JPWO2021216352A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2021216352A5 JPWO2021216352A5 JP2022564144A JP2022564144A JPWO2021216352A5 JP WO2021216352 A5 JPWO2021216352 A5 JP WO2021216352A5 JP 2022564144 A JP2022564144 A JP 2022564144A JP 2022564144 A JP2022564144 A JP 2022564144A JP WO2021216352 A5 JPWO2021216352 A5 JP WO2021216352A5
- Authority
- JP
- Japan
- Prior art keywords
- flow
- mode
- control valve
- pressure sensor
- lcv
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025186007A JP2026027337A (ja) | 2020-04-24 | 2025-11-05 | 分流レスガス投与 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063015243P | 2020-04-24 | 2020-04-24 | |
| US63/015,243 | 2020-04-24 | ||
| US202062706328P | 2020-08-10 | 2020-08-10 | |
| US62/706,328 | 2020-08-10 | ||
| PCT/US2021/027555 WO2021216352A1 (en) | 2020-04-24 | 2021-04-15 | Divertless gas-dosing |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025186007A Division JP2026027337A (ja) | 2020-04-24 | 2025-11-05 | 分流レスガス投与 |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2023523921A JP2023523921A (ja) | 2023-06-08 |
| JPWO2021216352A5 true JPWO2021216352A5 (https=) | 2024-04-23 |
| JP2023523921A5 JP2023523921A5 (https=) | 2024-04-23 |
| JP7771082B2 JP7771082B2 (ja) | 2025-11-17 |
Family
ID=78270147
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022564144A Active JP7771082B2 (ja) | 2020-04-24 | 2021-04-15 | 分流レスガス投与 |
| JP2025186007A Pending JP2026027337A (ja) | 2020-04-24 | 2025-11-05 | 分流レスガス投与 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025186007A Pending JP2026027337A (ja) | 2020-04-24 | 2025-11-05 | 分流レスガス投与 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12410517B2 (https=) |
| JP (2) | JP7771082B2 (https=) |
| KR (1) | KR20230007427A (https=) |
| CN (1) | CN115443348A (https=) |
| WO (1) | WO2021216352A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021216352A1 (en) | 2020-04-24 | 2021-10-28 | Lam Research Corporation | Divertless gas-dosing |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4964484A (https=) * | 1972-10-20 | 1974-06-21 | ||
| US7628860B2 (en) | 2004-04-12 | 2009-12-08 | Mks Instruments, Inc. | Pulsed mass flow delivery system and method |
| KR101161020B1 (ko) * | 2006-03-30 | 2012-07-02 | 미쯔이 죠센 가부시키가이샤 | 원자층 성장 장치 |
| JP4964484B2 (ja) | 2006-03-31 | 2012-06-27 | ステラケミファ株式会社 | 微細加工処理方法 |
| JP5750281B2 (ja) | 2011-03-07 | 2015-07-15 | 株式会社アルバック | 真空一貫基板処理装置及び成膜方法 |
| JP2013151720A (ja) * | 2012-01-25 | 2013-08-08 | Ulvac Japan Ltd | 真空成膜装置 |
| KR101661483B1 (ko) | 2012-10-22 | 2016-09-30 | 다이요 닛산 가부시키가이샤 | 셀렌화수소 혼합 가스의 공급 방법 및 공급 장치 |
| JP6413293B2 (ja) * | 2014-03-27 | 2018-10-31 | 東京エレクトロン株式会社 | 成膜方法及び記憶媒体 |
| JP6359913B2 (ja) * | 2014-08-12 | 2018-07-18 | 東京エレクトロン株式会社 | 処理装置 |
| JP6533740B2 (ja) * | 2015-12-15 | 2019-06-19 | Ckd株式会社 | ガス流量監視方法及びガス流量監視装置 |
| US10515783B2 (en) * | 2016-02-23 | 2019-12-24 | Lam Research Corporation | Flow through line charge volume |
| JP7107648B2 (ja) * | 2017-07-11 | 2022-07-27 | 株式会社堀場エステック | 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム |
| US10947621B2 (en) * | 2017-10-23 | 2021-03-16 | Applied Materials, Inc. | Low vapor pressure chemical delivery |
| JP7182988B2 (ja) | 2018-10-12 | 2022-12-05 | 東京エレクトロン株式会社 | 原料ガス供給装置、成膜装置及び原料ガス供給方法 |
| WO2021216352A1 (en) | 2020-04-24 | 2021-10-28 | Lam Research Corporation | Divertless gas-dosing |
-
2021
- 2021-04-15 WO PCT/US2021/027555 patent/WO2021216352A1/en not_active Ceased
- 2021-04-15 JP JP2022564144A patent/JP7771082B2/ja active Active
- 2021-04-15 CN CN202180030493.1A patent/CN115443348A/zh active Pending
- 2021-04-15 KR KR1020227041167A patent/KR20230007427A/ko active Pending
- 2021-04-15 US US17/920,578 patent/US12410517B2/en active Active
-
2025
- 2025-11-05 JP JP2025186007A patent/JP2026027337A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101903840B (zh) | 流量比率控制装置 | |
| CN111670420B (zh) | 用于流体的脉冲输送的流体控制系统和输送流体脉冲的方法 | |
| TWI444800B (zh) | Calibration method and flow measurement method of flow controller for gas supply device | |
| TWI818066B (zh) | 用於使用外部壓力觸發儀輸送脈衝氣體的方法和裝置 | |
| TW468101B (en) | Wide range gas flow system with real time flow measurement and correction | |
| US7461549B1 (en) | Mass flow verifiers capable of providing different volumes, and related methods | |
| TWI245113B (en) | Differential pressure type flowmeter and differential pressure type flowmeter controller | |
| JP4197648B2 (ja) | パルスショット式流量調整装置とパルスショット式流量調整方法 | |
| JP2004517396A (ja) | 圧力型マスフローコントローラシステム | |
| TW201812497A (zh) | 流量比率控制裝置、儲存流量比率控制裝置用程式的程式記錄媒體以及流量比率控制方法 | |
| JPWO2008072614A1 (ja) | 流量比率制御装置 | |
| TW201314402A (zh) | 氣體流量檢定系統及氣體流量檢定單元 | |
| EP3117137A1 (en) | System for and method of monitoring flow through mass flow controllers in real time | |
| KR102919935B1 (ko) | 펄스 가스 전달을 위한 방법 및 장치 | |
| CN110160609B (zh) | 一种双标准气体流量装置并联式结构及检测方法 | |
| JPWO2021216352A5 (https=) | ||
| US12410517B2 (en) | Divertless gas-dosing | |
| WO1997034208A1 (en) | Gas flow control method | |
| Liso et al. | A new differential pressure sensor based mass flow controller for advanced semiconductor processing | |
| JP2023550129A (ja) | 圧力制御を有するパルスガス供給のための方法及び装置 | |
| JP3311762B2 (ja) | マスフローコントローラと半導体装置の製造装置 |