JPWO2022137401A5 - - Google Patents

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Publication number
JPWO2022137401A5
JPWO2022137401A5 JP2022570862A JP2022570862A JPWO2022137401A5 JP WO2022137401 A5 JPWO2022137401 A5 JP WO2022137401A5 JP 2022570862 A JP2022570862 A JP 2022570862A JP 2022570862 A JP2022570862 A JP 2022570862A JP WO2022137401 A5 JPWO2022137401 A5 JP WO2022137401A5
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JP
Japan
Prior art keywords
sample
charged particle
particle beam
sample piece
image
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JP2022570862A
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English (en)
Japanese (ja)
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JPWO2022137401A1 (https=
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Priority claimed from PCT/JP2020/048255 external-priority patent/WO2022137401A1/ja
Publication of JPWO2022137401A1 publication Critical patent/JPWO2022137401A1/ja
Publication of JPWO2022137401A5 publication Critical patent/JPWO2022137401A5/ja
Pending legal-status Critical Current

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JP2022570862A 2020-12-23 2020-12-23 Pending JPWO2022137401A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/048255 WO2022137401A1 (ja) 2020-12-23 2020-12-23 荷電粒子ビーム装置

Publications (2)

Publication Number Publication Date
JPWO2022137401A1 JPWO2022137401A1 (https=) 2022-06-30
JPWO2022137401A5 true JPWO2022137401A5 (https=) 2023-09-22

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ID=82159258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022570862A Pending JPWO2022137401A1 (https=) 2020-12-23 2020-12-23

Country Status (3)

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US (1) US20240055220A1 (https=)
JP (1) JPWO2022137401A1 (https=)
WO (1) WO2022137401A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH103544A (ja) * 1996-06-14 1998-01-06 Imeeji Joho Kagaku Kenkyusho ジェスチャ認識装置
JP2012155637A (ja) * 2011-01-28 2012-08-16 Hitachi High-Technologies Corp パターンマッチング装置、及びコンピュータープログラム
JP5643147B2 (ja) * 2011-04-07 2014-12-17 日本電信電話株式会社 動きベクトル検出装置、動きベクトル検出方法及び動きベクトル検出プログラム
JP5895703B2 (ja) * 2012-05-22 2016-03-30 ソニー株式会社 画像処理装置及び画像処理方法、並びにコンピューター・プログラム
JP7109051B2 (ja) * 2018-03-30 2022-07-29 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置

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