JPWO2022176932A5 - - Google Patents

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Publication number
JPWO2022176932A5
JPWO2022176932A5 JP2023500911A JP2023500911A JPWO2022176932A5 JP WO2022176932 A5 JPWO2022176932 A5 JP WO2022176932A5 JP 2023500911 A JP2023500911 A JP 2023500911A JP 2023500911 A JP2023500911 A JP 2023500911A JP WO2022176932 A5 JPWO2022176932 A5 JP WO2022176932A5
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JP
Japan
Prior art keywords
piezoelectric pump
pump
housing
space
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023500911A
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English (en)
Japanese (ja)
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JPWO2022176932A1 (https=
JP7435894B2 (ja
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Application filed filed Critical
Priority claimed from PCT/JP2022/006291 external-priority patent/WO2022176932A1/ja
Publication of JPWO2022176932A1 publication Critical patent/JPWO2022176932A1/ja
Publication of JPWO2022176932A5 publication Critical patent/JPWO2022176932A5/ja
Application granted granted Critical
Publication of JP7435894B2 publication Critical patent/JP7435894B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023500911A 2021-02-22 2022-02-17 ポンプ装置 Active JP7435894B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021025858 2021-02-22
JP2021025858 2021-02-22
PCT/JP2022/006291 WO2022176932A1 (ja) 2021-02-22 2022-02-17 ポンプ装置

Publications (3)

Publication Number Publication Date
JPWO2022176932A1 JPWO2022176932A1 (https=) 2022-08-25
JPWO2022176932A5 true JPWO2022176932A5 (https=) 2023-10-05
JP7435894B2 JP7435894B2 (ja) 2024-02-21

Family

ID=82932257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023500911A Active JP7435894B2 (ja) 2021-02-22 2022-02-17 ポンプ装置

Country Status (4)

Country Link
US (1) US12467447B2 (https=)
JP (1) JP7435894B2 (https=)
CN (1) CN116745524A (https=)
WO (1) WO2022176932A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置
DE112023005722T5 (de) * 2023-03-20 2025-11-20 Murata Manufacturing Co., Ltd. Fluidsteuerungsvorrichtung

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07301182A (ja) * 1994-05-02 1995-11-14 Tosoh Corp 圧電ポンプの駆動方法
IL145583A0 (en) * 2001-09-24 2002-06-30 Digipump Ltd Piezoelectric pump for dispensing small quantities of liquids
CN1179127C (zh) * 2002-09-03 2004-12-08 吉林大学 多腔压电薄膜驱动泵
EP1722412B1 (en) 2005-05-02 2012-08-29 Sony Corporation Jet generator and electronic device
JP5130650B2 (ja) * 2005-05-02 2013-01-30 ソニー株式会社 噴流発生装置
DE102007050407A1 (de) * 2007-10-22 2009-04-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pumpe, Pumpenanordnung und Pumpenmodul
CN103925187B (zh) * 2014-05-04 2016-03-30 吉林大学 一种多振子压电泵
CN203892161U (zh) * 2014-05-04 2014-10-22 吉林大学 一种多振子压电泵
JP2016200067A (ja) * 2015-04-10 2016-12-01 株式会社村田製作所 流体制御装置
CN107923385B (zh) * 2015-08-31 2020-01-17 株式会社村田制作所 鼓风机
CN108496004B (zh) * 2016-02-01 2020-03-31 株式会社村田制作所 气体控制装置
JP6988365B2 (ja) 2017-10-20 2022-01-05 オムロンヘルスケア株式会社 メッシュ式ネブライザおよび交換部材
JP6687170B2 (ja) * 2017-12-22 2020-04-22 株式会社村田製作所 ポンプ
CN109854490B (zh) * 2019-03-03 2025-07-25 宁波瑞凌工具有限公司 一种轴流式微型压电气体压缩机
JP7416324B2 (ja) * 2021-02-16 2024-01-17 株式会社村田製作所 ポンプ装置

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