JPWO2022137401A1 - - Google Patents

Info

Publication number
JPWO2022137401A1
JPWO2022137401A1 JP2022570862A JP2022570862A JPWO2022137401A1 JP WO2022137401 A1 JPWO2022137401 A1 JP WO2022137401A1 JP 2022570862 A JP2022570862 A JP 2022570862A JP 2022570862 A JP2022570862 A JP 2022570862A JP WO2022137401 A1 JPWO2022137401 A1 JP WO2022137401A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022570862A
Other languages
Japanese (ja)
Other versions
JPWO2022137401A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022137401A1 publication Critical patent/JPWO2022137401A1/ja
Publication of JPWO2022137401A5 publication Critical patent/JPWO2022137401A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/31Electron-beam or ion-beam tubes for localised treatment of objects for cutting or drilling
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/34Microscope slides, e.g. mounting specimens on microscope slides
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/286Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/286Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
    • G01N2001/2873Cutting or cleaving
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30Electron or ion beam tubes for processing objects
    • H01J2237/317Processing objects on a microscale
    • H01J2237/3174Etching microareas
    • H01J2237/31745Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2022570862A 2020-12-23 2020-12-23 Pending JPWO2022137401A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/048255 WO2022137401A1 (ja) 2020-12-23 2020-12-23 荷電粒子ビーム装置

Publications (2)

Publication Number Publication Date
JPWO2022137401A1 true JPWO2022137401A1 (https=) 2022-06-30
JPWO2022137401A5 JPWO2022137401A5 (https=) 2023-09-22

Family

ID=82159258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022570862A Pending JPWO2022137401A1 (https=) 2020-12-23 2020-12-23

Country Status (3)

Country Link
US (1) US20240055220A1 (https=)
JP (1) JPWO2022137401A1 (https=)
WO (1) WO2022137401A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH103544A (ja) * 1996-06-14 1998-01-06 Imeeji Joho Kagaku Kenkyusho ジェスチャ認識装置
JP2012155637A (ja) * 2011-01-28 2012-08-16 Hitachi High-Technologies Corp パターンマッチング装置、及びコンピュータープログラム
JP2012221164A (ja) * 2011-04-07 2012-11-12 Nippon Telegr & Teleph Corp <Ntt> 動きベクトル検出装置、動きベクトル検出方法及び動きベクトル検出プログラム
JP2013242757A (ja) * 2012-05-22 2013-12-05 Sony Corp 画像処理装置及び画像処理方法、並びにコンピューター・プログラム
JP2019179700A (ja) * 2018-03-30 2019-10-17 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH103544A (ja) * 1996-06-14 1998-01-06 Imeeji Joho Kagaku Kenkyusho ジェスチャ認識装置
JP2012155637A (ja) * 2011-01-28 2012-08-16 Hitachi High-Technologies Corp パターンマッチング装置、及びコンピュータープログラム
JP2012221164A (ja) * 2011-04-07 2012-11-12 Nippon Telegr & Teleph Corp <Ntt> 動きベクトル検出装置、動きベクトル検出方法及び動きベクトル検出プログラム
JP2013242757A (ja) * 2012-05-22 2013-12-05 Sony Corp 画像処理装置及び画像処理方法、並びにコンピューター・プログラム
JP2019179700A (ja) * 2018-03-30 2019-10-17 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置

Also Published As

Publication number Publication date
US20240055220A1 (en) 2024-02-15
WO2022137401A1 (ja) 2022-06-30

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