JPWO2022224470A5 - - Google Patents

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Publication number
JPWO2022224470A5
JPWO2022224470A5 JP2023516025A JP2023516025A JPWO2022224470A5 JP WO2022224470 A5 JPWO2022224470 A5 JP WO2022224470A5 JP 2023516025 A JP2023516025 A JP 2023516025A JP 2023516025 A JP2023516025 A JP 2023516025A JP WO2022224470 A5 JPWO2022224470 A5 JP WO2022224470A5
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JP
Japan
Prior art keywords
crystal
piezoelectric layer
acoustic velocity
axis
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023516025A
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English (en)
Japanese (ja)
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JPWO2022224470A1 (https=
JP7587766B2 (ja
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Priority claimed from PCT/JP2021/039760 external-priority patent/WO2022224470A1/ja
Publication of JPWO2022224470A1 publication Critical patent/JPWO2022224470A1/ja
Publication of JPWO2022224470A5 publication Critical patent/JPWO2022224470A5/ja
Application granted granted Critical
Publication of JP7587766B2 publication Critical patent/JP7587766B2/ja
Active legal-status Critical Current
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JP2023516025A 2021-04-20 2021-10-28 共振子 Active JP7587766B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021071400 2021-04-20
JP2021071400 2021-04-20
PCT/JP2021/039760 WO2022224470A1 (ja) 2021-04-20 2021-10-28 共振子

Publications (3)

Publication Number Publication Date
JPWO2022224470A1 JPWO2022224470A1 (https=) 2022-10-27
JPWO2022224470A5 true JPWO2022224470A5 (https=) 2023-09-01
JP7587766B2 JP7587766B2 (ja) 2024-11-21

Family

ID=83722182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023516025A Active JP7587766B2 (ja) 2021-04-20 2021-10-28 共振子

Country Status (5)

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US (1) US20230402991A1 (https=)
JP (1) JP7587766B2 (https=)
CN (1) CN116888891A (https=)
DE (1) DE212021000552U1 (https=)
WO (1) WO2022224470A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12483221B2 (en) 2021-07-15 2025-11-25 Skyworks Solutions, Inc. Multilayer piezoelectric substrate device with partially recessed passivation layer
US12542524B2 (en) * 2022-04-08 2026-02-03 Skyworks Solutions, Inc. Acoustic wave device with trench portions and narrow interdigital transducer tip portions for transverse mode suppression
CN118337167A (zh) * 2024-04-10 2024-07-12 无锡市好达电子股份有限公司 弹性波装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4158650B2 (ja) * 2003-08-20 2008-10-01 セイコーエプソン株式会社 弾性表面波デバイス及びその製造方法
JP2006203408A (ja) 2005-01-19 2006-08-03 Epson Toyocom Corp 弾性表面波デバイス
JP4148220B2 (ja) * 2005-01-06 2008-09-10 エプソントヨコム株式会社 弾性表面波デバイス、複合デバイス、発振回路およびモジュール
CN103262410B (zh) 2010-12-24 2016-08-10 株式会社村田制作所 弹性波装置及其制造方法
WO2019138812A1 (ja) * 2018-01-12 2019-07-18 株式会社村田製作所 弾性波装置、マルチプレクサ、高周波フロントエンド回路、及び通信装置
JP7080671B2 (ja) 2018-02-27 2022-06-06 ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 弾性表面波デバイス
CN113169726B (zh) * 2018-12-13 2024-02-09 株式会社村田制作所 弹性波装置

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