JPWO2021241581A5 - - Google Patents
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- Publication number
- JPWO2021241581A5 JPWO2021241581A5 JP2022526584A JP2022526584A JPWO2021241581A5 JP WO2021241581 A5 JPWO2021241581 A5 JP WO2021241581A5 JP 2022526584 A JP2022526584 A JP 2022526584A JP 2022526584 A JP2022526584 A JP 2022526584A JP WO2021241581 A5 JPWO2021241581 A5 JP WO2021241581A5
- Authority
- JP
- Japan
- Prior art keywords
- component
- resin composition
- photosensitive resin
- composition according
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 claims description 23
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 5
- 229920001568 phenolic resin Polymers 0.000 claims description 5
- 239000005011 phenolic resin Substances 0.000 claims description 5
- 239000003431 cross linking reagent Substances 0.000 claims description 3
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims description 2
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 230000009477 glass transition Effects 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 150000003839 salts Chemical class 0.000 claims description 2
- -1 sulfonium compound Chemical class 0.000 claims description 2
- 238000009864 tensile test Methods 0.000 claims description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 claims 2
- 125000005372 silanol group Chemical group 0.000 claims 2
- 235000010290 biphenyl Nutrition 0.000 claims 1
- 239000004305 biphenyl Substances 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000007062 hydrolysis Effects 0.000 claims 1
- 238000006460 hydrolysis reaction Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020094819 | 2020-05-29 | ||
| JP2020094819 | 2020-05-29 | ||
| PCT/JP2021/019805 WO2021241581A1 (ja) | 2020-05-29 | 2021-05-25 | 感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021241581A1 JPWO2021241581A1 (https=) | 2021-12-02 |
| JPWO2021241581A5 true JPWO2021241581A5 (https=) | 2022-11-01 |
| JP7211560B2 JP7211560B2 (ja) | 2023-01-24 |
Family
ID=78744092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022526584A Active JP7211560B2 (ja) | 2020-05-29 | 2021-05-25 | 感光性樹脂組成物 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7211560B2 (https=) |
| KR (1) | KR102773392B1 (https=) |
| CN (1) | CN115698855A (https=) |
| TW (1) | TW202208474A (https=) |
| WO (1) | WO2021241581A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025263530A1 (ja) * | 2024-06-19 | 2025-12-26 | 住友ベークライト株式会社 | 感光性樹脂組成物、硬化膜および半導体装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007213032A (ja) | 2006-01-10 | 2007-08-23 | Hitachi Chemical Dupont Microsystems Ltd | ポジ型感光性樹脂組成物、パターン形成方法及び電子部品 |
| JP6026097B2 (ja) * | 2010-11-17 | 2016-11-16 | 旭化成株式会社 | 半導体素子表面保護膜又は層間絶縁膜用の感光性樹脂組成物 |
| KR102015682B1 (ko) * | 2012-02-07 | 2019-08-28 | 히타치가세이가부시끼가이샤 | 감광성 수지 조성물, 패턴 경화막의 제조 방법 및 전자 부품 |
| JP6477925B2 (ja) * | 2016-09-08 | 2019-03-06 | 住友ベークライト株式会社 | 半導体装置の製造方法 |
| KR102004129B1 (ko) * | 2016-11-11 | 2019-07-25 | 스미또모 베이크라이트 가부시키가이샤 | 감광성 수지 조성물, 수지막, 경화막, 반도체 장치의 제조 방법, 및 반도체 장치 |
| JP6566150B2 (ja) * | 2017-06-30 | 2019-08-28 | 住友ベークライト株式会社 | 感光性樹脂組成物、樹脂膜及び電子装置 |
| WO2019003918A1 (ja) * | 2017-06-30 | 2019-01-03 | 住友ベークライト株式会社 | 感光性樹脂組成物、樹脂膜及び電子装置 |
| JP7062899B2 (ja) | 2017-09-15 | 2022-05-09 | 住友ベークライト株式会社 | 感光性樹脂組成物、半導体装置および電子機器 |
| JP2019101052A (ja) | 2017-11-28 | 2019-06-24 | 日立化成株式会社 | 感光性樹脂組成物及び回路基板の製造方法 |
| JP7081138B2 (ja) | 2017-12-20 | 2022-06-07 | 住友ベークライト株式会社 | 永久膜形成用ネガ型感光性樹脂組成物、当該組成物の硬化膜および当該硬化膜を備える電気・電子機器 |
-
2021
- 2021-05-25 WO PCT/JP2021/019805 patent/WO2021241581A1/ja not_active Ceased
- 2021-05-25 KR KR1020227044405A patent/KR102773392B1/ko active Active
- 2021-05-25 CN CN202180038895.6A patent/CN115698855A/zh active Pending
- 2021-05-25 JP JP2022526584A patent/JP7211560B2/ja active Active
- 2021-05-28 TW TW110119409A patent/TW202208474A/zh unknown
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