2024014068A5 JP2024533512A JP2024533512A JPWO2024014068A5 JP WO2024014068 A5 JPWO2024014068 A5 JP WO2024014068A5 JP 2024533512 A JP2024533512 A JP 2024533512A JP 2024533512 A JP2024533512 A JP 2024533512A JP WO2024014068 A5 JPWO2024014068 A5 JP WO2024014068A5
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JP
Japan
Prior art keywords
palladium
thin film
cobalt oxide
oxide
less
Prior art date
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Pending
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JP2024533512A
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English (en)
Japanese (ja)
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JPWO2024014068A1 (https=
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Priority claimed from PCT/JP2023/012315 external-priority patent/WO2024014068A1/ja
Publication of JPWO2024014068A1 publication Critical patent/JPWO2024014068A1/ja
Publication of JPWO2024014068A5 publication Critical patent/JPWO2024014068A5/ja
Pending legal-status Critical Current

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JP2024533512A 2022-07-11 2023-03-27 Pending JPWO2024014068A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022111428 2022-07-11
PCT/JP2023/012315 WO2024014068A1 (ja) 2022-07-11 2023-03-27 パラジウムコバルト酸化物薄膜、デラフォサイト型酸化物薄膜、デラフォサイト型酸化物薄膜を有するショットキー電極、パラジウムコバルト酸化物薄膜の製造方法及びデラフォサイト型酸化物薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPWO2024014068A1 JPWO2024014068A1 (https=) 2024-01-18
JPWO2024014068A5 true JPWO2024014068A5 (https=) 2025-03-24

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ID=89536461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024533512A Pending JPWO2024014068A1 (https=) 2022-07-11 2023-03-27

Country Status (7)

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US (1) US20260011560A1 (https=)
JP (1) JPWO2024014068A1 (https=)
KR (1) KR20250024049A (https=)
CN (1) CN119563044A (https=)
DE (1) DE112023003041T5 (https=)
TW (1) TWI873706B (https=)
WO (1) WO2024014068A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025183057A1 (ja) * 2024-03-01 2025-09-04 国立研究開発法人物質・材料研究機構 半導体装置とその製造方法
CN120089461A (zh) * 2025-04-28 2025-06-03 中国科学院合肥物质科学研究院 一种金属型铜铁矿PdRhO2薄膜及其制备方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1693484A3 (en) * 2005-02-15 2007-06-20 Rohm and Haas Electronic Materials, L.L.C. Plating Method
WO2020090491A1 (ja) 2018-11-01 2020-05-07 住友ベークライト株式会社 パワーデバイス封止用樹脂組成物およびパワーデバイス

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